JPH03108899U - - Google Patents

Info

Publication number
JPH03108899U
JPH03108899U JP1990017258U JP1725890U JPH03108899U JP H03108899 U JPH03108899 U JP H03108899U JP 1990017258 U JP1990017258 U JP 1990017258U JP 1725890 U JP1725890 U JP 1725890U JP H03108899 U JPH03108899 U JP H03108899U
Authority
JP
Japan
Prior art keywords
rotor shaft
rotor
vacuum pump
bearing
rotatably supports
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1990017258U
Other languages
Japanese (ja)
Other versions
JP2525848Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990017258U priority Critical patent/JP2525848Y2/en
Publication of JPH03108899U publication Critical patent/JPH03108899U/ja
Application granted granted Critical
Publication of JP2525848Y2 publication Critical patent/JP2525848Y2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0442—Active magnetic bearings with devices affected by abnormal, undesired or non-standard conditions such as shock-load, power outage, start-up or touchdown
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C37/00—Cooling of bearings
    • F16C37/005—Cooling of bearings of magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C37/00—Cooling of bearings
    • F16C37/007—Cooling of bearings of rolling bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C39/00—Relieving load on bearings
    • F16C39/02—Relieving load on bearings using mechanical means

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図ないし第３図は本考案に係る真空ポンプ
の一実施例を示す図であり、第１図は本考案が適
用された複合型ターボ分子ポンプの全体断面図、
第２図は第１図における矢視部分拡大図、第３
図は第１図における矢視部分拡大図であり、第
４図は従来の真空ポンプを示す全体断面図である
。 ４……ロータ、８……ロータ軸、１０……半径
方向電磁石、１１……軸方向電磁石、１５……ス
テータ、２１，２２……第１、第２保護軸受、２
３，２４……第１、第２ネジ溝部。 1 to 3 are diagrams showing an embodiment of a vacuum pump according to the present invention, and FIG. 1 is an overall sectional view of a composite turbomolecular pump to which the present invention is applied;
Figure 2 is an enlarged view of the part shown in the arrow direction in Figure 1;
The figure is a partially enlarged view taken in the direction of the arrows in FIG. 1, and FIG. 4 is an overall sectional view showing a conventional vacuum pump. 4... Rotor, 8... Rotor shaft, 10... Radial electromagnet, 11... Axial electromagnet, 15... Stator, 21, 22... First and second protective bearings, 2
3, 24...first and second thread groove parts.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ステータに対して相対回転するロータと、この
ロータに一体的に取り付けられたロータ軸と、こ
のロータ軸を磁気浮上させて回転自在に支持する
磁気軸受と、前記ロータ軸が前記磁気軸受で制御
されないときにこのロータ軸を回転自在に支持し
て保護する保護軸受とを備えた真空ポンプにおい
て、前記ロータ軸の前記保護軸受によつて回転自
在に支持される部分にネジ溝部を設けたことを特
徴とする真空ポンプ。 A rotor that rotates relative to the stator, a rotor shaft that is integrally attached to the rotor, a magnetic bearing that magnetically levitates and rotatably supports the rotor shaft, and the rotor shaft is not controlled by the magnetic bearing. A vacuum pump sometimes equipped with a protective bearing that rotatably supports and protects the rotor shaft, characterized in that a threaded groove is provided in a portion of the rotor shaft that is rotatably supported by the protective bearing. vacuum pump.
JP1990017258U 1990-02-22 1990-02-22 Vacuum pump Expired - Fee Related JP2525848Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990017258U JP2525848Y2 (en) 1990-02-22 1990-02-22 Vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990017258U JP2525848Y2 (en) 1990-02-22 1990-02-22 Vacuum pump

Publications (2)

Publication Number Publication Date
JPH03108899U true JPH03108899U (en) 1991-11-08
JP2525848Y2 JP2525848Y2 (en) 1997-02-12

Family

ID=31520487

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990017258U Expired - Fee Related JP2525848Y2 (en) 1990-02-22 1990-02-22 Vacuum pump

Country Status (1)

Country Link
JP (1) JP2525848Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100726705B1 (en) * 2006-02-01 2007-06-13 임재엽 Floating jewel ring

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61132797A (en) * 1984-11-30 1986-06-20 Shimadzu Corp Bearing unit for turbo molecular pump
JPS6370699A (en) * 1986-09-12 1988-03-30 Nec Corp Underwater sound generator
JPS63129191A (en) * 1986-11-17 1988-06-01 Seiko Seiki Co Ltd Turbo-molecular pump
JPS63239397A (en) * 1987-03-25 1988-10-05 Shimadzu Corp Magnetic bearing device for turbomolecular pump

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61132797A (en) * 1984-11-30 1986-06-20 Shimadzu Corp Bearing unit for turbo molecular pump
JPS6370699A (en) * 1986-09-12 1988-03-30 Nec Corp Underwater sound generator
JPS63129191A (en) * 1986-11-17 1988-06-01 Seiko Seiki Co Ltd Turbo-molecular pump
JPS63239397A (en) * 1987-03-25 1988-10-05 Shimadzu Corp Magnetic bearing device for turbomolecular pump

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100726705B1 (en) * 2006-02-01 2007-06-13 임재엽 Floating jewel ring

Also Published As

Publication number Publication date
JP2525848Y2 (en) 1997-02-12

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees