JPH0365890U - - Google Patents
Info
- Publication number
- JPH0365890U JPH0365890U JP12670989U JP12670989U JPH0365890U JP H0365890 U JPH0365890 U JP H0365890U JP 12670989 U JP12670989 U JP 12670989U JP 12670989 U JP12670989 U JP 12670989U JP H0365890 U JPH0365890 U JP H0365890U
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- spiral groove
- molecular pump
- lubricating oil
- turbo
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011553 magnetic fluid Substances 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims description 2
- 239000010687 lubricating oil Substances 0.000 claims 2
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図および第２図は本考案に係るターボ分子
ポンプの一実施例を示す図であり、第１図はター
ボ分子ポンプの断面図、第２図はこのスパイラル
グルーブベアリングの断面図であり、第３図は従
来のスパイラルグルーブベアリングを示す断面図
である。
７……ロータ軸、１０……スパイラルグルーブ
ベアリング、２１……軸部、２２……受部、２７
……磁性流体シール部材。
1 and 2 are views showing an embodiment of the turbo-molecular pump according to the present invention, FIG. 1 is a sectional view of the turbo-molecular pump, and FIG. 2 is a sectional view of this spiral groove bearing. FIG. 3 is a sectional view showing a conventional spiral groove bearing. 7... Rotor shaft, 10... Spiral groove bearing, 21... Shaft part, 22... Receiving part, 27
...Magnetic fluid sealing member.
Claims (1)
成された軸部と、この軸部を潤滑油を介して回転
自在に支持する受部とを有するスパイラルグルー
ブベアリングを備えたターボ分子ポンプにおいて
、前記軸部に磁性流体シール部材を設けて、前記
潤滑油がこの軸部を伝つて流出しないようにした
ことを特徴とするターボ分子ポンプ。 In a turbo molecular pump equipped with a spiral groove bearing, the shaft part is fixed to a rotor shaft and has a spiral groove formed therein, and a receiving part rotatably supports this shaft part via lubricating oil. A turbo-molecular pump characterized in that a magnetic fluid sealing member is provided at the shaft portion to prevent the lubricating oil from flowing out along the shaft portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12670989U JPH0365890U (en) | 1989-10-30 | 1989-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12670989U JPH0365890U (en) | 1989-10-30 | 1989-10-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0365890U true JPH0365890U (en) | 1991-06-26 |
Family
ID=31674505
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12670989U Pending JPH0365890U (en) | 1989-10-30 | 1989-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0365890U (en) |
-
1989
- 1989-10-30 JP JP12670989U patent/JPH0365890U/ja active Pending
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