JPS581792U - turbo molecular pump - Google Patents

turbo molecular pump

Info

Publication number
JPS581792U
JPS581792U JP9558181U JP9558181U JPS581792U JP S581792 U JPS581792 U JP S581792U JP 9558181 U JP9558181 U JP 9558181U JP 9558181 U JP9558181 U JP 9558181U JP S581792 U JPS581792 U JP S581792U
Authority
JP
Japan
Prior art keywords
molecular pump
turbo molecular
bearings
turbo
oil reservoirs
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9558181U
Other languages
Japanese (ja)
Inventor
一成 岡本
Original Assignee
株式会社大阪真空機器製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社大阪真空機器製作所 filed Critical 株式会社大阪真空機器製作所
Priority to JP9558181U priority Critical patent/JPS581792U/en
Publication of JPS581792U publication Critical patent/JPS581792U/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

図面はターボ分子ポンプの要部断面図。 ２・・・スピンドル、３，４・・・軸受、８．　８’・
・・油溜り部、９，９′・・・マグネット。The drawing is a cross-sectional view of the main parts of a turbomolecular pump. 2... Spindle, 3, 4... Bearing, 8. 8'・
...Oil reservoir, 9,9'...Magnet.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 垂直方向スピンドルの上下端に軸受を有する垂直方向ス
ピンドルモーターを真空中で潤滑する潤滑油をスピンド
ルの内部に沿って軸受まで押送せしめるターボ分子ポン
プにおいて、スピンドルの下端に穿設された小孔の対面
側と下端の軸受の軸受カバーに、夫々油溜り部を設は且
つ該油溜り部にマグネットを装着してなることを特徴と
するターボ分子ポンプ。In a turbo-molecular pump that lubricates a vertical spindle motor with bearings at the top and bottom ends of the vertical spindle in a vacuum, the lubricating oil is forced along the inside of the spindle to the bearings. A turbo molecular pump characterized in that oil reservoirs are provided in the bearing covers of the side and lower end bearings, respectively, and magnets are attached to the oil reservoirs.
JP9558181U 1981-06-26 1981-06-26 turbo molecular pump Pending JPS581792U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9558181U JPS581792U (en) 1981-06-26 1981-06-26 turbo molecular pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9558181U JPS581792U (en) 1981-06-26 1981-06-26 turbo molecular pump

Publications (1)

Publication Number Publication Date
JPS581792U true JPS581792U (en) 1983-01-07

Family

ID=29890478

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9558181U Pending JPS581792U (en) 1981-06-26 1981-06-26 turbo molecular pump

Country Status (1)

Country Link
JP (1) JPS581792U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014025394A (en) * 2012-07-26 2014-02-06 Kanzaki Kokyukoki Mfg Co Ltd Reduction gear attaching/detaching structure for drainage pump
JP2021017830A (en) * 2019-07-18 2021-02-15 株式会社アルバック Vacuum pump

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014025394A (en) * 2012-07-26 2014-02-06 Kanzaki Kokyukoki Mfg Co Ltd Reduction gear attaching/detaching structure for drainage pump
JP2021017830A (en) * 2019-07-18 2021-02-15 株式会社アルバック Vacuum pump

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