JPS5816394U - turbo molecular pump - Google Patents

turbo molecular pump

Info

Publication number
JPS5816394U
JPS5816394U JP1981111890U JP11189081U JPS5816394U JP S5816394 U JPS5816394 U JP S5816394U JP 1981111890 U JP1981111890 U JP 1981111890U JP 11189081 U JP11189081 U JP 11189081U JP S5816394 U JPS5816394 U JP S5816394U
Authority
JP
Japan
Prior art keywords
oil
drive shaft
molecular pump
oil passage
axial center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1981111890U
Other languages
Japanese (ja)
Inventor
潔 成田
Original Assignee
株式会社島津製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社島津製作所 filed Critical 株式会社島津製作所
Priority to JP1981111890U priority Critical patent/JPS5816394U/en
Publication of JPS5816394U publication Critical patent/JPS5816394U/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F04D29/063—Lubrication specially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案の一実施例を示す正断面図、第２図は同
実施例の要部を示す断面図である。 ３２・・・駆動軸、２Ｃ・・・軸心、４．５・・・軸受
、６・・・ロータ、１４・・・油通路（幹油通路）、１
４ａ・・・軸心、１７・・・油タンク、１８・・・潤滑
油。FIG. 1 is a front cross-sectional view showing an embodiment of the present invention, and FIG. 2 is a cross-sectional view showing essential parts of the same embodiment. 32... Drive shaft, 2C... Shaft center, 4.5... Bearing, 6... Rotor, 14... Oil passage (main oil passage), 1
4a... Axis center, 17... Oil tank, 18... Lubricating oil.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 軸受により略鉛直姿勢に支持されたロータ駆動用の駆動
軸の真下に、潤滑油を貯留した油タンクを配設し、前記
駆動軸の軸心部に油通路を、その下端を前記油タンク内
に開口させて形成し、この油タンク内の潤滑油を前記油
通路を通して前記軸受に供給するようにしたターボ分子
ポンプにおいて、前記油通路の軸心と前記駆動軸の軸心
と゛の離間距離が上方に向って漸次増大するように前記
油通路を前記駆動軸の軸心に対して傾斜させていること
を特徴とするターボ分子ポンプ。An oil tank storing lubricating oil is provided directly below the drive shaft for driving the rotor, which is supported in a substantially vertical position by a bearing, and an oil passage is provided at the axial center of the drive shaft, and the lower end thereof is connected to the oil tank. In the turbo-molecular pump, which is formed with an opening in the oil tank and supplies lubricating oil in the oil tank to the bearing through the oil passage, the distance between the axial center of the oil passage and the axial center of the drive shaft is upward. A turbo-molecular pump characterized in that the oil passage is inclined with respect to the axis of the drive shaft so that the oil passage gradually increases toward .
JP1981111890U 1981-07-27 1981-07-27 turbo molecular pump Pending JPS5816394U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981111890U JPS5816394U (en) 1981-07-27 1981-07-27 turbo molecular pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981111890U JPS5816394U (en) 1981-07-27 1981-07-27 turbo molecular pump

Publications (1)

Publication Number Publication Date
JPS5816394U true JPS5816394U (en) 1983-02-01

Family

ID=29906235

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981111890U Pending JPS5816394U (en) 1981-07-27 1981-07-27 turbo molecular pump

Country Status (1)

Country Link
JP (1) JPS5816394U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59154894U (en) * 1983-03-31 1984-10-17 株式会社島津製作所 Turbo molecular pump lubrication system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59154894U (en) * 1983-03-31 1984-10-17 株式会社島津製作所 Turbo molecular pump lubrication system

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