JPS5816393U - turbo molecular pump - Google Patents

turbo molecular pump

Info

Publication number
JPS5816393U
JPS5816393U JP11188981U JP11188981U JPS5816393U JP S5816393 U JPS5816393 U JP S5816393U JP 11188981 U JP11188981 U JP 11188981U JP 11188981 U JP11188981 U JP 11188981U JP S5816393 U JPS5816393 U JP S5816393U
Authority
JP
Japan
Prior art keywords
molecular pump
drive shaft
oil
turbo
turbo molecular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11188981U
Other languages
Japanese (ja)
Other versions
JPS6229678Y2 (en
Inventor
潔 成田
Original Assignee
株式会社島津製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社島津製作所 filed Critical 株式会社島津製作所
Priority to JP11188981U priority Critical patent/JPS5816393U/en
Publication of JPS5816393U publication Critical patent/JPS5816393U/en
Application granted granted Critical
Publication of JPS6229678Y2 publication Critical patent/JPS6229678Y2/ja
Granted legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案の一実施例を示す正断面図、第２図は同
実施例の要部を示す断面図である。 −２・・・・・・駆動軸、４．５・・・・・・軸受、６
・・・・・・ロータ、１３−・・・・・・油流通路、１
７・・・・・・油供給系路、１８・・・・・・油タンク
、１９・・・・・・潤滑油。FIG. 1 is a front cross-sectional view showing an embodiment of the present invention, and FIG. 2 is a cross-sectional view showing essential parts of the same embodiment. -2... Drive shaft, 4.5... Bearing, 6
......Rotor, 13-...Oil flow passage, 1
7... Oil supply system line, 18... Oil tank, 19... Lubricating oil.

Claims (2)

【実用新案登録請求の範囲】[Scope of utility model registration request] （１）上方先端部にロータ翼群を固着し上下の軸受によ
り回転自在に支持された駆動軸を備え、これを高速回転
させてポンプ機能を行な動しめるとともに、この駆動軸
には油供給系路を内方に形成して下方油タンクの潤滑油
を汲み上げこれを前記軸受に逐時供給するようにしたタ
ニボ形の分子ポンプにおいて、前記油供給系路内にその
上端が前記駆動軸の先端部に保持されたヒートパイプを
垂設したことを特徴とするターボ分子ポンプ。(1) A drive shaft is equipped with a rotor blade group fixed to the upper tip and rotatably supported by upper and lower bearings.This drive shaft is rotated at high speed to perform the pump function, and oil is supplied to the drive shaft. In a Tanibo-type molecular pump in which a system line is formed inward to draw up lubricating oil from a lower oil tank and supply it to the bearings, the upper end of the oil supply line is connected to the drive shaft. A turbo molecular pump characterized by a vertically installed heat pipe held at the tip. （２）ヒートパイプの放熱端部が下方油タンク内にまで
延出されたことを特徴とする実用新案登録請求の範囲第
１項記載のターボ分子ポンプ。(2) The turbo-molecular pump according to claim 1, wherein the heat dissipation end of the heat pipe extends into the lower oil tank.
JP11188981U 1981-07-27 1981-07-27 turbo molecular pump Granted JPS5816393U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11188981U JPS5816393U (en) 1981-07-27 1981-07-27 turbo molecular pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11188981U JPS5816393U (en) 1981-07-27 1981-07-27 turbo molecular pump

Publications (2)

Publication Number Publication Date
JPS5816393U true JPS5816393U (en) 1983-02-01
JPS6229678Y2 JPS6229678Y2 (en) 1987-07-30

Family

ID=29906234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11188981U Granted JPS5816393U (en) 1981-07-27 1981-07-27 turbo molecular pump

Country Status (1)

Country Link
JP (1) JPS5816393U (en)

Also Published As

Publication number Publication date
JPS6229678Y2 (en) 1987-07-30

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