JPS60157993U - turbo molecular pump - Google Patents

turbo molecular pump

Info

Publication number
JPS60157993U
JPS60157993U JP4645084U JP4645084U JPS60157993U JP S60157993 U JPS60157993 U JP S60157993U JP 4645084 U JP4645084 U JP 4645084U JP 4645084 U JP4645084 U JP 4645084U JP S60157993 U JPS60157993 U JP S60157993U
Authority
JP
Japan
Prior art keywords
molecular pump
housing
bearing
turbo
turbo molecular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4645084U
Other languages
Japanese (ja)
Other versions
JPH018712Y2 (en
Inventor
川口　重一
潔 成田
Original Assignee
株式会社島津製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社島津製作所 filed Critical 株式会社島津製作所
Priority to JP4645084U priority Critical patent/JPS60157993U/en
Publication of JPS60157993U publication Critical patent/JPS60157993U/en
Application granted granted Critical
Publication of JPH018712Y2 publication Critical patent/JPH018712Y2/ja
Granted legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図はこの考案によるターボ分子ポンプの概略正断面
図、第２図は従来のターボ分子ポンプの概略正断面図、
第３図、第４図は他の実施例を示す概略正断面図である
。 １・・・駆動軸、２・・・下部軸受、３，３′・・・軸
受押え、４・・・スプリング、６・・・ハウジング、７
，７′・・・軸受構体、８・・・上部軸受、１２・・・
シリコンバウンド弾性体、１３．１３’・・・ゴム弾性
体。FIG. 1 is a schematic front sectional view of a turbo-molecular pump according to this invention, and FIG. 2 is a schematic front sectional view of a conventional turbo-molecular pump.
3 and 4 are schematic front sectional views showing other embodiments. 1... Drive shaft, 2... Lower bearing, 3, 3'... Bearing holder, 4... Spring, 6... Housing, 7
, 7'... Bearing structure, 8... Upper bearing, 12...
Silicon bound elastic body, 13.13'...Rubber elastic body.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ロータ駆動用の駆動軸を支承するスラスト軸受と、この
軸受に添設した軸受押えとを有した軸受構体をハウジン
グに対し部側軸芯方向に弾性支持させてなるターボ分子
ポンプにおいて、前記軸受構体と前記ハウジングとの間
に熱容量が大きくかつ熱伝導性の良好な弾性体を設けた
ことを特徴とするターボ分子ポンプ。In a turbo-molecular pump comprising a thrust bearing for supporting a drive shaft for driving a rotor, and a bearing retainer attached to the bearing, the bearing assembly is elastically supported in the axial direction of the housing with respect to the housing. A turbo-molecular pump characterized in that an elastic body having a large heat capacity and good thermal conductivity is provided between the housing and the housing.
JP4645084U 1984-03-29 1984-03-29 turbo molecular pump Granted JPS60157993U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4645084U JPS60157993U (en) 1984-03-29 1984-03-29 turbo molecular pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4645084U JPS60157993U (en) 1984-03-29 1984-03-29 turbo molecular pump

Publications (2)

Publication Number Publication Date
JPS60157993U true JPS60157993U (en) 1985-10-21
JPH018712Y2 JPH018712Y2 (en) 1989-03-08

Family

ID=30560852

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4645084U Granted JPS60157993U (en) 1984-03-29 1984-03-29 turbo molecular pump

Country Status (1)

Country Link
JP (1) JPS60157993U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0569422U (en) * 1992-02-25 1993-09-21 利和 奥野 Fixed structure of bearing
JP2010242822A (en) * 2009-04-03 2010-10-28 Ihi Corp Bearing structure of turbine generator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0569422U (en) * 1992-02-25 1993-09-21 利和 奥野 Fixed structure of bearing
JP2010242822A (en) * 2009-04-03 2010-10-28 Ihi Corp Bearing structure of turbine generator

Also Published As

Publication number Publication date
JPH018712Y2 (en) 1989-03-08

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