JPH046593U - - Google Patents
Info
- Publication number
- JPH046593U JPH046593U JP4434990U JP4434990U JPH046593U JP H046593 U JPH046593 U JP H046593U JP 4434990 U JP4434990 U JP 4434990U JP 4434990 U JP4434990 U JP 4434990U JP H046593 U JPH046593 U JP H046593U
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- bottom plate
- vacuum pump
- cylindrical body
- stator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
Description
第１図ないし第３図は本考案による真空ポンプ
の第１実施例を示す図であり、第１図は真空ポン
プの全体断面図、第２図はネジ溝部の半側面図、
第３図はロータの平面図、第４図および第５図は
本考案の第２実施例を示す図であり、第４図はロ
ータの平面図、第５図は第４図における連通孔の
Ｖ−Ｖ矢視断面図、第６図および第７図はそれぞ
れ従来の真空ポンプの全体断面図、第８図は第６
図に示す真空ポンプのネジ溝部の平面図、第９図
は第７図に示す真空ポンプのロータ翼あるいはス
テータ翼の平面図である。
４……ロータ、４ａ……底板、７……固定筒体
、８……ロータ軸、１０……半径方向電磁石、１
１……軸方向電磁石、１４，２７……ネジ溝部、
２５，２６……連通孔。
1 to 3 are diagrams showing a first embodiment of a vacuum pump according to the present invention, in which FIG. 1 is an overall sectional view of the vacuum pump, FIG. 2 is a half side view of a threaded groove,
FIG. 3 is a plan view of the rotor, FIGS. 4 and 5 are views showing a second embodiment of the present invention, FIG. 4 is a plan view of the rotor, and FIG. 5 is a diagram showing the communication holes in FIG. A sectional view taken along the line V-V, FIGS. 6 and 7 are overall sectional views of a conventional vacuum pump, and FIG. 8 is an overall sectional view of a conventional vacuum pump.
FIG. 9 is a plan view of the screw groove portion of the vacuum pump shown in the figure, and FIG. 9 is a plan view of the rotor blade or stator blade of the vacuum pump shown in FIG. 4... Rotor, 4a... Bottom plate, 7... Fixed cylinder, 8... Rotor shaft, 10... Radial electromagnet, 1
1... Axial electromagnet, 14, 27... Thread groove part,
25, 26...Communication hole.
Claims (1)
る筒状のロータと、前記底板の軸線部に一体的に
連結されたロータ軸と、前記ロータの内側に固定
して配置され前記ロータ軸を回転自在に支持する
軸受を有する固定筒体とを備え、前記ステータお
よびロータの一方にネジ溝部を形成した真空ポン
プにおいて、前記ロータの底板に連通孔を形成す
るとともに、前記ロータの内周および前記固定筒
体の外周の一方にネジ溝部を形成したことを特徴
とする真空ポンプ。 A cylindrical rotor that rotates relative to the stator and has a bottom plate at its end; a rotor shaft that is integrally connected to the axis of the bottom plate; and a rotor that is fixedly arranged inside the rotor and rotates the rotor shaft. A vacuum pump comprising a fixed cylindrical body having a freely supporting bearing and having a threaded groove formed in one of the stator and the rotor, wherein a communicating hole is formed in the bottom plate of the rotor, and the inner periphery of the rotor and the fixed cylindrical body A vacuum pump characterized in that a threaded groove is formed on one side of the outer periphery of a cylindrical body.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4434990U JPH046593U (en) | 1990-04-25 | 1990-04-25 | |
| DE19914113122 DE4113122A1 (en) | 1990-04-25 | 1991-04-22 | Vacuum pump with cylindrical rotor - has screw-shaped grooves on rotor surface with fixed cylindrical section |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4434990U JPH046593U (en) | 1990-04-25 | 1990-04-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH046593U true JPH046593U (en) | 1992-01-21 |
Family
ID=12689038
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4434990U Pending JPH046593U (en) | 1990-04-25 | 1990-04-25 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPH046593U (en) |
| DE (1) | DE4113122A1 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012032863A1 (en) * | 2010-09-06 | 2012-03-15 | エドワーズ株式会社 | Turbo-molecular pump |
| WO2012043035A1 (en) * | 2010-09-28 | 2012-04-05 | エドワーズ株式会社 | Exhaust pump |
| WO2012043027A1 (en) * | 2010-09-28 | 2012-04-05 | エドワーズ株式会社 | Exhaust pump |
| WO2013008519A1 (en) * | 2011-07-14 | 2013-01-17 | エドワーズ株式会社 | Thread groove vacuum pump, and evacuation system using same |
| WO2015045748A1 (en) * | 2013-09-30 | 2015-04-02 | エドワーズ株式会社 | Thread groove pump mechanism, vacuum pump using this thread groove pump mechanism, and rotor, outer-circumferential stator, and inner-circumferential stator used in this thread screw pump mechanism |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB9525337D0 (en) * | 1995-12-12 | 1996-02-14 | Boc Group Plc | Improvements in vacuum pumps |
| DE19632375A1 (en) * | 1996-08-10 | 1998-02-19 | Pfeiffer Vacuum Gmbh | Gas friction pump |
| EP3623634B1 (en) * | 2019-08-13 | 2022-04-06 | Pfeiffer Vacuum Gmbh | Vacuum pump comprising a holweck pump stage and two side channel pump stages |
-
1990
- 1990-04-25 JP JP4434990U patent/JPH046593U/ja active Pending
-
1991
- 1991-04-22 DE DE19914113122 patent/DE4113122A1/en not_active Withdrawn
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012032863A1 (en) * | 2010-09-06 | 2012-03-15 | エドワーズ株式会社 | Turbo-molecular pump |
| JP5738869B2 (en) * | 2010-09-06 | 2015-06-24 | エドワーズ株式会社 | Turbo molecular pump |
| US9416784B2 (en) | 2010-09-28 | 2016-08-16 | Edwards Japan Limited | Exhaust pump |
| WO2012043035A1 (en) * | 2010-09-28 | 2012-04-05 | エドワーズ株式会社 | Exhaust pump |
| WO2012043027A1 (en) * | 2010-09-28 | 2012-04-05 | エドワーズ株式会社 | Exhaust pump |
| CN102834620A (en) * | 2010-09-28 | 2012-12-19 | 埃地沃兹日本有限公司 | Exhaust pump |
| JPWO2012043027A1 (en) * | 2010-09-28 | 2014-02-06 | エドワーズ株式会社 | Exhaust pump |
| EP3499045A1 (en) * | 2010-09-28 | 2019-06-19 | Edwards Japan Limited | Exhaust pump |
| EP2623791A4 (en) * | 2010-09-28 | 2018-06-27 | Edwards Japan Limited | Exhaust pump |
| JP5763660B2 (en) * | 2010-09-28 | 2015-08-12 | エドワーズ株式会社 | Exhaust pump |
| JP5767644B2 (en) * | 2010-09-28 | 2015-08-19 | エドワーズ株式会社 | Exhaust pump |
| CN102834620B (en) * | 2010-09-28 | 2016-03-02 | 埃地沃兹日本有限公司 | Exhaust pump |
| WO2013008519A1 (en) * | 2011-07-14 | 2013-01-17 | エドワーズ株式会社 | Thread groove vacuum pump, and evacuation system using same |
| JPWO2013008519A1 (en) * | 2011-07-14 | 2015-02-23 | エドワーズ株式会社 | Thread groove type vacuum pump and vacuum exhaust system using the same |
| KR20160061921A (en) * | 2013-09-30 | 2016-06-01 | 에드워즈 가부시키가이샤 | Thread groove pump mechanism, vacuum pump using this thread groove pump mechanism, and rotor, outer-circumferential stator, and inner-circumferential stator used in this thread screw pump mechanism |
| JPWO2015045748A1 (en) * | 2013-09-30 | 2017-03-09 | エドワーズ株式会社 | Thread groove pump mechanism, vacuum pump using the thread groove pump mechanism, rotor used in the thread groove pump mechanism, outer stator and inner stator |
| WO2015045748A1 (en) * | 2013-09-30 | 2015-04-02 | エドワーズ株式会社 | Thread groove pump mechanism, vacuum pump using this thread groove pump mechanism, and rotor, outer-circumferential stator, and inner-circumferential stator used in this thread screw pump mechanism |
| US10253777B2 (en) | 2013-09-30 | 2019-04-09 | Edwards Japan Limited | Thread groove pump mechanism, vacuum pump including thread groove pump mechanism, and rotor, outer circumference side stator, and inner circumference side stator used in thread groove pump mechanism |
Also Published As
| Publication number | Publication date |
|---|---|
| DE4113122A1 (en) | 1991-10-31 |