JPH01113191U - - Google Patents
Info
- Publication number
- JPH01113191U JPH01113191U JP764788U JP764788U JPH01113191U JP H01113191 U JPH01113191 U JP H01113191U JP 764788 U JP764788 U JP 764788U JP 764788 U JP764788 U JP 764788U JP H01113191 U JPH01113191 U JP H01113191U
- Authority
- JP
- Japan
- Prior art keywords
- stator
- rotor
- housing
- circumferential surface
- gap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図は本考案ポンプの１実施例の半截断断面
図、第２図は従来のポンプの半截断断面図である
。
１…ハウジング、３ａ…ねじ溝、３ｂ…ステー
タ、４…ロータ、５…間隙。
FIG. 1 is a half-cut sectional view of one embodiment of the pump of the present invention, and FIG. 2 is a half-cut sectional view of a conventional pump. DESCRIPTION OF SYMBOLS 1...Housing, 3a...Thread groove, 3b...Stator, 4...Rotor, 5...Gap.
Claims (1)
隙を存して軸支し、これらステータの内周面或い
はロータの外周面にねじ溝を形成したものにおい
て、前記ステータを前記ハウジング内に円周方向
に摺動自在に設けたことを特徴とするねじ溝真空
ポンプ。 A rotor is pivotally supported with a gap in a stator provided in a housing, and thread grooves are formed on the inner circumferential surface of the stator or the outer circumferential surface of the rotor, and the stator is circumferentially supported within the housing. A threaded groove vacuum pump characterized by being slidably installed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP764788U JPH0640954Y2 (en) | 1988-01-26 | 1988-01-26 | Screw groove vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP764788U JPH0640954Y2 (en) | 1988-01-26 | 1988-01-26 | Screw groove vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01113191U true JPH01113191U (en) | 1989-07-31 |
| JPH0640954Y2 JPH0640954Y2 (en) | 1994-10-26 |
Family
ID=31212835
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP764788U Expired - Lifetime JPH0640954Y2 (en) | 1988-01-26 | 1988-01-26 | Screw groove vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0640954Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022075228A1 (en) * | 2020-10-09 | 2022-04-14 | エドワーズ株式会社 | Vacuum pump and rotary cylindrical body provided to vacuum pump |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4218765B2 (en) * | 1997-06-27 | 2009-02-04 | 株式会社荏原製作所 | Turbo molecular pump |
| US6926493B1 (en) * | 1997-06-27 | 2005-08-09 | Ebara Corporation | Turbo-molecular pump |
-
1988
- 1988-01-26 JP JP764788U patent/JPH0640954Y2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022075228A1 (en) * | 2020-10-09 | 2022-04-14 | エドワーズ株式会社 | Vacuum pump and rotary cylindrical body provided to vacuum pump |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0640954Y2 (en) | 1994-10-26 |