JPH01173493U - - Google Patents
Info
- Publication number
- JPH01173493U JPH01173493U JP6686188U JP6686188U JPH01173493U JP H01173493 U JPH01173493 U JP H01173493U JP 6686188 U JP6686188 U JP 6686188U JP 6686188 U JP6686188 U JP 6686188U JP H01173493 U JPH01173493 U JP H01173493U
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- bearing housing
- movable
- vertical direction
- outer periphery
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007789 sealing Methods 0.000 claims 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図は本考案の１実施例を示す縦断面図、第
２図は従来例の縦断面図である。
４……ロータ、５……軸受ハウジング、１２…
…ねじ溝部。
FIG. 1 is a longitudinal sectional view showing one embodiment of the present invention, and FIG. 2 is a longitudinal sectional view of a conventional example. 4... Rotor, 5... Bearing housing, 12...
...Thread groove part.
Claims (1)
に設けたねじ溝部を、上下方向に移動可能に形成
したことを特徴とする分子ポンプのシール装置。 A sealing device for a molecular pump, characterized in that a threaded groove portion provided on the outer periphery of a bearing housing facing the inner surface of a rotor is formed to be movable in the vertical direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6686188U JPH0643518Y2 (en) | 1988-05-23 | 1988-05-23 | Molecular pump sealing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6686188U JPH0643518Y2 (en) | 1988-05-23 | 1988-05-23 | Molecular pump sealing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01173493U true JPH01173493U (en) | 1989-12-08 |
| JPH0643518Y2 JPH0643518Y2 (en) | 1994-11-14 |
Family
ID=31292249
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6686188U Expired - Lifetime JPH0643518Y2 (en) | 1988-05-23 | 1988-05-23 | Molecular pump sealing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0643518Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014190343A (en) * | 2013-03-27 | 2014-10-06 | Oerlikon Leybold Vacuum Gmbh | Vacuum pump |
-
1988
- 1988-05-23 JP JP6686188U patent/JPH0643518Y2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014190343A (en) * | 2013-03-27 | 2014-10-06 | Oerlikon Leybold Vacuum Gmbh | Vacuum pump |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0643518Y2 (en) | 1994-11-14 |