JPH01130095U - - Google Patents
Info
- Publication number
- JPH01130095U JPH01130095U JP2524388U JP2524388U JPH01130095U JP H01130095 U JPH01130095 U JP H01130095U JP 2524388 U JP2524388 U JP 2524388U JP 2524388 U JP2524388 U JP 2524388U JP H01130095 U JPH01130095 U JP H01130095U
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- turbine blade
- circumferential surface
- blade row
- moving blades
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図は本考案の一実施例を示す縦断面図であ
る。第２図は本考案の他の実施例を示す第１図に
対応する部分縦断面図、第３図は従来例を示す第
１図に対応する縦断面図である。
３…ロータ、４…タービン翼列、５，８…ねじ
ロータ、６，７…固定筒部、４１…動翼、４２…
静翼。
FIG. 1 is a longitudinal sectional view showing an embodiment of the present invention. FIG. 2 is a partial vertical sectional view corresponding to FIG. 1 showing another embodiment of the present invention, and FIG. 3 is a vertical sectional view corresponding to FIG. 1 showing a conventional example. 3... Rotor, 4... Turbine blade row, 5, 8... Screw rotor, 6, 7... Fixed cylinder part, 41... Moving blade, 42...
Shizuka.
Claims (1)
側に設けた静翼と交互配置してタービン翼列を構
成するとともに、前記ロータの内周側に該ロータ
に近接させて同軸状に固定筒部を設け、この固定
筒部の外周面と前記ロータの内周面の一方に前記
タービン翼列に連通するねじ溝を形成したことを
特徴とするターボ分子ポンプ。 Moving blades are provided on the outer periphery of the rotor, and these moving blades are arranged alternately with stator blades provided on the stator side to constitute a turbine blade row, and a fixed cylinder is coaxially arranged close to the rotor on the inner periphery side of the rotor. A turbo-molecular pump characterized in that a threaded groove communicating with the turbine blade row is formed on one of the outer circumferential surface of the fixed cylindrical portion and the inner circumferential surface of the rotor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2524388U JPH01130095U (en) | 1988-02-26 | 1988-02-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2524388U JPH01130095U (en) | 1988-02-26 | 1988-02-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01130095U true JPH01130095U (en) | 1989-09-05 |
Family
ID=31245809
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2524388U Pending JPH01130095U (en) | 1988-02-26 | 1988-02-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01130095U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11351190A (en) * | 1998-05-20 | 1999-12-21 | Boc Group Plc:The | Vacuum pump |
-
1988
- 1988-02-26 JP JP2524388U patent/JPH01130095U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11351190A (en) * | 1998-05-20 | 1999-12-21 | Boc Group Plc:The | Vacuum pump |