JPS61192592U - - Google Patents
Info
- Publication number
- JPS61192592U JPS61192592U JP7839585U JP7839585U JPS61192592U JP S61192592 U JPS61192592 U JP S61192592U JP 7839585 U JP7839585 U JP 7839585U JP 7839585 U JP7839585 U JP 7839585U JP S61192592 U JPS61192592 U JP S61192592U
- Authority
- JP
- Japan
- Prior art keywords
- bearing
- turbo
- rotating body
- pump device
- molecular pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims description 2
- 239000010687 lubricating oil Substances 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図はこの考案の一実施例によるターボ分子
ポンプ装置の構成を示す断面図、第２図はこの考
案の他の実施例によるターボ分子ポンプ装置の構
成を示す断面図、第３図は従来のターボ分子ポン
プ装置の構成を示す断面図である。
図において、１はロータ翼、２はステータ翼、
３はケーシング、４は回転子、５はステータ、６
ａ，６ｂは玉軸受、１２は球面型スパイラルみぞ
軸受、１３は潤滑油、１４はタツチダウン軸受、
１５ａ，１５ｂ，１６ａ，１６ｂは磁気軸受、１
７は回転軸である。なお、各図中同一符号は同一
または相当部分を示すものとする。
FIG. 1 is a sectional view showing the configuration of a turbo-molecular pump device according to an embodiment of this invention, FIG. 2 is a sectional view showing the configuration of a turbo-molecular pump device according to another embodiment of this invention, and FIG. 3 is a conventional one. FIG. 2 is a cross-sectional view showing the configuration of a turbo-molecular pump device. In the figure, 1 is a rotor blade, 2 is a stator blade,
3 is a casing, 4 is a rotor, 5 is a stator, 6
a, 6b are ball bearings, 12 is a spherical spiral groove bearing, 13 is lubricating oil, 14 is a touch-down bearing,
15a, 15b, 16a, 16b are magnetic bearings, 1
7 is a rotation axis. Note that the same reference numerals in each figure indicate the same or corresponding parts.
補正 昭６１．５．２０
実用新案登録請求の範囲を次のように補正する
。Amendment May 20, 1986 The scope of claims for utility model registration is amended as follows.
【実用新案登録請求の範囲】
(1) ステータ翼を有するケーシング、上記ステ
ータ翼と対向配置された回転時に流体を吸引する
ロータ翼を有する回転体、この回転体に固定され
た回転子とこの回転子に対向配置されたステータ
を有し上記回転体を駆動する電動機、上記回転体
をその下部で支承する球面型スパイラルみぞ軸受
で形成した下部軸受、および上記回転体をその上
部で支承するタツチダウン軸受を有する上部軸受
を備えたターボ分子ポンプ装置。
(2) 上部軸受は磁気軸受を有する実用新案登録
請求の範囲第１項記載のターボ分子ポンプ装置。
(3) 磁気軸受は回転体の自重を軽減するように
構成されている実用新案登録請求の範囲第２項記
載のターボ分子ポンプ装置。
(4) 磁気軸受は回転体の半径方向の振れを防止
するように構成されている実用新案登録請求の範
囲第２項記載のターボ分子ポンプ装置。
磁気軸受は反発型磁気軸受である実用新案登録
請求の範囲第４項記載のターボ分子ポンプ装置。(6) ステータを保持する支持体にタツチダウン
軸受を配置した実用新案登録請求の範囲第１項記
載のターボ分子ポンプ装置。 [Claims for Utility Model Registration] (1) A casing having stator blades, a rotating body having rotor blades disposed opposite to the stator blades and sucking fluid during rotation, a rotor fixed to this rotating body, and a rotor that rotates. a lower bearing formed of a spherical spiral groove bearing that supports the rotor at its lower part; and a tuck-down bearing that supports the rotor at its upper part. Turbomolecular pump device with upper bearing having. (2) The turbo-molecular pump device according to claim 1, wherein the upper bearing has a magnetic bearing. (3) The turbo-molecular pump device according to claim 2, wherein the magnetic bearing is configured to reduce the weight of the rotating body. (4) The turbo-molecular pump device according to claim 2, wherein the magnetic bearing is configured to prevent the rotating body from wobbling in the radial direction. The turbo-molecular pump device according to claim 4, wherein the magnetic bearing is a repulsion type magnetic bearing. (6) The turbo-molecular pump device according to claim 1, wherein a tactile bearing is disposed on a support for holding a stator.
Claims (1)
ータ翼と対向配置され回転時に流体を吸引するロ
ータ翼を有する回転体、回転子が上記回転体に固
定され上記回転体を駆動する電動機、上記回転体
をその下部で支承する球面型スパイラルみぞ軸受
で形成した下部軸受、および上記回転体をその上
部で支承するタツチダウン軸受を有する上部軸受
を備えたターボ分子ポンプ装置。 (2) 上部軸受は磁気軸受を有する実用新案登録
請求の範囲第１項記載のターボ分子ポンプ装置。 (3) 磁気軸受は回転体の自重を軽減するように
構成されている実用新案登録請求の範囲第２項記
載のターボ分子ポンプ装置。 (4) 磁気軸受は回転体の半径方向の振れを防止
するように構成されている実用新案登録請求の範
囲第２項記載のターボ分子ポンプ装置。 (5) 磁気軸受は反発型磁気軸受である実用新案
登録請求の範囲第４項記載のターボ分子ポンプ装
置。[Claims for Utility Model Registration] (1) A casing having stator blades, a rotating body having rotor blades arranged opposite to the stator blades and sucking fluid during rotation, and a rotor fixed to the rotating body, A turbo-molecular pump device comprising a driving electric motor, a lower bearing formed of a spherical spiral groove bearing that supports the rotating body at its lower part, and an upper bearing having a touch-down bearing that supports the rotating body at its upper part. (2) The turbo-molecular pump device according to claim 1, wherein the upper bearing has a magnetic bearing. (3) The turbo-molecular pump device according to claim 2, wherein the magnetic bearing is configured to reduce the weight of the rotating body. (4) The turbo-molecular pump device according to claim 2, wherein the magnetic bearing is configured to prevent the rotating body from wobbling in the radial direction. (5) The turbo-molecular pump device according to claim 4, wherein the magnetic bearing is a repulsion type magnetic bearing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7839585U JPS61192592U (en) | 1985-05-24 | 1985-05-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7839585U JPS61192592U (en) | 1985-05-24 | 1985-05-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61192592U true JPS61192592U (en) | 1986-11-29 |
Family
ID=30622336
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7839585U Pending JPS61192592U (en) | 1985-05-24 | 1985-05-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61192592U (en) |
-
1985
- 1985-05-24 JP JP7839585U patent/JPS61192592U/ja active Pending
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