JPS62197794U - - Google Patents
Info
- Publication number
- JPS62197794U JPS62197794U JP8686686U JP8686686U JPS62197794U JP S62197794 U JPS62197794 U JP S62197794U JP 8686686 U JP8686686 U JP 8686686U JP 8686686 U JP8686686 U JP 8686686U JP S62197794 U JPS62197794 U JP S62197794U
- Authority
- JP
- Japan
- Prior art keywords
- rotating body
- bearing
- turbo
- electric motor
- molecular pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 2
- 239000012809 cooling fluid Substances 0.000 claims 1
- 239000012530 fluid Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図はこの考案の一実施例によるターボ分子
ポンプ装置を示す断面図、第２図〜第４図はそれ
ぞれこの考案の他の実施例によるターボ分子ポン
プ装置を示す断面図、第５図は従来のターボ分子
ポン装置を示す断面図である。図において、１は
ロータ翼、２はステータ翼、３はケーシング、４
は電動機の回転子、５は電動機のステータ、７は
排気口は、９はベース、１１ａ，１１ｂは気体、
１２は球面型スパイラルみぞ軸受、１３は潤滑油
、１４はタツチダウン軸受、２１は冷却パイプで
ある。なお、各図中同一符号は同一または相当部
分を示すものとする。
FIG. 1 is a sectional view showing a turbo-molecular pump device according to one embodiment of this invention, FIGS. 2 to 4 are sectional views showing turbo-molecular pump devices according to other embodiments of this invention, and FIG. FIG. 2 is a sectional view showing a conventional turbo molecular pump device. In the figure, 1 is a rotor blade, 2 is a stator blade, 3 is a casing, and 4 is a rotor blade.
is the rotor of the electric motor, 5 is the stator of the electric motor, 7 is the exhaust port, 9 is the base, 11a and 11b are gases,
12 is a spherical spiral groove bearing, 13 is lubricating oil, 14 is a touchdown bearing, and 21 is a cooling pipe. Note that the same reference numerals in each figure indicate the same or corresponding parts.
Claims (1)
記ステータ翼と、対向配置され回転時に流体を吸
引するロータ翼を有する回転体、この回転体に固
定された回転子とこの回転子に対向配置されたス
テータを有し上記回転体を駆動する電動機、上記
回転体をその下部で支承する球面型スパイラルみ
ぞ軸受で形成した下部軸受、および上記回転体を
その上部で支承するタツチダウン軸受を有する上
部軸受を備えるものにおいて、上記ケーシング内
部で上記球面型スパイラルみぞ軸受に対する冷却
器を設けたことを特徴とするターボ分子ポンプ装
置。 (2) 冷却器は電動機をも冷却する実用新案登録
請求の範囲第１項記載のターボ分子ポンプ装置。 (3) 冷却器は電動機のステータ支持体に装着さ
れ、内部を冷却用流体が流通する冷却パイプであ
る実用新案登録請求の範囲第１項または第２項に
記載のターボ分子ポンプ装置。[Claims for Utility Model Registration] (1) A casing having stator blades on its inner wall, a rotating body having rotor blades arranged opposite to the stator blades and sucking fluid during rotation, and a rotor fixed to this rotating body. An electric motor having a stator placed opposite to the rotor and driving the rotating body, a lower bearing formed of a spherical spiral groove bearing supporting the rotating body at its lower part, and supporting the rotating body at its upper part. 1. A turbo-molecular pump device comprising an upper bearing having a touch-down bearing, characterized in that a cooler for the spherical spiral groove bearing is provided inside the casing. (2) The turbo-molecular pump device according to claim 1, wherein the cooler also cools the electric motor. (3) The turbo-molecular pump device according to claim 1 or 2, wherein the cooler is a cooling pipe that is attached to the stator support of the electric motor and through which a cooling fluid flows.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8686686U JPS62197794U (en) | 1986-06-06 | 1986-06-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8686686U JPS62197794U (en) | 1986-06-06 | 1986-06-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62197794U true JPS62197794U (en) | 1987-12-16 |
Family
ID=30943568
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8686686U Pending JPS62197794U (en) | 1986-06-06 | 1986-06-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62197794U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01267392A (en) * | 1988-04-15 | 1989-10-25 | Hitachi Ltd | Turbo vacuum pump |
| JP2006063881A (en) * | 2004-08-26 | 2006-03-09 | Shimadzu Corp | High speed rotary apparatus |
| JP2021092150A (en) * | 2019-12-06 | 2021-06-17 | 株式会社島津製作所 | Vacuum pump |
-
1986
- 1986-06-06 JP JP8686686U patent/JPS62197794U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01267392A (en) * | 1988-04-15 | 1989-10-25 | Hitachi Ltd | Turbo vacuum pump |
| JP2006063881A (en) * | 2004-08-26 | 2006-03-09 | Shimadzu Corp | High speed rotary apparatus |
| JP4543828B2 (en) * | 2004-08-26 | 2010-09-15 | 株式会社島津製作所 | High speed rotating equipment |
| JP2021092150A (en) * | 2019-12-06 | 2021-06-17 | 株式会社島津製作所 | Vacuum pump |
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