JP2021092150A - Vacuum pump - Google Patents

Vacuum pump Download PDF

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JP2021092150A
JP2021092150A JP2019221114A JP2019221114A JP2021092150A JP 2021092150 A JP2021092150 A JP 2021092150A JP 2019221114 A JP2019221114 A JP 2019221114A JP 2019221114 A JP2019221114 A JP 2019221114A JP 2021092150 A JP2021092150 A JP 2021092150A
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bearing
cover member
vacuum pump
outer ring
fixing member
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JP7327132B2 (en
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雅嗣 眞鍋
Masatsugu Manabe
雅嗣 眞鍋
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Shimadzu Corp
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Shimadzu Corp
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Abstract

To provide a vacuum pump which is improved in the cooling efficiency of a bearing, and elongated in a lubrication life of the bearing.SOLUTION: A bearing 50 is accommodated in an internal space 11 of a base 10, and a shaft 40 is rotatably supported by an inner ring 51 of the bearing 50. An outer ring 52 of the bearing 50 is fixed to the base 10 by a bearing outer ring fixing member 3. A lower opening 11a of the internal space 11 is blocked by a blocking part 61 of a cover member 60. Heat is transmitted between the bearing outer ring fixing member 3 and the blocking part 61 by a protrusion 62 which protrudes toward the bearing outer ring fixing member 3 from the blocking part 61, and the cover member 60 is cooled by a cooling part 70.SELECTED DRAWING: Figure 2

Description

本発明は、真空ポンプに関する。 The present invention relates to a vacuum pump.

真空ポンプは、各種真空処理装置に用いられる。例えば、特許文献１に記載されたターボ分子ポンプは、ロータ、シャフト、転がり軸受、ベースおよびモータを含む。ロータは、シャフトに締結され、転がり軸受により回転自在に支持される。転がり軸受の外輪は、ベースに弾性的に保持される。シャフトがモータにより回転駆動されることにより、真空処理装置内の気体分子が一方向に移動され、外部に排出される。 Vacuum pumps are used in various vacuum processing devices. For example, the turbo molecular pump described in Patent Document 1 includes a rotor, a shaft, a rolling bearing, a base and a motor. The rotor is fastened to the shaft and rotatably supported by rolling bearings. The outer ring of the rolling bearing is elastically held by the base. When the shaft is rotationally driven by a motor, gas molecules in the vacuum processing apparatus are moved in one direction and discharged to the outside.

高速で回転する転がり軸受においては、高い潤滑性と低い転がり摩擦とを実現するために離油度が高いグリースが封入される。転がり軸受の放熱性が低いと、封入されたグリースの蒸発または劣化が進み、転がり軸受の寿命が短くなる。そこで、特許文献１においては、外輪からベースへの熱伝達を向上させる冷却用グリースが外輪とベースとの隙間に充填される。 In rolling bearings that rotate at high speed, grease with a high degree of oil release is sealed in order to achieve high lubricity and low rolling friction. If the heat dissipation of the rolling bearing is low, the enclosed grease will evaporate or deteriorate, and the life of the rolling bearing will be shortened. Therefore, in Patent Document 1, a cooling grease that improves heat transfer from the outer ring to the base is filled in the gap between the outer ring and the base.

特開２０１６−５６７５０号公報Japanese Unexamined Patent Publication No. 2016-56750

特許文献１のターボ分子ポンプにおいては、ベースの熱容量が大きく、また、伝熱経路が長いため、転がり軸受を効率よく冷却することができず、軸受の潤滑寿命を延ばすことが難しい。そのため、軸受の冷却効率を向上させることが望まれる。 In the turbo molecular pump of Patent Document 1, since the heat capacity of the base is large and the heat transfer path is long, the rolling bearing cannot be cooled efficiently, and it is difficult to extend the lubrication life of the bearing. Therefore, it is desired to improve the cooling efficiency of the bearing.

本発明の目的は、軸受の冷却効率を改善し、軸受の潤滑寿命を向上した真空ポンプを提供することである。 An object of the present invention is to provide a vacuum pump having improved bearing cooling efficiency and improved bearing lubrication life.

本発明の一態様は、開口を有する内部空間が形成されたベースと、内輪および外輪を有し、前記内部空間に収容された軸受と、前記軸受の前記内輪により回転可能に支持されたシャフトと、前記軸受の前記外輪を前記ベースに対して固定する固定部材と、前記ベースに設けられたカバー部材と、前記カバー部材を冷却するように配置された冷却部とを備え、前記カバー部材は、前記開口を閉塞する閉塞部と、前記固定部材と前記閉塞部との間で熱を伝達するように前記閉塞部から前記固定部材に向かって突出する突出部とを含む、真空ポンプに関する。 One aspect of the present invention includes a base in which an internal space having an opening is formed, a bearing having an inner ring and an outer ring and housed in the inner space, and a shaft rotatably supported by the inner ring of the bearing. The cover member includes a fixing member for fixing the outer ring of the bearing to the base, a cover member provided on the base, and a cooling unit arranged to cool the cover member. The present invention relates to a vacuum pump including a closing portion that closes the opening and a protruding portion that projects from the closing portion toward the fixing member so as to transfer heat between the fixing member and the closing portion.

本発明によれば、軸受の冷却効率を改善し、軸受の潤滑寿命を向上させることができる。 According to the present invention, the cooling efficiency of the bearing can be improved and the lubrication life of the bearing can be improved.

本発明の第１の実施の形態に係る真空ポンプの断面図である。It is sectional drawing of the vacuum pump which concerns on 1st Embodiment of this invention. 軸受の周辺部分の真空ポンプの構造を示す拡大断面図である。It is an enlarged sectional view which shows the structure of the vacuum pump of the peripheral part of a bearing. 第１の変形例に係る真空ポンプを示す拡大部分断面図である。It is an enlarged partial sectional view which shows the vacuum pump which concerns on the 1st modification. 第２の変形例に係る真空ポンプを示す拡大部分断面図である。It is an enlarged partial sectional view which shows the vacuum pump which concerns on the 2nd modification. 第３の変形例に係る真空ポンプを示す拡大部分断面図である。It is an enlarged partial sectional view which shows the vacuum pump which concerns on 3rd modification. 第４の変形例に係る真空ポンプを示す拡大部分断面図である。It is an enlarged partial sectional view which shows the vacuum pump which concerns on 4th modification. 本発明の第２の実施の形態に係る真空ポンプの断面図である。It is sectional drawing of the vacuum pump which concerns on 2nd Embodiment of this invention.

［１］第１の実施の形態
（１）真空ポンプの構成
以下、実施の形態に係る真空ポンプについて、図面を参照しながら詳細に説明する。図１は、本発明の第１の実施の形態に係る真空ポンプの断面図である。図１に示すように、真空ポンプ１００は、ターボ分子ポンプであり、ベース１０、ケーシング２０、モータ３０、シャフト４０、軸受５０、カバー部材６０および冷却部７０を備える。 [1] First Embodiment (1) Configuration of Vacuum Pump Hereinafter, the vacuum pump according to the embodiment will be described in detail with reference to the drawings. FIG. 1 is a cross-sectional view of a vacuum pump according to a first embodiment of the present invention. As shown in FIG. 1, the vacuum pump 100 is a turbo molecular pump and includes a base 10, a casing 20, a motor 30, a shaft 40, a bearing 50, a cover member 60, and a cooling unit 70.

ベース１０は、金属により形成され、略円筒形状を有する。ベース１０の中央部分における上下方向に貫通する空間を内部空間１１と呼ぶ。内部空間１１の下部には下部開口１１ａが形成される。内部空間１１が内部空間の例であり、下部開口１１ａが開口の例である。ベース１０の側壁部分には、上下方向に蛇行しながら径方向に延びる排気経路１２が形成される。排気経路１２の上流端部は、ベース１０の上面に開口する。また、ベース１０の側壁部分には、排気経路１２の下流端部とベース１０の外側面とを接続する図示しない排気口が形成される。 The base 10 is made of metal and has a substantially cylindrical shape. The space penetrating in the vertical direction in the central portion of the base 10 is called an internal space 11. A lower opening 11a is formed in the lower part of the internal space 11. The internal space 11 is an example of the internal space, and the lower opening 11a is an example of the opening. An exhaust path 12 extending in the radial direction while meandering in the vertical direction is formed on the side wall portion of the base 10. The upstream end of the exhaust path 12 opens on the upper surface of the base 10. Further, an exhaust port (not shown) is formed on the side wall portion of the base 10 to connect the downstream end portion of the exhaust path 12 and the outer surface of the base 10.

ケーシング２０は、金属により形成され、略円筒形状を有する。ターボ分子ポンプ１００の吸気側には非接触方式で、シャフト４０を回転可能に支持する磁気軸受９０が配置される。磁気軸受９０は、静止側永久磁石９１および回転側永久磁石９２を含む。磁気軸受９０の静止側永久磁石９１は、ケーシング２０上部に組み立てられる。ケーシング２０は、ベース１０の上部に取り付けられる。なお、ケーシング２０の上部には、フランジ部が形成される。ケーシング２０の内周面には、内方に水平に突出する複数の固定翼２２が、スペーサ２３により軸方向に位置決めされる。 The casing 20 is made of metal and has a substantially cylindrical shape. A magnetic bearing 90 that rotatably supports the shaft 40 is arranged on the intake side of the turbo molecular pump 100 in a non-contact manner. The magnetic bearing 90 includes a stationary side permanent magnet 91 and a rotating side permanent magnet 92. The stationary side permanent magnet 91 of the magnetic bearing 90 is assembled on the upper part of the casing 20. The casing 20 is attached to the top of the base 10. A flange portion is formed on the upper portion of the casing 20. On the inner peripheral surface of the casing 20, a plurality of fixed wings 22 projecting horizontally inward are positioned in the axial direction by the spacer 23.

モータ３０は、モータステータ３１とモータロータ３２とを含み、回転軸が上下方向を向くようにベース１０の内部空間１１に収容される。モータロータ３２は、シャフト４０に固定される。シャフト４０には、回転翼４１が締結され、固定翼２２と交互に配置される。回転翼４１の上部には磁気軸受９０の回転側永久磁石９２が配置される。 The motor 30 includes a motor stator 31 and a motor rotor 32, and is housed in the internal space 11 of the base 10 so that the rotation axis faces in the vertical direction. The motor rotor 32 is fixed to the shaft 40. Rotor blades 41 are fastened to the shaft 40 and are arranged alternately with the fixed blades 22. A permanent magnet 92 on the rotating side of the magnetic bearing 90 is arranged above the rotary blade 41.

軸受５０は、ベース１０の内部空間１１においてモータ３０の下方に配置される。軸受５０は、例えば転がり軸受であり、シャフト４０の下部を回転可能にベース１０に支持する。本例では、軸受５０は玉軸受（ボールベアリング）であるが、実施の形態はこれに限定されない。軸受５０は、ころ軸受等の他の転がり軸受であってもよい。なお、ころ軸受は、円筒ころ軸受、棒状ころ軸受、針状ころ軸受または円錐ころ軸受を含む。 The bearing 50 is arranged below the motor 30 in the internal space 11 of the base 10. The bearing 50 is, for example, a rolling bearing, and the lower portion of the shaft 40 is rotatably supported by the base 10. In this example, the bearing 50 is a ball bearing, but the embodiment is not limited to this. The bearing 50 may be another rolling bearing such as a roller bearing. The roller bearings include cylindrical roller bearings, rod roller bearings, needle roller bearings and conical roller bearings.

カバー部材６０は、軸受５０を放熱可能に軸受５０と熱的に接触した状態で、内部空間１１の下部開口１１ａを閉塞するようにベース１０の下部に取り付けられる。カバー部材６０の詳細は後述する。冷却部７０は、ベース１０およびカバー部材６０の下面に取り付けられ、ベース１０およびカバー部材６０を冷却する。本実施の形態においては、冷却部７０は水冷ジャケットであり、内部に冷却媒体として冷却水を循環するための流路７１が形成される。 The cover member 60 is attached to the lower part of the base 10 so as to close the lower opening 11a of the internal space 11 in a state where the bearing 50 is in thermal contact with the bearing 50 so as to dissipate heat. Details of the cover member 60 will be described later. The cooling unit 70 is attached to the lower surfaces of the base 10 and the cover member 60 to cool the base 10 and the cover member 60. In the present embodiment, the cooling unit 70 is a water-cooled jacket, and a flow path 71 for circulating cooling water as a cooling medium is formed inside.

モータ３０のロータ３２がステータ３１により回転駆動されると、ロータ３２に締結されたシャフト４０が回転する。これにより、複数の回転翼４１が複数の固定翼２２に対して回転する。この場合、ケーシング２０の上部開口から導入された気体分子が、ベース１０の排気経路１２に沿って移動し、排気口から排出される。 When the rotor 32 of the motor 30 is rotationally driven by the stator 31, the shaft 40 fastened to the rotor 32 rotates. As a result, the plurality of rotary blades 41 rotate with respect to the plurality of fixed blades 22. In this case, the gas molecules introduced from the upper opening of the casing 20 move along the exhaust path 12 of the base 10 and are discharged from the exhaust port.

（２）軸受の放熱機構
図２は、軸受５０の周辺部分の真空ポンプ１００の構造を示す拡大断面図である。図２に示すように、軸受５０は、内輪５１、外輪５２および複数の転がり部材５３を含む。内輪５１は、軸受内輪固定部材１によりシャフト４０に固定される。複数の転がり部材５３は、内輪５１と外輪５２との間で図示しない保持器（リテーナ）により保持される。外輪５２は、軸受ハウジング２および軸受外輪固定部材３によりベース１０に固定される。軸受外輪固定部材３が固定部材の例である。 (2) Heat Dissipation Mechanism of Bearing FIG. 2 is an enlarged cross-sectional view showing the structure of the vacuum pump 100 in the peripheral portion of the bearing 50. As shown in FIG. 2, the bearing 50 includes an inner ring 51, an outer ring 52, and a plurality of rolling members 53. The inner ring 51 is fixed to the shaft 40 by the bearing inner ring fixing member 1. The plurality of rolling members 53 are held between the inner ring 51 and the outer ring 52 by a cage (retainer) (not shown). The outer ring 52 is fixed to the base 10 by the bearing housing 2 and the bearing outer ring fixing member 3. The bearing outer ring fixing member 3 is an example of the fixing member.

具体的には、軸受ハウジング２は、周壁部２ａ、上面部２ｂおよびフランジ部２ｃを含む雌ねじ部材である。周壁部２ａは、略円筒形状を有する。周壁部２ａの内周面には、ねじ山とねじ溝とからなるねじ部が形成される。上面部２ｂは、周壁部２ａの上部を閉塞する。上面部２ｂの中央部には、上下方向に貫通する貫通孔２ｄが形成される。フランジ部２ｃは、周壁部２ａの下端部から外方に広がるように形成される。軸受ハウジング２は、シャフト４０が上面部２ｂの貫通孔２ｄに挿通された状態で、ベース１０の内部空間１１に固定される。 Specifically, the bearing housing 2 is a female screw member including a peripheral wall portion 2a, an upper surface portion 2b, and a flange portion 2c. The peripheral wall portion 2a has a substantially cylindrical shape. A threaded portion composed of a thread and a threaded groove is formed on the inner peripheral surface of the peripheral wall portion 2a. The upper surface portion 2b closes the upper portion of the peripheral wall portion 2a. A through hole 2d penetrating in the vertical direction is formed in the central portion of the upper surface portion 2b. The flange portion 2c is formed so as to extend outward from the lower end portion of the peripheral wall portion 2a. The bearing housing 2 is fixed to the internal space 11 of the base 10 in a state where the shaft 40 is inserted into the through hole 2d of the upper surface portion 2b.

軸受外輪固定部材３は、略円環形状を有する雄ねじ部材である。軸受外輪固定部材３の外周面には、ねじ山とねじ溝とからなるねじ部が形成される。軸受外輪固定部材３は、シャフト４０が挿通されつつ軸受５０の下方に配置される。軸受外輪固定部材３の外周面のねじ部と軸受ハウジング２の周壁部２ａの内周面のねじ部とが螺合されることにより、軸受外輪固定部材３の上面が軸受５０の外輪５２の下面に接触する。この場合、外輪５２が軸受ハウジング２と軸受外輪固定部材３とにより上下方向から狭持された状態でベース１０に固定される。 The bearing outer ring fixing member 3 is a male screw member having a substantially annular shape. A threaded portion composed of a thread and a thread groove is formed on the outer peripheral surface of the bearing outer ring fixing member 3. The bearing outer ring fixing member 3 is arranged below the bearing 50 while the shaft 40 is inserted. By screwing the threaded portion on the outer peripheral surface of the bearing outer ring fixing member 3 and the threaded portion on the inner peripheral surface of the peripheral wall portion 2a of the bearing housing 2, the upper surface of the bearing outer ring fixing member 3 is the lower surface of the outer ring 52 of the bearing 50. Contact. In this case, the outer ring 52 is fixed to the base 10 in a state of being narrowly held from the vertical direction by the bearing housing 2 and the bearing outer ring fixing member 3.

カバー部材６０は、熱伝導性が高くかつ加工しやすい材料（本例ではアルミニウム）により形成され、閉塞部６１および突出部６２を含む。閉塞部６１は、例えば円形を有する板部材であり、ベース１０の下部において内部空間１１の下部開口１１ａを閉塞するように軸受ハウジング２のフランジ部２ｃの下面に取り付けられる。ベース１０の下面とカバー部材６０の閉塞部６１の下面とは略面一となる。突出部６２は、例えば円筒形状を有し、閉塞部６１の上面の中央から上方に突出するように形成される。突出部６２の上端部は、軸受外輪固定部材３の下面に接触する。 The cover member 60 is made of a material having high thermal conductivity and easy to process (aluminum in this example), and includes a closing portion 61 and a protruding portion 62. The closing portion 61 is, for example, a plate member having a circular shape, and is attached to the lower surface of the flange portion 2c of the bearing housing 2 so as to close the lower opening 11a of the internal space 11 at the lower part of the base 10. The lower surface of the base 10 and the lower surface of the closing portion 61 of the cover member 60 are substantially flush with each other. The projecting portion 62 has, for example, a cylindrical shape, and is formed so as to project upward from the center of the upper surface of the closing portion 61. The upper end of the protruding portion 62 comes into contact with the lower surface of the bearing outer ring fixing member 3.

（３）効果
本実施の形態に係る真空ポンプ１００においては、軸受５０の外輪５２とカバー部材６０の突出部６２とが軸受外輪固定部材３を介して熱的に接触する。この場合、軸受５０において発生した熱は、軸受外輪固定部材３を介して、カバー部材６０に伝達される。これにより、軸受５０の放熱が効率よく行われる。特に、本実施の形態では、軸受外輪固定部材３と突出部６２とが直接接触するので、軸受５０の放熱がより効率よく行われる。 (3) Effect In the vacuum pump 100 according to the present embodiment, the outer ring 52 of the bearing 50 and the protruding portion 62 of the cover member 60 are in thermal contact with each other via the bearing outer ring fixing member 3. In this case, the heat generated in the bearing 50 is transferred to the cover member 60 via the bearing outer ring fixing member 3. As a result, heat dissipation of the bearing 50 is efficiently performed. In particular, in the present embodiment, since the bearing outer ring fixing member 3 and the protruding portion 62 are in direct contact with each other, the bearing 50 dissipates heat more efficiently.

また、カバー部材６０は冷却部７０により効率よく水冷される。したがって、軸受５０とカバー部材６０との間での熱交換が効率よく行われる。ここで、軸受外輪固定部材３およびカバー部材６０は、ベース１０およびケーシング２０に比べて体積が小さい。そのため、熱容量を小さくすることができる。さらに、軸受５０と冷却部７０との間に最短の伝熱経路が形成されるので、熱伝達の損失が小さい。これらの結果、軸受５０の冷却効率を改善し、軸受５０の潤滑寿命を向上させることができる。 Further, the cover member 60 is efficiently water-cooled by the cooling unit 70. Therefore, heat exchange between the bearing 50 and the cover member 60 is efficiently performed. Here, the bearing outer ring fixing member 3 and the cover member 60 have a smaller volume than the base 10 and the casing 20. Therefore, the heat capacity can be reduced. Further, since the shortest heat transfer path is formed between the bearing 50 and the cooling unit 70, the loss of heat transfer is small. As a result, the cooling efficiency of the bearing 50 can be improved and the lubrication life of the bearing 50 can be improved.

（４）変形例
本実施の形態において、軸受外輪固定部材３とカバー部材６０とが直接接触するが、実施の形態はこれに限定されない。図３は、第１の変形例に係る真空ポンプ１００を示す拡大部分断面図である。図３に示すように、第１の変形例に係る真空ポンプ１００は、伝熱部材８０をさらに含む。伝熱部材８０は、環状を有し、銅合金またはアルミニウム合金等の熱伝導性が高い材料により形成される。伝熱部材８０は、軸受外輪固定部材３の下面とカバー部材６０の突出部６２の上端部とに接触するように配置される。 (4) Deformation Example In the present embodiment, the bearing outer ring fixing member 3 and the cover member 60 come into direct contact with each other, but the embodiment is not limited to this. FIG. 3 is an enlarged partial cross-sectional view showing the vacuum pump 100 according to the first modification. As shown in FIG. 3, the vacuum pump 100 according to the first modification further includes a heat transfer member 80. The heat transfer member 80 has an annular shape and is formed of a material having high thermal conductivity such as a copper alloy or an aluminum alloy. The heat transfer member 80 is arranged so as to come into contact with the lower surface of the bearing outer ring fixing member 3 and the upper end portion of the protruding portion 62 of the cover member 60.

第１の変形例によれば、軸受５０の外輪５２とカバー部材６０の突出部６２とが軸受外輪固定部材３および伝熱部材８０を介して熱的に接触する。そのため、軸受５０において発生した熱を軸受外輪固定部材３および伝熱部材８０を介してカバー部材６０に伝達することができる。また、適切な厚みを有する伝熱部材８０を用いることにより、軸受５０を任意の位置に取り付けつつ突出部６２と軸受外輪固定部材３とを容易に熱的に接触させることができる。 According to the first modification, the outer ring 52 of the bearing 50 and the protruding portion 62 of the cover member 60 are in thermal contact with each other via the bearing outer ring fixing member 3 and the heat transfer member 80. Therefore, the heat generated in the bearing 50 can be transferred to the cover member 60 via the bearing outer ring fixing member 3 and the heat transfer member 80. Further, by using the heat transfer member 80 having an appropriate thickness, the protrusion 62 and the bearing outer ring fixing member 3 can be easily brought into thermal contact while the bearing 50 is attached at an arbitrary position.

また、本実施の形態において、軸受外輪固定部材３、カバー部材６０および冷却部７０が別体として形成されるが、実施の形態はこれに限定されない。図４は、第２の変形例に係る真空ポンプ１００を示す拡大部分断面図である。図４に示すように、第２の変形例においては、軸受外輪固定部材３およびカバー部材６０の突出部６２が一体的に形成される。図４では、軸受外輪固定部材３とカバー部材６０の突出部６２との境界が便宜的に一点鎖線で示されている。第２の変形例によれば、軸受外輪固定部材３とカバー部材６０との間の熱伝達の損失がより小さくなる。この場合、軸受５０の放熱をより効率よく行うことができる。 Further, in the present embodiment, the bearing outer ring fixing member 3, the cover member 60, and the cooling portion 70 are formed as separate bodies, but the embodiment is not limited to this. FIG. 4 is an enlarged partial cross-sectional view showing the vacuum pump 100 according to the second modification. As shown in FIG. 4, in the second modification, the bearing outer ring fixing member 3 and the protruding portion 62 of the cover member 60 are integrally formed. In FIG. 4, the boundary between the bearing outer ring fixing member 3 and the protruding portion 62 of the cover member 60 is shown by a alternate long and short dash line for convenience. According to the second modification, the loss of heat transfer between the bearing outer ring fixing member 3 and the cover member 60 becomes smaller. In this case, heat dissipation of the bearing 50 can be performed more efficiently.

図５は、第３の変形例に係る真空ポンプ１００を示す拡大部分断面図である。図５に示すように、第３の変形例においては、カバー部材６０の閉塞部６１および冷却部７０が一体的に形成される。図５では、カバー部材６０の閉塞部６１と冷却部７０との境界が便宜的に一点鎖線で示されている。第３の変形例によれば、カバー部材６０と冷却部７０との間の熱伝達の損失がより小さくなる。この場合でも、軸受５０の放熱をより効率よく行うことができる。なお、第３の変形例に係る真空ポンプ１００は、第１の変形例における図３の伝熱部材８０を含んでもよい。 FIG. 5 is an enlarged partial cross-sectional view showing the vacuum pump 100 according to the third modification. As shown in FIG. 5, in the third modification, the closing portion 61 and the cooling portion 70 of the cover member 60 are integrally formed. In FIG. 5, the boundary between the closing portion 61 and the cooling portion 70 of the cover member 60 is shown by a alternate long and short dash line for convenience. According to the third modification, the loss of heat transfer between the cover member 60 and the cooling unit 70 becomes smaller. Even in this case, heat dissipation of the bearing 50 can be performed more efficiently. The vacuum pump 100 according to the third modification may include the heat transfer member 80 of FIG. 3 in the first modification.

図６は、第４の変形例に係る真空ポンプ１００を示す拡大部分断面図である。図６に示すように、第４の変形例においては、軸受外輪固定部材３、カバー部材６０および冷却部７０が一体的に形成される。図６では、軸受外輪固定部材３とカバー部材６０と冷却部７０との境界が便宜的に一点鎖線で示されている。第４の変形例によれば、軸受外輪固定部材３とカバー部材６０と冷却部７０との間の熱伝達の損失がさらに小さくなる。この場合、軸受５０の放熱をさらに効率よく行うことができる。 FIG. 6 is an enlarged partial cross-sectional view showing the vacuum pump 100 according to the fourth modification. As shown in FIG. 6, in the fourth modification, the bearing outer ring fixing member 3, the cover member 60, and the cooling portion 70 are integrally formed. In FIG. 6, the boundary between the bearing outer ring fixing member 3, the cover member 60, and the cooling portion 70 is shown by a alternate long and short dash line for convenience. According to the fourth modification, the loss of heat transfer between the bearing outer ring fixing member 3, the cover member 60, and the cooling unit 70 is further reduced. In this case, heat dissipation of the bearing 50 can be performed more efficiently.

［２］第２の実施の形態
以下、第２の実施の形態に係る真空ポンプ１００について、第１の実施の形態に係る真空ポンプ１００と異なる点を説明する。図７は、本発明の第２の実施の形態に係る真空ポンプ１００の断面図である。図７に示すように、本実施の形態においては、冷却部７０は空冷ジャケットであり、流路７１に代えて下面に放熱フィン７２を有する。 [2] Second Embodiment Hereinafter, the vacuum pump 100 according to the second embodiment will be described as being different from the vacuum pump 100 according to the first embodiment. FIG. 7 is a cross-sectional view of the vacuum pump 100 according to the second embodiment of the present invention. As shown in FIG. 7, in the present embodiment, the cooling unit 70 is an air-cooled jacket, and has heat radiation fins 72 on the lower surface instead of the flow path 71.

本実施の形態に係る真空ポンプ１００においても、軸受５０の外輪５２とカバー部材６０の突出部６２とが軸受外輪固定部材３を介して熱的に接触する。この場合、軸受５０において発生した熱は、軸受外輪固定部材３を介して、カバー部材６０に伝達される。これにより、軸受５０の放熱が効率よく行われる。 Also in the vacuum pump 100 according to the present embodiment, the outer ring 52 of the bearing 50 and the protruding portion 62 of the cover member 60 are in thermal contact with each other via the bearing outer ring fixing member 3. In this case, the heat generated in the bearing 50 is transferred to the cover member 60 via the bearing outer ring fixing member 3. As a result, heat dissipation of the bearing 50 is efficiently performed.

また、カバー部材６０は冷却部７０により効率よく空冷される。したがって、軸受５０とカバー部材６０との間での熱交換が効率よく行われる。ここで、軸受外輪固定部材３およびカバー部材６０は、ベース１０およびケーシング２０に比べて体積が小さい。そのため、熱容量を小さくすることができる。さらに、軸受５０と冷却部７０との間に最短の伝熱経路が形成されるので、熱伝達の損失が小さい。これらの結果、軸受５０の冷却効率を改善し、軸受５０の潤滑寿命を向上させることができる。 Further, the cover member 60 is efficiently air-cooled by the cooling unit 70. Therefore, heat exchange between the bearing 50 and the cover member 60 is efficiently performed. Here, the bearing outer ring fixing member 3 and the cover member 60 have a smaller volume than the base 10 and the casing 20. Therefore, the heat capacity can be reduced. Further, since the shortest heat transfer path is formed between the bearing 50 and the cooling unit 70, the loss of heat transfer is small. As a result, the cooling efficiency of the bearing 50 can be improved and the lubrication life of the bearing 50 can be improved.

本実施の形態に係る真空ポンプ１００は、第１の実施の形態の第１の変形例における図３の伝熱部材８０を含んでもよい。また、本実施の形態において、軸受外輪固定部材３、カバー部材６０および冷却部７０が別体として形成されるが、実施の形態はこれに限定されない。第１の実施の形態の第２〜第４の変形例と同様に、軸受外輪固定部材３、カバー部材６０および冷却部７０の少なくとも一部が一体的に形成されてもよい。 The vacuum pump 100 according to the present embodiment may include the heat transfer member 80 of FIG. 3 in the first modification of the first embodiment. Further, in the present embodiment, the bearing outer ring fixing member 3, the cover member 60, and the cooling portion 70 are formed as separate bodies, but the embodiment is not limited to this. Similar to the second to fourth modifications of the first embodiment, at least a part of the bearing outer ring fixing member 3, the cover member 60, and the cooling portion 70 may be integrally formed.

［３］他の実施の形態
上記実施の形態において、真空ポンプ１００がターボ分子ポンプである場合が示されているが、実施の形態はこれに限定されない。例えば、真空ポンプ１００は、ジークバーンポンプまたはHolweckポンプ等のドラッグポンプ（ネジ溝ポンプ）のみを備えた真空ポンプであってもよいし、ターボ分子ポンプおよびドラッグポンプの組み合わせからなる真空ポンプであってもよい。 [3] Other Embodiments In the above embodiment, the case where the vacuum pump 100 is a turbo molecular pump is shown, but the embodiment is not limited to this. For example, the vacuum pump 100 may be a vacuum pump provided only with a drag pump (thread groove pump) such as a Siegburn pump or a Holweck pump, or a vacuum pump composed of a combination of a turbo molecular pump and a drag pump. May be good.

［４］態様
上述した複数の例示的な実施形態は、以下の態様の具体例であることが当業者により理解される。 [4] Aspects It will be understood by those skilled in the art that the plurality of exemplary embodiments described above are specific examples of the following embodiments.

（第１項）一態様に係る真空ポンプは、
開口を有する内部空間が形成されたベースと、
内輪および外輪を有し、前記内部空間に収容された軸受と、
前記軸受の前記内輪により回転可能に支持されたシャフトと、
前記軸受の前記外輪を前記ベースに対して固定する固定部材と、
前記ベースに設けられたカバー部材と、
前記カバー部材を冷却するように配置された冷却部とを備え、
前記カバー部材は、
前記開口を閉塞する閉塞部と、
前記固定部材と前記閉塞部との間で熱を伝達するように前記閉塞部から前記固定部材に向かって突出する突出部とを含んでもよい。 (Section 1) The vacuum pump according to one aspect is
A base with an internal space with an opening,
A bearing having an inner ring and an outer ring and housed in the internal space,
A shaft rotatably supported by the inner ring of the bearing and
A fixing member that fixes the outer ring of the bearing to the base,
The cover member provided on the base and
A cooling unit arranged to cool the cover member is provided.
The cover member is
A closed portion that closes the opening and
It may include a protruding portion protruding from the closing portion toward the fixing member so as to transfer heat between the fixing member and the closing portion.

この真空ポンプにおいては、ベースの内部空間に軸受が収容され、軸受の内輪によりシャフトが回転可能に支持される。軸受の外輪は、固定部材によりベースに対して固定される。内部空間の開口は、カバー部材の閉塞部により閉塞される。閉塞部から固定部材に向かって突出する突出部により固定部材と閉塞部との間で熱が伝達され、冷却部によりカバー部材が冷却される。 In this vacuum pump, a bearing is housed in the internal space of the base, and the shaft is rotatably supported by the inner ring of the bearing. The outer ring of the bearing is fixed to the base by a fixing member. The opening of the internal space is closed by the closing portion of the cover member. Heat is transferred between the fixing member and the closing portion by the protruding portion protruding from the closing portion toward the fixing member, and the cover member is cooled by the cooling portion.

この構成によれば、軸受において発生した熱は、外輪および固定部材を介して、カバー部材に伝達される。これにより、軸受の放熱が効率よく行われる。また、カバー部材は冷却部により冷却される。したがって、軸受とカバー部材との間での熱交換が効率よく行われる。さらに、軸受と冷却部との間に最短の伝熱経路が形成されるので、熱伝達の損失が小さい。これらの結果、軸受の冷却効率を向上させることができ、軸受の潤滑寿命を延ばすことができる。 According to this configuration, the heat generated in the bearing is transferred to the cover member via the outer ring and the fixing member. As a result, heat dissipation of the bearing is efficiently performed. Further, the cover member is cooled by the cooling unit. Therefore, heat exchange between the bearing and the cover member is efficiently performed. Further, since the shortest heat transfer path is formed between the bearing and the cooling portion, the loss of heat transfer is small. As a result, the cooling efficiency of the bearing can be improved, and the lubrication life of the bearing can be extended.

（第２項）第１項に記載の真空ポンプにおいて、
前記固定部材と前記カバー部材の前記突出部とが直接接触してもよい。 (Item 2) In the vacuum pump according to item 1,
The fixing member and the protruding portion of the cover member may come into direct contact with each other.

この場合、軸受の放熱をより効率よく行うことができる。 In this case, heat dissipation of the bearing can be performed more efficiently.

（第３項）第１項に記載の真空ポンプにおいて、
前記固定部材と前記カバー部材の前記突出部とに接触するように設けられた伝熱部材をさらに備えてもよい。 (Item 3) In the vacuum pump according to item 1,
A heat transfer member provided so as to come into contact with the fixing member and the protruding portion of the cover member may be further provided.

この場合、軸受の外輪とカバー部材の突出部とが固定部材および伝熱部材を介して熱的に接触する。そのため、軸受において発生した熱を固定部材および伝熱部材を介してカバー部材に伝達することができる。また、適切な厚みを有する伝熱部材を用いることにより、軸受を任意の位置に取り付けつつ突出部と固定部材とを容易に熱的に接触させることができる。 In this case, the outer ring of the bearing and the protruding portion of the cover member are in thermal contact with each other via the fixing member and the heat transfer member. Therefore, the heat generated in the bearing can be transferred to the cover member via the fixing member and the heat transfer member. Further, by using a heat transfer member having an appropriate thickness, the protruding portion and the fixing member can be easily brought into thermal contact while the bearing is attached at an arbitrary position.

（第４項）第１項に記載の真空ポンプにおいて、
前記固定部材と前記カバー部材の前記突出部とが一体的に形成されてもよい。 (Item 4) In the vacuum pump according to item 1,
The fixing member and the protruding portion of the cover member may be integrally formed.

この場合、固定部材とカバー部材との間の熱伝達の損失がより小さくなる。これにより、軸受の放熱をより効率よく行うことができる。 In this case, the loss of heat transfer between the fixing member and the cover member becomes smaller. This makes it possible to dissipate heat from the bearing more efficiently.

（第５項）第１項〜第４項のいずれか一項に記載の真空ポンプにおいて、
前記カバー部材の前記閉塞部と前記冷却部とが一体的に形成されてもよい。 (Section 5) In the vacuum pump according to any one of paragraphs 1 to 4,
The closed portion and the cooling portion of the cover member may be integrally formed.

この場合、カバー部材と冷却部との間の熱伝達の損失がより小さくなる。これにより、軸受の放熱をより効率よく行うことができる。 In this case, the loss of heat transfer between the cover member and the cooling unit becomes smaller. This makes it possible to dissipate heat from the bearing more efficiently.

（第６項）第１項に記載の真空ポンプにおいて、
前記固定部材と前記カバー部材と前記冷却部とが一体的に形成されてもよい。 (Section 6) In the vacuum pump according to paragraph 1,
The fixing member, the cover member, and the cooling portion may be integrally formed.

この場合、固定部材とカバー部材と冷却部との間の熱伝達の損失がさらに小さくなる。これにより、軸受の放熱をさらに効率よく行うことができる。 In this case, the loss of heat transfer between the fixing member, the cover member, and the cooling portion is further reduced. As a result, heat dissipation of the bearing can be performed more efficiently.

（第７項）第１項〜第６項のいずれか一項に記載の真空ポンプにおいて、
前記冷却部には、冷却媒体を循環するための流路が埋設されてもよい。 (Section 7) In the vacuum pump according to any one of paragraphs 1 to 6,
A flow path for circulating the cooling medium may be embedded in the cooling unit.

この場合、カバー部材は冷却媒体により効率よく冷却される。これにより、軸受とカバー部材との間での熱交換が効率よく行われる。 In this case, the cover member is efficiently cooled by the cooling medium. As a result, heat exchange between the bearing and the cover member is efficiently performed.

（第８項）第１項〜第６項のいずれか一項に記載の真空ポンプにおいて、
前記冷却部には、放熱フィンが形成されてもよい。 (Item 8) In the vacuum pump according to any one of items 1 to 6,
Radiation fins may be formed in the cooling portion.

この場合、カバー部材は効率よく空冷される。これにより、軸受とカバー部材との間での熱交換が効率よく行われる。 In this case, the cover member is efficiently air-cooled. As a result, heat exchange between the bearing and the cover member is efficiently performed.

１…軸受内輪固定部材，２…軸受ハウジング，２ａ…周壁部，２ｂ…上面部，２ｃ…フランジ部，２ｄ…貫通孔，３…軸受外輪固定部材，１０…ベース，１１…内部空間，１１ａ…下部開口，１２…排気経路，２０…ケーシング，２２…固定翼，２３…スペーサ，３０…モータ，３１…モータステータ，３２…モータロータ，４０…シャフト，４１…回転翼，５０…軸受，５１…内輪，５２…外輪，５３…転がり部材，６０…カバー部材，６１…閉塞部，６２…突出部，７０…冷却部，７１…流路，７２…放熱フィン，８０…伝熱部材，９０…磁気軸受，９１…静止側永久磁石，９２…回転側永久磁石，１００…真空ポンプ 1 ... Bearing inner ring fixing member, 2 ... Bearing housing, 2a ... Peripheral wall part, 2b ... Top surface part, 2c ... Flange part, 2d ... Through hole, 3 ... Bearing outer ring fixing member, 10 ... Base, 11 ... Internal space, 11a ... Lower opening, 12 ... Exhaust path, 20 ... Casing, 22 ... Fixed blade, 23 ... Spacer, 30 ... Motor, 31 ... Motor stator, 32 ... Motor rotor, 40 ... Shaft, 41 ... Rotating blade, 50 ... Bearing, 51 ... Inner ring , 52 ... outer ring, 53 ... rolling member, 60 ... cover member, 61 ... closed part, 62 ... protruding part, 70 ... cooling part, 71 ... flow path, 72 ... heat dissipation fin, 80 ... heat transfer member, 90 ... magnetic bearing , 91 ... stationary side permanent magnet, 92 ... rotating side permanent magnet, 100 ... vacuum pump

Claims (8)

開口を有する内部空間が形成されたベースと、
内輪および外輪を有し、前記内部空間に収容された軸受と、
前記軸受の前記内輪により回転可能に支持されたシャフトと、
前記軸受の前記外輪を前記ベースに対して固定する固定部材と、
前記ベースに設けられたカバー部材と、
前記カバー部材を冷却するように配置された冷却部とを備え、
前記カバー部材は、
前記開口を閉塞する閉塞部と、
前記固定部材と前記閉塞部との間で熱を伝達するように前記閉塞部から前記固定部材に向かって突出する突出部とを含む、真空ポンプ。 A base with an internal space with an opening,
A bearing having an inner ring and an outer ring and housed in the internal space,
A shaft rotatably supported by the inner ring of the bearing and
A fixing member that fixes the outer ring of the bearing to the base,
The cover member provided on the base and
A cooling unit arranged to cool the cover member is provided.
The cover member is
A closed portion that closes the opening and
A vacuum pump including a protrusion that projects from the closure toward the fixation member so as to transfer heat between the fixation member and the closure. 前記固定部材と前記カバー部材の前記突出部とが直接接触する、請求項１記載の真空ポンプ。 The vacuum pump according to claim 1, wherein the fixing member and the protruding portion of the cover member are in direct contact with each other. 前記固定部材と前記カバー部材の前記突出部とに接触するように設けられた伝熱部材をさらに備える、請求項１記載の真空ポンプ。 The vacuum pump according to claim 1, further comprising a heat transfer member provided so as to contact the fixing member and the protruding portion of the cover member. 前記固定部材と前記カバー部材の前記突出部とが一体的に形成された、請求項１記載の真空ポンプ。 The vacuum pump according to claim 1, wherein the fixing member and the protruding portion of the cover member are integrally formed. 前記カバー部材の前記閉塞部と前記冷却部とが一体的に形成された、請求項１〜４のいずれか一項に記載の真空ポンプ。 The vacuum pump according to any one of claims 1 to 4, wherein the closed portion and the cooling portion of the cover member are integrally formed. 前記固定部材と前記カバー部材と前記冷却部とが一体的に形成された、請求項１記載の真空ポンプ。 The vacuum pump according to claim 1, wherein the fixing member, the cover member, and the cooling portion are integrally formed. 前記冷却部には、冷却媒体を循環するための流路が埋設された、請求項１〜６のいずれか一項に記載の真空ポンプ。 The vacuum pump according to any one of claims 1 to 6, wherein a flow path for circulating a cooling medium is embedded in the cooling unit. 前記冷却部には、放熱フィンが形成された、請求項１〜６のいずれか一項に記載の真空ポンプ。 The vacuum pump according to any one of claims 1 to 6, wherein heat radiation fins are formed in the cooling unit.
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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62197794U (en) * 1986-06-06 1987-12-16
JPS62197795U (en) * 1986-06-06 1987-12-16
JP2006226267A (en) * 2005-02-21 2006-08-31 Mitsubishi Heavy Ind Ltd Bearing structure of vacuum pump and vacuum pump using it
JP2014043789A (en) * 2012-08-24 2014-03-13 Shimadzu Corp Vacuum pump
JP2014506981A (en) * 2011-02-16 2014-03-20 オーリコン レイボルド バキューム ゲーエムベーハー Bearing structure for rotating the shaft of the vacuum pump at high speed
JP3199803U (en) * 2015-06-29 2015-09-10 株式会社島津製作所 Turbo molecular pump for analyzer
JP2015190331A (en) * 2014-03-27 2015-11-02 株式会社島津製作所 vacuum pump
JP2016056750A (en) * 2014-09-10 2016-04-21 株式会社島津製作所 Vacuum pump

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62197794U (en) * 1986-06-06 1987-12-16
JPS62197795U (en) * 1986-06-06 1987-12-16
JP2006226267A (en) * 2005-02-21 2006-08-31 Mitsubishi Heavy Ind Ltd Bearing structure of vacuum pump and vacuum pump using it
JP2014506981A (en) * 2011-02-16 2014-03-20 オーリコン レイボルド バキューム ゲーエムベーハー Bearing structure for rotating the shaft of the vacuum pump at high speed
JP2014043789A (en) * 2012-08-24 2014-03-13 Shimadzu Corp Vacuum pump
JP2015190331A (en) * 2014-03-27 2015-11-02 株式会社島津製作所 vacuum pump
JP2016056750A (en) * 2014-09-10 2016-04-21 株式会社島津製作所 Vacuum pump
JP3199803U (en) * 2015-06-29 2015-09-10 株式会社島津製作所 Turbo molecular pump for analyzer

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