JPS62197795U - - Google Patents
Info
- Publication number
- JPS62197795U JPS62197795U JP8686786U JP8686786U JPS62197795U JP S62197795 U JPS62197795 U JP S62197795U JP 8686786 U JP8686786 U JP 8686786U JP 8686786 U JP8686786 U JP 8686786U JP S62197795 U JPS62197795 U JP S62197795U
- Authority
- JP
- Japan
- Prior art keywords
- cooler
- pump device
- bearing
- turbo
- spiral groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005855 radiation Effects 0.000 claims description 2
- 238000001816 cooling Methods 0.000 claims 1
- 239000012809 cooling fluid Substances 0.000 claims 1
- 239000012530 fluid Substances 0.000 claims 1
- 239000010687 lubricating oil Substances 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図はこの考案の一実施例によるターボ分子
ポンプ装置を示す断面図、第２図〜第５図はそれ
ぞれこの考案の他の実施例によるターボ分子ポン
プ装置を示す断面図、第６図は従来のターボ分子
ポンプ装置を示す断面図である。
図において、１はロータ翼、２はステータ翼、
３はケーシング、４は電動機の回転子、５は電動
機のステータ、７は排気口、９はベース、１１ａ
，１１ｂは気体、１２は球面型スパイラルみぞ軸
受、１３は潤滑油、１４はタツチダウン軸受、１
５は回転軸、２２は冷却器、２３は放熱フインで
ある。なお、各図中同一符号は同一または相当部
分を示すものとする。
FIG. 1 is a cross-sectional view showing a turbo-molecular pump device according to one embodiment of this invention, FIGS. 2 to 5 are cross-sectional views showing turbo-molecular pump devices according to other embodiments of this invention, and FIG. FIG. 2 is a cross-sectional view showing a conventional turbo-molecular pump device. In the figure, 1 is a rotor blade, 2 is a stator blade,
3 is the casing, 4 is the rotor of the electric motor, 5 is the stator of the electric motor, 7 is the exhaust port, 9 is the base, 11a
, 11b is gas, 12 is a spherical spiral groove bearing, 13 is lubricating oil, 14 is a touch-down bearing, 1
5 is a rotating shaft, 22 is a cooler, and 23 is a heat radiation fin. Note that the same reference numerals in each figure indicate the same or corresponding parts.
Claims (1)
記ステータ翼と対向配置され回転時に流体を吸引
するロータ翼を有する回転体、回転子が上記回転
体に固定され上記回転体を駆動する電動機、上記
回転体をその下部で支承する球面型スパイラルみ
ぞ軸受で形成した下部軸受、および上記回転体を
その上部で支承するタツチダウン軸受を有する上
部軸受を備えるものにおいて、上記ケーシング外
側に上記球面型スパイラルみぞ軸受を冷却する冷
却器を設けたことを特徴とするターボ分子ポンプ
装置。 (2) 球面型スパイラルみぞ軸受を冷却器中に収
納した実用新案登録請求の範囲第１項記載のター
ボ分子ポンプ装置。 (3) 電動機の少なくとも一部を冷却器中に収納
した実用新案登録請求の範囲第２項記載のターボ
分子ポンプ装置。 (4) 冷却器は放熱フインを有する実用新案登録
請求の範囲第１項ないし第３項の何れかに記載の
ターボ分子ポンプ装置。 (5) 冷却器は冷却用流体が流通するパイプを具
備する実用新案登録請求の範囲第１項ないし第４
項の何れかに記載のターボ分子ポンプ装置。[Claims for Utility Model Registration] (1) A casing having stator blades on its inner wall, a rotating body having rotor blades that are arranged opposite to the stator blades and suck fluid during rotation, and a rotor fixed to the rotating body and causing the rotation. an electric motor that drives the body, a lower bearing formed of a spherical spiral groove bearing that supports the rotary body at its lower part, and an upper bearing having a touch-down bearing that supports the rotary body at its upper part, the outer side of the casing A turbo molecular pump device comprising: a cooler for cooling the spherical spiral groove bearing. (2) The turbo-molecular pump device according to claim 1, in which a spherical spiral groove bearing is housed in a cooler. (3) The turbomolecular pump device according to claim 2, wherein at least a portion of the electric motor is housed in a cooler. (4) The turbo-molecular pump device according to any one of claims 1 to 3, wherein the cooler has heat radiation fins. (5) The cooler is equipped with a pipe through which cooling fluid flows.Claims 1 to 4 of the Utility Model Registration Claims
The turbomolecular pump device according to any one of paragraphs.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8686786U JPS62197795U (en) | 1986-06-06 | 1986-06-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8686786U JPS62197795U (en) | 1986-06-06 | 1986-06-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62197795U true JPS62197795U (en) | 1987-12-16 |
Family
ID=30943570
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8686786U Pending JPS62197795U (en) | 1986-06-06 | 1986-06-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62197795U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021092150A (en) * | 2019-12-06 | 2021-06-17 | 株式会社島津製作所 | Vacuum pump |
-
1986
- 1986-06-06 JP JP8686786U patent/JPS62197795U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021092150A (en) * | 2019-12-06 | 2021-06-17 | 株式会社島津製作所 | Vacuum pump |
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