JPS60204997A - Composite vacuum pump - Google Patents

Abstract

PURPOSE:To permit the exhaust ranging from the atmospheric pressure to the superhigh vacuum range by a pump by forming a spiral gooved pump part and a centrifugal type pump into a pump case body and installing the rotors of these pump parts onto a common rotary shaft. CONSTITUTION:The captioned pump consists of a spiral-grooved pump part 3 and a centrifugal type pump part 4, and the rotor 5 of the spiral-grooved pump part 3 and the rotor 4a of the centrifugal type pump part 4 are installed onto a common rotary shaft 6. With the revolution of a motor 8, the rotors 5a and 4a revolve through the common rotary shaft 6, and the gas supplied from a suction port 9 is compressed by a spiral-grooved pump 3 equipped with a movable vane 3A, stationary vane 3B, and a spiral groove (not shown in the figure), and further compressed by the centrifugal pump 4 and discharged from a discharge port 10. Therefore, the exhaust ranging from the atmospheric pressure to the superhigh vacuum range is enabled by a pump. Further, the necessity of a rough suction pump and an auxiliary pump, etc. in the conventional method can be eliminated, and the necessity of space can be obviated, and a simple operation is permitted.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a compound vacuum pump capable of evacuation from atmospheric pressure to ultra-high vacuum with a single pump.

Spanty ion pump as a conventional ultra-high vacuum pump,
There are titanium sublimation pumps, turbomolecular pumps, cryopumps, etc., but all of these pumps require a roughing pump or an auxiliary pump to pump air from atmospheric pressure to ultra-high vacuum. This requires piping and valves, as well as a complicated control panel to control the operation of both pumps, which has the drawback of making the vacuum system complex and taking up space.

The present invention eliminates these inconveniences, eliminates the need for piping, pipes, etc., uses an in-cylinder vacuum salt drainage system, and does not take up much space, making it extremely popular and extremely popular! The purpose of this pump is to provide a composite vacuum pump that allows exhaust air to reach the empty area, and its characteristic feature is that at least a helical groove pump section and a centrifugal pump section are formed within the pump housing. The rotors of these pump parts are mounted on a common rotating shaft.

', -11 One embodiment of the present invention will be described with reference to FIGS. 1 to 7.

(1) indicates a pump housing, and inside the pump housing (1), a turbo molecular bomb part (2), a spiral groove pump part (3), and a centrifugal pump part (4) are sequentially formed from one side. did. The turbo-molecular pump section (2) consists of rotor blades (2a)...(2a) provided on the outer peripheral surface of the upper part of the rotor (5).
and a stator blade (2b) provided on the inner peripheral surface of the pump housing (1).
...(2b) The spiral groove pump part (
3) is the dynamic g(2a) of the turbo molecular pump section (2).
...An annular plate-like movement a (3a) protruding from the outer circumferential surface of the rotor (5) common to (2a)... (3a) and protruding from the inner circumferential surface of the pump housing (1) Annular plate-shaped ARM (3b
)...(3b) Togaranari, each of these E (3b)
As shown in FIGS. 2 and 3, the upper surface of the rotor blade (3a) opposite to the lower surface has a large number of spiral grooves (3c) facing inward according to the rotational direction of the rotor blade (3a). However, on the lower surface opposite to the upper surface of the rotor blade (3a), the rotor blade (3a)
Spiral groove (3d) that goes outward according to the rotation direction of (
3d) are formed respectively. Further, the centrifugal pump section (4) includes a rotor (4a) provided on the outer peripheral surface of a rotating shaft (6) fitted to the rotor (5) and the pump housing (1).
and a stator (4b) provided on the inner peripheral surface of the stator.

That is, the turbo molecular pump part (2) and the spiral groove pump part (3
) and the rotor (4) of the centrifugal pump section (4).
a) are mounted on a common rotating shaft (6). The rotating shaft (6) has two bearings (7a) (7b)
and is supported by the pump housing (1).

(8) is the hole 77' between the bearings (7a) and (7b).
A motor provided in the flf body (1), (8a) is its rotor, (8b) is a stator, the rotary shaft (6) is fitted to the rotor, and the rotary shaft is driven by the motor (8). (6) through the rotor (5) of the turbomolecular pump part (2) and the helical groove pump part (3) and the centrifugal pump part (4)
The rotors (4a) of the two rotors rotate together.

Here, the rotor (4a) of the centrifugal pump part (4) is a disc (4d) having a shaft cylinder part (4C) in the center as shown in FIGS. 4 and 5. The quality of radial protrusions (4e)...(4e) is formed, and the shaft cylinder part (4e) is formed.
The gas that has entered the gap (4f) between C) and the stator (4b) is given a centrifugal force by the co-rotating elements (4e)...(4e), causing a circle &
(4d) so that it is discharged to the outside. Further, the stator (4b) of the centrifugal pump section (4) is a -1-side disk (41) having an opening (4g) at the periphery and an opening (4h) at the center as shown in FIGS. 6 and 7. and the opening in the center (4j)
a lower disk (4k) having a
41), radial fins (4n)...(4n) are provided protrudingly in these internal spaces (4m), and the openings (
The gas that entered the internal space (4m) from 4g) exchanges heat with the fins (4n)...(4n), is cooled, and is discharged from the opening (4j), making it easier to radiate the heat of compression of the gas. I did it like that.

In addition, (9) is an intake port, (10) is a discharge port, (11) is a sleeve, (12) is a shaft sealing part, and (13) is the said bearing via the oil passage in said 101 rotating shaft (6). (7a) (7b)
Shows the oil tank that supplies oil to the

Next, we will explain the operation of the pump in the example below. do.

According to the drive of the motor (8), the rotors (5) and (4a) rotate together through the common rotation shaft (6), and thus the gas from the intake port (9) is transferred to the turbo molecular pump section (2). The rotating motion χ (2a) and the static W (2b)
Further, in the spiral groove pump part (3), the gas is compressed by the movement '1 (
A flow in the same direction occurs along with the lower surface of the stator vane (3b), so that the gas flows through the spiral groove (3c) on the upper surface of the stator vane (3b)...
(3c) flows in the direction of arrow B shown in the second figure and is compressed inward, and the gas passes through the inner clearance (3e) and is then accompanied by the upper surface of the moving W (3a), causing waves in the same direction. As a result, similar gases flow into the helical groove (
3d) ... (3d) flows in the direction of arrow C in Figure 2 and is compressed outward, and then the gas passes through the outer clearance (3f) and repeats the same compression action as described above to become highly compressed. It is further compressed to high pressure by the rotor (4e)...(4e) of the rotating rotor (4a) and the stationary stator (4b)...(4b) in the centrifugal pump section (4). It is discharged from the discharge port (10). Therefore, exhaust can be performed from atmospheric pressure to ultra-high vacuum. Here, the pressure at the discharge port (10) may be above atmospheric pressure or below atmospheric pressure.

FIG. 8 shows another experimental example, in which the turbo-molecular pump part (2) is not present, but instead is a combination of a spiral groove pump part (3) and a centrifugal pump part (4). vinegar,
The rotor (5a) of the spiral groove pump section (3) and the rotor (4a) of the centrifugal pump section (4) are mounted on a common rotating shaft (6).

In each of the above embodiments, the driving parts such as the motor (8) are in the atmosphere, so there is no need to vacuum seal the motor lead wires or the combined parts. If the mold is purged with a pump, the corrosive gas will not enter the driving part even when the corrosive gas is used as a mold.

In addition, although the above embodiment shows the case where the bearing lubricating oil is used for the bearing, it is also possible to use grease cylinder lubricating oil, and instead of the rolling bearing of the above embodiment, a magnetic bearing, a single male bearing, etc. may be used as the bearing. good. Further, the driving portion may be an air turbine type motor or the like instead of the electric motor of the above embodiment.

As described above, according to the present invention, at least the spiral groove pump section and the centrifugal pump section are formed within the pump housing, and the rotors of these pump sections are mounted on a common rotating shaft. Capable of evacuating to high vacuum areas.

Roughing pumps and auxiliary pumps, etc., are no longer required as in the past.
In this way, it becomes a second-class vacuum evacuation system that does not take up space.
The operation is simple, and the number of stages of rotor blades and stationary blades can be easily increased in the spiral groove pump section, making it easier to obtain a high vacuum.

[Brief explanation of drawings]

FIG. 1 is a longitudinal cross-sectional view of one embodiment of the compound vacuum pump of the present invention, FIG. FIG. 7 is an enlarged cross-sectional view taken along the line Vl, FIG. 7 is a cross-sectional view taken along the line ■--■, and FIG. 8 is a longitudinal cross-sectional view of another embodiment. (1) Pump housing, (3) Spiral groove pump section, (3a) Moving blade, (3b) Stationary blade, (4)
... Centrifugal pump section, (41), (5) ... Rotor, (6) ... Rotating shaft 9
Figure 1 Figure 4 Figure 5 Figure 6 Figure 7

Claims (2)

[Claims] (1) A compound vacuum pump in which at least a spiral groove pump section and a centrifugal pump section are formed in a pump housing, and the rotors of these pump sections are mounted on a common rotating shaft. (2) The compound vacuum according to claim 1, wherein the rfii spiral groove pump section is composed of an annular plate-shaped rotor blade and an annular plate-shaped stator vane with a plurality of spiral grooves formed on the surface facing the rotor blade. pump.