JPH0419393B2 - - Google Patents
Info
- Publication number
- JPH0419393B2 JPH0419393B2 JP10051084A JP10051084A JPH0419393B2 JP H0419393 B2 JPH0419393 B2 JP H0419393B2 JP 10051084 A JP10051084 A JP 10051084A JP 10051084 A JP10051084 A JP 10051084A JP H0419393 B2 JPH0419393 B2 JP H0419393B2
- Authority
- JP
- Japan
- Prior art keywords
- pump
- rotor
- flow region
- vacuum
- suction port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006073 displacement reaction Methods 0.000 claims description 10
- 230000006835 compression Effects 0.000 description 11
- 238000007906 compression Methods 0.000 description 11
- 230000000694 effects Effects 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は真空ポンプに係り、特にクリーンな超
高真空を得るのに好適な真空ポンプに関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a vacuum pump, and particularly to a vacuum pump suitable for obtaining a clean ultra-high vacuum.
［従来の技術］
従来の真空ポンプは、第１図に示すようにター
ボ分子ポンプ１と、ターボ分子ポンプ１の吐出側
に接続されるロータリポンプ等の粗引ポンプ２と
から構成されている。ターボ分子ポンプ１は一方
に超高真空容器に接続する吸込口３を、他方に吐
出口４を有するケーシング５と、そのケーシング
５内に配設されるロータ６と、そのロータ６の外
周に設けられる動翼７と、ケーシング５内面に設
けられる静翼８と、ロータ軸６Ａを回転させる駆
動モータ９とを備え、動翼７と静翼８とを交互に
配置された構成となつていて、ロータ６及び動翼
７の回転により吸込口３から低真空側の吐出口４
に気体分子を運ぶことによつて、超高真空が得ら
れるようになつている。また、ターボ分子ポンプ
１の吐出口４にはクイツクカツプリング１０Ａを
介してフレキシブルチユーブ１１の一端が接続さ
れ、そのフレキシブルチユーブ１１の他端に粗引
ポンプがクイツクカツプリング１０Ｂを介して接
続されている。また、粗引ポンプ２からの油の逆
流によりターボ分子ポンプ１あるいは超高真空容
器が汚染されるを防ぐため、粗引ポンプ２とフレ
キシブルチユーブ１１との間にトラツプ１２を介
在させている。尚、図中１３はロータ軸６Ａを支
承する軸受を示す。[Prior Art] As shown in FIG. 1, a conventional vacuum pump is comprised of a turbo-molecular pump 1 and a roughing pump 2, such as a rotary pump, connected to the discharge side of the turbo-molecular pump 1. The turbo molecular pump 1 includes a casing 5 having a suction port 3 connected to an ultra-high vacuum container on one side and a discharge port 4 on the other side, a rotor 6 disposed inside the casing 5, and a rotor 6 provided on the outer periphery of the rotor 6. The rotor blades 7 are provided on the inner surface of the casing 5, and the drive motor 9 rotates the rotor shaft 6A, and the rotor blades 7 and the stator blades 8 are arranged alternately. Due to the rotation of the rotor 6 and the rotor blades 7, from the suction port 3 to the discharge port 4 on the low vacuum side.
Ultra-high vacuums can now be obtained by transporting gas molecules to Further, one end of a flexible tube 11 is connected to the discharge port 4 of the turbo molecular pump 1 via a quick coupling 10A, and a roughing pump is connected to the other end of the flexible tube 11 via a quick coupling 10B. has been done. Furthermore, a trap 12 is interposed between the roughing pump 2 and the flexible tube 11 in order to prevent the turbo-molecular pump 1 or the ultra-high vacuum container from being contaminated by backflow of oil from the roughing pump 2. Note that 13 in the figure indicates a bearing that supports the rotor shaft 6A.
［発明が解決しようとする課題］
上記従来技術はターボ分子ポンプとは別に粗引
ポンプを備える必要があるから、設置スペースが
大きくなると共に、粗引ポンプを稼働させて一定
の真空条件になつて始めてターボ分子ポンプの稼
働が許されるなど、細かい運転条件が必要となる
という問題があつた。[Problems to be Solved by the Invention] The above-mentioned conventional technology requires a roughing pump in addition to the turbomolecular pump, which increases the installation space and makes it difficult to maintain a constant vacuum condition by operating the roughing pump. The problem was that detailed operating conditions were required, such as allowing turbomolecular pumps to operate for the first time.
本発明の目的は、超高真空から大気圧までの排
気をすることができる真空ポンプ装置を提供する
ことにある。 An object of the present invention is to provide a vacuum pump device capable of evacuation from ultra-high vacuum to atmospheric pressure.
［課題を解決するための手段］
上記目的は、一方に吸込口を、他方に吐出口を
有するケーシング内に、分子流領域、中間流領
域、粘性流領域の真空排気をそれぞれ行うポンプ
要素を前記吸込口から前記吐出口に向かつて配設
したポンプ装置であつて、少なくとも前記粘性流
領域のポンプ要素はスクリユウロータを備えた容
積形ポンプで構成することによつて構成される。[Means for Solving the Problems] The above object is to provide a pump element for evacuating a molecular flow region, an intermediate flow region, and a viscous flow region, respectively, in a casing having a suction port on one side and a discharge port on the other side. The pump device is arranged from the suction port to the discharge port, and at least the pump element in the viscous flow region is configured by a positive displacement pump equipped with a screw rotor.
［作用］
分子流領域のポンプ要素によつて気体分子を吸
込口側から中間流領域のポンプ要素へ移動させ、
中間流領域のポンプ要素によつて粘性流領域のポ
ンプ要素へ移動させる気体分子に運動量を与え、
粘性流領域のポンプ要素によつてスクリユウロー
タで構成して中間流領域のポンプ要素側から大気
側へと圧縮排気させる。[Operation] The pump element in the molecular flow region moves gas molecules from the suction port side to the pump element in the intermediate flow region,
imparting momentum to the gas molecules to be transferred by the pump element in the intermediate flow region to the pump element in the viscous flow region;
A pump element in a viscous flow region is configured with a screw rotor, and compresses and exhausts air from the pump element side in an intermediate flow region to the atmosphere side.
［実施例］
以下、本発明の一実施例を第２図により説明す
る。第２図は本発明による真空ポンプ装置の断面
図を示し、２１は一方に吸込口２２を、他方に吐
出口２３を有するケーシングで、このケーシング
２１内には第１のポンプ要素２４、第２のポンプ
要素２５、第３のポンプ要素２６が設けられてい
る。第１のポンプ要素２４には吸込口２２寄り
に、第２のポンプ要素２５は第１のポンプ要素２
４の吐出側に、第３のポンプ要素２６は第２のポ
ンプ要素２５の吐出側にそれぞれ配置されてい
る。[Example] Hereinafter, an example of the present invention will be described with reference to FIG. FIG. 2 shows a sectional view of a vacuum pump device according to the present invention, and 21 is a casing having a suction port 22 on one side and a discharge port 23 on the other side. A pump element 25 and a third pump element 26 are provided. The first pump element 24 is located closer to the suction port 22, and the second pump element 25 is located closer to the first pump element 2.
4 and the third pump element 26 is arranged on the discharge side of the second pump element 25, respectively.
第１のポンプ要素２４は、筒状のロータ２７の
外周に設けた複数の動翼２８とケーシング２１の
内周に設けた複数の静翼２９とを交互に配置して
なるターボ分子ポンプで構成されている。 The first pump element 24 is a turbo-molecular pump in which a plurality of rotor blades 28 provided on the outer periphery of a cylindrical rotor 27 and a plurality of stationary blades 29 provided on the inner periphery of the casing 21 are alternately arranged. has been done.
第２のポンプ要素２５は、ケーシング２１に設
けられたねじ付き外筒３０及び外筒３０内で回転
するロータ３１を備えてなるシールポンプで構成
されている。 The second pump element 25 is constituted by a seal pump comprising a threaded outer cylinder 30 provided in the casing 21 and a rotor 31 rotating within the outer cylinder 30.
第３のポンプ要素２６は、スクリユウ形の雄ロ
ータ３２、雌ロータ３３を備えた容積形圧縮ポン
プで構成されている。 The third pump element 26 is constituted by a positive displacement compression pump having a screw-shaped male rotor 32 and a female rotor 33.
そして、これら各ポンプのロータ駆動軸は一つ
の駆動軸３４で共用され、ロータ駆動軸３４はケ
ーシング２１側壁に設置した端板モータ３５によ
り高速で回転させられるようになつている。この
ように、駆動源を一つですむともに真空ポンプ装
置を小型型化できる効果がある。また、ロータ駆
動軸３４の一方はターボ分子ポンプ２４のロータ
内側に設けた磁気軸受３６Ａで支持され、他方は
容積形圧縮ポンプ２６の雄ロータ近傍に設けられ
た磁気軸受３６Ｂで支持されている。尚、図中３
８はタイミングギヤを示す。 The rotor drive shafts of these pumps are shared by one drive shaft 34, and the rotor drive shaft 34 is rotated at high speed by an end plate motor 35 installed on the side wall of the casing 21. In this way, there is an effect that only one driving source is required and the vacuum pump device can be downsized. Further, one of the rotor drive shafts 34 is supported by a magnetic bearing 36A provided inside the rotor of the turbo molecular pump 24, and the other is supported by a magnetic bearing 36B provided near the male rotor of the positive displacement compression pump 26. In addition, 3 in the figure
8 indicates a timing gear.
次に、本発明の作用について説明する。端板モ
ータ３５により、ロータ駆動軸３４が回転させら
れると、ターボ分子ポンプ２４、シールポンプ２
５及び容積形圧縮ポンプ２６の各ロータが同時に
回転する。ターボ分子ポンプ２４部の分子流領域
においては動翼２８と静翼２９との作用でガス分
子が吸込口２２からシールポンプ２５側へ高い圧
縮比をもつて移行する。 Next, the operation of the present invention will be explained. When the rotor drive shaft 34 is rotated by the end plate motor 35, the turbo molecular pump 24 and the seal pump 2
The rotors of 5 and positive displacement compression pump 26 rotate simultaneously. In the molecular flow region of the turbo molecular pump 24, gas molecules move from the suction port 22 to the seal pump 25 side with a high compression ratio due to the action of the rotor blades 28 and stationary blades 29.
詳述すると、ターボ分子ポンプ２４は交互に動
翼と静翼とが配置され、動翼の回転によつて、気
体分子を吸込口側からシールポンプ２５側へ確立
的に移動させる。ターボ分子ポンプ２４は最大
10-11Torr程度から10-3Torr程度の圧縮を行う。
シールポンプ２５はねじ付き外筒とその外筒内で
回転するロータからなり、ねじ面に気体分子を衝
突させ、ターボ分子ポンプ２４側から容積形圧縮
ポンプ２６側へ分子に運動量を与える。シールポ
ンプ２５は10-3Torrから1Torr程度まで圧縮す
る。容積形圧縮ポンプ２６は互いに非接触で噛み
合う雄ロータと雌ロータとからなり、気体をシー
ルポンプ２５側から大気側へ圧縮排気させる。即
ち、ターボ分子ポンプ２４の分子流領域、シール
ポンプ２５の中間流領域、容積形圧縮ポンプ２６
の粘性流領域を分担し、１台の真空ポンプ装置で
超高真空から大気までの圧縮を行う。この真空ポ
ンプ装置は超動直後の圧力の高いときは容積形圧
縮ポンプ２６のみでポンプ作用を行う。そして、
圧力が低下するに従いシールポンプ２５、ターボ
分子ポンプ２４の順にポンプ作用を行い、最終的
には10-11Torr程度の真空に達する。 Specifically, the turbo molecular pump 24 has rotor blades and stationary blades arranged alternately, and the rotation of the rotor blades reliably moves gas molecules from the suction port side to the seal pump 25 side. The turbo molecular pump 24 is the maximum
Compression is performed from about 10 -11 Torr to about 10 -3 Torr.
The seal pump 25 is composed of a threaded outer cylinder and a rotor rotating within the outer cylinder, and causes gas molecules to collide with the threaded surface, giving momentum to the molecules from the turbo molecular pump 24 side to the positive displacement compression pump 26 side. The seal pump 25 compresses from 10 -3 Torr to about 1 Torr. The positive displacement compression pump 26 consists of a male rotor and a female rotor that mesh with each other without contacting each other, and compresses and exhausts gas from the seal pump 25 side to the atmosphere side. That is, the molecular flow region of the turbo molecular pump 24, the intermediate flow region of the seal pump 25, and the positive displacement compression pump 26.
The viscous flow region is divided among the two, and one vacuum pump device performs compression from ultra-high vacuum to atmospheric air. In this vacuum pump device, when the pressure is high immediately after supermotion, only the positive displacement compression pump 26 performs pumping action. and,
As the pressure decreases, the seal pump 25 and the turbo-molecular pump 24 perform pumping action in this order, eventually reaching a vacuum of about 10 -11 Torr.
第３図は本発明の他の実施例を示し、第２図と
異なるのはターボ分子ポンプ２４のロータ内側に
ロータ駆動軸３４の駆動モータ３９を設置し、か
つロータ駆動軸３４の他方及び雄ロータ軸の他方
を球面軸受４０で支持した点にある。この実施例
では第２図に示したスラスト軸受及びラジアル軸
受の磁気軸受３６Ａ，３６Ｂを不要にでき、より
コンパクトなものとなりコスト低減も図れる。 FIG. 3 shows another embodiment of the present invention, which differs from FIG. 2 in that a drive motor 39 for the rotor drive shaft 34 is installed inside the rotor of the turbo molecular pump 24, and the other and male The other point of the rotor shaft is supported by a spherical bearing 40. In this embodiment, the magnetic bearings 36A and 36B of the thrust bearing and radial bearing shown in FIG. 2 can be omitted, making it more compact and reducing costs.
尚、前述した実施例はいずれもシールポンプ２
５において、ねじ付き外筒３０内でロータ３１を
回転させる構造としても同様の効果が得られるこ
とができる。 In addition, in all of the above-mentioned embodiments, the seal pump 2
5, the same effect can be obtained by using a structure in which the rotor 31 is rotated within the threaded outer cylinder 30.
［発明の効果］
本発明によれば、一つのケーシング内に分子流
領域、中間流領域、粘性流領域の真空排気をそれ
ぞれ行うポンプ要素を配設して、超高真空から大
気圧までの排気を行えるので、設置スペースの減
少が図れる。[Effects of the Invention] According to the present invention, pump elements that perform vacuum evacuation in the molecular flow region, intermediate flow region, and viscous flow region are disposed in one casing, and the pump elements are arranged in one casing to perform evacuation from ultra-high vacuum to atmospheric pressure. This allows the installation space to be reduced.
第１図は従来の真空ポンプ装置を示す断面図、
第２図は本発明の真空ポンプ装置の一実施例を示
す断面図、第３図は本発明の真空ポンプ装置の他
の実施例を示す断面図である。
符号の説明、２１…ケーシング、２２…吸込
口、２３…吐出口、２４…ターボ分子ポンプ、２
５…シールポンプ、２６…容積形圧縮ポンプ、２
７…ロータ、２８…動翼、２９…静翼、３０…ね
じ付き外筒、３１…ロータ、３２…雄ロータ、３
３…雌ロータ、３４…ロータ駆動軸。
Figure 1 is a sectional view showing a conventional vacuum pump device.
FIG. 2 is a sectional view showing one embodiment of the vacuum pump device of the present invention, and FIG. 3 is a sectional view showing another embodiment of the vacuum pump device of the present invention. Explanation of symbols, 21...Casing, 22...Suction port, 23...Discharge port, 24...Turbo molecular pump, 2
5... Seal pump, 26... Positive displacement compression pump, 2
7... Rotor, 28... Moving blade, 29... Stator blade, 30... Threaded outer cylinder, 31... Rotor, 32... Male rotor, 3
3... Female rotor, 34... Rotor drive shaft.
Claims (1)
シング内に、分子流領域、中間流領域、粘性流領
域の真空排気をそれぞれ行うポンプ要素を前記吸
込口から前記吐出口に向かつて配設したポンプ装
置であつて、少なくとも前記粘性流領域のポンプ
要素はスクリユウロータを備えた容積形ポンプで
構成されていることを特徴とする真空ポンプ装
置。 ２ 特許請求の範囲第１項において、前記各ポン
プ要素のロータ駆動軸を一軸としたことを特徴と
する真空ポンプ装置。[Scope of Claims] 1 In a casing having a suction port on one side and a discharge port on the other side, a pump element that performs vacuum evacuation in a molecular flow region, an intermediate flow region, and a viscous flow region is connected from the suction port to the discharge port. 1. A vacuum pump device disposed towards a vacuum pump device, wherein at least the pump element in the viscous flow region is constituted by a positive displacement pump equipped with a screw rotor. 2. The vacuum pump device according to claim 1, wherein each of the pump elements has a single rotor drive shaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10051084A JPS60247075A (en) | 1984-05-21 | 1984-05-21 | Vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10051084A JPS60247075A (en) | 1984-05-21 | 1984-05-21 | Vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60247075A JPS60247075A (en) | 1985-12-06 |
| JPH0419393B2 true JPH0419393B2 (en) | 1992-03-30 |
Family
ID=14275943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10051084A Granted JPS60247075A (en) | 1984-05-21 | 1984-05-21 | Vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60247075A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017014022A1 (en) * | 2015-07-23 | 2017-01-26 | エドワーズ株式会社 | Venting system |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0784871B2 (en) * | 1986-06-12 | 1995-09-13 | 株式会社日立製作所 | Vacuum exhaust device |
| JPH01277698A (en) * | 1988-04-30 | 1989-11-08 | Nippon Ferrofluidics Kk | Compound vacuum pump |
| JP2003343469A (en) | 2002-03-20 | 2003-12-03 | Toyota Industries Corp | Vacuum pump |
| DE60304870T2 (en) * | 2003-11-18 | 2006-11-30 | Varian S.P.A., Leini | Vacuum pump with vibration damper |
| JP6009193B2 (en) * | 2012-03-30 | 2016-10-19 | 株式会社荏原製作所 | Vacuum exhaust device |
| CN107524579A (en) * | 2017-09-26 | 2017-12-29 | 安徽万瑞冷电科技有限公司 | A kind of cryogenic pump |
| JP2021161917A (en) * | 2020-03-31 | 2021-10-11 | エドワーズ株式会社 | Vacuum pump and piping structure part for vacuum pump |
-
1984
- 1984-05-21 JP JP10051084A patent/JPS60247075A/en active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017014022A1 (en) * | 2015-07-23 | 2017-01-26 | エドワーズ株式会社 | Venting system |
| JP2017025793A (en) * | 2015-07-23 | 2017-02-02 | エドワーズ株式会社 | Exhaust system |
| CN107709773A (en) * | 2015-07-23 | 2018-02-16 | 埃地沃兹日本有限公司 | Gas extraction system |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60247075A (en) | 1985-12-06 |
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