JPS60247075A - Vacuum pump - Google Patents
Vacuum pumpInfo
- Publication number
- JPS60247075A JPS60247075A JP10051084A JP10051084A JPS60247075A JP S60247075 A JPS60247075 A JP S60247075A JP 10051084 A JP10051084 A JP 10051084A JP 10051084 A JP10051084 A JP 10051084A JP S60247075 A JPS60247075 A JP S60247075A
- Authority
- JP
- Japan
- Prior art keywords
- pump
- pump element
- rotor
- casing
- drive shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は真空ポンプ装置に係り、特に半導体製造装置、
核融合装置などのクリーンな超高真空を得るのに好適な
真空ポンプ装置に関する。[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to a vacuum pump device, and particularly to a semiconductor manufacturing device,
The present invention relates to a vacuum pump device suitable for obtaining a clean ultra-high vacuum in nuclear fusion devices and the like.
従来の真空ポンプ装置は、第１図に示すようにターボ分
子ポンプ１と、該ターボ分子ポンプ１の吐出側に接続さ
れるロータリポンプ等の粗引ポンプ２とから構成されて
いる。ターボ分子ポンプ１は、一方に超高真空容器に接
続する吸込口３を、他方に吐出口４を有するケーシング
５と、そのケーシング５内に配設されるロータ６と、そ
のロータ６の外周に設けられる動翼７と、ケーシング５
内面に設けられる静翼８と、ロータ軸６Ａを回転させる
駆動モータ９とを備え、動翼７と静Ｘ８とを交互に配置
させた構成となっていて、ロータ６および動翼７の回転
により吸込口３から低真空側の吐出口４に気体分子を運
ぶことによって、超高真空が得られるようになっている
。またターボ分子ポンプ１の吐出口４にはクイックカッ
プリング１０Ａを介してフレキシブルチューブ１１の一
端が接続され、そのフレキシブルチューブ１１の他端に
前記粗引ポンプ２がクイックカップリング１０Ｂを介し
て接続されている。また粗引ポンプ２からの油の逆流に
よりターボ分子ポンプ１あるいは超高真空容器が汚染さ
れるのを防ぐため、粗引ポンプ２とフレキシブルチュー
ブ１１との間にトラップ１２を介在させている。尚、図
中１３はロータ軸６Ａを支承する軸受を示す。As shown in FIG. 1, a conventional vacuum pump device includes a turbo-molecular pump 1 and a roughing pump 2, such as a rotary pump, connected to the discharge side of the turbo-molecular pump 1. The turbo molecular pump 1 includes a casing 5 having a suction port 3 connected to an ultra-high vacuum container on one side and a discharge port 4 on the other side, a rotor 6 disposed inside the casing 5, and a rotor 6 disposed on the outer periphery of the rotor 6. The rotor blades 7 provided and the casing 5
It is equipped with stationary blades 8 provided on the inner surface and a drive motor 9 that rotates the rotor shaft 6A, and has a configuration in which moving blades 7 and stationary blades X8 are arranged alternately. An ultra-high vacuum can be obtained by transporting gas molecules from the suction port 3 to the discharge port 4 on the low vacuum side. Further, one end of a flexible tube 11 is connected to the discharge port 4 of the turbo molecular pump 1 via a quick coupling 10A, and the roughing pump 2 is connected to the other end of the flexible tube 11 via a quick coupling 10B. ing. In addition, a trap 12 is interposed between the roughing pump 2 and the flexible tube 11 in order to prevent the turbo-molecular pump 1 or the ultra-high vacuum vessel from being contaminated by backflow of oil from the roughing pump 2. Note that 13 in the figure indicates a bearing that supports the rotor shaft 6A.
しかし、前述した真空ポンプ装置においては、次のよう
な問題がある。However, the vacuum pump device described above has the following problems.
（１）ターボ分子ポンプ１とは別に粗引ポンプ２を備え
る必要があるため、設置スペースが大きくなる。(1) Since it is necessary to provide the roughing pump 2 separately from the turbomolecular pump 1, the installation space becomes large.
（２）粗引ポンプ２を稼動させて一定の真空条件になっ
て始めてターボ分子ポンプ１の稼動が許されるなど、細
かい運転条件が必要となる。(2) Fine operating conditions are required, such as allowing the turbo molecular pump 1 to operate only after the roughing pump 2 is operated and a certain vacuum condition is achieved.
（３）油を使用する粗引ポンプ２を用いているので、ク
リーンな超高真空を得がたい。(3) Since the roughing pump 2 uses oil, it is difficult to obtain a clean ultra-high vacuum.
（４）ターボ分子ポンプＩおよび粗引ポンプ２をそれぞ
れ駆動する駆動源が必要となると共に、電源系統もそれ
ぞれ必要となる。(4) A driving source for driving the turbo molecular pump I and the roughing pump 2 is required, and a power supply system is also required for each.
（５）ロータリ・ポンプ等の粗引ポンプ２は振動を発生
するので、ターボ分子ポンプ１を半導体製造装置など振
動をきらうものに使用する場合には、ターボ分子ポンプ
１に振動が伝わらないようにしなければならない。(5) The roughing pump 2, such as a rotary pump, generates vibrations, so when using the turbomolecular pump 1 in semiconductor manufacturing equipment or other equipment that dislikes vibrations, make sure that the vibrations are not transmitted to the turbomolecular pump 1. There must be.
本発明の目的は、一つのケーシング内に、分子流領域、
中間流領域、粘性流領域の真空排気をそれぞれ行うポン
プ要素を配設して超高真空から大気圧までの排気を行え
るようにして、設置スペースの減少、細かい運転条件の
廃止を図れると共に、クリーンな超高真空を得られ、ま
た各ポンプ要素のロータ駆動軸を一軸となすことで、一
つの駆動源で済み、しかも防振対策を施すことなく振動
をきらう半導体製造装置などに使用できる真空ポンプ装
置を提供することにある。The object of the present invention is to provide a molecular flow region within one casing.
By installing pump elements that perform vacuum evacuation in the intermediate flow region and viscous flow region, it is possible to perform evacuation from ultra-high vacuum to atmospheric pressure, reducing installation space and eliminating detailed operating conditions. A vacuum pump that can obtain an ultra-high vacuum, and by using a single rotor drive shaft for each pump element, only one drive source is required, and it can be used in semiconductor manufacturing equipment, etc., which avoids vibration without the need for anti-vibration measures. The goal is to provide equipment.
この目的を達成するために、本発明は、一方に吸込口を
、他方に吐出口を有するケーシング内に。To achieve this objective, the invention provides a casing with an inlet on one side and an outlet on the other.
第１ポンプ要素、第２ポンプ要素および第３ポンプ要素
を設け、第１ポンプ要素を吸込口寄りに、第２ポンプ要
素を第１ポンプ要素の吐出側に、第３ポンプ要素を第２
ポンプ要素の吐出側にそれぞれ配置し、前記第１ポンプ
要素を、動翼とｆ！ｐ翼とを交互に配置したターボ分子
ポンプで構成し、前記第２ポンプ要素を、ねじ付外筒お
よび該外筒内で回転するロータまたは外筒および該外筒
内で回転するねじ付ロータを備えるシールポンプで構成
し、゛前記第３ポンプ要素を、一対のスクリュウロータ
を備える容積形圧縮ポンプで構成し、これら各ポンプの
ロータ駆動軸を一軸となすことで、超高真空から大気圧
までの排気を行えるようにしたものである。A first pump element, a second pump element and a third pump element are provided, the first pump element being closer to the suction port, the second pump element being closer to the discharge side of the first pump element, and the third pump element being closer to the second pump element.
are arranged on the discharge side of the pump elements, and the first pump element is connected to the rotor blade and f! The second pump element includes a threaded outer cylinder and a rotor that rotates within the outer cylinder, or an outer cylinder and a threaded rotor that rotates within the outer cylinder. The third pump element is a positive displacement compression pump equipped with a pair of screw rotors, and the rotor drive shafts of each of these pumps are uniaxial, so that the pump can be operated from ultra-high vacuum to atmospheric pressure. It is designed to allow exhaust of air.
以下、本発明の一実施例を第２図により説明する。第２
図は本発明による真空ポンプ装置の断面図を示し、２１
は一方に吸込口２２を、他方に吐出口２３を有するケー
シングで、このケーシング２１内には第１ポンプ要素２
４、第２ポンプ要素２５および第３ポンプ要素２６が設
けられている。An embodiment of the present invention will be described below with reference to FIG. Second
The figure shows a sectional view of a vacuum pump device according to the invention, 21
is a casing having a suction port 22 on one side and a discharge port 23 on the other side, and inside this casing 21 is a first pump element 2.
4, a second pump element 25 and a third pump element 26 are provided.
第１ポンプ要素２４には吸込口２２寄りに、第２ポンプ
要素２５は第１ポンプ要素２４の吐出側に、第３ポンプ
要素２６は第２ポンプ要素２５の吐出側にそれぞれ配置
されている。The first pump element 24 is disposed near the suction port 22, the second pump element 25 is disposed on the discharge side of the first pump element 24, and the third pump element 26 is disposed on the discharge side of the second pump element 25.
前記第１ポンプ要素シ４は、筒状のロータ２７の外周に
設けた複数の動翼２８とケーシング２１の内周に設けた
複数の静翼２９とを交互に配置して成るターボ分子ポン
プで構成されている。The first pump element 4 is a turbo-molecular pump consisting of a plurality of rotor blades 28 provided on the outer periphery of a cylindrical rotor 27 and a plurality of stationary blades 29 provided on the inner periphery of the casing 21, which are alternately arranged. It is configured.
前記第２ポンプ要素２５は、ケーシング２１内に設けた
ねじ付外筒３０および該外筒３ｏ内で回転するロータ３
１を備えて成るシールポンプで構成されている。The second pump element 25 includes a threaded outer cylinder 30 provided within the casing 21 and a rotor 3 rotating within the outer cylinder 3o.
The pump consists of a seal pump comprising: 1.
前記第３ポンプ要素２６は、スクリュウ形の雄ロータ３
２、雌ロータ３３を備えた容積形圧縮ポ。The third pump element 26 has a screw-shaped male rotor 3.
2. Positive displacement compression port with female rotor 33.
ンプで構成されている。It consists of a
そして、これら各ポンプのロータ駆動軸は一本の駆動軸
３４で共用され、該ロータ駆動軸３４はケーシング２１
側壁に設置した端板モータ３５により高速で回転させら
れるようになっている。またロータ駆動軸３４の一方は
ターボ分子ポンプ２４のロータ内側に設けた磁気軸受３
６Ａで支持され、他方は容積形圧縮ポンプ２６の雄ロー
タ近傍に設けた磁気軸受３６Ｂで支持されている。また
容積形圧縮ポンプ２６の雌ロータ３３の軸も磁気軸受２
７Ａ、３７Ｂで支持されている。尚、図中３８はタイミ
ングギヤを示す。The rotor drive shaft of each of these pumps is shared by a single drive shaft 34, and the rotor drive shaft 34 is connected to the casing 21.
It can be rotated at high speed by an end plate motor 35 installed on the side wall. Further, one side of the rotor drive shaft 34 is provided with a magnetic bearing 3 provided inside the rotor of the turbo molecular pump 24.
6A, and the other is supported by a magnetic bearing 36B provided near the male rotor of the positive displacement compression pump 26. Furthermore, the shaft of the female rotor 33 of the positive displacement compression pump 26 is also supported by the magnetic bearing 2.
It is supported by 7A and 37B. Note that 38 in the figure indicates a timing gear.
次に本発明の作用について説明する。Next, the operation of the present invention will be explained.
端板モータ３５によりロータ駆動軸３４が回転させられ
ると、ターボ分子ポンプ２４、シールポンプ２５および
容積形圧縮ポンプ２６の各ロータが同時に回転する。タ
ーボ分子ポンプ２４部の分子流領域においては動翼２８
と静翼２９との作用でガス分子が吸込口２２からシール
ポンプ２５側へ高い圧縮比をもって移行する。その圧力
としては、１０”Ｔｏｒｒ程度から］、 ０−３Ｔ ｏ
ｒｒ程度となる。次いでシールポンプ２５部の中間流領
域では、該シールポンプ２５の作用で１０−３Ｔｏｒｒ
からＩＴｏｒｒ程度の圧力となり、粘性流領域では容積
形圧縮ポンプ２６により粗引きされ吐出口２３から大気
へ排出される。When the rotor drive shaft 34 is rotated by the end plate motor 35, the rotors of the turbo molecular pump 24, the seal pump 25, and the positive displacement compression pump 26 rotate simultaneously. In the molecular flow region of the turbo molecular pump 24, the rotor blades 28
Due to the action of the stator blades 29 and the stator vanes 29, gas molecules move from the suction port 22 to the seal pump 25 side with a high compression ratio. The pressure is from about 10"Torr], 0-3T o
It will be about rr. Next, in the intermediate flow region of the seal pump 25, the pressure is increased to 10-3 Torr by the action of the seal pump 25.
The pressure becomes about ITorr, and in the viscous flow region, it is roughly pumped by the positive displacement compression pump 26 and discharged from the discharge port 23 to the atmosphere.
第３図は本発明の他の実施例を示し、第２図と異なるの
は、ターボ分子ポンプ２４のロータ内側にロータ駆動軸
３４の駆動モータ３９を設置し、かつロータ駆動軸３４
の他方および雌ロータ軸の他方を球面軸受４０で支持し
た点にある。この実施例では、第２図に示したスラスト
軸受およびラジアル軸受の磁気軸受３６Ｂ、３７Ｂを不
要にでき、よりコンバク１〜なものとなりコスト低減も
図れる。FIG. 3 shows another embodiment of the present invention, which differs from FIG. 2 in that a drive motor 39 for the rotor drive shaft 34 is installed inside the rotor of the turbo molecular pump 24, and
and the other female rotor shaft are supported by a spherical bearing 40. In this embodiment, the magnetic bearings 36B and 37B of the thrust bearing and the radial bearing shown in FIG. 2 can be omitted, making it more compact and reducing costs.
尚、前述した実施例はいずれもシールポンプ２５におい
て、ねじ付外筒３０内でロータ３１を回転さぜる構造例
を示したが、外筒内でねじ付ロータを回転させる構造と
しても同様の効果が得られることは勿論である。Incidentally, in each of the above-mentioned embodiments, in the seal pump 25, the rotor 31 is rotated within the threaded outer cylinder 30, but a similar structure may also be used to rotate the threaded rotor within the outer cylinder. Of course, the effect can be obtained.
以上説明したように、本発明によれば、一つのケーシン
グ内に、分子流領域、中間流領域、粘性流領域の真空排
気をそれぞれ行うポンプ要素を配設して超高真空から大
気圧までの排気を行えるので、設置スペースの減少、細
かい運転条件の廃止を図れると共に、クリーンな超高真
空を得ることができる。また各ポンプ要素のロータ駆動
軸を一軸となしたことで、一つの駆動源で済む効果があ
る。As explained above, according to the present invention, pump elements that perform vacuum evacuation in the molecular flow region, intermediate flow region, and viscous flow region are arranged in one casing, and the pump elements are disposed in one casing to perform vacuum evacuation in the molecular flow region, intermediate flow region, and viscous flow region. Since exhaust can be performed, it is possible to reduce the installation space, eliminate detailed operating conditions, and obtain a clean ultra-high vacuum. Furthermore, by configuring the rotor drive shaft of each pump element as one axis, there is an effect that only one drive source is required.
第１図は従来の真空ポンプ装置を示す断面図、第２図は
本発明の真空ポンプ装置の一実施例を示す断面図、第３
図は本発明の他の実施例を示す断面図である。
２１・・・ケーシング、２２・・・吸込口、２３・・・
吐出口、２４・・・第１ポンプ要素（ターボ分子ポンプ
）、２５・・・第２ポンプ要素（長−ルポンプ）、２６
・・・第３ポンプ要素（容積形圧縮ポンプ）、２７・・
・ロータ、２８・・・動翼、２９・・・静翼、３ｏ・・
・ねじ付外筒、３１・・・ロータ、３２・・・雄ロータ
、３３・・・雌ロータ、３４・・ロータ駆動軸。
代理人 弁理士 高橋明夫
＄ｒ 口
？−
Ａ
茅 ２ｍ
第 ３１２］FIG. 1 is a sectional view showing a conventional vacuum pump device, FIG. 2 is a sectional view showing an embodiment of the vacuum pump device of the present invention, and FIG.
The figure is a sectional view showing another embodiment of the present invention. 21...Casing, 22...Suction port, 23...
Discharge port, 24... first pump element (turbo molecular pump), 25... second pump element (long-loop pump), 26
...Third pump element (positive displacement compression pump), 27...
・Rotor, 28... Moving blade, 29... Stationary blade, 3o...
- Threaded outer cylinder, 31... Rotor, 32... Male rotor, 33... Female rotor, 34... Rotor drive shaft. Agent Patent Attorney Akio Takahashi $r Mouth? - A Kaya 2m No. 312]
Claims (1)
、第１ポンプ要素、第２ポンプ要素および第３ポンプ要
素を設け、第１ポンプ要素を吸込口寄りに、第２ポンプ
要素°を第１ポンプ要素の吐出側に、第３ポンプ要素を
第２ポンプ要素の吐出側にそれぞれ配置し、前記第１ポ
ンプ要素を、ロータの外周に設けた動翼とケーシングに
設けた静翼とを交互に配置して成るターボ分子ポンプで
構成し、前記第２ポンプ要素を、ケーシングに設けたね
じ付外筒および該外筒内で回転するロータまたはケーシ
ングに設けた外筒および該外筒内で回転するねじ付ロー
タを備えて成るシールポンプで構成し、前記第３ポンプ
要素を、一対のスクリュウロータを備えて成る容積形圧
縮ポンプで構成し、これら各ポンプのロータ駆動軸を一
軸としたことを特徴とする真空ポンプ装置。A first pump element, a second pump element, and a third pump element are provided in a casing having a suction port on one side and a discharge port on the other side, with the first pump element being closer to the suction port and the second pump element being closer to the suction port. A third pump element is arranged on the discharge side of the first pump element and a third pump element is arranged on the discharge side of the second pump element, and the first pump element is arranged so that the rotor blades provided on the outer periphery of the rotor and the stationary blades provided on the casing are arranged alternately. a turbomolecular pump arranged in wherein the third pump element is a positive displacement compression pump having a pair of screw rotors, and each of these pumps has a single rotor drive shaft. Characteristic vacuum pump equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10051084A JPS60247075A (en) | 1984-05-21 | 1984-05-21 | Vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10051084A JPS60247075A (en) | 1984-05-21 | 1984-05-21 | Vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60247075A true JPS60247075A (en) | 1985-12-06 |
| JPH0419393B2 JPH0419393B2 (en) | 1992-03-30 |
Family
ID=14275943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10051084A Granted JPS60247075A (en) | 1984-05-21 | 1984-05-21 | Vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60247075A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62291479A (en) * | 1986-06-12 | 1987-12-18 | Hitachi Ltd | Vacuum exhaust device |
| JPH01277698A (en) * | 1988-04-30 | 1989-11-08 | Nippon Ferrofluidics Kk | Compound vacuum pump |
| EP1347176A2 (en) * | 2002-03-20 | 2003-09-24 | Kabushiki Kaisha Toyota Jidoshokki | Vacuum pump |
| JP2005147151A (en) * | 2003-11-18 | 2005-06-09 | Varian Spa | Vacuum pump provided with vibration damper |
| EP2644893A3 (en) * | 2012-03-30 | 2017-08-23 | Ebara Corporation | Vacuum evacuation apparatus |
| CN107524579A (en) * | 2017-09-26 | 2017-12-29 | 安徽万瑞冷电科技有限公司 | A kind of cryogenic pump |
| EP4130481A4 (en) * | 2020-03-31 | 2024-04-10 | Edwards Japan Limited | Vacuum pump and vacuum pump piping structure |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6616611B2 (en) * | 2015-07-23 | 2019-12-04 | エドワーズ株式会社 | Exhaust system |
-
1984
- 1984-05-21 JP JP10051084A patent/JPS60247075A/en active Granted
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62291479A (en) * | 1986-06-12 | 1987-12-18 | Hitachi Ltd | Vacuum exhaust device |
| JPH01277698A (en) * | 1988-04-30 | 1989-11-08 | Nippon Ferrofluidics Kk | Compound vacuum pump |
| EP1347176A2 (en) * | 2002-03-20 | 2003-09-24 | Kabushiki Kaisha Toyota Jidoshokki | Vacuum pump |
| EP1347176A3 (en) * | 2002-03-20 | 2003-11-05 | Kabushiki Kaisha Toyota Jidoshokki | Vacuum pump |
| US7140846B2 (en) | 2002-03-20 | 2006-11-28 | Kabushiki Kaisha Toyota Jidoshokki | Vacuum pump having main and sub pumps |
| JP2005147151A (en) * | 2003-11-18 | 2005-06-09 | Varian Spa | Vacuum pump provided with vibration damper |
| EP2644893A3 (en) * | 2012-03-30 | 2017-08-23 | Ebara Corporation | Vacuum evacuation apparatus |
| CN107524579A (en) * | 2017-09-26 | 2017-12-29 | 安徽万瑞冷电科技有限公司 | A kind of cryogenic pump |
| EP4130481A4 (en) * | 2020-03-31 | 2024-04-10 | Edwards Japan Limited | Vacuum pump and vacuum pump piping structure |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0419393B2 (en) | 1992-03-30 |
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