EP2644893A3 - Vacuum evacuation apparatus - Google Patents

Vacuum evacuation apparatus Download PDF

Info

Publication number
EP2644893A3
EP2644893A3 EP13001550.6A EP13001550A EP2644893A3 EP 2644893 A3 EP2644893 A3 EP 2644893A3 EP 13001550 A EP13001550 A EP 13001550A EP 2644893 A3 EP2644893 A3 EP 2644893A3
Authority
EP
European Patent Office
Prior art keywords
vacuum
evacuation apparatus
vacuum evacuation
evacuating
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP13001550.6A
Other languages
German (de)
French (fr)
Other versions
EP2644893A2 (en
Inventor
Hiroyuki Kawasaki
Hiroshi Sobukawa
Atsushi Oyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of EP2644893A2 publication Critical patent/EP2644893A2/en
Publication of EP2644893A3 publication Critical patent/EP2644893A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B25/00—Multi-stage pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

The present invention relates to a vacuum evacuation apparatus which can be mounted in a posture that can freely be selected a vacuum evacuation apparatus for evacuating a container from an atmospheric pressure to a high vacuum or less includes a first vacuum pump for evacuating the container to a high vacuum or less, and a second vacuum pump for evacuating the container from an atmospheric pressure to a medium or low vacuum the first vacuum pump and the second vacuum pump are integrally connected to each other into an integral unit.
EP13001550.6A 2012-03-30 2013-03-26 Vacuum evacuation apparatus Withdrawn EP2644893A3 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012080559A JP6009193B2 (en) 2012-03-30 2012-03-30 Vacuum exhaust device

Publications (2)

Publication Number Publication Date
EP2644893A2 EP2644893A2 (en) 2013-10-02
EP2644893A3 true EP2644893A3 (en) 2017-08-23

Family

ID=48039974

Family Applications (1)

Application Number Title Priority Date Filing Date
EP13001550.6A Withdrawn EP2644893A3 (en) 2012-03-30 2013-03-26 Vacuum evacuation apparatus

Country Status (3)

Country Link
US (1) US20130259712A1 (en)
EP (1) EP2644893A3 (en)
JP (2) JP6009193B2 (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013219464A1 (en) * 2013-09-26 2015-03-26 Inficon Gmbh Evacuation of a foil chamber
KR101630827B1 (en) * 2014-06-27 2016-06-15 (주) 씨엠테크 A vacuum exhaust system of sterilizing apparatus
EP3067567A1 (en) * 2015-03-11 2016-09-14 Pfeiffer Vacuum GmbH Vacuum pump
JP6616611B2 (en) * 2015-07-23 2019-12-04 エドワーズ株式会社 Exhaust system
FR3042325B1 (en) * 2015-10-13 2017-11-17 Ifp Energies Now THERMAL INSULATION DEVICE BETWEEN A TURBINE WHOSE WHEEL IS DRIVEN IN ROTATION BY A HOT FLUID AND AN ELECTRIC GENERATOR WITH A ROTOR FITTED TO THIS WHEEL, IN PARTICULAR FOR A TURBOGENERATOR.
EP3267040B1 (en) * 2016-07-04 2023-12-20 Pfeiffer Vacuum Gmbh Turbomolecular pump
JP6776971B2 (en) * 2017-03-27 2020-10-28 株式会社島津製作所 Vacuum pump and pump-integrated power supply
GB201715151D0 (en) * 2017-09-20 2017-11-01 Edwards Ltd A drag pump and a set of vacuum pumps including a drag pump
FR3076582B1 (en) * 2018-01-09 2020-01-24 Pfeiffer Vacuum DRY TYPE VACUUM PUMP AND METHOD FOR CONTROLLING A SYNCHRONOUS VACUUM PUMP MOTOR
CN108194353B (en) * 2018-02-02 2019-12-13 中山市天元真空设备技术有限公司 Multistage roots dry vacuum pump with independent paired rotor rotating shafts and capable of directly discharging air
GB2577876B (en) * 2018-10-05 2022-02-16 Edwards Ltd Portable vacuum pump assembly and mass spectrometer
JP2021161917A (en) * 2020-03-31 2021-10-11 エドワーズ株式会社 Vacuum pump and piping structure part for vacuum pump
KR102479328B1 (en) * 2020-12-11 2022-12-19 주식회사 듀얼드론텍 A propulsion apparatus and Doron using the same
CN113847244A (en) * 2021-10-14 2021-12-28 四川莱斯特真空科技有限公司 Integrated turbine and screw combined pump

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60247075A (en) * 1984-05-21 1985-12-06 Hitachi Ltd Vacuum pump
EP0340685A2 (en) * 1988-04-30 1989-11-08 Nippon Ferrofluidics Corporation Composite vacuum pump
EP1533530A1 (en) * 2003-11-18 2005-05-25 VARIAN S.p.A. Vacuum pump provided with vibration damper
JP2006037951A (en) * 2004-06-25 2006-02-09 Osaka Vacuum Ltd Heat insulation structure of compound molecular pump
WO2006020473A1 (en) * 2004-08-11 2006-02-23 The Boc Group, Inc. An integrated high vacuum pumping system
US20070020115A1 (en) * 2005-07-01 2007-01-25 The Boc Group, Inc. Integrated pump apparatus for semiconductor processing
US20090047142A1 (en) * 2006-01-31 2009-02-19 Ebara Densan Ltd. Vacuum pump unit

Family Cites Families (24)

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Publication number Priority date Publication date Assignee Title
JPS5752396A (en) * 1980-09-16 1982-03-27 Toshiba Corp Speed control device of induction motor
JPS6022496A (en) * 1983-07-15 1985-02-04 Mayekawa Mfg Co Ltd High efficiency operating speed control system for ac motor
JPS6028298U (en) * 1983-07-30 1985-02-26 株式会社島津製作所 turbo molecular pump
JPS60204997A (en) 1984-03-28 1985-10-16 Osaka Shinku Kiki Seisakusho:Kk Composite vacuum pump
US5219269A (en) * 1988-07-13 1993-06-15 Osaka Vacuum, Ltd. Vacuum pump
JPH0725632Y2 (en) * 1988-09-20 1995-06-07 日本フェローフルイディクス株式会社 Vacuum exhaust system flow rate detector
JP2680156B2 (en) 1990-02-15 1997-11-19 株式会社日立製作所 Vacuum pump
JPH0596580U (en) * 1992-05-29 1993-12-27 三菱重工業株式会社 Anti-vibration device
JP3776467B2 (en) * 1994-06-28 2006-05-17 株式会社日立製作所 Exhaust network
JPH1140094A (en) 1997-07-18 1999-02-12 Hitachi Ltd Exhaust system and exhaust method of vacuum device
IT1297347B1 (en) * 1997-12-24 1999-09-01 Varian Spa VACUUM PUMP.
JP3856576B2 (en) 1998-10-27 2006-12-13 独立行政法人 日本原子力研究開発機構 Fusion reactor exhaust system
JP2000220467A (en) * 1999-01-28 2000-08-08 Tokai Rubber Ind Ltd Low water absorptive and low oil absorptive sound insulating material
JP2002147386A (en) 2000-11-16 2002-05-22 Shimadzu Corp Exhaust device using turbo-molecular pump
JP2002168192A (en) * 2000-12-01 2002-06-14 Seiko Instruments Inc Vacuum pump
JP4147042B2 (en) * 2002-03-12 2008-09-10 エドワーズ株式会社 Vacuum pump
JP2004100594A (en) * 2002-09-10 2004-04-02 Toyota Industries Corp Vacuum pump device
JP2005114083A (en) * 2003-10-09 2005-04-28 Ebara Corp Vibration removing system of vacuum chamber
JP4218756B2 (en) * 2003-10-17 2009-02-04 株式会社荏原製作所 Vacuum exhaust device
JP4543920B2 (en) * 2004-12-22 2010-09-15 株式会社デンソー Waste heat utilization equipment for heat engines
JP4782788B2 (en) * 2005-07-28 2011-09-28 京セラ株式会社 Sample holder, sample adsorption device using the same, and sample processing method using the same
JP5009634B2 (en) * 2006-01-31 2012-08-22 株式会社荏原製作所 Vacuum pump unit
JP2007231938A (en) * 2006-02-06 2007-09-13 Boc Edwards Kk Vacuum device, method of quickly reducing water vapor partial pressure in vacuum device, method of preventing rise of water vapor partial pressure in load lock chamber, and vacuum pump for vacuum device
DE102009037010A1 (en) * 2009-08-11 2011-02-17 Oerlikon Leybold Vacuum Gmbh vacuum pump system

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60247075A (en) * 1984-05-21 1985-12-06 Hitachi Ltd Vacuum pump
EP0340685A2 (en) * 1988-04-30 1989-11-08 Nippon Ferrofluidics Corporation Composite vacuum pump
EP1533530A1 (en) * 2003-11-18 2005-05-25 VARIAN S.p.A. Vacuum pump provided with vibration damper
JP2006037951A (en) * 2004-06-25 2006-02-09 Osaka Vacuum Ltd Heat insulation structure of compound molecular pump
WO2006020473A1 (en) * 2004-08-11 2006-02-23 The Boc Group, Inc. An integrated high vacuum pumping system
US20070020115A1 (en) * 2005-07-01 2007-01-25 The Boc Group, Inc. Integrated pump apparatus for semiconductor processing
US20090047142A1 (en) * 2006-01-31 2009-02-19 Ebara Densan Ltd. Vacuum pump unit

Also Published As

Publication number Publication date
EP2644893A2 (en) 2013-10-02
JP2016205405A (en) 2016-12-08
JP6333908B2 (en) 2018-05-30
US20130259712A1 (en) 2013-10-03
JP6009193B2 (en) 2016-10-19
JP2013209928A (en) 2013-10-10

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