EP2644893A3 - Vacuum evacuation apparatus - Google Patents
Vacuum evacuation apparatus Download PDFInfo
- Publication number
- EP2644893A3 EP2644893A3 EP13001550.6A EP13001550A EP2644893A3 EP 2644893 A3 EP2644893 A3 EP 2644893A3 EP 13001550 A EP13001550 A EP 13001550A EP 2644893 A3 EP2644893 A3 EP 2644893A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- vacuum
- evacuation apparatus
- vacuum evacuation
- evacuating
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B25/00—Multi-stage pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012080559A JP6009193B2 (en) | 2012-03-30 | 2012-03-30 | Vacuum exhaust device |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2644893A2 EP2644893A2 (en) | 2013-10-02 |
EP2644893A3 true EP2644893A3 (en) | 2017-08-23 |
Family
ID=48039974
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP13001550.6A Withdrawn EP2644893A3 (en) | 2012-03-30 | 2013-03-26 | Vacuum evacuation apparatus |
Country Status (3)
Country | Link |
---|---|
US (1) | US20130259712A1 (en) |
EP (1) | EP2644893A3 (en) |
JP (2) | JP6009193B2 (en) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102013219464A1 (en) * | 2013-09-26 | 2015-03-26 | Inficon Gmbh | Evacuation of a foil chamber |
KR101630827B1 (en) * | 2014-06-27 | 2016-06-15 | (주) 씨엠테크 | A vacuum exhaust system of sterilizing apparatus |
EP3067567A1 (en) * | 2015-03-11 | 2016-09-14 | Pfeiffer Vacuum GmbH | Vacuum pump |
JP6616611B2 (en) * | 2015-07-23 | 2019-12-04 | エドワーズ株式会社 | Exhaust system |
FR3042325B1 (en) * | 2015-10-13 | 2017-11-17 | Ifp Energies Now | THERMAL INSULATION DEVICE BETWEEN A TURBINE WHOSE WHEEL IS DRIVEN IN ROTATION BY A HOT FLUID AND AN ELECTRIC GENERATOR WITH A ROTOR FITTED TO THIS WHEEL, IN PARTICULAR FOR A TURBOGENERATOR. |
EP3267040B1 (en) * | 2016-07-04 | 2023-12-20 | Pfeiffer Vacuum Gmbh | Turbomolecular pump |
JP6776971B2 (en) * | 2017-03-27 | 2020-10-28 | 株式会社島津製作所 | Vacuum pump and pump-integrated power supply |
GB201715151D0 (en) * | 2017-09-20 | 2017-11-01 | Edwards Ltd | A drag pump and a set of vacuum pumps including a drag pump |
FR3076582B1 (en) * | 2018-01-09 | 2020-01-24 | Pfeiffer Vacuum | DRY TYPE VACUUM PUMP AND METHOD FOR CONTROLLING A SYNCHRONOUS VACUUM PUMP MOTOR |
CN108194353B (en) * | 2018-02-02 | 2019-12-13 | 中山市天元真空设备技术有限公司 | Multistage roots dry vacuum pump with independent paired rotor rotating shafts and capable of directly discharging air |
GB2577876B (en) * | 2018-10-05 | 2022-02-16 | Edwards Ltd | Portable vacuum pump assembly and mass spectrometer |
JP2021161917A (en) * | 2020-03-31 | 2021-10-11 | エドワーズ株式会社 | Vacuum pump and piping structure part for vacuum pump |
KR102479328B1 (en) * | 2020-12-11 | 2022-12-19 | 주식회사 듀얼드론텍 | A propulsion apparatus and Doron using the same |
CN113847244A (en) * | 2021-10-14 | 2021-12-28 | 四川莱斯特真空科技有限公司 | Integrated turbine and screw combined pump |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60247075A (en) * | 1984-05-21 | 1985-12-06 | Hitachi Ltd | Vacuum pump |
EP0340685A2 (en) * | 1988-04-30 | 1989-11-08 | Nippon Ferrofluidics Corporation | Composite vacuum pump |
EP1533530A1 (en) * | 2003-11-18 | 2005-05-25 | VARIAN S.p.A. | Vacuum pump provided with vibration damper |
JP2006037951A (en) * | 2004-06-25 | 2006-02-09 | Osaka Vacuum Ltd | Heat insulation structure of compound molecular pump |
WO2006020473A1 (en) * | 2004-08-11 | 2006-02-23 | The Boc Group, Inc. | An integrated high vacuum pumping system |
US20070020115A1 (en) * | 2005-07-01 | 2007-01-25 | The Boc Group, Inc. | Integrated pump apparatus for semiconductor processing |
US20090047142A1 (en) * | 2006-01-31 | 2009-02-19 | Ebara Densan Ltd. | Vacuum pump unit |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5752396A (en) * | 1980-09-16 | 1982-03-27 | Toshiba Corp | Speed control device of induction motor |
JPS6022496A (en) * | 1983-07-15 | 1985-02-04 | Mayekawa Mfg Co Ltd | High efficiency operating speed control system for ac motor |
JPS6028298U (en) * | 1983-07-30 | 1985-02-26 | 株式会社島津製作所 | turbo molecular pump |
JPS60204997A (en) | 1984-03-28 | 1985-10-16 | Osaka Shinku Kiki Seisakusho:Kk | Composite vacuum pump |
US5219269A (en) * | 1988-07-13 | 1993-06-15 | Osaka Vacuum, Ltd. | Vacuum pump |
JPH0725632Y2 (en) * | 1988-09-20 | 1995-06-07 | 日本フェローフルイディクス株式会社 | Vacuum exhaust system flow rate detector |
JP2680156B2 (en) | 1990-02-15 | 1997-11-19 | 株式会社日立製作所 | Vacuum pump |
JPH0596580U (en) * | 1992-05-29 | 1993-12-27 | 三菱重工業株式会社 | Anti-vibration device |
JP3776467B2 (en) * | 1994-06-28 | 2006-05-17 | 株式会社日立製作所 | Exhaust network |
JPH1140094A (en) | 1997-07-18 | 1999-02-12 | Hitachi Ltd | Exhaust system and exhaust method of vacuum device |
IT1297347B1 (en) * | 1997-12-24 | 1999-09-01 | Varian Spa | VACUUM PUMP. |
JP3856576B2 (en) | 1998-10-27 | 2006-12-13 | 独立行政法人 日本原子力研究開発機構 | Fusion reactor exhaust system |
JP2000220467A (en) * | 1999-01-28 | 2000-08-08 | Tokai Rubber Ind Ltd | Low water absorptive and low oil absorptive sound insulating material |
JP2002147386A (en) | 2000-11-16 | 2002-05-22 | Shimadzu Corp | Exhaust device using turbo-molecular pump |
JP2002168192A (en) * | 2000-12-01 | 2002-06-14 | Seiko Instruments Inc | Vacuum pump |
JP4147042B2 (en) * | 2002-03-12 | 2008-09-10 | エドワーズ株式会社 | Vacuum pump |
JP2004100594A (en) * | 2002-09-10 | 2004-04-02 | Toyota Industries Corp | Vacuum pump device |
JP2005114083A (en) * | 2003-10-09 | 2005-04-28 | Ebara Corp | Vibration removing system of vacuum chamber |
JP4218756B2 (en) * | 2003-10-17 | 2009-02-04 | 株式会社荏原製作所 | Vacuum exhaust device |
JP4543920B2 (en) * | 2004-12-22 | 2010-09-15 | 株式会社デンソー | Waste heat utilization equipment for heat engines |
JP4782788B2 (en) * | 2005-07-28 | 2011-09-28 | 京セラ株式会社 | Sample holder, sample adsorption device using the same, and sample processing method using the same |
JP5009634B2 (en) * | 2006-01-31 | 2012-08-22 | 株式会社荏原製作所 | Vacuum pump unit |
JP2007231938A (en) * | 2006-02-06 | 2007-09-13 | Boc Edwards Kk | Vacuum device, method of quickly reducing water vapor partial pressure in vacuum device, method of preventing rise of water vapor partial pressure in load lock chamber, and vacuum pump for vacuum device |
DE102009037010A1 (en) * | 2009-08-11 | 2011-02-17 | Oerlikon Leybold Vacuum Gmbh | vacuum pump system |
-
2012
- 2012-03-30 JP JP2012080559A patent/JP6009193B2/en active Active
-
2013
- 2013-03-25 US US13/849,719 patent/US20130259712A1/en not_active Abandoned
- 2013-03-26 EP EP13001550.6A patent/EP2644893A3/en not_active Withdrawn
-
2016
- 2016-09-14 JP JP2016179496A patent/JP6333908B2/en active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60247075A (en) * | 1984-05-21 | 1985-12-06 | Hitachi Ltd | Vacuum pump |
EP0340685A2 (en) * | 1988-04-30 | 1989-11-08 | Nippon Ferrofluidics Corporation | Composite vacuum pump |
EP1533530A1 (en) * | 2003-11-18 | 2005-05-25 | VARIAN S.p.A. | Vacuum pump provided with vibration damper |
JP2006037951A (en) * | 2004-06-25 | 2006-02-09 | Osaka Vacuum Ltd | Heat insulation structure of compound molecular pump |
WO2006020473A1 (en) * | 2004-08-11 | 2006-02-23 | The Boc Group, Inc. | An integrated high vacuum pumping system |
US20070020115A1 (en) * | 2005-07-01 | 2007-01-25 | The Boc Group, Inc. | Integrated pump apparatus for semiconductor processing |
US20090047142A1 (en) * | 2006-01-31 | 2009-02-19 | Ebara Densan Ltd. | Vacuum pump unit |
Also Published As
Publication number | Publication date |
---|---|
EP2644893A2 (en) | 2013-10-02 |
JP2016205405A (en) | 2016-12-08 |
JP6333908B2 (en) | 2018-05-30 |
US20130259712A1 (en) | 2013-10-03 |
JP6009193B2 (en) | 2016-10-19 |
JP2013209928A (en) | 2013-10-10 |
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Legal Events
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PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
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Extension state: BA ME |
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RIC1 | Information provided on ipc code assigned before grant |
Ipc: F04D 25/16 20060101ALI20170719BHEP Ipc: F04C 23/00 20060101AFI20170719BHEP Ipc: F04D 19/04 20060101ALI20170719BHEP |
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17P | Request for examination filed |
Effective date: 20180123 |
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RBV | Designated contracting states (corrected) |
Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR |
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STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN |
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18W | Application withdrawn |
Effective date: 20181030 |