JPS6028298U - turbo molecular pump - Google Patents

turbo molecular pump

Info

Publication number
JPS6028298U
JPS6028298U JP1983119648U JP11964883U JPS6028298U JP S6028298 U JPS6028298 U JP S6028298U JP 1983119648 U JP1983119648 U JP 1983119648U JP 11964883 U JP11964883 U JP 11964883U JP S6028298 U JPS6028298 U JP S6028298U
Authority
JP
Japan
Prior art keywords
casing
molecular pump
intake port
turbo molecular
turbo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1983119648U
Other languages
Japanese (ja)
Other versions
JPS6346717Y2 (en
Inventor
牧本　健一郎
秀人 西川
Original Assignee
株式会社島津製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社島津製作所 filed Critical 株式会社島津製作所
Priority to JP1983119648U priority Critical patent/JPS6028298U/en
Publication of JPS6028298U publication Critical patent/JPS6028298U/en
Application granted granted Critical
Publication of JPS6346717Y2 publication Critical patent/JPS6346717Y2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案の一実施例を示す概略断面図第２図は本
考案の他の実施側番示す部分断面図である。 ５・・・・・・ケーシング、６・・・・・・吸込口、７
・・・・・・取付用フランジ、９．９’・・・・・・ケ
ーシング端部、１０．１０’・・・・・・ケーシング本
体部、１２・・・・・・弾性部材、１３・・・・・・シ
ール手段（Ｏリング）、１６・・・・・・シール手段（
ベローズ）。FIG. 1 is a schematic cross-sectional view showing one embodiment of the present invention. FIG. 2 is a partial cross-sectional view showing another embodiment of the present invention. 5...Casing, 6...Suction port, 7
...Mounting flange, 9.9'...Casing end, 10.10'...Casing main body, 12...Elastic member, 13. ... Sealing means (O-ring), 16 ... Sealing means (
bellows).

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ケーシングの一端に吸気口を開口させ、この吸気口の開
口端外周に取付用フランジを設けたターボ分子ポンプに
おいて、前記取付用フランジを含むケーシング端部をゲ
ージング本体部から分離させ、このケーシング端部とケ
ーシング本体部との間に弾性部材を介設するとともに、
前記ケーシング端部の吸気口をケーシング本体部の吸気
口に気密に接続するためのシール手段を設けたことを特
徴とするターボ分子ポンプ。In a turbo-molecular pump that has an intake port opened at one end of the casing and a mounting flange provided on the outer periphery of the opening end of the intake port, the casing end including the mounting flange is separated from the gauging main body, and the casing end An elastic member is interposed between the and the casing body, and
A turbo-molecular pump characterized in that a sealing means is provided for airtightly connecting the intake port of the casing end to the intake port of the casing main body.
JP1983119648U 1983-07-30 1983-07-30 turbo molecular pump Granted JPS6028298U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1983119648U JPS6028298U (en) 1983-07-30 1983-07-30 turbo molecular pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983119648U JPS6028298U (en) 1983-07-30 1983-07-30 turbo molecular pump

Publications (2)

Publication Number Publication Date
JPS6028298U true JPS6028298U (en) 1985-02-26
JPS6346717Y2 JPS6346717Y2 (en) 1988-12-02

Family

ID=30274509

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983119648U Granted JPS6028298U (en) 1983-07-30 1983-07-30 turbo molecular pump

Country Status (1)

Country Link
JP (1) JPS6028298U (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09168472A (en) * 1995-12-18 1997-06-30 Marubeni Mach Kk Metallic multiple buddhist altar for laying ashes to rest
JP2003519761A (en) * 2000-01-15 2003-06-24 ライボルト ヴァークウム ゲゼルシャフト ミット ベシュレンクテル ハフツング Vacuum pump with vibration damper
JP2005147151A (en) * 2003-11-18 2005-06-09 Varian Spa Vacuum pump provided with vibration damper
JP2013209928A (en) * 2012-03-30 2013-10-10 Ebara Corp Vacuum evacuation device
WO2020195942A1 (en) * 2019-03-26 2020-10-01 エドワーズ株式会社 Vacuum pump, casing, and intake opening flange
JP2020165422A (en) * 2019-03-26 2020-10-08 エドワーズ株式会社 Vacuum pump, casing and suction port flange

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6616611B2 (en) * 2015-07-23 2019-12-04 エドワーズ株式会社 Exhaust system

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09168472A (en) * 1995-12-18 1997-06-30 Marubeni Mach Kk Metallic multiple buddhist altar for laying ashes to rest
JP2003519761A (en) * 2000-01-15 2003-06-24 ライボルト ヴァークウム ゲゼルシャフト ミット ベシュレンクテル ハフツング Vacuum pump with vibration damper
JP2005147151A (en) * 2003-11-18 2005-06-09 Varian Spa Vacuum pump provided with vibration damper
JP2013209928A (en) * 2012-03-30 2013-10-10 Ebara Corp Vacuum evacuation device
WO2020195942A1 (en) * 2019-03-26 2020-10-01 エドワーズ株式会社 Vacuum pump, casing, and intake opening flange
JP2020165422A (en) * 2019-03-26 2020-10-08 エドワーズ株式会社 Vacuum pump, casing and suction port flange

Also Published As

Publication number Publication date
JPS6346717Y2 (en) 1988-12-02

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