IT1297347B1 - VACUUM PUMP. - Google Patents

VACUUM PUMP.

Info

Publication number
IT1297347B1
IT1297347B1 IT97TO001139A ITTO971139A IT1297347B1 IT 1297347 B1 IT1297347 B1 IT 1297347B1 IT 97TO001139 A IT97TO001139 A IT 97TO001139A IT TO971139 A ITTO971139 A IT TO971139A IT 1297347 B1 IT1297347 B1 IT 1297347B1
Authority
IT
Italy
Prior art keywords
vacuum pump
vacuum
pump
Prior art date
Application number
IT97TO001139A
Other languages
Italian (it)
Inventor
Simon Mauro De
Vincenzo Spaziani
Original Assignee
Varian Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Spa filed Critical Varian Spa
Priority to IT97TO001139A priority Critical patent/IT1297347B1/en
Priority to EP98111113A priority patent/EP0931939B1/en
Priority to DE69815806T priority patent/DE69815806T2/en
Publication of ITTO971139A1 publication Critical patent/ITTO971139A1/en
Application granted granted Critical
Publication of IT1297347B1 publication Critical patent/IT1297347B1/en
Priority to HK00100211A priority patent/HK1021401A1/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B27/00—Multi-cylinder pumps specially adapted for elastic fluids and characterised by number or arrangement of cylinders
    • F04B27/04—Multi-cylinder pumps specially adapted for elastic fluids and characterised by number or arrangement of cylinders having cylinders in star- or fan-arrangement
    • F04B27/053—Multi-cylinder pumps specially adapted for elastic fluids and characterised by number or arrangement of cylinders having cylinders in star- or fan-arrangement with an actuating element at the inner ends of the cylinders
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
IT97TO001139A 1997-12-24 1997-12-24 VACUUM PUMP. IT1297347B1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
IT97TO001139A IT1297347B1 (en) 1997-12-24 1997-12-24 VACUUM PUMP.
EP98111113A EP0931939B1 (en) 1997-12-24 1998-06-17 Vacuum pump
DE69815806T DE69815806T2 (en) 1997-12-24 1998-06-17 vacuum pump
HK00100211A HK1021401A1 (en) 1997-12-24 2000-01-13 Vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT97TO001139A IT1297347B1 (en) 1997-12-24 1997-12-24 VACUUM PUMP.

Publications (2)

Publication Number Publication Date
ITTO971139A1 ITTO971139A1 (en) 1999-06-24
IT1297347B1 true IT1297347B1 (en) 1999-09-01

Family

ID=11416233

Family Applications (1)

Application Number Title Priority Date Filing Date
IT97TO001139A IT1297347B1 (en) 1997-12-24 1997-12-24 VACUUM PUMP.

Country Status (4)

Country Link
EP (1) EP0931939B1 (en)
DE (1) DE69815806T2 (en)
HK (1) HK1021401A1 (en)
IT (1) IT1297347B1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6248157B1 (en) * 1999-08-20 2001-06-19 Systec Inc. Vacuum degassing
FR2822200B1 (en) * 2001-03-19 2003-09-26 Cit Alcatel PUMPING SYSTEM FOR LOW THERMAL CONDUCTIVITY GASES
JP4250353B2 (en) * 2001-06-22 2009-04-08 エドワーズ株式会社 Vacuum pump
CN101852199B (en) * 2009-03-31 2011-11-09 储继国 Composite vacuum pump
JP6009193B2 (en) * 2012-03-30 2016-10-19 株式会社荏原製作所 Vacuum exhaust device
DE102013213257A1 (en) * 2013-07-05 2015-01-08 Pfeiffer Vacuum Gmbh Diaphragm vacuum pump
EP3267040B1 (en) 2016-07-04 2023-12-20 Pfeiffer Vacuum Gmbh Turbomolecular pump

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0784871B2 (en) 1986-06-12 1995-09-13 株式会社日立製作所 Vacuum exhaust device
DE3826710A1 (en) * 1987-08-07 1989-02-16 Japan Atomic Energy Res Inst Vacuum pump
JPH01277698A (en) * 1988-04-30 1989-11-08 Nippon Ferrofluidics Kk Compound vacuum pump
EP0344345B1 (en) * 1988-06-01 1991-09-18 Leybold Aktiengesellschaft Pumpsystem for a leak detecting apparatus
FR2640697B1 (en) 1988-12-16 1993-01-08 Cit Alcatel PUMPING ASSEMBLY FOR PROVIDING HIGH VACUUMS
FR2656658B1 (en) * 1989-12-28 1993-01-29 Cit Alcatel MIXED TURBOMOLECULAR VACUUM PUMP, WITH TWO ROTATION SHAFTS AND WITH ATMOSPHERIC PRESSURE DISCHARGE.
IT1241431B (en) * 1990-03-09 1994-01-17 Varian Spa PERFECTED TURBOMOLECULAR PUMP.
DE9305554U1 (en) * 1993-04-15 1993-06-17 KNF-Neuberger GmbH, 7800 Freiburg Double displacement pump

Also Published As

Publication number Publication date
EP0931939A2 (en) 1999-07-28
HK1021401A1 (en) 2000-06-09
ITTO971139A1 (en) 1999-06-24
EP0931939A3 (en) 2000-08-30
DE69815806D1 (en) 2003-07-31
DE69815806T2 (en) 2004-05-19
EP0931939B1 (en) 2003-06-25

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Legal Events

Date Code Title Description
0001 Granted