CN101852199B - Composite vacuum pump - Google Patents
Composite vacuum pump Download PDFInfo
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- CN101852199B CN101852199B CN2009101062714A CN200910106271A CN101852199B CN 101852199 B CN101852199 B CN 101852199B CN 2009101062714 A CN2009101062714 A CN 2009101062714A CN 200910106271 A CN200910106271 A CN 200910106271A CN 101852199 B CN101852199 B CN 101852199B
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- pump
- quiet
- suction port
- vacuum pump
- composite vacuum
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Abstract
The invention belongs to the field of vacuum-pumping equipment and provides a composite vacuum pump which comprises a pump shell, a gas inlet and a gas outlet, wherein the gas inlet and the gas outlet are formed on the pump shell; a plurality of levels of molecular drag pumps and Roots pumps, which are installed coaxially, are arranged in the pump shell; the molecular drag pumps are combined in parallel or series and are arranged at the part near the gas inlet; the Roots pumps are combined in series and are arranged at the part near the gas outlet; and the molecular drag pumps and the Roots pumps are combined in series. The composite vacuum pump provided by the invention has the advantages of high pumping speed, high ultimate vacuum, low energy consumption, small size and light weight and can also acquire clean medium vacuum and high vacuum.
Description
Technical field
The present invention relates to the vacuum equipment field, a kind of dry type composite vacuum pump that is combined by Roots pump and molecular drag pump is provided.
Background technique
Existing discharging directly into atmosphere multi-stage roots pump can obtain the middle vacuum of cleaning, has obtained extensive use in industries such as microelectronic and photo-electrons.Yet this pump energy consumption height, the pump housing are huge, heavy, and limiting vacuum only can reach in the vacuum section.For example: the 30L/s Roots pump of 5 grades of series connection, limiting vacuum only 10
-1Pa, volume reaches 800 * 400 * 600, and weight surpasses 200kg.
Summary of the invention
The objective of the invention is to overcome the deficiencies in the prior art, provide that a kind of energy consumption is low, volume is little, in light weight, composite vacuum pump that limiting vacuum is high.
The present invention realizes like this, a kind of composite vacuum pump, comprise pump case, be opened in suction port and relief opening on the described pump case, be provided with molecular drag pump and Roots pump that multi-stage coaxial is installed in the described pump case, described molecular drag pump adopts parallel connection or tandem compound, places near described suction port place; Described Roots pump adopts tandem compound, places near described exhaust ports; Described molecular drag pump and Roots pump adopt tandem compound.
Particularly, described molecular drag pump is the Siegbahn molecular pump with two pulling faces, and described Siegbahn molecular pump comprises pump case, quietly takes turns, motive sealing, spacer ring, driving wheel, rotor and axle.
Preferably, described Siegbahn molecular pump is used for vertical composite vacuum pump; The cross section of described quiet spiral blade of taking turns is a cross, and the space between per two adjacent described blades forms the groove of bleeding, and the bottom land middle part of the described groove of bleeding is provided with opening; Described bottom land is bigger near described quiet opening rate of taking turns inside line, and is less near described quiet opening rate of taking turns the outside; Described quiet the wheel adopted only single or many parallel connections are combined into quiet wheels; Described quiet take turns or a side of quiet wheels is provided with motive sealing; Describedly quietly take turns or quiet wheels stationary seal side, be provided with the axial admission mouth near the periphery; The driving wheel inboard of described molecular pump by of described axial admission mouth, is equipped with relief opening except that.
Preferably, described molecular pump is used for horizontal composite vacuum pump; The cross section of described quiet spiral blade of taking turns is a cross, and the space between per two adjacent described blades forms the groove of bleeding, and the bottom land middle part of the described groove of bleeding is provided with opening; Described bottom land is bigger near described quiet opening rate of taking turns inside line, and is less near described quiet opening rate of taking turns the outside; Described quiet take turns adopt only single or many be installed in parallel and be quiet wheels; Described quiet take turns or the both sides of quiet wheels are respectively equipped with motive sealing; Described quiet take turns or the periphery of quiet wheels is provided with the radial air inlet mouth; Described pump case and radial air inlet mouth corresponding position are established gas channel; Relief opening is all established in described driving wheel inboard.
Particularly, described molecular drag pump is the Gaede molecular pump with two or more pulling faces, and described Gaede molecular pump comprises pump case, quietly takes turns, spacer ring, driving wheel, rotor and axle.
Preferably, described molecular pump quiet taken turns by groove top, motive sealing, bleed groove and bottom land and formed overall structure; The both sides of described motive sealing are respectively equipped with suction port and relief opening, and described suction port and relief opening lay respectively on described bottom land and the groove top; The cross section of described bottom land is a T shape, the stiffening ring of the described motive sealing of double as; The described groove of bleeding is adopting the inclination grooved near suction port and relief opening position; The groove tip cutting of the described groove of bleeding is gone in the described driving wheel.
Preferably, the quiet wheel by some motive sealings, groove top of described molecular pump formed overall structure; Described motive sealing both sides are respectively equipped with suction port and relief opening; Described suction port and relief opening all are positioned on the described groove top; Described quiet the wheel is installed between two driving wheels, described groove top and the space formation between two driving wheels groove of bleeding; The described groove of bleeding adopts the inclination grooved at the position near suction port and relief opening; Described motive sealing inboard is provided with stiffening ring.
Particularly, described Roots pump comprises pump case, rotor and rotating shaft, offers suction port and relief opening on the described pump case, and the gap between described rotor and the described pump case forms buffer space.
More specifically, the arc surface concentric with described rotating shaft adopted at the top of described rotor, and the pairing central angle of the arc length of described arc surface is 5 ° to 10 °; The arc surface of described rotor bottom and the arc surface of another rotor top are complementary.
Preferably, the rotor of described Roots pump adopts trilobed structure, and reduces the width of described suction port and relief opening, the fit circular arc face between described pump case inwall and the rotor with respect to the center of circle subtended angle of rotating shaft greater than 120 °.
Preferably, the most close described vacuum pump suction port place is a described Siegbahn molecular pump in parallel, is the described Siegbahn molecular pump of series connection subsequently, is the Gaede molecular pump of series connection at last.
Preferably, the most close suction port place sets up the turbomolecular pump of some grades of series connection.
Compared with the prior art, the advantage of composite vacuum pump provided by the present invention is as follows:
A. the limiting vacuum of this composite vacuum pump increases substantially, and can enter the high vacuum section;
B. this composite vacuum pump can obtain the very middle and high vacuum of cleaning;
C. the energy consumption of this composite vacuum pump is low;
D. the pumping speed of this composite vacuum pump is big, size is little, in light weight.
Description of drawings
The schematic representation of the vertical Siegbahn molecular pump that Fig. 1 a is provided for the embodiment of the invention one;
The quiet schematic representation of taking turns that Fig. 1 b is provided for the embodiment of the invention one;
Fig. 1 c is the left view of Fig. 1 b;
The schematic representation of the horizontal Siegbahn molecular pump that Fig. 2 a is provided for the embodiment of the invention two;
The quiet schematic representation of taking turns that Fig. 2 b is provided for the embodiment of the invention two;
Fig. 2 c is the left view of Fig. 2 b;
The schematic representation of the A type Gaede molecular pump that Fig. 3 a is provided for the embodiment of the invention three;
The quiet schematic representation of taking turns that Fig. 3 b is provided for the embodiment of the invention three;
Fig. 3 c is the left view of Fig. 3 b;
The schematic representation of the Type B Gaede molecular pump that Fig. 4 a is provided for the embodiment of the invention four;
The quiet schematic representation of taking turns that Fig. 4 b is provided for the embodiment of the invention four;
Fig. 4 c is the left view of Fig. 4 b;
Fig. 5 is the schematic representation of low leakage Roots pump provided by the present invention;
Fig. 6 is provided by the present invention 1
#The schematic representation of composite vacuum pump.
Embodiment
In order to make purpose of the present invention, technological scheme and advantage clearer, below in conjunction with drawings and Examples, the present invention is described in more detail.Should be appreciated that specific embodiment described herein only in order to explanation the present invention, and be not used in qualification the present invention.
The composite vacuum pump that the embodiment of the invention provided, comprise a pump case, be opened in suction port and air outlet on the described pump case, be provided with the Roots pump of plural serial stage in the described pump case, and some molecular drag pumps of coaxial mounted, parallel connection or tandem compound, described molecular drag pump is near described suction port setting, described Roots pump is near described relief opening setting, described Roots pump and molecular drag pump tandem compound.
The composite vacuum pump that the embodiment of the invention provided, the optimal drive mode adopts frequency control of motor speed.
Embodiment one: vertical Siegbahn molecular pump
Shown in Fig. 1 a, 1b and 1c, this vertical Siegbahn molecular pump comprises pump case 17, quietly takes turns 11, driving wheel 12, motive sealing 18, rotor 13, rotating shaft 14 and spacer ring 110.
Describedly quietly take turns 11, motive sealing 18 and spacer ring 110 be fixedly arranged on the described pump case 17, described driving wheel 12 is fixedly arranged on the rotor 13, is provided with axial admission mouth 16 between described driving wheel 12 and the spacer ring 110.
Particularly, describedly quietly take turns 11 and be provided with some spiral blades 15 (in the present embodiment being 6), the cross section of described blade 15 is a cross, and the space between the per two adjacent blades 15 forms the groove 111 of bleeding, and opening is left at the bottom land middle part of the described groove 111 of bleeding; Describedly quietly take turns 11 and adopt only single or many combinations in parallel are quiet wheels; Described quiet take turns 11 or a side of quiet wheels be provided with motive sealing 18; Describedly quietly take turns 11 or quiet wheels stationary seal 18 sides, be provided with axial admission mouth 16 near the periphery; Driving wheel 12 inboards of described molecular pump by of described axial admission mouth 16, are equipped with relief opening 19 except that.
When rotor 13 was pressed among Fig. 1 c direction high speed rotating shown in the arrow, gas entered the described groove 111 of bleeding by described suction port 16, discharged through described relief opening 19 then; Change the sense of rotation of rotor 13 or the Hand of spiral of blade 15, can change the direction of bleeding.
Further, better vacuumize effect in order to reach, the bottom land of the described groove 111 of bleeding is less near quiet opening rate of taking turns 11 outsides ratio of groove width (the bottom land breach with), and is bigger near described quiet opening rate of taking turns 11 inboards.
Embodiment two: horizontal Siegbahn molecular pump
The basic structure of present embodiment and embodiment one are similar, and shown in Fig. 2 a, 2b and 2c, this horizontal Siegbahn pump comprises pump case 26, quietly takes turns 21, motive sealing 27, spacer ring 29, driving wheel 22, rotor 23 and axle 24.
Describedly quietly take turns 21, motive sealing 27 and spacer ring 29 be fixedly arranged on the pump case 26; Describedly quietly take turns 21 and adopt only single or many (shown in Fig. 2 being 2) parallel connections are combined into quiet wheels; Described quiet take turns 21 or the both sides of quiet wheels be respectively equipped with motive sealing 27; Described quiet take turns 21 or the periphery of quiet wheels on offer radially suction port 211, gas channel 212 is offered at described pump case 26 and described suction port 211 corresponding positions; Described driving wheel 22 is fixedly arranged on the rotor 23; The inboard of described driving wheel 22 is equipped with relief opening 28.
When rotor 23 was pressed among Fig. 2 c direction high speed rotating shown in the arrow, gas after the connection pore 212 on the pump case 26, suction port 211 enter the groove 210 of bleeding, was discharged by relief opening 28 earlier then, constitutes a kind of horizontal Siegbahn molecular pump.Change the sense of rotation of rotor 23 or quietly take turns 21 and the Hand of spiral of motive sealing 27, can change the direction of bleeding.
Further, better vacuumize effect in order to reach, less near described quiet bottom land opening rate of taking turns 21 outsides, bigger near described quiet bottom land opening rate of taking turns 21 inboards.
Embodiment three, A type Gaede molecular drag pump
Present embodiment shown in Fig. 3 a, 3b and 3c, this A type Gaede molecular pump by pump case 37, quietly take turns 31, driving wheel 32, driving wheel 311, rotor 34, rotating shaft 35 and spacer ring 38 form.
Describedly quietly take turns 31, spacer ring 38 is fixedly arranged on the described pump case 37, described driving wheel 32 and driving wheel 311 are fixedly arranged on the rotor 34, described driving wheel 32 inboards are provided with gas channel 36.
Particularly, describedly quietly take turns 31 and forms the formation overall structure by bleed groove 33 and bottom land 310 of groove top 39, some (shown in the figure being 2) motive sealings 314.
The both sides of described motive sealing 314 are provided with suction port 312 and relief opening 313; Described suction port 312 and relief opening 313 lay respectively on bottom land 310 and the groove top 39; The cross section of described bottom land 310 is a T shape, and described groove top 39 can be inserted in the driving wheel 32, reduces and leaks; The stiffening ring of described bottom land 310 double as motive sealings 314 is to improve the intensity of motive sealing 314; The described groove 33 of bleeding increases compressed capability adopting the inclination grooved near described suction port 312 and relief opening 313 places.
In the present embodiment, described motive sealing 314 is two, describedly quietly takes turns 31 and is installed between driving wheel 32 and the driving wheel 311, forms the unit of bleeding of two parallel connections.
When rotor 34 was pressed among Fig. 3 c direction high speed rotating shown in the arrow, gas entered the groove 33 of bleeding via the gas channel on the driving wheel 32 36, suction port 312, was discharged by relief opening 313 then; Change the sense of rotation of rotor 34, can change the direction of bleeding.
Embodiment four, Type B Gaede molecular pump
Present embodiment shown in Fig. 4 a, 4b and 4c, this Type B Gaede molecular pump by pump case 44, quietly take turns 41, spacer ring 45, driving wheel 48, rotor 42 and rotating shaft 43 form.Describedly quietly take turns 41, spacer ring 45 is fixedly arranged on the described pump case 44, described driving wheel 48 is fixedly arranged on the rotor 42.
Particularly, describedly quietly take turns 41 and forms the formation overall structure by groove top 49, some (shown in the figure being 2) motive sealings 410 and stiffening ring 46.
The both sides of described motive sealing 410 are respectively equipped with suction port 411 and relief opening 412, and described suction port 411 and relief opening 412 all are located on the described groove top 49; Described stiffening ring 46 is used to increase the mechanical strength of motive sealing 410, can certainly be without stiffening ring 46.
In the present embodiment, described motive sealing 410 is 2, describedly quietly takes turns 41 and is installed between two driving wheels 48; Space between 49 and two driving wheels 48 in described groove top constitutes the groove 47 of bleeding, and forms the unit of bleeding of 2 parallel connections; Described groove top 49 can be inserted in the driving wheel 48, leaks to reduce.
When rotor 42 was pressed among Fig. 4 c direction high speed rotating shown in the arrow, gas was taken out to relief opening 412 through the groove 47 of bleeding by suction port 411; Change the sense of rotation of rotor 42, can change the direction of bleeding.
The described groove 47 of bleeding adopts the inclination grooved at the position near suction port 411 and relief opening 412, to increase compressed capability.
Embodiment five, the low Roots pump that leaks
Present embodiment as shown in Figure 5, should lowly leak Roots pump and comprise pump case 51, rotor 52 and rotor 53, rotating shaft 54 and rotating shaft 55, offer suction port 56 and relief opening 57 on the described pump case 51, the gap between described rotor 52 and rotor 53 and the described pump case 51 forms buffer space 58.
Particularly, the arc surface concentric with described rotating shaft 54 and rotating shaft 55 adopted at the top of described rotor 52 and rotor 53 respectively, the pairing central angle of the optimum length of this arc surface is 5 °～10 °, to increase the length of seal clearance between rotor 52 and rotor 53 and described pump case 51 inwalls; The bottom arc surface and the top arc surface of described rotor 52 and rotor 53 are complementary, to reduce gas leakage.
Particularly, described rotor 52 and rotor 53 adopt trilobed structure, and reduce the suction port 56 of described pump case 51 and the width of relief opening 57, make the inwall of pump case 51 and the fit circular arc face between rotor 52 and the rotor 53 with respect to the center of circle subtended angle of rotating shaft 54 and rotating shaft 55 greater than 120 °, thereby make and have a buffer space between suction port 56 and the relief opening 57 at any time at least, to reduce the leakage between pump case 51 and rotor 52 and the rotor 53, improve the compression ratio of Roots pump when High Voltage moves.
Embodiment six: the 1# composite vacuum pump
Should embodiment by vertical Siegbahn molecular pump, A type Gaede molecular pump, Type B Gaede molecular pump, and multi-stage roots pump combination constitutes a composite vacuum pump.
Particularly, as shown in Figure 6, this composite vacuum pump is made up of the Roots pump 69 of pump case 612, motor 611, coaxial mounted motive sealing 62, vertical Siegbahn molecular pump 63, vertical Siegbahn molecular pump 64 and vertical Siegbahn molecular pump 65, motive sealing 66, A type Gaede molecular pump 67, Type B Gaede molecular pump 68 and plural serial stage; Described pump case 612 is provided with suction port 61 and relief opening 610.
The Placement of above-mentioned pumps at different levels is as follows: the most close described pumping hole 61 places are provided with the Siegbahn molecular pump 63 and the Siegbahn molecular pump 64 of 2 grades of parallel connections; Then, connect successively 65,1 grade of A type Gaede of 1 grade of Siegbahn molecular pump molecular pump 67 and 1 grade of Type B Gaede molecular pump 68; At last, connect, constitute a composite vacuum pump with multi-stage roots pump 69.
Embodiment seven: 2
#Composite vacuum pump
The structure of present embodiment and embodiment six are similar, and its difference is: near setting up the turbomolecular pump of some grades of series connection in the suction port place, to increase the pumping speed of high vacuum section; Plural parallel stage Siegbahn molecular pump following closely makes outside air inlet into, and corresponding motive sealing moves to the below of described Siegbahn molecular pump in parallel; Connect with other molecular pumps subsequently again.
In addition, embodiment six and embodiment seven also can cancel Roots pump, constitute the vertical composite molecular pump of a function admirable.
In sum, compared with the prior art, the advantage of composite vacuum pump provided by the present invention is as follows:
A. the limiting vacuum of this composite vacuum pump increases substantially, and can enter the high vacuum section;
B. this composite vacuum pump can obtain the very middle and high vacuum of cleaning;
C. the energy consumption of this composite vacuum pump is low;
D. the pumping speed of this composite vacuum pump is big, size is little, in light weight.
The above only is preferred embodiment of the present invention, not in order to restriction the present invention, all any modifications of being done within the spirit and principles in the present invention, is equal to and replaces and improvement etc., all should be included within protection scope of the present invention.
Claims (13)
1. composite vacuum pump, comprise pump case, be opened in suction port and relief opening on the described pump case, be provided with molecular drag pump and Roots pump that multi-stage coaxial is installed in the described pump case, it is characterized in that: described molecular drag pump adopts parallel connection or tandem compound, places near described suction port place; Described Roots pump adopts tandem compound, places near described exhaust ports; Described molecular drag pump and Roots pump adopt tandem compound.
2. composite vacuum pump according to claim 1 is characterized in that: described molecular drag pump is the Siegbahn molecular pump with two pulling faces, and described Siegbahn molecular pump comprises pump case, quietly takes turns, motive sealing, spacer ring, driving wheel, rotor and axle.
3. composite vacuum pump according to claim 2 is characterized in that: described Siegbahn molecular pump is used for vertical composite vacuum pump; The cross section of described quiet spiral blade of taking turns is a cross, and the space between per two adjacent described blades forms the groove of bleeding, and the bottom land middle part of the described groove of bleeding is provided with opening; Described bottom land is bigger near described quiet opening rate of taking turns inside line, and is less near described quiet opening rate of taking turns the outside; Described quiet the wheel adopted only single or many parallel connections are combined into quiet wheels; Described quiet take turns or a side of quiet wheels is provided with motive sealing; Describedly quietly take turns or quiet wheels stationary seal side, be provided with the axial admission mouth near the periphery; The driving wheel inboard of described molecular pump by of described axial admission mouth, is equipped with relief opening except that.
4. composite vacuum pump according to claim 2 is characterized in that: described molecular pump is used for horizontal composite vacuum pump; The cross section of described quiet spiral blade of taking turns is a cross, and the space between per two adjacent described blades forms the groove of bleeding, and the bottom land middle part of the described groove of bleeding is provided with opening; Described bottom land is bigger near described quiet opening rate of taking turns inside line, and is less near described quiet opening rate of taking turns the outside; Described quiet the wheel adopts single or many to be installed in parallel into quiet wheels; Described quiet take turns or the both sides of quiet wheels are respectively equipped with motive sealing; Described quiet take turns or the periphery of quiet wheels is provided with the radial air inlet mouth; Described pump case and radial air inlet mouth corresponding position are established gas channel; Relief opening is all established in described driving wheel inboard.
5. composite vacuum pump according to claim 1 is characterized in that: described molecular drag pump is the Gaede molecular pump with two or more pulling faces, and described Gaede molecular pump comprises pump case, quietly takes turns, spacer ring, driving wheel, rotor and axle.
6. composite vacuum pump according to claim 5 is characterized in that: described molecular pump quiet taken turns by groove top, motive sealing, bleed groove and bottom land and formed overall structure; The both sides of described motive sealing are respectively equipped with suction port and relief opening, and described suction port and relief opening lay respectively on described bottom land and the groove top; The cross section of described bottom land is a T shape, the stiffening ring of the described motive sealing of double as; The described groove of bleeding is adopting the inclination grooved near suction port and relief opening position.
7. composite vacuum pump according to claim 5 is characterized in that: the quiet wheel by some motive sealings, groove top of described molecular pump formed overall structure; Described motive sealing both sides are respectively equipped with suction port and relief opening; Described suction port and relief opening all are positioned on the described groove top; Described quiet the wheel is installed between two driving wheels, described groove top and the space formation between two driving wheels groove of bleeding; The described groove of bleeding adopts the inclination grooved at the position near suction port and relief opening; Described motive sealing inboard is provided with stiffening ring.
8. composite vacuum pump according to claim 1 is characterized in that: described Roots pump comprises pump case, rotor and rotating shaft, offers suction port and relief opening on the described pump case, and the gap between described rotor and the described pump case forms buffer space.
9. composite vacuum pump according to claim 8 is characterized in that: the arc surface concentric with described rotating shaft adopted at the top of described rotor, and the pairing central angle of the arc length of described arc surface is 5 ° to 10 °; The arc surface of described rotor bottom and the arc surface of another rotor top are complementary.
10. composite vacuum pump according to claim 8, it is characterized in that: the rotor of described Roots pump adopts trilobed structure, and reduce the width of described suction port and relief opening, the fit circular arc face between described pump case inwall and the rotor with respect to the center of circle subtended angle of rotating shaft greater than 120 °.
11. composite vacuum pump according to claim 2 is characterized in that: the most close described vacuum pump suction port place is described Siegbahn molecular pump in parallel, the described Siegbahn molecular pump for connecting subsequently.
12. composite vacuum pump according to claim 5 is characterized in that: the most close described exhaust ports is the described Gaede molecular pump of series connection.
13. composite vacuum pump according to claim 1 is characterized in that: the most close suction port place sets up the turbomolecular pump of some grades of series connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009101062714A CN101852199B (en) | 2009-03-31 | 2009-03-31 | Composite vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009101062714A CN101852199B (en) | 2009-03-31 | 2009-03-31 | Composite vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101852199A CN101852199A (en) | 2010-10-06 |
| CN101852199B true CN101852199B (en) | 2011-11-09 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2009101062714A Expired - Fee Related CN101852199B (en) | 2009-03-31 | 2009-03-31 | Composite vacuum pump |
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| CN (1) | CN101852199B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT201700075054A1 (en) * | 2017-07-04 | 2017-10-04 | Agilent Tech Inc A Delaware Corporation | Molecular pumping stage for vacuum pump and vacuum pump comprising said molecular pumping stage |
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| CN102465890A (en) * | 2010-11-04 | 2012-05-23 | 致扬科技股份有限公司 | Improved stator structure of turbo molecular pump and manufacture method thereof |
| CN102889219B (en) * | 2011-07-18 | 2016-05-11 | 李晨 | Disk type molecular pump |
| TWI457503B (en) * | 2012-05-23 | 2014-10-21 | Prosol Corp | An improved turbo molecular pump |
| CN103644118B (en) * | 2013-12-17 | 2016-02-03 | 储继国 | Circulating pump in parallel, combination circulating pump, compound circulating pump and unit of bleeding thereof |
| CN104314807A (en) * | 2014-09-30 | 2015-01-28 | 何家密 | Application of rotor with bisecting rotation angle coaxial assembly of multiple cams or gears to achieve synchronous equilibrium |
| CN104806535B (en) * | 2015-03-26 | 2018-10-12 | 储继国 | Compound radial flow pump, combination radial flow pump and extract system |
| CN106762713B (en) * | 2017-03-09 | 2018-12-14 | 苏州摩星真空科技有限公司 | Vertical compound runoff molecular pump |
| CN107143506B (en) * | 2017-07-12 | 2019-05-24 | 东北大学 | A kind of Multi-stage high-vacuum dry pump |
| CN116624360B (en) * | 2023-05-25 | 2024-02-09 | 广东托亚电器科技有限公司 | Low-pressure rapid inflation pumping structure and application thereof in vehicle-mounted inflator pump |
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| IT201700075054A1 (en) * | 2017-07-04 | 2017-10-04 | Agilent Tech Inc A Delaware Corporation | Molecular pumping stage for vacuum pump and vacuum pump comprising said molecular pumping stage |
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| Publication number | Publication date |
|---|---|
| CN101852199A (en) | 2010-10-06 |
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