CN100513798C - Dual-drive molecular pump - Google Patents
Dual-drive molecular pump Download PDFInfo
- Publication number
- CN100513798C CN100513798C CNB2005101001695A CN200510100169A CN100513798C CN 100513798 C CN100513798 C CN 100513798C CN B2005101001695 A CNB2005101001695 A CN B2005101001695A CN 200510100169 A CN200510100169 A CN 200510100169A CN 100513798 C CN100513798 C CN 100513798C
- Authority
- CN
- China
- Prior art keywords
- pump
- quiet
- dual
- molecular pump
- bleeding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000007789 sealing Methods 0.000 claims description 19
- 238000013016 damping Methods 0.000 claims description 18
- 230000009977 dual effect Effects 0.000 claims description 9
- 230000035939 shock Effects 0.000 claims description 3
- 239000002131 composite material Substances 0.000 abstract description 10
- 230000003068 static effect Effects 0.000 abstract 4
- 230000000740 bleeding effect Effects 0.000 description 56
- 150000001875 compounds Chemical class 0.000 description 11
- 238000007906 compression Methods 0.000 description 9
- 238000009434 installation Methods 0.000 description 9
- 230000006835 compression Effects 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 238000005086 pumping Methods 0.000 description 5
- 230000007812 deficiency Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
- F04D29/056—Bearings
- F04D29/059—Roller bearings
Abstract
This invention refers to a double-driven molecular pump with simple structure, easy mass production and raised effective suction speed, which contains spiral static wheel fixed on casing and active seal, active wheel fixed on rotor, said active wheel, static wheel and active seal being alternatively arranged, air inlet and outlet set in pump casing, motor set on one side of rotary axle with sleeved end covers on two ends. Said invention features the several stages of series and parallel static wheel sharing one frame which consists of fixing ring and support column having static wheel blade on fixing surface, also can be coaxially installed with other molecular pump and mechanical vacuum pump to form composite vacuum pump with better performance.
Description
Technical field
The present invention relates to a kind of molecular pump, relate in particular to a kind of dual-drive molecular pump.
Background technique
Chinese patent 87101116.6 discloses a kind of " molecular pump ".Its purpose provides a kind ofly to be had two and drags face and pumping speed is higher, operating pressure, extraction flow can surpass tens times of existing drive molecular pumps runoff type molecule pump, and the composite vacuum pump of this pump and other rotating machinery vacuum pump formation.Its deficiency is:
1, quiet runner of taking turns the medial and lateral gas channel is little, has reduced the effective pumping speed of pump.
2, quiet wheel construction complexity, the inconvenience assembling is difficult to produce in batches.
Summary of the invention
The objective of the invention is to overcome above-mentioned deficiency of the prior art and provide a kind of simple in structure, be easy to produce in batches and can improve the dual-drive molecular pump of the effective pumping speed of pump.
Purpose of the present invention can reach by following measure:
This dual-drive molecular pump, comprising that the helical that is installed on the pump case is quiet takes turns and the motive sealing level, and be installed in epitrochanterian driving wheel, described driving wheel and quiet take turns and the motive sealing level between staggered gap arrangement, on the pump case respectively correspondence offer suction port and relief opening, motor is located at a side of rotating shaft, the two ends of rotating shaft are respectively installed with end cap, its special way is: some grades of parallel connections, series connection quiet taken turns shared same framework, and framework is made of retaining ring and pillar, and the pillar stationary plane is provided with quiet impeller blade; Described quiet blade medial and lateral of taking turns all do not have the retaining ring setting.
Purpose of the present invention can also reach by following measure:
Described quiet impeller blade and pillar are one-body molded; Described quiet blade medial and lateral of taking turns all do not have the retaining ring setting.
Described quiet blade of taking turns and its outside retaining ring are one-body molded; The inboard no retaining ring setting of described quiet blade of taking turns.
Some parallel connections are quiet takes turns a shared framework, and each pillar is provided with a stationary plane, the integral blade that the constant tilt direction is identical.
Some series connection are quiet takes turns a shared framework, and each pillar is provided with two stationary planes, fixes the blade of different true dip directions respectively.
The dual-drive molecular pump of some grades of parallel connections, series connection bleed the unit and some also, the coaxial installation in unit of bleeding of other rotary vacuum pump of series connection, tandem compound, near the suction port of pump is the dual-drive molecular pump of the some parallel connections unit of bleeding, near the relief opening of pump is other rotary vacuum pumps of some series connection unit of bleeding, and constitutes horizontal compound dual-drive molecular pump.
Described coaxial mounted some also, other rotary vacuum pump of series connection selects Siegbahn molecular pump bleed unit, Holweck molecular pump bleed a kind of of unit or combination for use; The pump of the some series connection of relief opening of close pump is selected a kind of of Siegbahn molecular pump, Holweck molecular pump or combination for use.
The dual shock-damping structure that the supporting of rotor is adopted is made up of the second layer damping ring that is provided with between the damping ring, bearing support and the end cap that are provided with between the rotor bearing outside and the bearing support.
Described second layer damping ring is the whole shock ring that is filled between bearing support and the end cap.
Other vacuum pump of unit and some grades of parallel connections or the series connection coaxial installation in unit of bleeding of bleeding of the dual-drive molecular pump of some grades of parallel connections or series connection, near the turbomolecular pump of the series connection of the suction port of pump unit and the dual-drive molecular pump in parallel unit of bleeding of bleeding, select Siegbahn molecular pump bleed unit, Holweck molecular pump bleed a kind of of unit or combination for use near other rotary vacuum pump of the relief opening of pump series connection unit of bleeding, constitute vertical compound dual-drive molecular pump.
The present invention has following advantage compared to existing technology:
1, simple in structure, be convenient to produce in batches.
2, eliminate the bleed-off passage inboard, perhaps eliminated the retaining ring in inboard and the outside simultaneously, increased the inlet/outlet conductance of bleed-off passage, improved the effective pumping speed of pump;
3, can with other molecular pump, the perhaps coaxial installation of rotary machine vacuum pump equal vacuum pump, parallel connection and tandem compound constitute the composite molecular pump of function admirable.
Description of drawings
Fig. 1 is the present invention's two pump structure schematic representation that drag in parallel.
Fig. 2 is that the A-A of Fig. 1 is to sectional view.
Fig. 3 is two structural representation that drags the quiet wheel frame of pump in parallel.
Fig. 4 is that the A-A of Fig. 3 is to sectional view.
Fig. 5 is two structural representation that drags the quiet impeller blade of pump in parallel.
Fig. 6 is that the A-A of Fig. 5 is to sectional view.
Fig. 7 is two quiet structural representation of taking turns of pump that drags in parallel.
Fig. 8 is two drag pump blade, a pillar integral structure schematic representation in parallel.
Fig. 9 is that the A-A of Fig. 8 is to sectional view.
Figure 10 is the two quiet wheel frame schematic representation of pump that drag of series connection.
Figure 11 is that the A-A of Figure 10 is to sectional view.
Figure 12 is the two quiet structural representations of taking turns of pump that drag of series connection.
Figure 13 is the single quiet overall structure schematic representation of taking turns.
Figure 14 is the side view of Figure 13.
Figure 15 is the structural representation that horizontal Composite Double is dragged first embodiment of pump.
Figure 16 is the structural representation that horizontal Composite Double is dragged second embodiment of pump.
Figure 17 is two dual damping device structural representations that drag pump.
The vertical Composite Double of Figure 18 is dragged first embodiment's of pump structural representation.
The vertical Composite Double of Figure 19 is dragged second embodiment's of pump structural representation.
In the accompanying drawing:
1---the quiet wheel, 11---framework;
2---driving wheel, 21---rotating shaft, 22---rotor, 23---spacer ring;
3---pump case, 31---suction port, 32---relief opening, 33---end cap, 34---retaining ring, 35---pillar, 36---blade;
4---gas channel; 5---motor;
6---bearing, 61---damping ring, 62---second layer damping ring, 63---bearing support;
71---the dual-drive molecular pump unit of bleeding, 72---the Siegbahn molecular pump unit of bleeding,
73---, the Holweck molecular pump unit of bleeding, 74---the turbomolecular pump unit of bleeding;
8---the motive sealing level; 9---compression stage.
Embodiment
The present invention is further detailed in conjunction with the accompanying drawings below:
Fig. 1, Fig. 2, Fig. 3, Fig. 4, Fig. 5, Fig. 6, Fig. 7, Fig. 8, Fig. 9 show first embodiment of the present invention.
See also illustrated in figures 1 and 2, this parallel connection dual-drive molecular pump comprises that being installed in quiet on the pump case 3 takes turns 1, and be installed in driving wheel 2 on the rotor 22, described driving wheel 2 and quiet take turns 1 between staggered gap arrangement, the quiet 1 shared same framework 11 of taking turns of its some grades of parallel connections, framework 11 is made of retaining ring 34 and pillar 35, and pillar 35 stationary planes are provided with quiet impeller blade 36.Rotor 22 is provided with six flat disk driving wheels 3, between the adjacent driving wheel 3, is respectively equipped with five and two drags that pump is quiet takes turns 1.The true dip direction of quiet impeller blade 36 is all identical, forms the dual-drive molecular pump of five groups of unit 71 parallel connections of bleeding.Quiet 1 the excircle of taking turns, and gas channel 4 is established in the inboard of driving wheel 3.Quiet 1 tower structure that adopts as shown in Figure 3, Figure 4 of taking turns, it is made up of two retaining rings 34, eight pillars 35.Each pillar 35 is provided with as Fig. 5, integral blade 36 shown in Figure 6, adopts this structure, can increase the conductance of bleed-off passage suction port and relief opening, thereby effectively improve pumping speed.Assemble finish quiet and take turns 1 as shown in Figure 7.
Quiet impeller blade and pillar also can adopt as Fig. 8, blade 36, pillar 35 integrated formed structures shown in Figure 9, directly are fixed on two retaining rings 34.
Using process: when driving wheel 2 shown in Fig. 2 arrow during the direction high speed rotating, pumped gas is evacuated to quiet 1 inboard of taking turns by quiet 1 outside of taking turns.Change the sense of rotation of driving wheel 2, the true dip direction of perhaps quiet impeller blade 36 can change the direction of bleeding.
Figure 10, Figure 11, Figure 12 show second embodiment of the present invention.
See also Figure 10 and shown in Figure 11, this series dual drive molecular pump comprises that being installed in quiet on the pump case 3 takes turns 1 and the motive sealing level, and be installed in epitrochanterian driving wheel, described driving wheel and quiet take turns 1 and the motive sealing level between staggered gap arrangement, the quiet 1 shared same framework 11 of taking turns of its some grades of series connection, framework 11 is made of retaining ring 34 and pillar 35, and pillar 35 stationary planes are provided with the quiet impeller blade 36 of helical.
Present embodiment drags the coaxial installation in pump unit by two-stage is two, and the quiet 1 blade lean direction of taking turns of two-stage unit is opposite, thereby makes the direction of bleeding opposite, and the 1st grade relief opening 32 links to each other with the 2nd grade suction port 31, constitutes the dual-drive molecular pump of connecting and bleeding.The pillar 35 of the quiet wheel frame 11 of present embodiment is provided with two stationary planes, fixes the blade 36 of different true dip directions respectively.The series dual drive molecular pump that assembling is finished is quiet takes turns 1 as shown in figure 12,
Using process: when driving wheel clockwise direction high speed rotating, the pumped gas that the top is quiet in taking turns is taken out rotating shaft place to the inside by the quiet outside of taking turns, and the pumped gas that the below is quiet in taking turns is taken out outside survey by the inboard, constitutes series connection and bleeds.Change the sense of rotation of driving wheel, the true dip direction of perhaps quiet impeller blade 36 can change the direction of bleeding.
Figure 13, Figure 14 show the 3rd embodiment of the present invention.
See also Figure 13, shown in Figure 14, this one-body molded quiet dual-drive molecular pump of taking turns comprises that being installed in quiet on the pump case 3 takes turns 1 and the motive sealing level, and be installed in epitrochanterian driving wheel, described driving wheel and quiet take turns 1 and the motive sealing level between staggered gap arrangement, be that with the foregoing description one and embodiment's two difference every quiet impeller blade 36 is one-body molded with outside retaining ring 34, constitute independent whole.Then, should quietly take turns 1 and be divided into two halves, the inboard no retaining ring setting of blade.Adopt this structure, machining accuracy guarantees easily, installs, debugs more convenient.Owing to quietly take turns 1 inboard no retaining ring setting, therefore, the conductance of the inboard mouth of bleed-off passage is bigger.
Using process as shown in figure 13, when driving wheel clockwise direction high speed rotating, pumped gas is taken out rotating shaft place to the inside by the quiet outside of taking turns.Change the sense of rotation of driving wheel, the true dip direction of perhaps quiet impeller blade 36 can change the direction of bleeding.
Figure 15, Figure 17 show the 4th embodiment of the present invention.
See also Figure 15 and shown in Figure 17, this horizontal Composite Double drags pump to comprise to be installed in quiet on the pump case 3 to take turns 1 and motive sealing level 8, and be installed in driving wheel 2 on the rotor 22, described driving wheel 2 and quiet take turns 1 and motive sealing level 8 between staggered gap arrangement, on the pump case 3 respectively correspondence offer suction port 31 and relief opening 32, motor 5 is located at a side of rotating shaft 21, and the two ends of rotating shaft 21 are respectively installed with end cap 33.
The Siegbahn molecular pump of unit 71 and some parallel connections and the series connection unit 72 coaxial installations of bleeding of bleeding of the dual-drive molecular pump of some grades of parallel connections and series connection, in parallel, tandem compound constitute horizontal compound dual-drive molecular pump.
In the present embodiment, be positioned at the 1st of the middle part level of bleeding and compose in parallel by five groups of dual-drive molecular pumps unit 71 of bleeding.The first grade both sides of bleeding are provided with respectively by the dual-drive molecular pump of the two groups of parallel connections unit 71 of bleeding and form the 2nd level of bleeding, first and second is bled and is provided with bleed grade both sides of motive sealing level 8, the 2 between the level and is provided with by three groups of Siegbahn molecular pumps compression stage 9 that unit 72 is composed in series of bleeding.
Dual shock-damping structure is as shown in figure 17 adopted in the supporting of rotor.Comprise: between bearing 6 outsides and bearing support 63, be provided with a damping ring 61; Circle, perhaps rectangle can be adopted in the cross section of this damping ring 61; Be provided with second layer damping ring 62 between this bearing support 63 and the end cap, second layer damping ring 62 can adopt 2 cross sections for circular, and perhaps the O of rectangle circle also can adopt the whole shock ring that is filled between bearing support 63 and the end cap 33.After adopting dual damping device, the vibration of pump and noise can reduce significantly.
The dual damping device of present embodiment can also be used for horizontal and vertical turbomolecular pump and composite molecular pump, also can be used for other around the property shaft mechanical.
Using process: pumped gas enters from the suction port 31 of pump, is evacuated to inboard rotating shaft place by the 1st level of bleeding, and is divided into left and right two-way then, and is through second bleed level and the compression stage 9, last successively, through gas channel 4, from relief opening 32 discharges.
Figure 16 shows the 5th embodiment of the present invention.
See also shown in Figure 16, this horizontal compound dual-drive molecular pump comprises that being installed in quiet on the pump case 3 takes turns 1 and motive sealing level 8, and be installed in driving wheel 2 on the rotor 22, described driving wheel 2 and quiet take turns 1 and motive sealing level 8 between staggered gap arrangement, on the pump case 3 respectively correspondence offer suction port 31 and relief opening 32, motor 5 is located at a side of rotating shaft 21, and the both sides of rotating shaft 21 are respectively installed with end cap 33.
Some grades of parallel connections, series dual drive molecular pumps unit 71, Siegbahn molecular pump unit 72, the Holweck molecular pump unit 73 of bleeding of bleeding of bleeding, and the coaxial installation of rotating machinery vacuum pump, in parallel, tandem compound.
In the present embodiment, be positioned at the 1st of the middle part level of bleeding and compose in parallel by five groups of dual-drive molecular pumps unit 71 of bleeding.The first grade both sides of bleeding are established second level of bleeding of bleeding by the Siegbahn molecular pump of two groups of parallel connections that unit 72 forms respectively, first and second is bled and is provided with bleed grade both sides of motive sealing level 8, the second between the level and is provided with by the Holweck molecular pumps of the four groups of series connection compression stage 9 that unit 73 forms of bleeding.
Using process: pumped gas enters from the suction port 31 of pump, is evacuated to inboard rotating shaft place by the 1st level of bleeding, and is divided into left and right two-way then, and is through second bleed level and the compression stage 9, last successively, through gas channel 4, from relief opening 32 discharges.
Figure 18 shows the 6th embodiment of the present invention.
See also shown in Figure 180, this vertical compound dual-drive molecular pump is made of rotating shaft 21, pump case 3, rotor 22, turbomolecular pump unit 74, dual-drive molecular pump the bleed relief opening 32 of unit 72, bearing 11, motor 5, gas channel 4, suction port 31, pump of unit 71, motive sealing level 8, Siegbahn molecular pump of bleeding of bleeding, on the pump case 3 respectively correspondence offer suction port 31 and relief opening 32, motor 5 is located at the below of rotating shaft 21, and the below of rotating shaft 21 is set with end cap 33.
Unit 74, dual-drive molecular pump unit 71 and the Siegbahn molecular pump unit 72 coaxial installations of bleeding of bleeding of bleeding of the turbomolecular pump of some grades of parallel connections, series connection, first level of bleeding of bleeding by the turbomolecular pumps of 8 groups of series connection that unit 74 forms is set near the suction port 31 of pump, second level of bleeding that the dual-drive molecular pumps that first bleeds is provided with two groups of series connection below the level bleed that unit 71 forms, be provided with by the Siegbahn molecular pumps of the three groups of series connection compression stage 9 that unit 72 forms of bleeding near the relief opening 32 of pump, constitute vertical compound dual-drive molecular pump with this.
Using process: pumped gas is entered by suction port 31, through first bleed level, second bleed level, compression stage 9 and the gas channel 4, is discharged by relief opening 32 at last successively.
Figure 19 shows the 7th embodiment of the present invention.
See also shown in Figure 19, this vertical Composite Double drags pump by rotating shaft 21, pump case 3, rotor 22, turbomolecular pump driving wheel 2, turbomolecular pump is quiet takes turns 1, drive molecular pump driving wheel 2, two pump unit 71 of bleeding that drag, motive sealing level 8, the Siegbahn molecular pump unit 72 of bleeding, bearing 6, motor 5, gas channel 4, suction port 31, the relief opening 32 of pump constitutes, comprise that being installed in quiet on the pump case 3 takes turns 1 and motive sealing level 8, and be installed in driving wheel 2 on the rotor 22, described driving wheel 2 and quiet take turns 1 and motive sealing level 8 between staggered gap arrangement, motor 5 is located at the below of rotating shaft 21, and the below of rotating shaft 21 is set with end cap 33.
Some grades of parallel connections, the turbomolecular pump unit of bleeding of series connection, the dual-drive molecular pump unit 71 of bleeding, the Holweck molecular pump of unit 72 and the some grades of series connection coaxial installation of unit 73 coaxial installations of bleeding of bleeding of Siegbahn molecular pump, first level of bleeding of bleeding by the turbomolecular pumps of 8 groups of series connection that unit 74 forms is set near the suction port 31 of pump, two drag pump to bleed unit 71 forms second levels of bleeding that first bleeds is provided with two groups of series connection below the level, be provided with by the Holweck molecular pumps of the two groups of series connection compression stage 9 that unit 73 forms of bleeding near the relief opening 32 of pump, constitute vertical compound dual-drive molecular pump with this.
Using process: pumped gas is entered by suction port 31, through first bleed level, second bleed level, compression stage 9 and the gas channel 4, is discharged by relief opening 32 at last successively.
The above only is preferred embodiment of the present invention, and all equalizations of being done according to claim scope of the present invention change and modify, and all should belong to the covering scope of claim of the present invention.
Claims (3)
1, a kind of dual-drive molecular pump, comprising that the helical that is installed on the pump case is quiet takes turns and the motive sealing level, and be installed in epitrochanterian driving wheel, described driving wheel and quiet take turns and the motive sealing level between staggered gap arrangement, on the pump case respectively correspondence offer suction port and relief opening, motor is located at a side of rotating shaft, the two ends of rotating shaft are respectively installed with end cap, it is characterized in that: some grades of parallel connections, series connection quiet taken turns shared same framework, and framework is made of retaining ring and pillar, and the pillar stationary plane is provided with quiet impeller blade; Described quiet blade medial and lateral of taking turns all do not have the retaining ring setting.
2, dual-drive molecular pump according to claim 1 is characterized in that: the dual shock-damping structure that the supporting of rotor is adopted is made up of the second layer damping ring that is provided with between the damping ring, bearing support and the end cap that are provided with between the rotor bearing outside and the bearing support.
3, dual-drive molecular pump according to claim 2 is characterized in that: described second layer damping ring is the whole shock ring that is filled between bearing support and the end cap.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101001695A CN100513798C (en) | 2005-10-10 | 2005-10-10 | Dual-drive molecular pump |
| PCT/CN2006/002466 WO2007041932A1 (en) | 2005-10-10 | 2006-09-20 | Double-drag molecular pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101001695A CN100513798C (en) | 2005-10-10 | 2005-10-10 | Dual-drive molecular pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1743680A CN1743680A (en) | 2006-03-08 |
| CN100513798C true CN100513798C (en) | 2009-07-15 |
Family
ID=36139173
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005101001695A Expired - Fee Related CN100513798C (en) | 2005-10-10 | 2005-10-10 | Dual-drive molecular pump |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN100513798C (en) |
| WO (1) | WO2007041932A1 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101852199B (en) * | 2009-03-31 | 2011-11-09 | 储继国 | Composite vacuum pump |
| GB2474507B (en) * | 2009-10-19 | 2016-01-27 | Edwards Ltd | Vacuum pump |
| CN104806535B (en) * | 2015-03-26 | 2018-10-12 | 储继国 | Compound radial flow pump, combination radial flow pump and extract system |
| GB2585936A (en) * | 2019-07-25 | 2021-01-27 | Edwards Ltd | Drag pump |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1025574C (en) * | 1987-10-10 | 1994-08-03 | 储继国 | Runoff type molecule pump |
| CN1039882A (en) * | 1988-07-26 | 1990-02-21 | 中国科学院北京真空物理实验室 | Dish type molecular pump statical and moving plates matching way and equipment thereof |
| CN1110376A (en) * | 1994-04-16 | 1995-10-18 | 储继国 | Driven molecular pump |
| DE19634095A1 (en) * | 1996-08-23 | 1998-02-26 | Pfeiffer Vacuum Gmbh | Entry stage for a double-flow gas friction pump |
| JP2001132683A (en) * | 1999-10-29 | 2001-05-18 | Applied Materials Inc | Turbo-molecular pump |
-
2005
- 2005-10-10 CN CNB2005101001695A patent/CN100513798C/en not_active Expired - Fee Related
-
2006
- 2006-09-20 WO PCT/CN2006/002466 patent/WO2007041932A1/en active Application Filing
Non-Patent Citations (2)
| Title |
|---|
| 双拖动分子泵. 储继国.真空科学与技术，第16卷第2期. 1996 |
| 双拖动分子泵. 储继国.真空科学与技术，第16卷第2期. 1996 * |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2007041932A1 (en) | 2007-04-19 |
| CN1743680A (en) | 2006-03-08 |
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Effective date of registration: 20170420 Address after: 215400 Taicang Economic Development Zone, Jiangsu, Qingdao West Road, No. 38, No. Patentee after: Suzhou Moxing Vacuum Technology Co Ltd Address before: 518000 Shenzhen, Baoan District, a district of the West Bank of the west shore of the 2 pick on the four floor of the building 7 Patentee before: SHENZHEN MOL VACUUM TECH CO., LTD. |
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