CN103452872A - Atmosphere-impact-resisting molecular pump - Google Patents

Atmosphere-impact-resisting molecular pump Download PDF

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Publication number
CN103452872A
CN103452872A CN2013104262846A CN201310426284A CN103452872A CN 103452872 A CN103452872 A CN 103452872A CN 2013104262846 A CN2013104262846 A CN 2013104262846A CN 201310426284 A CN201310426284 A CN 201310426284A CN 103452872 A CN103452872 A CN 103452872A
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CN
China
Prior art keywords
rotor
chassis
molecular pump
mounting layer
chinese people
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Pending
Application number
CN2013104262846A
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Chinese (zh)
Inventor
董欣
郁晋军
刘敏强
于天化
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BEIJING BEIYI INNOVATION VACUUM TECHNOLOGY Co Ltd
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BEIJING BEIYI INNOVATION VACUUM TECHNOLOGY Co Ltd
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Application filed by BEIJING BEIYI INNOVATION VACUUM TECHNOLOGY Co Ltd filed Critical BEIJING BEIYI INNOVATION VACUUM TECHNOLOGY Co Ltd
Priority to CN2013104262846A priority Critical patent/CN103452872A/en
Publication of CN103452872A publication Critical patent/CN103452872A/en
Priority to PCT/CN2014/076478 priority patent/WO2015039443A1/en
Pending legal-status Critical Current

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Abstract

The invention belongs to the technical field of fluid machinery and particularly relates to an atmosphere-impact-resisting molecular pump which is applicable to semiconductor, energy-saving lamp and solar manufacturing industries to obtain vacuum. The molecular pump comprises a base plate. A motor is mounted in the middle of the base plate. A rotor is fastened to the base plate. A pump shell is fixedly fastened to the rotor and the base through screws. An air inlet is formed at the top of the pump shell. The side, close to the bottom, of the base plate is provided with an exhaust port. The rotor is integrally formed by cylindrical hard aluminum alloy materials. 4-8 spiral exhaust grooves are evenly formed in the rotor from top to bottom. A mounting layer is disposed inside the rotor, a hollow cavity is formed on each of the upper side and the lower side of the mounting layer. A conical through hole is formed at the center of the mounting layer. A motor spindle part extending to the upper portion of the base plate is inserted into the conical through hole and in close fit with the same. The molecular pump is simple in structure, convenient to maintain, easy to machine and high in rotor strength, production cost can be lowered, atmosphere impact resistance is achieved, and the like.

Description

The molecular pump that a kind of Chinese People's Anti-Japanese Military and Political College gas impacts
Technical field
The invention belongs to the fluid machinery technical field, relate in particular to the molecular pump that obtains a kind of Chinese People's Anti-Japanese Military and Political College gas impact of vacuum for semiconductor, Compact Fluorescent Lamp, solar energy manufacturing.
Background technique
At first molecular pump was invented by German's Gaede (wGaede) in 1911.Its principle is to lean on the rigid body surface of high-speed motion to pass to gas molecule with momentum, makes gas molecule produce directional flow on the moving direction on rigid body surface, thereby reaches the purpose of bleeding.1958, the W. Bake of Germany proposed turbomolecular pump with practical value first.Turbomolecular pump is mainly by the pump housing, form with the rotor of blade (being the movable vane wheel), stationary blade wheel and drive system etc.The linear velocity of movable vane wheel outer rim is up to the speed (being generally 150～400 meter per seconds) of heat motion of gas molecules.The compression ratio of single impeller is very little, and turbomolecular pump will be comprised of a plurality of movable vane wheels and stationary blade wheel.Movable vane wheel and stationary blade wheel alternative arrangement.Dynamic and static impeller physical dimension is basic identical, but blade pitch angle is contrary.The motion of dihedral vane makes gas molecule arrive the probability of exhaust side through blade from the air inlet side, more much bigger than the probability that arrives the air inlet side through blade from exhaust side.The impeller continuous rotation, gas molecule just constantly by the air inlet effluent to exhaust side, thereby produce air-extraction function.
The Gaede traction pump has very high compression ratio under Molecular flow, can extract various gas and steam, is particularly suitable for extracting heavier gas, but has the characteristics that pumping speed is little.There are the characteristics of the multistage rotor and stator blade complex process of processing in turbomolecular pump.
Along with development in science and technology, particularly energy-saving and emission-reduction are ordered about down, the fields such as semiconductor, Compact Fluorescent Lamp, solar energy are greatly developed, and molecular pump is used widely in above-mentioned field, existing molecular pump all has complex structure usually, is not easy to safeguard, difficulty of processing is large, manufacture cost is high, not impact-resistant shortcoming; Especially in exhaust process, often running into some damages because being evacuated device, atmosphere directly is filled with molecular pump, cause the cracked situation of molecular pump, although at present to molecular pump rotor improve to some extent (patent No. CN202381395U), but can only, to a certain degree to improve anti-air pressure strong, such as reaching 4000Pa, but can not realize being exposed in atmosphere fully.
Summary of the invention
The object of the invention is to solve the molecular pump complex structure that prior art is manufactured, be not easy to safeguard, difficulty of processing is large, and manufacture cost is high, not impact-resistant problem, and provide simple in structure, and be convenient to safeguard, be easy to processing, manufacture difficulty is little, processing cost is low, shock-resistant, especially can resist atmosphere and directly impact and the molecular pump that a kind of Chinese People's Anti-Japanese Military and Political College gas of broken pump phenomenon impacts can not occur.
The technical solution adopted in the present invention is:
The molecular pump that a kind of Chinese People's Anti-Japanese Military and Political College gas impacts, comprise chassis, be arranged on the motor on chassis, rotor and the fixing button be connected on electric machine main shaft is contained in the pump case on rotor and chassis, axially there is a cylindrical hole at the middle part on described chassis, cylindrical hole is arranged with a circular groove outward, the chassis outer side surface is provided with a relief opening near bottom position, and relief opening is communicated with circular groove; Described motor is arranged in the cylindrical hole on chassis for embedding, and electric machine main shaft extends up to the chassis top outer; Described rotor is cylindrical, its outer surface has 4～8 spirality air vents from top to bottom even, air vent starts to extend vertically from starting point, the degree of depth gradually from depth to shallow, width is narrowed down by wide gradually, until rotor outer surface bottom, internal rotor position placed in the middle is provided with a mounting layer, the mounting layer central position has a through hole, respectively there is a hollow cavity both sides up and down of mounting layer, and described pump case is cylindrical structural, and its bottom is open, interior is circular cylindrical cavity, and top is provided with suction port.
Described rotor is by the machine shaping of cylindrical hard aluminium alloy material monolithic.
The starting point degree of depth of described air vent is 30～60mm, and the tail end degree of depth is 2～5mm, and the intermediate depth gradient is successively decreased.
The curved surface that the cross section external frame of the muscle section that described adjacent two air vents form is approximate trapezoid, the height of described cross section successively decreases and successively decreases gradually with the air vent degree of depth.
Described rotor can extend in the circular groove on chassis, and there are Spielpassung in muscle section and circular groove that the rotor exterior air vent forms, and matching gap is 0.2～0.6mm; Be set with the spiral envelope by a paracentral side in the circular groove of chassis, rotor mounting layer lower floor's cavity inner wall and spiral are sealed up for safekeeping in Spielpassung, and its matching gap is 0.3～0.6mm; The pump case spiral-lock is on rotor, and there is Spielpassung in the muscle section that its cavity inner wall and rotor exterior air vent form, and matching gap is 0.3～0.7mm.
Described internal rotor mounting layer central through bore is taper.
Lower central position, described chassis is equipped with the oil sump seat, in the oil sump seat, is placed with lubricant oil, and the electric machine main shaft lower end extend in the oil sump seat.
The relief opening flange is equipped with in the relief opening outside on described chassis.
Beneficial effect of the present invention is:
1. because prior art is normally installed blade in rotor outer surface processing, the molecular pump that a kind of Chinese People's Anti-Japanese Military and Political College provided by the invention gas impacts, its rotor adopts the monoblock cylindrical material directly at its outer surface, to process the spirality air vent, muscle section and rotor itself that adjacent two air vents form are structure as a whole, this has significantly increased rotor strength as linkage structure blade compared to prior art and rotor, make it have the ability that the opposing atmosphere directly impacts, and the spirality air vent is compared blade and more easily processed, make the manufacture cost of rotor also significantly reduce;
2. the molecular pump that a kind of Chinese People's Anti-Japanese Military and Political College provided by the invention gas impacts, cancelled stator, spacer ring, reduced the complexity of equipment, reduced cost of production, and be convenient to safeguard;
3. the air vent of rotor starts vertically the degree of depth gradually from depth to shallow from starting point, width is narrowed down by wide gradually, until air vent tail end, desirable larger pumping speed and compression ratio, reasonably the degree of depth of air vent also makes with conventional molecular pump and compares with width, to more superior venting capacity is arranged between 0.01Pa, greatly shorten bleeding the time of system at 100Pa, reduced the system operation cost;
4. respectively there is a hollow cavity both sides up and down of rotor mounting layer, its at the middle and upper levels hollow cavity both can when having foreign matter to fall into, play collecting action, greatly reduce the damage of foreign matter to pump, can deduct rotor weight again, reduce production costs; Lower floor's hollow cavity makes the structure of whole rotor more reasonable, is convenient to install;
5. rotor, by the machine shaping of hard aluminium alloy material monolithic, also makes rotor have higher intensity, and the diameter that can resist in the course of the work atmosphere impacts;
6. the curved surface that the cross section external frame of the muscle section that adjacent two air vents of rotor outer surface form is approximate trapezoid, make muscle section have higher intensity, shock-resistant, and be beneficial to exhaust simultaneously;
7. rational matching gap size between each parts, also make molecular pump integral body provided by the invention have better venting capacity;
8. internal rotor mounting layer central through bore is taper, and what can coordinate with the electric machine main shaft top is tightr, is difficult for slippage;
9. lower central position in chassis is equipped with the oil sump seat, in the oil sump seat, is placed with lubricant oil, and the electric machine main shaft lower end extend in the oil sump seat, can make electric machine main shaft obtain when work uninterrupted lubricated, improves the utilization efficiency of molecular pump, increases the service life.
The present invention has solved well because being evacuated device and has damaged, atmosphere directly is filled with molecular pump, cause the cracked problem of molecular pump, have simple in structurely, be convenient to safeguard, be easy to processing, manufacture difficulty is little, processing cost is low, shock-resistant, especially can resist that atmosphere directly impacts and advantage that broken pump phenomenon can not occur.
The accompanying drawing explanation
The cross-sectional view of the molecular pump that Fig. 1 is a kind of Chinese People's Anti-Japanese Military and Political College provided by the invention gas impact.
The structural representation of the rotor of the molecular pump that Fig. 2 is a kind of Chinese People's Anti-Japanese Military and Political College provided by the invention gas impact.
The cross-sectional view of the rotor of the molecular pump that Fig. 3 is a kind of Chinese People's Anti-Japanese Military and Political College provided by the invention gas impact.
In figure: 1, pump case; 2, rotor; 3, chassis; 4, spiral envelope; 5, relief opening flange; 6, oil sump seat; 7, lower bearing; 8, electric machine main shaft; 9, motor; 10, upper bearing (metal); 11, bearing support; 12, bearing support gland; 13, set screw.
Embodiment
Below in conjunction with the drawings and specific embodiments, the invention will be further described.
Embodiment 1, the molecular pump that a kind of Chinese People's Anti-Japanese Military and Political College gas impacts as shown in Figure 1, Figure 2, Figure 3 shows, comprise chassis 3, axially there is a cylindrical hole at 3 middle parts, described chassis, cylindrical hole is arranged with a circular groove outward, chassis 3 outer side surfaces are provided with a relief opening near bottom position, relief opening is communicated with circular groove, relief opening flange 5 is equipped with in the relief opening outside on chassis 3, base 3 tops are provided with bearing support 11, bearing support 11 tops are provided with bearing support gland 12, in 3 circular grooves of chassis, by a paracentral side, are set with spiral envelope 4, cylindrical hole on chassis 3 is embedded in motor 9 is installed, electric machine main shaft 8 is by upper bearing (metal) 10 and lower bearing 7 supporting and locations, upper bearing (metal) 10 is loaded in bearing support 11, and fixing with chassis 3 by bearing support gland 12, lower bearing 6 is directly fixing with chassis 3, and electric machine main shaft 8 extends up to chassis 3 top outer, and 3 lower central positions, chassis are equipped with oil sump seat 6, be placed with lubricant oil in oil sump seat 6, electric machine main shaft 8 lower ends extend in oil sump seat 6, a rotor 2 by the machine shaping of cylindrical hard aluminium alloy material monolithic is installed on electric machine main shaft 8 tops, its outer surface has 5 spirality air vents from top to bottom even, air vent starts to extend vertically from starting point, the degree of depth gradually from depth to shallow, width is narrowed down by wide gradually, until rotor outer surface bottom, the starting point degree of depth of described air vent is 40mm, the tail end degree of depth is 4mm, the intermediate depth gradient is successively decreased, the muscle cross section external frame that adjacent two air vents form is to be similar to trapezoidal arched surface, the height of described cross section successively decreases and successively decreases gradually with the air vent degree of depth, make any point in muscle section all equate with the perpendicular distance of rotor center axis, the inner position placed in the middle of rotor 2 is provided with a mounting layer, the mounting layer central position has a conical through-hole, respectively there is a hollow cavity both sides up and down of mounting layer, its at the middle and upper levels hollow cavity both can when having foreign matter to fall into, play collecting action, greatly reduce the damage of foreign matter to pump, can deduct again rotor 2 weight, save material, reduce production costs, rotor lower floor chamber wall extend in the circular groove on chassis 3, spiral-lock is on chassis 3, cover 3 center portions, chassis and embedding and be arranged on the motor 9 in the cylindrical hole on chassis 3, rotor 2 forms cone match with electric machine main shaft 8 by conical through-hole, and fixing by set screw 13, the value of rotor 2 height H and diameter D is generally: H=(1～1.5) D, this kind of proportionate relationship can be under certain rotor quality, can obtain reasonable vacuum performance, the pass of choosing rotor 2 height H and diameter D in the present embodiment is: H=D, on rotor 2 and chassis 3, spiral-lock is by pump case 1, and described pump case 1 is cylindrical structural, and its bottom is open, and interior is circular cylindrical cavity, and top is provided with suction port, rotor 2 extend in the circular groove on chassis 3, and there are Spielpassung in muscle section and circular groove that the outside air vent of rotor 2 forms, and matching gap is 0.2mm, there are Spielpassung in rotor 2 mounting layer lower floor cavity inner walls and spiral envelope 4, and its matching gap is 0.3mm, pump case 1 spiral-lock is on rotor 2, and there is Spielpassung in the muscle section that the outside air vent of its cavity inner wall and rotor 2 forms, and matching gap is 0.3mm.
Pumping process during concrete the use is: under motor 9 drives, electric machine main shaft 8 rotor driven 2 High Rotation Speeds, the rotor collision of gas molecule and High Rotation Speed obtains momentum, and form under the bleed-off passage effect on rotor 2 and shell 1 and chassis 3, by suction port, discharged to relief opening flange 5, through the prime extract system, taken away.Pump body gas is drained by rotor 2 and the exhaust passage that spiral envelope 4 forms.
Embodiment 2, the molecular pump that a kind of Chinese People's Anti-Japanese Military and Political College gas impacts as shown in Figure 1, Figure 2, Figure 3 shows, itself and embodiment's 1 difference is that the pass of rotor 2 height H and diameter D is: H=1.5D, rotor outer surface has 5 spirality air vents from top to bottom even, the starting point degree of depth of air vent is 30mm, and the tail end degree of depth is 2mm, and the intermediate depth gradient is successively decreased, there are Spielpassung in muscle section and circular groove that the outside air vent of rotor 2 forms, and matching gap is 0.6mm; There are Spielpassung in rotor 2 mounting layer lower floor cavity inner walls and spiral envelope 4, and its matching gap is 0.6mm; Pump case 1 spiral-lock is on rotor 2, and there is Spielpassung in the muscle section that the outside air vent of its cavity inner wall and rotor 2 forms, and matching gap is 0.7mm, and other structure characteristics are all identical with embodiment 1, no longer repeated description.
Embodiment 3, the molecular pump that a kind of Chinese People's Anti-Japanese Military and Political College gas impacts as shown in Figure 1, Figure 2, Figure 3 shows, itself and embodiment's 1 difference is that the pass of rotor 2 height H and diameter D is: H=1.2D, rotor outer surface has 5 spirality air vents from top to bottom even, the starting point degree of depth of air vent is 45mm, and the tail end degree of depth is 3.5mm, and the intermediate depth gradient is successively decreased, there are Spielpassung in muscle section and circular groove that the outside air vent of rotor 2 forms, and matching gap is 0.4mm; There are Spielpassung in rotor 2 mounting layer lower floor cavity inner walls and spiral envelope 4, and its matching gap is 0.4mm; Pump case 1 spiral-lock is on rotor 2, and there is Spielpassung in the muscle section that the outside air vent of its cavity inner wall and rotor 2 forms, and matching gap is 0.4mm, and other structure characteristics are all identical with embodiment 1, no longer repeated description.
By above embodiment, can be found out, the proportionate relationship of choose reasonable rotor 2 height H and diameter D, the matching gap between the degree of depth of air vent and each parts, both can guarantee the pump safe handling, can obtain vacuum performance preferably again.In a word, the molecular pump that a kind of Chinese People's Anti-Japanese Military and Political College provided by the invention gas impacts has solved well some and has damaged because being evacuated device, and atmosphere directly is filled with molecular pump, causes the cracked problem of molecular pump, have simple in structure, be convenient to safeguard, be easy to processing, manufacture difficulty is little, processing cost is low, shock-resistant, can directly bear the advantage that atmosphere impacts and can be not cracked, the Security that greatly improves pump.Unique rotor structure and exhaust mode, compare with conventional molecular pump simultaneously, at 100Pa, to more superior venting capacity is arranged between 0.01Pa, greatly shortened bleeding the time of system, reduced the system operation cost.

Claims (8)

1. the molecular pump that Chinese People's Anti-Japanese Military and Political College gas impacts, comprise chassis, be arranged on the motor on chassis, rotor and the fixing button be connected on electric machine main shaft is contained in the pump case on rotor and chassis, it is characterized in that: axially there is a cylindrical hole at the middle part on described chassis, cylindrical hole is arranged with a circular groove outward, the chassis outer side surface is provided with a relief opening near bottom position, and relief opening is communicated with circular groove; Described motor is arranged in the cylindrical hole on chassis for embedding, and electric machine main shaft extends up to the chassis top outer; Described rotor is cylindrical, its outer surface has 4～8 spirality air vents from top to bottom even, air vent starts to extend vertically from starting point, the degree of depth gradually from depth to shallow, width is narrowed down by wide gradually, until rotor outer surface bottom, internal rotor position placed in the middle is provided with a mounting layer, the mounting layer central position has a through hole, respectively there is a hollow cavity both sides up and down of mounting layer, and described pump case is cylindrical structural, and its bottom is open, interior is circular cylindrical cavity, and top is provided with suction port.
2. the molecular pump that a kind of Chinese People's Anti-Japanese Military and Political College according to claim 1 gas impacts, it is characterized in that: described rotor is by the machine shaping of cylindrical hard aluminium alloy material monolithic.
3. the molecular pump that a kind of Chinese People's Anti-Japanese Military and Political College according to claim 1 and 2 gas impacts, it is characterized in that: the starting point degree of depth of described air vent is 30～60mm, and the tail end degree of depth is 2～5mm, and the intermediate depth gradient is successively decreased.
4. the molecular pump that a kind of Chinese People's Anti-Japanese Military and Political College according to claim 1 and 2 gas impacts, it is characterized in that: the curved surface that the cross section external frame of the muscle section that described adjacent two air vents form is approximate trapezoid, the height of described cross section successively decreases and successively decreases gradually with the air vent degree of depth.
5. the molecular pump that a kind of Chinese People's Anti-Japanese Military and Political College according to claim 1 gas impacts, it is characterized in that: described rotor can extend in the circular groove on chassis, and there are Spielpassung in muscle section and circular groove that the rotor exterior air vent forms, and matching gap is 0.2～0.6mm; Be set with the spiral envelope by a paracentral side in the circular groove of chassis, rotor mounting layer downside cavity inner wall and spiral are sealed up for safekeeping in Spielpassung, and its matching gap is 0.3～0.6mm; The pump case spiral-lock is on rotor, and there is Spielpassung in the muscle section that its cavity inner wall and rotor exterior air vent form, and matching gap is 0.3～0.7mm.
6. the molecular pump that a kind of Chinese People's Anti-Japanese Military and Political College according to claim 1 gas impacts, it is characterized in that: described internal rotor mounting layer central through bore is taper.
7. the molecular pump that a kind of Chinese People's Anti-Japanese Military and Political College according to claim 1 gas impacts, it is characterized in that: lower central position, described chassis is equipped with the oil sump seat, in the oil sump seat, is placed with lubricant oil, and the electric machine main shaft lower end extend in the oil sump seat.
8. the molecular pump that a kind of Chinese People's Anti-Japanese Military and Political College according to claim 1 gas impacts is characterized in that: the relief opening flange is equipped with in the relief opening outside on described chassis.
CN2013104262846A 2013-09-18 2013-09-18 Atmosphere-impact-resisting molecular pump Pending CN103452872A (en)

Priority Applications (2)

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CN2013104262846A CN103452872A (en) 2013-09-18 2013-09-18 Atmosphere-impact-resisting molecular pump
PCT/CN2014/076478 WO2015039443A1 (en) 2013-09-18 2014-04-29 Atmospheric impact resistant molecular pump

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CN2013104262846A CN103452872A (en) 2013-09-18 2013-09-18 Atmosphere-impact-resisting molecular pump

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015039443A1 (en) * 2013-09-18 2015-03-26 北京北仪创新真空技术有限责任公司 Atmospheric impact resistant molecular pump
CN106949074A (en) * 2017-04-20 2017-07-14 中山联速集成电路有限公司 A kind of silent air compressor

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10299689A (en) * 1997-04-21 1998-11-10 Daikin Ind Ltd Exhaust pump
DE29815055U1 (en) * 1998-08-24 1998-12-24 Precision Instr Dev Center Nat Vacuum pump of the spiral groove type
JP2001221186A (en) * 2000-02-04 2001-08-17 Tokyo Electron Ltd Axial flow vacuum pump and processor
US6302641B1 (en) * 2000-01-07 2001-10-16 Kashiyama Kougyou Industry Co., Ltd. Multiple type vacuum pump
US6514035B2 (en) * 2000-01-07 2003-02-04 Kashiyama Kougyou Industry Co., Ltd. Multiple-type pump
DE102004047930A1 (en) * 2004-10-01 2006-04-06 Leybold Vacuum Gmbh Friction vacuum pump
CN203488393U (en) * 2013-09-18 2014-03-19 北京北仪创新真空技术有限责任公司 Molecular pump capable of resisting atmospheric impact

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10299689A (en) * 1997-04-21 1998-11-10 Daikin Ind Ltd Exhaust pump
DE29815055U1 (en) * 1998-08-24 1998-12-24 Precision Instr Dev Center Nat Vacuum pump of the spiral groove type
US6302641B1 (en) * 2000-01-07 2001-10-16 Kashiyama Kougyou Industry Co., Ltd. Multiple type vacuum pump
US6514035B2 (en) * 2000-01-07 2003-02-04 Kashiyama Kougyou Industry Co., Ltd. Multiple-type pump
JP2001221186A (en) * 2000-02-04 2001-08-17 Tokyo Electron Ltd Axial flow vacuum pump and processor
DE102004047930A1 (en) * 2004-10-01 2006-04-06 Leybold Vacuum Gmbh Friction vacuum pump
CN203488393U (en) * 2013-09-18 2014-03-19 北京北仪创新真空技术有限责任公司 Molecular pump capable of resisting atmospheric impact

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015039443A1 (en) * 2013-09-18 2015-03-26 北京北仪创新真空技术有限责任公司 Atmospheric impact resistant molecular pump
CN106949074A (en) * 2017-04-20 2017-07-14 中山联速集成电路有限公司 A kind of silent air compressor

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Application publication date: 20131218