CN1110376A - Driven molecular pump - Google Patents
Driven molecular pump Download PDFInfo
- Publication number
- CN1110376A CN1110376A CN 94104226 CN94104226A CN1110376A CN 1110376 A CN1110376 A CN 1110376A CN 94104226 CN94104226 CN 94104226 CN 94104226 A CN94104226 A CN 94104226A CN 1110376 A CN1110376 A CN 1110376A
- Authority
- CN
- China
- Prior art keywords
- pump
- bleeding
- unit
- drags
- dish type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
Abstract
The present invention relates to a drive molecular pump using non-rectangular air-pumping duct. Its typical structure is that the duct wall of its air-pumping duct is projected or inclined towards drive direction. Some stages of basic air-pumping units can be co-axially installed, and formed into a series- and parallel combined multistage air-pumping unit. This single-stage and multi-stage air-pumping unit also can be co-axially installed with other moelcular pump and rotary mechanical pump, and formed into a compound vacuum pump with good performance. This pump is high in pumping speed and compression ratio.
Description
The existing drive molecular pump slot cross-section of bleeding all adopts rectangular configuration, and for example, famous dish type is singly dragged pump (Siegbahn molecular pump), the cylinder list drags pump (Holweck molecular pump), and Chinese patent 1978, CN-87101116.6-2, CN-92101300.0 and U.S. Pat 3794449 etc.This quasi-molecule pump can not make full use of the dragging speed that gas molecule obtains, and pumping speed and compression ratio are all lower.
The purpose of this invention is to provide a kind of bleed drive molecular pump (be called for short and tiltedly drag pump, wherein, the groove of bleeding is provided with an abbreviation monocline that drags face and drags pump, and the groove of bleeding is provided with two abbreviation diclinics that drag face and drags pump) of groove of non-rectangular cross-section that adopts.
Provided by the invention tiltedly drag pump by driving wheel, quietly take turns, rotating shaft, pump case etc. form.It is characterized in that this pump has one group of unit of bleeding substantially at least, the groove of bleeding of this unit of bleeding substantially adopts non-rectangular cross-section, its typical structure tilts or projection to drawing direction for the slot cross-section of bleeding, thereby, improved impeller intensity, and can make full use of the dragging speed that gas molecule obtains, improve the pumping speed and the compression ratio of pump.
The some groups of above-mentioned coaxial installations in unit of bleeding substantially link to each other their suction port respectively with relief opening, can form parallel connection and bleed.Their suction port and relief opening are joined end to end successively, can constitute series connection and bleed.Bleed near the unit parallel connection of bleeding of pump steam inlet, bleed, the unit of can constitutive character can better multistagely bleeding near the units in series of bleeding of pump exhaust inlet.
Above-mentioned single-stage or multistage pump bleed unit and the various molecular pump of tiltedly dragging, for example, turbomolecular pump, dish type is singly dragged pump, and the cylinder list drags pump, perhaps the rotating machinery pump, perhaps their combination coaxial is installed, and the series and parallel combination can the better composite vacuum pump of component property.
Advantage of the present invention:
1. the drive molecular pump of the present invention's proposition can make full use of the dragging speed that gas molecule obtains, and improves the pumping speed and the compression ratio of pump.
2. the drive molecular pump impeller intensity height that proposes of the present invention, good manufacturability.
Below in conjunction with drawings and Examples the present invention is further described.
Fig. 1 single stage disk shaped monocline is dragged the schematic representation of pump.
Fig. 2 single stage disk shaped monocline is dragged the quiet schematic representation of taking turns of pump.
Fig. 3 single-stage cylinder monocline is dragged the schematic representation of pump.
Fig. 4 single stage disk shaped diclinic drags the schematic representation of pump.
Fig. 5 single stage disk shaped diclinic drags the schematic representation of pump driving wheel.
Fig. 6 single stage disk shaped diclinic drags the quiet schematic representation of taking turns of pump.
Fig. 7 single-stage cylinder diclinic drags the schematic representation of pump.
The horizontal compound dish type diclinic of Fig. 8 drags pump (1).
The horizontal compound dish type diclinic of Fig. 9 drags pump (2).
The vertical compound dish type diclinic of Figure 10 drags pump.
The vertical compound cylinder diclinic of Figure 11 drags pump.
Embodiment one: the single stage disk shaped monocline is dragged pump
The single stage disk shaped monocline drags pump as shown in Figure 1, is made up of rotating shaft (1), driving wheel (2), the quiet wheel (3), spacer ring (4) and pump case (5) etc.
Driving wheel (2) is made of a flat disk.The quiet wheel (3) constitutes by being provided with the bleed disk of groove (6) of some helicals as shown in Figure 2.The groove cell wall (7) of bleeding tilts to drawing direction (direction shown in the solid arrow among Fig. 2), the resultant velocity (among Fig. 2 shown in the dotted arrow) of dragging speed that gas molecule obtains and heat movement speed is conformed to the cell wall direction, thereby, make full use of the dragging speed that gas obtains, improve the pumping speed and the compression ratio of pump.
When the driving wheel high speed rotating, pumped gas is taken out to the inside by the outside.Change the Hand of spiral of the groove of bleeding, perhaps drawing direction (being the driving wheel sense of rotation) can change the direction of bleeding.If the change drawing direction, the true dip direction of then corresponding change cell wall (7).
If to entering or discharge the unit of bleeding, gas enters or discharge the driving wheel disk outside of a side can set up row's turbomolecular pump short blade to pumped gas by the driving wheel outboard shafts, the direction of bleeding of these short blades should be consistent with the flow direction of pumped gas.
The driving wheel disk can also be processed into outer thin interior thick, and stationary blade wheel is outer thick interior thin, dynamic and static impeller axial clearance approximately equal.
The dish type monocline drags the dynamic and static wheel construction of pump to exchange.
Embodiment two: single-stage cylinder monocline is dragged pump
Single-stage cylinder monocline drags pump as shown in Figure 3, is made up of rotating shaft (1), driving wheel (8), the quiet wheel (9) and pump case (5) etc.
Driving wheel (8) is made of a cylndrical surface.The quiet wheel (9) constitutes by being provided with the bleed cylinder of groove (10) of some helicals, the groove cell wall (11) of bleeding tilts to drawing direction, the dragging speed that gas molecule is obtained conforms to the cell wall direction with the resultant velocity of heat movement speed, thereby makes full use of dragging speed.Change the Hand of spiral of the groove of bleeding, perhaps drawing direction (being the driving wheel sense of rotation) can change the direction of bleeding.If the change drawing direction, the true dip direction of then corresponding change cell wall (11).
The cylinder monocline drags the dynamic and static wheel construction of pump to exchange.
Embodiment three: the single stage disk shaped diclinic drags pump
The single stage disk shaped diclinic drags pump as shown in Figure 4, by rotating shaft (1), driving wheel (12), the quiet wheel (13), motive sealing (14), and spacer ring (4) and pump case compositions such as (5).
Driving wheel (12) is made of two coaxial flat disks, and as shown in Figure 5, wherein a flat disk (left side flat disk among Fig. 4) is provided with some pores (15) near rotating shaft place.The quiet wheel (13) as shown in Figure 6, constitute by some spiral blades (16) and fixing device (17) thereof, the middle part, cross section of blade (16) is to drawing direction (direction shown in the solid arrow among Fig. 6) projection, become sector (as shown in Figure 6), perhaps arc, perhaps other shapes make the resultant velocity (among Fig. 6 shown in the dotted arrow) of dragging speed that gas molecule obtains and heat movement speed conform to the cell wall direction, thereby, make full use of the dragging speed that gas molecule obtains.Vanes fixed device (17) should reduce gas at the resistance of direction of bleeding as far as possible.Motive sealing (14) can adopt dish type to drag singly that pump is quiet takes turns, and perhaps the dish type monocline drags that pump is quiet takes turns, perhaps other dynamic seal apparatuss.
The quiet wheel (13) is installed in the middle of two driving wheels (12), and motive sealing (14) is installed in the driving wheel outside that is provided with pore, leaves the working clearance between the dynamic and static parts.If radial clearance double as gas channel, then radial clearance is bigger.
If the radial clearance between driving wheel (12) and the spacer ring (4) is less, motive sealing (14) can.
During the driving wheel high speed rotating, the space (18) between the two adjacent quiet impeller blades just becomes one and has two grooves of bleeding that drag face, and pumped gas is radially taken out rotating shaft place to the inside from the outside.Change the Hand of spiral of quiet impeller blade (16), perhaps drawing direction (being the driving wheel sense of rotation) can change the direction of bleeding.If the change drawing direction, the protrusion direction of the quiet impeller blade of then corresponding change (16).
If to entering or discharge the unit of bleeding, gas enters or discharge the driving wheel disk outside of a side can set up row's turbomolecular pump short blade to pumped gas by the driving wheel outboard shafts, the direction of bleeding of these short blades should be consistent with the flow direction of pumped gas.
The driving wheel disk can also be processed in outer thin thick, quiet take turns with motive sealing outer thin in thick, axial clearance approximately equal between the dynamic and static parts.
Embodiment four: single-stage cylinder diclinic drags pump
Single-stage cylinder diclinic drags pump as shown in Figure 7, is made up of rotating shaft (1), driving wheel (19), the quiet wheel (20), motive sealing (21) and pump case (5) etc.
Driving wheel (19) is made of two coaxial circles cylinders.The quiet wheel (20) is made of some spiral blades (22) and fixing device (23).The middle part, cross section of blade (22) becomes sector, perhaps arc, perhaps other shapes to the drawing direction projection.The dragging speed that gas molecule is obtained conforms to the cell wall direction with the resultant velocity of heat movement speed, thereby, make full use of the dragging speed that gas molecule obtains.Vanes fixed device (23) should reduce gas at the resistance of direction of bleeding as far as possible.Motive sealing (21) can adopt the cylinder list to drag that pump is quiet takes turns, and perhaps the cylinder monocline drags that pump is quiet takes turns, perhaps other dynamic seal apparatuss.
The quiet wheel (20) is installed in the middle of two driving wheels (19), and motive sealing (21) is installed in the driving wheel outside, leaves the working clearance between the dynamic and static parts.
During the driving wheel high speed rotating, the space (24) between the two adjacent quiet impeller blades just becomes one and has two grooves of bleeding that drag face, and pumped gas is taken out downwards from the top vertically, discharges through the pore (15) of driving wheel bottom.Change the Hand of spiral of quiet impeller blade, perhaps drawing direction (being the driving wheel sense of rotation) can change the direction of bleeding.If the change drawing direction, the true dip direction of the quiet impeller blade of then corresponding change.
Embodiment five: horizontal compound dish type diclinic drags pump
Horizontal compound dish type diclinic drags pump to drag bleed unit and dish type of pump singly to drag pump by some groups of dish type diclinics, and perhaps the cylinder list drags pump, perhaps other molecular pumps unit of bleeding, and perhaps their combination coaxial is installed, and series and parallel constitutes.Near the suction port of pump be some levels also, the dish type diclinic of tandem compound drags the pump unit of bleeding, near the relief opening of pump for singly dragging pump, perhaps other molecular pumps unit of bleeding.
Fig. 8 is a kind of schematic representation of feasible configurations.This pump middle part is located to form first level of bleeding for some groups (shown in Fig. 8 being three groups) dish type diclinic in parallel drags the pump unit (26) (the adjacent two parallel connections driving wheel of bleeding between the unit is established the connection pore near rotating shaft place, and without motive sealing) of bleeding near suction port (25).Both sides some level (being secondary shown in Fig. 8) the dish type diclinics of connecting respectively drag the pump unit (26) of bleeding, and each dish type diclinic drags pump stage singly to drag pump with dish type, and perhaps the dish type monocline drags pump to bleed unit (27) as motive sealing.Then, both sides some level (being secondary shown in Fig. 8) dish types of connecting again respectively singly drag pump or dish type monocline to drag the pump unit (27) of bleeding.
The pumped gas flow direction is entered by the suction port (25) of pump shown in arrow among Fig. 8, drags bleed unit and dish type of pump singly to drag pump through the dish type diclinic successively, and perhaps the dish type monocline is dragged the pump unit of bleeding, and is last, discharged by the relief opening (28) of pump.
Fig. 9 is the schematic representation of another kind of feasible configurations.This pump middle part is located to constitute first level of bleeding for some groups (shown in Fig. 9 being two groups) dish type diclinic in parallel drags the pump unit (26) of bleeding near suction port (25), both sides some level (being one-level shown in Fig. 9) the dish type diclinics of connecting respectively drag the pump unit (26) of bleeding, each dish type diclinic drags pump stage singly to drag pump with dish type, and perhaps the dish type monocline drags pump to bleed unit (27) as motive sealing.Then, both sides some level (being level Four shown in Fig. 9) the cylinder lists of connecting again respectively drag pump, and perhaps the cylinder monocline is dragged the pump unit (29) of bleeding.
Embodiment six: vertical compound dish type diclinic drags pump
Vertical compound dish type diclinic drags pump to drag bleed unit and dish type of pump singly to drag pump by some groups of dish type diclinics, and perhaps the cylinder list drags pump, perhaps other molecular pumps unit of bleeding, and perhaps their combination coaxial is installed, and series and parallel constitutes.Near the suction port of pump is that dish type is dragged the pump unit of bleeding more, near the relief opening of pump for singly dragging pump, perhaps other molecular pumps unit of bleeding.
Figure 10 is a kind of schematic representation of feasible configurations.This pump top constitutes first level of bleeding near suction port (25) for some groups (shown in Figure 10 being two groups) dish type diclinic in parallel drags the pump unit (26) of bleeding, then, the some level of connecting (being one-level shown in Figure 10) dish type diclinics drag the pump unit (26) of bleeding, each dish type diclinic drags pump stage singly to drag pump with dish type, and perhaps the dish type monocline drags pump to bleed unit (27) as motive sealing.Drag pump near the relief opening (28) of pump some levels (being level Four shown in Figure 10) cylinder lists of connecting again, perhaps the cylinder monocline is dragged the pump unit (29) of bleeding.
Vertical compound dish type diclinic drag pump near suction port (25) also can some grades of series connection of coaxial installation the turbomolecular pump unit of bleeding, further improve the pumping speed of pump.
Embodiment seven: vertical compound cylinder diclinic drags pump
Vertical compound cylinder diclinic drags pump to drag bleed unit and dish type of pump singly to drag pump by some groups of cylinder diclinics, and perhaps the cylinder list drags pump, perhaps other molecular pumps unit of bleeding, and perhaps their combination coaxial is installed, and series and parallel constitutes.Drag the pump unit of bleeding near the suction port of pump for the cylinder diclinic.Near the relief opening of pump for singly dragging pump and other molecular pumps unit of bleeding.
Figure 11 is a kind of schematic representation of feasible configurations.This pump top is located to drag the pump unit (30) of bleeding for some levels (shown in Figure 11 being two groups) cylinder diclinic in parallel near suction port (25), constitute first level of bleeding, drag pump near the some levels of the relief opening (28) of pump series connection (being secondary shown in Fig. 1) cylinder lists, perhaps the cylinder monocline is dragged the pump unit (29) of bleeding.
The turbomolecular pump that compound cylinder diclinic drags pump can also some grades of series connection of coaxial installation to bleed near the suction port (25) of the pump unit of bleeding further improves the pumping speed of pump.
Claims (19)
1, a kind of molecular pump, by driving wheel, quietly take turns, rotating shaft, pump case etc. form, and it is characterized in that this pump has one group of basic drive molecular pump unit of bleeding at least, the groove of bleeding of this unit of bleeding adopts non-rectangular cross-section.
2, molecular pump according to claim 1 is characterized in that the slot cross-section of bleeding of this unit of bleeding substantially tilts or projection to drawing direction, and the dragging speed that gas molecule is obtained conforms to the cell wall direction with the resultant velocity of heat movement speed.
3, molecular pump according to claim 2, its unit of bleeding substantially drags pump for the dish type monocline, and the driving wheel of this unit of bleeding substantially is made of a flat disk.The quiet wheel by being provided with the bleed disk of groove of some helicals constitutes.It is characterized in that the quiet groove cell wall of bleeding of taking turns tilts to drawing direction, the dragging speed that gas molecule is obtained conforms to the cell wall direction with the resultant velocity of heat movement speed.
4, molecular pump according to claim 3 is characterized in that the dish type monocline drags the pump driving wheel disk outside of bleeding substantially in the unit to set up row's turbine short blade, and the direction of bleeding of these short blades is consistent with the flow direction of pumped gas.
5, molecular pump according to claim 3 is characterized in that the dish type monocline drags the pump driving wheel disk of bleeding substantially in the unit thick in thin outward, and stationary blade wheel is outer thin in thick, dynamic and static impeller axial clearance approximately equal.
6, molecular pump according to claim 3 is characterized in that the dish type monocline drags bleed the substantially dynamic and static wheel construction of unit of pump to exchange.
7, molecular pump according to claim 2, its unit of bleeding substantially drags pump for the cylinder monocline, and the driving wheel of this unit of bleeding substantially is made of a cylndrical surface.The quiet wheel by being provided with the bleed cylinder of groove of some helicals constitutes, and it is characterized in that the quiet groove cell wall of bleeding of taking turns tilts to drawing direction, and the dragging speed that gas molecule is obtained conforms to the cell wall direction with the resultant velocity of heat movement speed.
8, molecular pump according to claim 7 is characterized in that the cylinder monocline drags bleed the substantially dynamic and static wheel construction of unit of pump to exchange.
9, molecular pump according to claim 2, its unit of bleeding substantially drags pump for the dish type diclinic, and the driving wheel of this unit of bleeding substantially is made of two coaxial flat disks, and wherein a flat disk is provided with some pores near rotating shaft place.The quiet wheel by some spiral blades and fixing device thereof constitutes, and motive sealing adopts dish type to drag singly that pump is quiet takes turns, perhaps other dynamic seal apparatuss.The quiet wheel is installed in the middle of two driving wheels, and motive sealing is installed in the driving wheel outside that is provided with pore.The middle part that this element characteristic of bleeding substantially is quiet impeller blade cross section is to the drawing direction projection, becomes sector, perhaps arc, and perhaps other shapes, the dragging speed that gas molecule is obtained conforms to the cell wall direction with the resultant velocity of heat movement speed.
10, molecular pump according to claim 9 is characterized in that the dish type diclinic drags the pump driving wheel disk outside of bleeding substantially in the unit to set up row's turbine short blade, and the direction of bleeding of these short blades is consistent with the flow direction of pumped gas.
11, molecular pump according to claim 9 is characterized in that the dish type diclinic drags the pump driving wheel disk of bleeding substantially in the unit thick in thin outward, and stationary blade wheel and motive sealing are outer thin in thick, dynamic and static impeller axial clearance approximately equal.
12, molecular pump according to claim 9 is characterized in that the dish type diclinic drags the pump radial clearance between the driving wheel and spacer ring of bleeding substantially in the unit less, without motive sealing.
13, molecular pump according to claim 9 is characterized in that some groups of dish type diclinics drag pump and other drive molecular pumps unit of bleeding, and perhaps their combination coaxial is installed, the series and parallel combination.Near the suction port of pump be some levels also, the dish type diclinic of tandem compound drags the pump unit of bleeding, and is other drive molecular pumps unit of bleeding near the relief opening of pump.
14, molecular pump according to claim 13 is characterized in that some groups of dish type diclinics drag pump and some grades of dish types singly to drag pump, and perhaps the dish type monocline is dragged the coaxial installation of pump, the series and parallel combination.Near the suction port of pump be some levels also, the dish type diclinic of tandem compound drags the pump unit of bleeding, and is that the dish type of some grades of series connection is singly dragged pump near the relief opening of pump, perhaps the dish type monocline is dragged the pump unit of bleeding.
15, molecular pump according to claim 13 is characterized in that some groups of dish type diclinics drag pump and some grades of cylinder lists to drag pump, and perhaps the cylinder monocline is dragged the pump coaxial installation in unit of bleeding, the series and parallel combination.Near the suction port of pump be some levels also, the dish type diclinic of tandem compound drags the pump unit of bleeding, and is that the cylinder list of some grades of series connection drags pump near the relief opening of pump, perhaps the cylinder monocline is dragged the pump unit of bleeding.
16, molecular pump according to claim 13 is characterized in that in its vertical molecular pump structure turbomolecular pump that suction port near pump the increases some grades of series connection unit of bleeding.
17, molecular pump according to claim 2, its unit of bleeding substantially drags pump for the cylinder diclinic, and the driving wheel of this elementary cell is made of two coaxial circles cylinders.The quiet wheel by some cylinder spiral blades and fixing device constitutes.Motive sealing adopts the cylinder list to drag that pump is quiet takes turns, perhaps other dynamic seal apparatuss.The quiet wheel is installed in the middle of two driving wheels, and motive sealing is installed in the driving wheel outside.This element characteristic of bleeding substantially is that the cross section middle part of quiet impeller blade to the drawing direction projection, becomes sector, perhaps arc, and perhaps other shapes, the dragging speed that gas molecule is obtained conforms to the cell wall direction with the resultant velocity of heat movement speed.
18, molecular pump according to claim 17 is characterized in that some groups of cylinder diclinics drag bleed unit and some grades of cylinder lists of pump to drag pump, and perhaps the cylinder monocline is dragged the pump coaxial installation in unit of bleeding, series and parallel combination.Near the suction port of pump be some levels also, the cylinder diclinic of series connection drags the pump unit of bleeding, and is that the cylinder list of some grades of series connection drags pump near the relief opening of pump, perhaps the cylinder monocline is dragged the pump unit of bleeding.
19, vertical molecular pump according to claim 18 is characterized in that turbomolecular pump that suction port near pump the increases some grades of series connection unit of bleeding.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 94104226 CN1110376A (en) | 1994-04-16 | 1994-04-16 | Driven molecular pump |
| PCT/CN1994/000075 WO1995028571A1 (en) | 1994-04-16 | 1994-09-24 | Molecular pump |
| AU77382/94A AU7738294A (en) | 1994-04-16 | 1994-09-24 | Molecular pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 94104226 CN1110376A (en) | 1994-04-16 | 1994-04-16 | Driven molecular pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1110376A true CN1110376A (en) | 1995-10-18 |
Family
ID=5031489
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 94104226 Pending CN1110376A (en) | 1994-04-16 | 1994-04-16 | Driven molecular pump |
Country Status (3)
| Country | Link |
|---|---|
| CN (1) | CN1110376A (en) |
| AU (1) | AU7738294A (en) |
| WO (1) | WO1995028571A1 (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007041932A1 (en) * | 2005-10-10 | 2007-04-19 | Jiguo Chu | Double-drag molecular pump |
| CN100429406C (en) * | 2003-09-30 | 2008-10-29 | 爱德华兹有限公司 | Vacuum pump |
| CN102648351A (en) * | 2009-10-19 | 2012-08-22 | 爱德华兹有限公司 | Vacuum pump |
| CN1860301B (en) * | 2003-09-30 | 2012-10-10 | 爱德华兹有限公司 | Vacuum pump |
| CN101463825B (en) * | 2007-12-20 | 2013-03-13 | 爱德华兹有限公司 | Vacuum pump |
| CN104806535A (en) * | 2015-03-26 | 2015-07-29 | 储继国 | Complex radial flow pump, combined radial flow pump and air extraction system |
| CN105765232A (en) * | 2013-11-28 | 2016-07-13 | 埃地沃兹日本有限公司 | Component for vacuum pump, siegbahn type exhaust mechanism, and compound vacuum pump |
| CN105829729A (en) * | 2013-12-26 | 2016-08-03 | 埃地沃兹日本有限公司 | Vacuum exhaust mechanism, compound vacuum pump, and rotating body component |
| WO2023166290A1 (en) * | 2022-03-03 | 2023-09-07 | Edwards Limited | Siegbahn drag pumps |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102008063131A1 (en) * | 2008-12-24 | 2010-07-01 | Oerlikon Leybold Vacuum Gmbh | vacuum pump |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2918208A (en) * | 1956-02-02 | 1959-12-22 | Becker Willi | Molecular pump |
| SU572584A2 (en) * | 1966-01-03 | 1977-09-15 | Shchedov Anatolij K | Molecular vacuum pump |
| NL8105614A (en) * | 1981-12-14 | 1983-07-01 | Ultra Centrifuge Nederland Nv | HIGH VACUUM MOLECULAR PUMP. |
| JPS61247893A (en) * | 1985-04-26 | 1986-11-05 | Hitachi Ltd | Vacuum pump |
| CN1009297B (en) * | 1987-06-03 | 1990-08-22 | 中国科学院北京真空物理实验室 | Disk turbine molecular pump |
| US5238362A (en) * | 1990-03-09 | 1993-08-24 | Varian Associates, Inc. | Turbomolecular pump |
-
1994
- 1994-04-16 CN CN 94104226 patent/CN1110376A/en active Pending
- 1994-09-24 AU AU77382/94A patent/AU7738294A/en not_active Abandoned
- 1994-09-24 WO PCT/CN1994/000075 patent/WO1995028571A1/en active Application Filing
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100429406C (en) * | 2003-09-30 | 2008-10-29 | 爱德华兹有限公司 | Vacuum pump |
| CN1860301B (en) * | 2003-09-30 | 2012-10-10 | 爱德华兹有限公司 | Vacuum pump |
| CN102062109B (en) * | 2003-09-30 | 2012-11-28 | 爱德华兹有限公司 | Vacuum pump |
| WO2007041932A1 (en) * | 2005-10-10 | 2007-04-19 | Jiguo Chu | Double-drag molecular pump |
| CN101463825B (en) * | 2007-12-20 | 2013-03-13 | 爱德华兹有限公司 | Vacuum pump |
| CN102648351A (en) * | 2009-10-19 | 2012-08-22 | 爱德华兹有限公司 | Vacuum pump |
| CN102648351B (en) * | 2009-10-19 | 2016-03-30 | 爱德华兹有限公司 | Vacuum pump |
| CN105765232B (en) * | 2013-11-28 | 2019-05-14 | 埃地沃兹日本有限公司 | Vacuum pump accessory, siegbahn's type exhaust gear and compound vacuum pump |
| CN105765232A (en) * | 2013-11-28 | 2016-07-13 | 埃地沃兹日本有限公司 | Component for vacuum pump, siegbahn type exhaust mechanism, and compound vacuum pump |
| CN105829729A (en) * | 2013-12-26 | 2016-08-03 | 埃地沃兹日本有限公司 | Vacuum exhaust mechanism, compound vacuum pump, and rotating body component |
| US10662957B2 (en) | 2013-12-26 | 2020-05-26 | Edwards Japan Limited | Vacuum exhaust mechanism, compound type vacuum pump, and rotating body part |
| CN104806535A (en) * | 2015-03-26 | 2015-07-29 | 储继国 | Complex radial flow pump, combined radial flow pump and air extraction system |
| WO2023166290A1 (en) * | 2022-03-03 | 2023-09-07 | Edwards Limited | Siegbahn drag pumps |
Also Published As
| Publication number | Publication date |
|---|---|
| WO1995028571A1 (en) | 1995-10-26 |
| AU7738294A (en) | 1995-11-10 |
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