AU7738294A - Molecular pump - Google Patents

Molecular pump

Info

Publication number
AU7738294A
AU7738294A AU77382/94A AU7738294A AU7738294A AU 7738294 A AU7738294 A AU 7738294A AU 77382/94 A AU77382/94 A AU 77382/94A AU 7738294 A AU7738294 A AU 7738294A AU 7738294 A AU7738294 A AU 7738294A
Authority
AU
Australia
Prior art keywords
molecular pump
molecular
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU77382/94A
Inventor
Jiguo Chu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of AU7738294A publication Critical patent/AU7738294A/en
Abandoned legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
AU77382/94A 1994-04-16 1994-09-24 Molecular pump Abandoned AU7738294A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN94104226 1994-04-16
CN 94104226 CN1110376A (en) 1994-04-16 1994-04-16 Driven molecular pump
PCT/CN1994/000075 WO1995028571A1 (en) 1994-04-16 1994-09-24 Molecular pump

Publications (1)

Publication Number Publication Date
AU7738294A true AU7738294A (en) 1995-11-10

Family

ID=5031489

Family Applications (1)

Application Number Title Priority Date Filing Date
AU77382/94A Abandoned AU7738294A (en) 1994-04-16 1994-09-24 Molecular pump

Country Status (3)

Country Link
CN (1) CN1110376A (en)
AU (1) AU7738294A (en)
WO (1) WO1995028571A1 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0322889D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
CN100513798C (en) * 2005-10-10 2009-07-15 储继国 Dual-drive molecular pump
GB0724837D0 (en) * 2007-12-20 2008-01-30 Edwards Ltd vacuum pump
DE102008063131A1 (en) * 2008-12-24 2010-07-01 Oerlikon Leybold Vacuum Gmbh vacuum pump
GB2474507B (en) * 2009-10-19 2016-01-27 Edwards Ltd Vacuum pump
JP6616560B2 (en) * 2013-11-28 2019-12-04 エドワーズ株式会社 Vacuum pump parts and composite vacuum pump
JP6228839B2 (en) * 2013-12-26 2017-11-08 エドワーズ株式会社 Vacuum exhaust mechanism, combined vacuum pump, and rotating body parts
CN104806535B (en) * 2015-03-26 2018-10-12 储继国 Compound radial flow pump, combination radial flow pump and extract system
GB2616283A (en) * 2022-03-03 2023-09-06 Edwards Ltd Siegbahn drag pumps

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2918208A (en) * 1956-02-02 1959-12-22 Becker Willi Molecular pump
SU572584A2 (en) * 1966-01-03 1977-09-15 Shchedov Anatolij K Molecular vacuum pump
NL8105614A (en) * 1981-12-14 1983-07-01 Ultra Centrifuge Nederland Nv HIGH VACUUM MOLECULAR PUMP.
JPS61247893A (en) * 1985-04-26 1986-11-05 Hitachi Ltd Vacuum pump
CN1009297B (en) * 1987-06-03 1990-08-22 中国科学院北京真空物理实验室 Disk turbine molecular pump
US5238362A (en) * 1990-03-09 1993-08-24 Varian Associates, Inc. Turbomolecular pump

Also Published As

Publication number Publication date
CN1110376A (en) 1995-10-18
WO1995028571A1 (en) 1995-10-26

Similar Documents

Publication Publication Date Title
AU1326395A (en) Micropump
AU4255797A (en) Dispensing pump
AU1444197A (en) Pump dispenser
AU1956395A (en) Dispenser pumps
AU3257495A (en) Molecular presenting system
AU4536597A (en) Air pump
AUPO188896A0 (en) Pump
AU2694997A (en) Peripheral pump
AU7738294A (en) Molecular pump
EP0800840A3 (en) Peristaltic infusionpump
AU6283694A (en) Sheet-metal-construction pump stage
AUPO215496A0 (en) Pump
AU1210597A (en) Pump assembly
AU4139897A (en) Positive displacement pump
AU3355995A (en) Pump assembly
AU2509897A (en) Peripheral pump
AU1265299A (en) Pump
AU1585495A (en) Fluid pumping
AU2691397A (en) Pump for fluids
AU680178B1 (en) Pump
AU7691596A (en) Pump or motor
AU3903195A (en) Pump
AU661450B3 (en) Pumping unit
AUPM976894A0 (en) Pump
AU5907694A (en) Pumps