CN1012518B - Composite molecular pump - Google Patents
Composite molecular pumpInfo
- Publication number
- CN1012518B CN1012518B CN88104185A CN88104185A CN1012518B CN 1012518 B CN1012518 B CN 1012518B CN 88104185 A CN88104185 A CN 88104185A CN 88104185 A CN88104185 A CN 88104185A CN 1012518 B CN1012518 B CN 1012518B
- Authority
- CN
- China
- Prior art keywords
- turbine
- blade wheel
- pump
- fixed
- wheel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002131 composite material Substances 0.000 title claims abstract description 20
- 150000001875 compounds Chemical class 0.000 claims description 19
- 230000000740 bleeding effect Effects 0.000 claims description 17
- 238000005240 physical vapour deposition Methods 0.000 abstract description 3
- 239000000126 substance Substances 0.000 abstract description 3
- 238000005229 chemical vapour deposition Methods 0.000 abstract description 2
- 238000004377 microelectronic Methods 0.000 abstract description 2
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 238000013329 compounding Methods 0.000 abstract 1
- 238000005086 pumping Methods 0.000 description 9
- 238000007906 compression Methods 0.000 description 4
- 230000006835 compression Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 210000002421 cell wall Anatomy 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000002000 scavenging effect Effects 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000029058 respiratory gaseous exchange Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000005211 surface analysis Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Abstract
A composite molecular pump is composed of a turbo molecular pump stage and a composite exhaust system which are connected in series. The composite exhaust system is formed by matching a composite movable impeller and a stationary impeller which are provided with short turbine blade teeth on the outer circumference and air exhaust grooves on the inner disk surface and compounding the composite movable impeller and the stationary impeller with a cylindrical spiral tooth movable isolating ring. The invention has simple structure, safe and reliable operation, the working range and the vacuum performance greatly exceed those of a turbo molecular pump, and can meet the requirements of physical vapor deposition and chemical vapor deposition of plasma research subjects in the fields of chemical industry, semiconductors, microelectronics, nuclear electronics, energy, space navigation and the like.
Description
The invention belongs to a kind of molecular pump.
Though the turbomolecular pump of extensive use has good high vacuum and ultra high vacuum performance at present, because the restriction of working principle and pump structure, forepressure tolerance is 10
-2The holder magnitude is when the inlet pressure of pump is higher than 10
-2During holder, pumping speed, compression ratio significantly descend.And some application requires pump can bear the prime operating pressure of several holders as physical vapor deposition, chemical gas deposition, is higher than 5 * 10 at inlet pressure
-2The pumping speed of pump will reach 150l/sec during holder.Turbomolecular pump can not satisfy these performance requirements.
Application number is that 8969039 U. S. Patent has proposed a kind of combined pump that adopts multistage disc helical molecule drawing pump and turbomolecular pump tandem compound, it has improved the pumping speed under the High Voltage to a certain extent, yet the working clearance of this class pump only is 0.1 millimeter, and factors such as the inertial force of high speed rotor, thermal expansion all may make pump damage.Simultaneously,, therefore be not used widely so far because this type of pump pumping speed of pump in high vacuum region is lower than turbomolecular pump yet.
Application number provides a kind of disc type turbomolecular pump for 87103982 Chinese invention patent.This pump Rotating Plates disk upper edge circumference is evenly distributed with the short leaf-teeth of turbine, opens several grooves of bleeding on its fixed disk card, evenly distribute along circumference, and it is linear to be radial circular arc.This pump performance has surpassed turbomolecular pump, can partly satisfy above requirement, but owing to have following shortcoming in this pump structure, has limited the raising of this pump performance;
Accompanying drawing 1 is the combination assumption diagram of this pump: the moving isolating ring (1) between the adjacent rotating disk, with fixed disk (2) relative movement, the working clearance that forms is one and leaves enough large-area annular gas molecule circulating area, also is simultaneously to produce the zone that the gas molecule maximum is backflowed.If breathing area dwindles the then circulation of gas molecule and is obstructed.Rotating disk (3) is a circular flat board, has the short leaf-teeth of turbine on the outer circumference.What the inboard disc surface of rotating disk (3) lacked a gas molecule radially drags structure, has only the momentum that passes to a circumferential surface tangent direction of gas molecule by rotating speed, and its Momentum Transfer direction is inconsistent with the direction of bleeding.
Task of the present invention is to avoid the deficiency of above-mentioned molecular pump, and a kind of novel composite structure of composite molecular pump is provided.
Purpose of the present invention can reach by following measure:
1. the turbo-molecular pump stage is connected with compound vent systems;
2. compound vent systems is by being the short leaf-teeth of turbine on the outer circumference, moves isolating ring with the cylindrical screw tooth and is composited for the complex dynamic impeller of the groove of bleeding and dull and stereotyped stationary blade wheel are complementary on the inboard disc face.
3. compound vent systems also can be complementary by the stationary blade wheel that has the groove of bleeding on above-mentioned complex dynamic impeller and the card and be composited with the moving isolating ring of cylindrical screw tooth.
4. moving isolating ring adopts the structural type of cylindrical screw tooth or the short leaf-teeth of turbine.
Turbo-molecular pump stage of the present invention is arranged in the pump case near entry end, form by staggered turbine rotor blade wheel and turbine stationary blade wheel, the turbine rotor blade wheel is fixed in the rotating shaft, and the turbine stationary blade wheel is fixed in the pump case, and this compound vent systems is placed in the pump case near outlet end.Compound vent systems is made up of the movable vane wheel and the stationary blade wheel of the short leaf-teeth of staggered band turbine, the movable vane wheel is fixed in the same rotating shaft, stationary blade wheel is fixed in the pump case, adjacent movable vane wheel is spaced apart by the moving isolating ring that is fixed in the same rotating shaft, movable vane is taken turns inboard card and is had the groove of bleeding, moving isolating ring circumferential surface is provided with the cylindrical screw tooth, or adopts the short leaf-teeth structure of turbine.
Describe structure of the present invention and working condition in detail below in conjunction with accompanying drawing, wherein:
Accompanying drawing 1 is existing disc type turbomolecular pump combination assumption diagram;
Accompanying drawing 2 is a composite molecular pump combination assumption diagram of the present invention;
Accompanying drawing 3a is the structural drawing of compound movable vane wheel (9);
Accompanying drawing 3b is the structural drawing of the moving isolating ring (11) of cylindrical screw tooth;
Accompanying drawing 4 is descriptions of accompanying drawing 2 working conditions.
Referring to accompanying drawing 2, whole extract system of the present invention is installed in the pump case (5), and the bleed complex dynamic impeller (9) of groove and the short leaf-teeth of turbine and the moving isolating ring (11) of cylindrical screw tooth of some grades of turbine rotor blades wheel (7) and some grades of bands is fixedly mounted on rotating shaft (6) and goes up the composition vane rotor.Turbine stationary blade wheel (8), stationary blade wheel (10) is fixed on the pump-foot (13) by quiet isolating ring (12).(7) are alternate vertically is staggered for turbine stationary blade wheel (8) and turbine rotor blade wheel, are the turbine rotor blade wheel near the first order at pumping hole place.Stationary blade wheel (10) is alternate vertically with complex dynamic impeller (5) to be staggered, and the last level of the relief opening of close pump is a complex dynamic impeller, or the turbine rotor blade wheel.The rotation of motor driving movable vane wheel rotor high-speed, the relative movement of sound impeller produces the good usefulness of bleeding.
Accompanying drawing 1 is the description of the composite molecular pump working condition of the present invention shown in the accompanying drawing 2:
(A) be the turbo-molecular pump stage, be called turbine stage.The trend of gas molecule is an axial flow.
(B) be compound vent systems: be called compound level.The trend of gas molecule is axial, radially alternating change.
Arrow and dotted line are represented the direction of bleeding among the figure.
Go up the movable vane wheel that the afterbody of installing is the band leaf-teeth of one-side gaining in rotating shaft (6).Also can be the turbine rotor blade wheel, this be the afterbody of the whole extract system of pump, is installed in the relief opening upper end of pump.
It plays the scavenging action of centrifugal pump in entire work process: when motor begins the rotation of drives impeller rotor, the groove of bleeding on the inboard card of impeller drags static gas molecule and begins to produce export-oriented runoff, by the turbine leaf-teeth on the impeller outer circumference gas molecule is transformed into axial flow by Radial Flow and discharges pumping hole.Along with the acceleration rotation of motor, the centrifugal action of movable vane wheel strengthens, and the momentum that impeller passes to gas molecule increases, and flowing of gas molecule just accelerated, and air displacement increases.Upwards analogize according to this, each grade exhaust stage (14) that complex dynamic impeller and stationary blade wheel constitute provides effective scavenging action simultaneously.When the normal high speed rotating of motor, each grade exhaust stage (14) provides the maximum effect of bleeding for the whole extract system of pump.
The exhaust stage (14) that complex dynamic impeller and stationary blade wheel constitute provides effectively bleeds and is equivalent to transstage (15) to the moving isolating ring of cylindrical screw tooth and stationary blade wheel inner ring surface formation the fore pump level of bleeding is provided, the pumping performance that transstage (15) is had is fully played, the compression stage that assistance is made of complex dynamic impeller and stationary blade wheel (16) work of bleeding, the benefit of bleeding that compression stage has been given play to is higher than the exhaust capacity that it has.
Turbine stage (A) is connected with compound level (B), constitutes a kind of extract system of composite molecular pump, and its compound level is equivalent to provide a fore pump for the extract system of entire pump, makes the working state of composite molecular pump be in the optimum state.
The complex dynamic impeller of compound vent systems of the present invention, the short leaf-teeth of the turbine in the outside leave the groove cell wall of bleeding with inboard card and link to each other.
The complex dynamic impeller of compound vent systems of the present invention, the groove cell wall of bleeding of its inboard can adopt circular arc linear, or spiral of Archimedes shape.
The embodiment of the invention shown in Figure 2
At least by pump case (5), rotating shaft (6), turbine rotor blade wheel (7), the bleed complex dynamic impeller (9) of the short leaf-teeth of groove and turbine of turbine stationary blade wheel (8), band, stationary blade wheel (10), the cylindrical screw tooth moves isolating ring (11), and part such as quiet isolating ring (12), pump-foot (13) is formed.
Turbine is selected 10 grades for use, and the composite structure vent systems is selected 9 grades for use, and the groove of bleeding of complex dynamic impeller card inboard selects for use circular arc linear, and groove depth is successively decreased for 6 millimeters to 2 millimeters; Its leaf-teeth length is 11 millimeters to 4 millimeters and successively decreases.
The inlet flange internal diameter of pump is elected 150 millimeters as, and movable vane wheel maximum outside diameter is 174 millimeters.This composite molecular pump when Molecular flow to N
2Pumping speed improved 22% than existing turbomolecular pump.Improve 10% than existing disc type turbomolecular pump.5 * 10
-2During the torr High Voltage to N
2Pumping speed be 3.3 times of turbomolecular pump, be 2.3 times of disc type turbomolecular pump, to H
2Compression ratio be 4.3 times of turbomolecular pump, be 1.25 times of disc type turbomolecular pump.
Each progression of above-mentioned composite molecular pump, each structural parameter can be done suitably increase and decrease and adjustment according to concrete needs.
Composite molecular pump provided by the invention, features simple structure, the impeller sum has reduced than turbomolecular pump, and the impeller working clearance is 0.5 millimeter to 1.5 millimeters, and assembly technology is easy, and it is safe and reliable to turn round.Its operating range and vacuum performance have substantially exceeded turbomolecular pump, can replace turbomolecular pump, and existing all kinds of molecular pumps.
The present invention can be widely used in the manufacturing of electronic device, surface analysis, and thin film technique, plasma technique, accelerator, electronics show fields such as mirror.
The present invention satisfies the plasma research topic physical vapor deposition of applications such as chemical industry, semiconductor, microelectronic, nuclear electron, the energy, aerospace, the needs of chemical vapor deposition.
Claims (3)
1, a kind of composite molecular pump, be in series by turbo-molecular pump stage and compound vent systems, this turbo-molecular pump stage is arranged in the pump case near entry end, form by staggered turbine rotor blade wheel and turbine stationary blade wheel, the turbine rotor blade wheel is fixed in the rotating shaft, the turbine stationary blade wheel is fixed in the pump case, this compound vent systems is arranged in the pump case near outlet end, it is characterized in that this compound vent systems has the movable vane wheel and the stationary blade wheel of the short leaf-teeth of staggered band turbine, described movable vane wheel is fixed in the same rotating shaft, described stationary blade wheel is fixed in the pump case, adjacent described movable vane wheel is spaced apart by the moving isolating ring that is fixed in the same rotating shaft, described movable vane is taken turns inboard card and is provided with the groove of bleeding, and described moving isolating ring circumferential surface is provided with the cylindrical screw tooth.
2, a kind of composite molecular pump, be in series by turbo-molecular pump stage and compound vent systems, this turbo-molecular pump stage is arranged in the pump case near entry end, form by staggered turbine rotor blade wheel and turbine stationary blade wheel, the turbine rotor blade wheel is fixed in the rotating shaft, the turbine stationary blade wheel is fixed in the pump case, this compound vent systems is arranged in the pump case near outlet end, it is characterized in that this compound vent systems is taken turns by the movable vane of the short leaf-teeth of staggered band turbine and stationary blade wheel is formed, the movable vane wheel is fixed in the same rotating shaft, stationary blade wheel is fixed in the pump case, adjacent movable vane wheel is spaced apart by the moving isolating ring that is fixed in the same rotating shaft, movable vane is taken turns inboard card and is had the groove of bleeding, and moving isolating ring adopts the short leaf-teeth structure of turbine.
3,, it is characterized in that near the last level in the exhaust ports rotating shaft of pump be turbine leaf-teeth movable vane wheel according to claim 1 or 2 said composite molecular pumps.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN88104185A CN1012518B (en) | 1988-07-12 | 1988-07-12 | Composite molecular pump |
| DE19893922782 DE3922782A1 (en) | 1988-07-12 | 1989-07-11 | Molecular pump in a unit design |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN88104185A CN1012518B (en) | 1988-07-12 | 1988-07-12 | Composite molecular pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1039287A CN1039287A (en) | 1990-01-31 |
| CN1012518B true CN1012518B (en) | 1991-05-01 |
Family
ID=4832909
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN88104185A Expired CN1012518B (en) | 1988-07-12 | 1988-07-12 | Composite molecular pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1012518B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5412239B2 (en) * | 2009-02-24 | 2014-02-12 | 株式会社島津製作所 | Turbo molecular pump and particle trap for turbo molecular pump |
| JP6616560B2 (en) * | 2013-11-28 | 2019-12-04 | エドワーズ株式会社 | Vacuum pump parts and composite vacuum pump |
| JP6228839B2 (en) | 2013-12-26 | 2017-11-08 | エドワーズ株式会社 | Vacuum exhaust mechanism, combined vacuum pump, and rotating body parts |
| CN106609826A (en) * | 2015-10-27 | 2017-05-03 | 熵零控股股份有限公司 | Power transmission unit |
| CN108869339A (en) * | 2018-08-30 | 2018-11-23 | 太仓市凯福士机械有限公司 | A kind of turbomolecular pump |
-
1988
- 1988-07-12 CN CN88104185A patent/CN1012518B/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| CN1039287A (en) | 1990-01-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C06 | Publication | ||
| PB01 | Publication | ||
| C13 | Decision | ||
| GR02 | Examined patent application | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C15 | Extension of patent right duration from 15 to 20 years for appl. with date before 31.12.1992 and still valid on 11.12.2001 (patent law change 1993) | ||
| OR01 | Other related matters | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |