CN1025574C - Runoff type molecule pump - Google Patents
Runoff type molecule pump Download PDFInfo
- Publication number
- CN1025574C CN1025574C CN 87101116 CN87101116A CN1025574C CN 1025574 C CN1025574 C CN 1025574C CN 87101116 CN87101116 CN 87101116 CN 87101116 A CN87101116 A CN 87101116A CN 1025574 C CN1025574 C CN 1025574C
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- Prior art keywords
- bleeding
- molecular pump
- unit
- pump
- wheel
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- Expired - Fee Related
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Abstract
The present invention relates to a mechanical vacuum pump with high rotation speed, which belongs to a molecular pump. The present invention is structurally characterized in that a plurality of rows of blades are equidistantly distributed on each movable impeller and each static impeller, and the single end of each blade is connected with the plane of an impeller. One or two air suction blade slots with a dragging surface are arranged on the impeller. The different impeller structures can be coaxially installed and can be combined or combined with common pumps to form radial molecular pumps in the types of parallel connection, series connection and integration of parallel connection and series connection. The pump has the advantages of simple structure and convenient machining, accelerated pumping speed, increased work pressure and reduced cost.
Description
The present invention relates to a kind of molecular pump.
Chinese patent CN-85105304A discloses a kind of dish type drive molecular pump, though this pump compression ratio is higher, pumping speed is lower, has limited further promoting the use of of it.
The purpose of this invention is to provide and a kind ofly have two and drag face, novel runoff type molecule pump (abbreviation radial flow pump) that pumping speed is higher, and the composite vacuum pump that constitutes of this pump and other rotating machinery vacuum pumps.
Molecular pump provided by the invention, comprise movable vane wheel, motive sealing, rotating shaft, stationary blade wheel, pump case, suction port and relief opening, the movable vane wheel is fixed in the rotating shaft, stationary blade wheel and motive sealing are fixed on the pump case, it is characterized in that: have the two unit of bleeding substantially that drag face of one-level in the impeller combination that described movable vane wheel, stationary blade wheel constitute at least, this unit of bleeding substantially comprises:
1. the movable vane wheel is made of two flat disks, has at least a dish being provided with pore near rotating shaft place in two disks.
2. stationary blade wheel is made up of some spiral blades and fixing device, stationary blade wheel is installed in the middle of the two movable vanes wheel, space on the stationary blade wheel between the movable vane of two adjacent blades and the both sides wheel constitutes one and has two grooves of bleeding that drag face, between movable vane wheel and the stationary blade wheel, between movable vane wheel and the pump case, all leave the working clearance between stationary blade wheel and the rotating shaft, wherein the radial clearance double as gas channel between movable vane wheel and pump case and stationary blade wheel and the rotating shaft.
3. motive sealing is installed in the outside of the movable vane wheel that is provided with pore, motive sealing take turns with movable vane and rotating shaft between at radial and axial working clearance, wherein the radial clearance double as gas channel between motive sealing and the rotating shaft of leaving.
It is thin interior thick that the above-mentioned unit of bleeding substantially can be processed into moving impeller outer, and stationary blade wheel is outer thick interior thin, and dynamic and static impeller is axially leaving the equal working clearance.
The stationary blade wheel blade of the above-mentioned unit of bleeding substantially and the optimum value of the angle between the radius are 50 °-75 °.The number of blade in the stationary blade wheel outside can be more than the number of blade of inboard.
Change the sense of rotation of the true dip direction or the movable vane wheel of stationary blade wheel blade, can change the direction of bleeding.
The above-mentioned unit of bleeding substantially can constitute a molecular pump with practical value separately.Yet, the some grades of coaxial installations in unit of bleeding substantially, identical as if the true dip direction of adjacent secondary stationary blade wheel blade, can constitute parallel connection bleed, if the true dip direction of adjacent secondary stationary blade wheel blade is opposite, can constitute series connection bleeds, with the suitable series and parallel combination in the multistage unit of bleeding, can constitute a better molecular pump of performance.
Above-mentioned single-stage or multistage radial flow pump and other molecular pump, the coaxial installation of rotary machine pump, series connection is bled, and can also constitute the composite vacuum pump of various function admirables.
Advantage of the present invention:
1. the radial flow pump of the present invention's proposition is simple in structure, easy to process, and pumping speed and compression ratio are higher, and can constitute the multistage pump of series and parallel combination.
The radial-flow type single-stage that proposes of the present invention and many-level molecule pump can be with other molecular pump and the coaxial installation of rotary machine vacuum pump, form the composite vacuum pump of various function admirables.
Below in conjunction with drawings and Examples the present invention is further described.
Fig. 1 is the schematic representation of single-stage radial flow pump of the present invention.
Fig. 2 is the front view of stationary blade wheel of the present invention.
Fig. 3 is the side view of stationary blade wheel of the present invention.
Fig. 4 is the schematic representation of multistage radial flow pump of the present invention.
Fig. 5 is the schematic representation of compound radial flow pump of the present invention.
Fig. 6 is the schematic representation of composite molecular pump of the present invention.
In the accompanying drawing, 1. movable vane wheel, 2. stationary blade wheel, 3. one-sided dish type pump stationary blade wheel, 4. rotating shaft, 5. pump case, 6. be communicated with pore, 7. blade, 8. internal fixation ring, 9. outer fixing ring, 10. bilateral dish type pump stationary blade wheel, 11. suction ports, 12. relief openings, 13. motors, 14. turbomolecular pump movable vanes wheel, 15. turbomolecular pump stationary blade wheels.
Embodiment 1: the single-stage radial flow pump
The single-stage runoff type molecule pump takes turns 1 by movable vane, stationary blade wheel 2, motive sealing 3, compositions such as rotating shaft 4 and pump case 5 as shown in Figure 1.
Embodiment 2: multistage radial flow pump
Multistage radial flow pump is made up of the some grades of coaxial installations of radial flow pump, multistage radial flow pump shown in Fig. 4 is by 5 movable vane wheels 1, three quiet take turns 2 and the motive sealing 10 that connects together of secondary form, middle three movable vanes wheel is provided with uniform connection pore 6, the true dip direction of two stationary blade wheel blades on right side is identical, the direction of bleeding is from constituting the secondary parallel connection impeller of bleeding outside to inside, the true dip direction of the stationary blade wheel blade in left side is opposite with the true dip direction of right side two stationary blade wheel blades, bleed direction from inside to outside, constitute to connect and bleed with the right side secondary parallel connection impeller of bleeding, motive sealing 10 is made up of two dish type pump stationary blade wheels 10 that connect together, a left side, the true dip direction of right side dish type pump stator blade wheel blade groove respectively with a left side, the true dip direction of right side radial flow pump stationary blade wheel blade is identical, this pump bleed direction as shown in phantom in Figure 4, impeller parameters is with embodiment 1.
Embodiment 3: composite molecular pump
Composite molecular pump is by pump case, rotating shaft, compositions such as some grades of radial flow pump impellers and dish type pump impeller, combined pump shown in Fig. 5 is by 11 movable vane wheels 1, six radial flow pump stationary blade wheels 2, four bilateral dish type pump stationary blade wheels 10 and two one-sided dish type pump stationary blade wheels 3 are formed, the true dip direction of middle four radial flow pump stationary blade wheel blades is identical, constitute from parallel connection outside to inside and bleed, two the radial flow pump stationary blade wheels in both sides bleed direction from inside to outside, constitute to connect with middle level Four radial flow pump and bleed, a left side, right outermost respectively also has two dish type pump stationary blade wheels 10 and 3 to constitute the dish type pump that three grades of series connection are bled respectively, and drag pump impeller to constitute to connect with its inboard two and bleed, the body of waiting to bleed enters the pump housing by suction port 11, then, pass through the radial flow pump impeller that middle level Four parallel connection is bled successively, the dish type pump impeller that the single-stage radial flow pump impeller of both sides and two outermost three grades of series connection are bled is extracted into relief opening 12, take away by fore pump at last, between the impeller that adjacent parallel connection is bled without motive sealing.
Embodiment 4: composite molecular pump
The compound radial flow pump that single-stage or multistage footpath pump or itself and dish type pump constitute can constitute composite molecular pump with turbomolecular pump, composite molecular pump shown in Figure 6 is by pump case 5, rotating shaft 4, motor 13, four turbomolecular pump movable vane wheels 14, four turbomolecular pump stationary blade wheels 15, three radial flow pump movable vane wheels 1, a radial flow pump stationary blade wheel 2, a bilateral dish type pump stator blade 10 and a composition such as one-sided dish type pump stator blade 3, middle radial flow pump movable vane wheel inboard is provided with to be communicated with on the pore 6(figure and does not show), radial flow pump and dish type pump impeller are formed the compound radial flow pump that series connection is bled among the figure, this compound radial flow pump constitutes to connect with turbine molecule pump impeller bleeds, the body of waiting to bleed enters the pump housing by suction port 11, the axial-flow turbine molecule pump impeller 13 of bleeding through 8 grades of series connection, 14, the compound radial flow pump of bleeding through the series connection of below is extracted into relief opening 12 again, taken away by fore pump then, the parameter of radial flow pump impeller is with embodiment 1.
Embodiment 5: composite vacuum pump
Single-stage or multistage radial flow pump, the perhaps composite molecular pump and the coaxial installation of rotating machinery vacuum pump that constitute of they and drive molecular pump and turbine molecule pump impeller, formation composite vacuum pump.The relief opening of molecular pump part links to each other with the mechanical vacuum pump steam inlet.
Claims (12)
1, a kind of molecular pump, form by movable vane wheel, motive sealing, rotating shaft, stationary blade wheel, pump case, suction port and relief opening etc., the movable vane wheel is fixed in the rotating shaft, stationary blade wheel and motive sealing are fixed on the pump case, it is characterized in that: have the two unit of bleeding substantially that drag face of one-level in the impeller combination that described movable vane wheel, stationary blade wheel constitute at least, this unit of bleeding substantially comprises:
(1) two movable vane wheel that flat disk constitutes has at least a dish being provided with pore near rotating shaft place in two disks, and transfers sealing in this disk outside;
(2) stationary blade wheel is made up of some spiral blades and fixing device, stationary blade wheel is installed in the middle of the two movable vanes wheel, space on the stationary blade wheel between the movable vane of two adjacent blades and the two sides wheel constitutes one and has two grooves of bleeding that drag face, between dynamic and static impeller, rotating shaft, the pump case radially with axially leave the working clearance, radial clearance double as gas channel;
(3) motive sealing is installed in the outside of the movable vane wheel that is provided with pore, motive sealing take turns with movable vane and rotating shaft between at radial and axial working clearance, the radial clearance double as gas channel of leaving.
2, molecular pump according to claim 1, thick in the moving impeller outer of the wherein said unit of bleeding substantially is thin, stationary blade wheel is outer thick interior thin.
3, molecular pump according to claim 1 and 2 is characterized in that the described unit of bleeding substantially, and the angle between stationary blade wheel blade and the radius is 50 °-75 °.
4, molecular pump according to claim 1 and 2 is characterized in that the described unit of bleeding substantially, and the lobe numbers in the impeller outside is more than the lobe numbers of inboard, and adjacent bleeding do not add motive sealing between the unit.
5, molecular pump according to claim 1 and 2 is characterized in that in the impeller combination the multistage coaxial installation in unit of bleeding substantially being arranged, and these unit of bleeding substantially direction of bleeding is identical, constitutes parallel connection and bleeds.
6, molecular pump according to claim 1 and 2 is characterized in that in the impeller combination the multistage coaxial installation in unit of bleeding substantially being arranged, and bleed the substantially direction of bleeding of unit of adjacent secondary is opposite, forms parallel connection and bleeds.
7, molecular pump according to claim 1 and 2 is characterized in that in the impeller combination the multistage coaxial installation in unit of bleeding substantially being arranged, and bleeds near the unit parallel connection of bleeding substantially of air inlet side, bleeds near the units in series of bleeding substantially of exhaust side.
8, molecular pump according to claim 1 and 2 is characterized in that constituting composite molecular pump near the drive molecular pump that exhaust side is provided with one-level dish-type drive molecular pump at least or the other types unit of bleeding.
9, molecular pump according to claim 1 and 2 is characterized in that being provided with at least the one-level turbomolecular pump unit of bleeding near air inlet side, constitutes composite molecular pump.
10, molecular pump according to claim 1 and 2 is characterized in that its exhaust side is provided with coaxial rotating machinery vacuum pump, constitutes composite vacuum pump.
11, molecular pump according to claim 6 is characterized in that constituting composite molecular pump near the drive molecular pump that exhaust side also is provided with one-level dish-type drive molecular pump at least or the other types unit of bleeding.
12, molecular pump according to claim 10 is characterized in that also being provided with at least the one-level turbomolecular pump unit of bleeding near air inlet side, constitutes composite molecular pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 87101116 CN1025574C (en) | 1987-10-10 | 1987-10-10 | Runoff type molecule pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 87101116 CN1025574C (en) | 1987-10-10 | 1987-10-10 | Runoff type molecule pump |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 92101746 Division CN1070991A (en) | 1992-03-07 | 1992-03-07 | Radial-flow turbine molecular pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1032574A CN1032574A (en) | 1989-04-26 |
| CN1025574C true CN1025574C (en) | 1994-08-03 |
Family
ID=4813197
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 87101116 Expired - Fee Related CN1025574C (en) | 1987-10-10 | 1987-10-10 | Runoff type molecule pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1025574C (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100354589C (en) * | 2003-11-24 | 2007-12-12 | 深圳大学 | Vacuum smelting furnace |
| CN100513798C (en) * | 2005-10-10 | 2009-07-15 | 储继国 | Dual-drive molecular pump |
| JP5767644B2 (en) * | 2010-09-28 | 2015-08-19 | エドワーズ株式会社 | Exhaust pump |
| CN102889219B (en) * | 2011-07-18 | 2016-05-11 | 李晨 | Disk type molecular pump |
| CN103994085B (en) * | 2014-06-05 | 2017-02-22 | 核工业理化工程研究院 | Embedded molecular pump capable of measuring pressure ratio |
| CN109441875A (en) * | 2018-12-25 | 2019-03-08 | 大连金刚科技有限责任公司 | Impeller and gas pump |
| CN110778527B (en) * | 2019-12-06 | 2020-05-08 | 台州轩辕国际贸易有限公司 | Control method of high-lift submersible pump |
-
1987
- 1987-10-10 CN CN 87101116 patent/CN1025574C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN1032574A (en) | 1989-04-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C15 | Extension of patent right duration from 15 to 20 years for appl. with date before 31.12.1992 and still valid on 11.12.2001 (patent law change 1993) | ||
| OR01 | Other related matters | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |