CN1032574A - Runoff type molecule pump - Google Patents
Runoff type molecule pump Download PDFInfo
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- CN1032574A CN1032574A CN 87101116 CN87101116A CN1032574A CN 1032574 A CN1032574 A CN 1032574A CN 87101116 CN87101116 CN 87101116 CN 87101116 A CN87101116 A CN 87101116A CN 1032574 A CN1032574 A CN 1032574A
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Abstract
The invention belongs to the high-speed mechanical vacuum pump of molecular pump class, its structural feature is: the blade that has plurality of rows to equidistantly distribute on each sound impeller, and the single-ended and paddle wheel plane of blade links to each other; Have one or two to drag the leaf groove of bleeding of face on the impeller, above-mentioned different blade wheel structure can coaxially be installed, and can be combined into parallel connection, connect between them or with conventional pump, series-parallel runoff type molecule pump; This pump structure is simple, and is easy to process, improved pumping speed and operating pressure, reduced cost.
Description
The invention belongs to high-speed mechanical vacuum pump, the molecular pump class, this pump is mainly used in fields such as film, plasma, surface analysis, accelerator and vacuum device and microelectronic component manufacturing.
The existing product molecular pump is called for short common molecular pump, all adopts the turbine shaft streaming, and operating pressure is lower, and complex structure costs an arm and a leg, and pumping speed is lower, has limited further applying of molecular pump.
U.S. Pat 3322334(1967) proposed a kind of runoff type molecule pump structure, the pumping speed of pump is significantly improved, yet, owing to adopt long blade structure, when rotor high-speed rotated, the axial blade that is installed on the rotor field spider was born very big stress, needed to install some reinforcing device. on the blade, so that structure is more complicated than common molecular pump, in addition, with four row's turbine blade rows are arranged, compression ratio is very low usually for this structure, therefore, fail to be used for the products molecule pump so far.
It is higher to the purpose of this invention is to provide a kind of pumping speed and operating pressure, simple in structure, novel runoff type molecule pump easy to process.
The present invention is achieved in that
The single-stage runoff type molecule pump impeller sets that the present invention is made up of movable vane wheel, rotating shaft, stationary blade wheel and pump case etc. constitutes basic structure.The movable vane wheel is fixed in the rotating shaft, on the stationary blade wheel fixed pump shell.In the dynamic and static impeller, have at least a side to be provided with blade that links to each other with paddle wheel plane inclination, single-ended or leaf groove, blade or leaf groove and impeller constitute overall structure, thereby impeller And easy to assembly can constitute the multistage runoff type molecule pump of Chuan, And connection or its combination with the some grades of coaxial installations of impeller.
Basic structure of the present invention is divided into three kinds:
First kind of structure is radial-flow turbine molecular pump.
In this structure, one side of movable vane wheel has the row blade row concentric with rotating shaft at least, each blade row is made of some uniform blades, blade is vertical with paddle wheel plane, blade is single-ended to link to each other with paddle wheel plane, angle between blade and the impeller radius is 50 °～75 °, the blade lean angle of same blade row is identical, and the blade lean angle of different blade rows can be different, still, the blade lean direction of same impeller side should be identical, in the same blade row, the clearance t of blade on the circumferencial direction of blade row place is with the ratio of width of blade b, the empty string that is blade is 0.8～1.2 than the optimum value of t/b, and the number of blade of each blade row is usually between 15～80.
One side of stationary blade wheel also has the row blade row concentric with rotating shaft at least, and the structure of blade and optimum value are identical with the movable vane impeller blade in the blade row, but the true dip direction of blade is opposite, and the thickness of blade is also thinner.The radial position of blade row should be taken turns the position fork of blade row with movable vane on the stationary blade wheel.
After dynamic and static impeller sets installed, its blade row replaced interfix, was radially leaving certain working clearance with axle, wherein the passage of the big double as gas flow in gap between the movable vane wheel outside and pump case and stationary blade wheel inboard and the rotating shaft.Blade alternate on the dynamic and static impeller after the assembling changes true dip direction.
When movable vane wheel high speed rotating, this has just constituted a radial-flow turbine molecular pump to impeller.
If the arranged radially of a pair of radial-flow turbine molecular pump impeller has n row blade row, so, this equates substantially to the compression ratio of the impeller compression ratio will be with the only common molecular pump impeller serial work of n the time.The value of n can reach more than 10 usually.This shows that the compression ratio of radial-flow turbine molecular pump is very high.
The pumping speed of radial-flow turbine molecular pump is directly proportional with length of blade.Because movable vane wheel high speed rotating, the root of movable vane wheel upper blade bears very big stress, and the length square of the size of stress and the radius of blade, rotating speed square and blade is directly proportional, and is inversely proportional to the thickness of blade.Suitably increase the thickness of root of blade, can make the blade in the rotation be in work under the iso-stress state, length of blade can increase more than 40%.The pumping speed of a pair of radial-flow turbine molecular pump impeller is equivalent to 1/3～1/2 of common molecular pump pumping speed usually.
Change the sense of rotation of movable vane wheel, perhaps change the true dip direction of dynamic and static impeller blade, can change the direction of radially bleeding.
In the above-mentioned radial-flow turbine molecular pump, the spacing t of blade equates substantially.If blade processing is become not uniform thickness shape, gradually crooked shape blade in the perhaps similar turbomachinery, make in the blade row perpendicular distance between adjacent blades less by air inlet side place, bigger near the side place of giving vent to anger, then can further improve the compression ratio of radial-flow turbine molecular pump when under the High Voltage condition, working.This structure also can be used for gas compressor.
When the movable vane wheel, when perhaps the stationary blade wheel bilateral all has blade row ， And and takes turns the formation radial-flow turbine molecular pump with corresponding quiet, movable vane respectively, should be considered as two stage pump.
Second kind of structure is the dish type drive molecular pump, is called for short the dish type pump.
In this structure, stationary blade wheel is a planar disc, and a side of stationary blade wheel has the spiral groove of bleeding at least, and the shape approximation of groove is a logarithmic spiral.Groove depth is 0.03～0.06 with the optimum value of the ratio of blade radius.About 1 millimeter of the thickness of cell wall.Angle optimum value between spiral chute and impeller radius is 50 °～75 °.The optimum value of groove number is 10～30.
The movable vane wheel is by flat disk, and perhaps outer thin interior thick moving back dialled the shape disk and constituted.
When dynamic and static impeller is assembled, axially and radially leaving certain working clearance respectively.Groove has adopted log spiral owing to bleed, and the axial clearance between dynamic and static impeller can increase.Between the movable vane wheel outside and the pump case and the gap between stationary blade wheel inboard and the rotating shaft should be bigger, the passage of double as gas flow.When movable vane wheel high speed rotating, at this moment impeller has just constituted the one-level runoff type molecule pump.
Compression ratio when the compression ratio of single stage disk shaped pump is bled to 3～4 grades of common molecular pump impeller serials is similar, and pumping speed is 1/20～1/10 of a common molecular pump.
The sense of rotation that changes spiral fluted true dip direction or change movable vane wheel can change the direction of radially bleeding.
The movable vane wheel construction of dish type pump is simple, processing, easy to assembly, and therefore, manufacture cost is lower.
All there is the helical groove of bleeding the stationary blade wheel both sides, and And forms when bleeding the unit with discoid movable vane wheel respectively, should be considered as two stage pump.
The third structure is called for short two pumps that drag for two face shape molecular pumps that drag.
In this structure, movable vane is taken turns by two flat disks, or shape disk formation is dialled in two outer thin interior thick moving back.In two disks, have at least a disk being provided with several uniform pores, constitute the inlet, outlet passage near rotating shaft place.
Stationary blade wheel is in the form of annular discs, is made of inside and outside two ring sets, is fixing some helical blades between two ring sets, inner ring sleeve sometimes can, the decision of the intensity of optic lobe sheet.The shape approximation of blade is a logarithmic spiral, and the optimum value of angle is 50 °～75 ° between blade and impeller radius.About 1 millimeter of the thickness of blade.Width of blade (in the axial direction) is 0.03～0.08 with the optimum value of the ratio of impeller radius.The best number of blade is 8～25.
Stationary blade wheel is installed in the middle of two movable vane wheel disks, and dynamic and static impeller axially and is radially leaving the working clearance respectively, wherein the gap double as gas flow channel between the movable vane wheel outside and pump case and stationary blade wheel inboard and the rotating shaft.
When movable vane wheel high speed rotating, at this moment impeller has just constituted the one-level runoff type molecule pump.
In this structure, the groove of bleeding is made of adjacent two stationary blade wheel blades and two movable vane wheel disks, in each groove of bleeding, the surface of two high-speed motions is arranged, i.e. the internal surface of two movable vane wheel disks.Therefore, we claim that it is two face shape molecular pumps that drag.
Two pumping speed that drag pump are two times of dish type pump, compression ratio be the dish type pump square doubly.
Change the true dip direction of stationary blade wheel blade, perhaps the sense of rotation of movable vane wheel just can change two directions of bleeding that drag pump.
Because reasons in structure, between two suction ports that drag pump and air outlet, there is intrinsic short-channel, therefore, the movable vane wheel outside being provided with pore should add dynamic seal apparatus, for example, adds one-level dish type pump.
Above-mentioned three kinds of basic structures all can constitute a molecular pump with practical value separately.Yet, close by Chuan, And joint group each other, and the Chuan, And joint group of they and common molecular pump closes, just can constitute a better runoff type molecule pump of performance, perhaps runoff, the hybrid molecular pump of axial flow.
With some the coaxial installations of single-stage runoff type molecule pump, adjacent dynamic and static impeller upper blade, or the true dip direction of leaf groove is opposite respectively, thereby the direction of radially bleeding of adjacent two stage pump is alternately changed, and just can constitute the multistage runoff type molecule pump that a series connection is bled.The progression of series connection impeller sets can increase arbitrarily in principle, and its compression ratio is approximately the product of impeller sets compression ratios at different levels.
With some the coaxial installations of single-stage runoff type molecule pump, adjacent dynamic and static impeller upper blade, or the true dip direction of leaf groove is identical respectively, thus make the direction of bleeding of impellers at different levels identical; Simultaneously, establish several uniform connection pores at the movable vane wheel near the place that rotating shaft place gas converges; The gas communication pore then also should be established at stationary blade wheel near the pump case place if there is not ready-made gas communication passage in the stationary blade wheel outside, but needn't be uniform; Just can constitute the multistage runoff type molecule pump of a parallel operation.
The impeller sets that parallel connection is bled for example is less than 10 grades not really for a long time, and its total pumping speed is similar to impeller pumping speed sums at different levels.
Two the dragging in the pump that Zai And connection is bled, the motive sealing between the adjacent secondary can be removed.
With Chuan Lian with the coaxial installation of multistage runoff type molecule pump of And connection can be formed the multistage runoff type molecule pump that Chuan, And joint group closes.In order to obtain best pumping performance, usually, to bleed near the impeller Cai Yong And connection of suction port, the impeller of close air outlet adopts series connection to bleed.
Basic structure with three kinds of runoff molecular pump impellers, perhaps their Chuan, And joint group closes and the coaxial installation of plain shaft streaming turbomolecular pump, and between aial flow impeller and radial flow impeller, stay bigger axial clearance, 5 millimeter for example, constitute air-flow by the passage that axially turns to Radial Flow, just can constitute a runoff, the hybrid molecular pump of axial flow.
With the runoff type molecule pump and single-stage or the coaxial installation of twin-stage rotating machinery vacuum pump of above-mentioned single-stage or Duo Ji And connection, series connection or Chuan, And connection, the air outlet of molecular pump directly links to each other with the suction port of mechanical pump, can constitute a kind of composite vacuum pump of novelty.
Advantage of the present invention:
1. three kinds of runoff type molecule pump blade wheel structures of the present invention's proposition are simple, are convenient to the coaxial installation of multi-stage impeller, constitute the multistage runoff type molecule pump that series connection ， And connection or Chuan, And joint group close.
2. the composite molecular pump that constitutes by the synthetic multistage runoff type molecule pump of three kinds of basic structure Chuan, And joint groups and they and common molecular pump, simple in structure, impeller progression reduces 40% at least than common molecular pump, the corresponding decline of cost, pumping speed also can improve.
3. the runoff type molecule pump impeller of the present invention's proposition adopts short length of blade, or adopts the leaf groove structure of drive molecular pump, and therefore, operating pressure is higher.Usually, suction port pressure can reach more than 0.1 holder, and air outlet pressure can reach several holders, exceeds more than 10 times than common molecular pump respectively.
Below in conjunction with drawings and Examples the present invention is further described.
Fig. 1 is a single-stage radial-flow turbine molecular pump of the present invention.
Fig. 2 is the front view of movable vane wheel 1 of the present invention.
Fig. 3 is the left side view of movable vane wheel 1 of the present invention.
Fig. 4 is the front view of stationary blade wheel 3 of the present invention.
Fig. 5 is the left side view of stationary blade wheel 3 of the present invention.
Fig. 6 is the structural representation of single-stage radial-flow type dish type drive molecular pump of the present invention.
Fig. 7 is the front view of dish type drive molecular pump stationary blade wheel 6 of the present invention.
Fig. 8 is the left side view of dish type drive molecular pump stationary blade wheel 6 of the present invention.
Fig. 9 is the two schematic representation that drag face shape molecular pump of single-stage radial-flow type of the present invention.
Figure 10 is the two front views that drag face shape molecular pump stationary blade wheel 8 of the present invention.
Figure 11 is the two left side views that drag face shape molecular pump stationary blade wheel 8 of the present invention.
Figure 12 is the present invention's runoff type molecule pump structural representation of connecting.
Figure 13 is this Fa Ming And connection runoff type molecule pump structural representation.
Figure 14 is a Chuan, And connection runoff type molecule pump structural representation of the present invention.
Figure 15 is the horizontal radial-flow turbine molecular pump structural representation of the present invention.
Figure 16 is the vertical runoff of the present invention, the hybrid molecular pump structural representation of axial flow.
In the accompanying drawing: 1-movable vane wheel, 2-rotating shaft, 3-stationary blade wheel, 4-shell, 5-movable vane wheel, 6-stationary blade wheel, 7-movable vane wheel, 8-stationary blade wheel, the 9-blade, 10-suction port, 11-air outlet, 12-motor, 13-leaf groove, 14-movable vane wheel, 15-stationary blade wheel, 16-impeller, the 17-fore line, 18-blade, 19-bosh, 20-vent, 21-motive sealing 22-cell wall, 23-inner ring sleeve, the outer ring set of 24-.
Embodiment 1: the single-stage radial-flow turbine molecular pump
The single-stage radial-flow turbine molecular pump is made up of movable vane wheel 1, rotating shaft 2, stationary blade wheel 3 and pump case 4 etc. as shown in Figure 1.
Embodiment 2: single-stage radial-flow type dish type drive molecular pump
The single stage disk shaped pump is made up of movable vane wheel 5, rotating shaft 2, stationary blade wheel 6 and pump case 4 etc. as shown in Figure 6.
Movable vane wheel 5 is a flat disk.Stationary blade wheel 6 is disc, shown in Fig. 7,8.One side of stationary blade wheel has at least 1～5 helicals groove 13 of bleeding, shown in the figure two.The angle of bleeding between groove and the radius is about 60 °, and groove depth is about 0.05 with the ratio of radius, about 1 millimeter of the thickness of cell wall 22.
Movable vane wheel 5 is installed in the rotating shaft 2, and stationary blade wheel 6 is installed on the pump case 4.About 0.3～0.75 millimeter of axial running clearance between dynamic and static impeller, impeller size is bigger, gets bigger numerical value, and all the other gaps are with embodiment 1.
Embodiment 3: the two face shape molecular pumps that drag of single-stage radial-flow type
Single-stage is two to drag pump as shown in Figure 9, by movable vane wheel 7, compositions such as stationary blade wheel 8, rotating shaft 2, motive sealing 21 and pump case 4.
Movable vane wheel 7 is made up of two flat disks, the flat disk in left side is provided with uniform connection pore 20, stationary blade wheel 8 is in the form of annular discs, shown in Figure 10,11, stationary blade wheel is provided with 12 helical blades 18, and shown in the figure 3, the angle between blade 18 and radius is approximately 60 °, about 1 millimeter of the thickness of blade 18, the ratio about 0.08 of width and impeller.
Movable vane wheel 7 is fixed in the rotating shaft 2, a motive sealing 21 is equipped with in the outside of left movable vane wheel, motive sealing 21 is made of the stationary blade wheel 6 of dish type pump, stationary blade wheel 8 and motive sealing 21 are fixed on the pump case 4, during installation, stationary blade wheel is inserted in the middle of two movable vane wheel disks, and the axial clearance between movable vane wheel 7 and stationary blade wheel 8, the motive sealing 21 is 0.5～1 millimeter, and other gap is with embodiment 1.
The multistage runoff type molecule pump that embodiment's 4: Chuan, And connection and Chuan, And joint group thereof close
Chuan, And joins and makes up multistage runoff type molecule pump shown in Figure 12,13 and 14, is made up of movable vane wheel 14, rotating shaft 2, stationary blade wheel 15 and pump case 4 etc.In the basic structure that dynamic and static impeller 14,15 can be three kinds of runoff type molecule pumps any one, two motive sealings 21 that drag pump do not illustrate.Working clearance between dynamic and static impeller is with embodiment 1.
The series multistage runoff type molecule pump is coaxially installed with 3 grades of runoff type molecule pumps as shown in figure 12 among Figure 12, wherein, the dynamic and static impeller upper blade of middle one-level, or the blade on the dynamic and static impeller of the true dip direction of leaf groove and two sides, or leaf groove direction is opposite respectively.The flow path of pumped gas as shown in phantom in Figure 12.
And joins multistage runoff type molecule pump as shown in figure 13, also coaxial among Figure 13 three grades of runoff type molecule pumps is housed.Dynamic and static impeller upper blades at different levels, or the true dip direction of leaf groove is identical respectively.The movable vane wheel of left side two stage pump is provided with equal qi-emitting hole 20.The flow path of pumped gas as shown in phantom in Figure 13.
Chuan, And joint group closes multistage runoff type molecule pump as shown in figure 14.The coaxial level Four runoff type molecule pump that is equipped with among Figure 14.The dynamic and static impeller upper blade of right side triplex, or the true dip direction of leaf groove is identical respectively, the dynamic and static impeller upper blade of left side one-level pump, perhaps the true dip direction of leaf groove is opposite with the right side triplex respectively, and the movable vane wheel of middle two stage pump is provided with equal qi-emitting hole 20.The flow path of pumped gas is shown in the dotted line among Figure 14, and promptly the three Beng And connection in right side are bled and bled with left side one-level series connection of pumps.
Embodiment 5: horizontal radial-flow turbine molecular pump
The present invention is made up of some grades of radial-flow turbine molecular pumps.Concrete structure is made of movable vane wheel 1, stationary blade wheel 3, rotating shaft 2, pump case 4, inlet, outlet 10,11, motor 12, fore line 17 and bosh 19 etc. as shown in figure 15.
Dynamic and static impeller 1,3 is formed 20 grades of radial-flow turbine molecular pumps altogether.Wherein, except that the 2nd grade and the 19th grade (beginning counting from a left side), the true dip direction of the blade 9 on all dynamic and static impellers 1,3 is identical respectively, and the sense of rotation of impeller makes the 2nd, 19 grade to bleed from inside to outside, and all the other are at different levels from bleeding outside to inside.The movable vane wheel of the 3rd～18 grade of pump is provided with uniform pore 20.Thereby middle 16 grades of pump Gou Cheng And connection is from the air-breathing level of bleeding outside to inside, the compression stage that their both sides respectively have the secondary series connection with it to bleed.
Pumped gas sucks the air-breathing level of forming by middle 16 grades of And connection impeller by the suction port 10 of pump, then, be divided into left and right two the tunnel, compression stage and the fore line of forming by both sides two-stage tandem radial-flow impeller 17 respectively, come together in air outlet 11, take away by fore pump at last.
Embodiment 6: vertical runoff, the hybrid molecular pump of axial flow
The present invention is made of secondary radial-flow turbine molecular pump and the coaxial installation of 9 grades of plain shaft streaming turbine molecule pump impellers.Concrete structure is made up of the dynamic and static impeller 1,3 of radial-flow turbine molecular pump, rotating shaft 2, common molecular pump impeller 16, pump case 4, motor 12, inlet, outlet 10,11 and bosh 19 as shown in figure 16.
The structure of the dynamic and static impeller 1,3 of radial-flow turbine molecular pump and installation dimension are with embodiment 1, top one-level radial flow pump is bled from inside to outside, below one-level radial flow pump is from bleeding outside to inside, the two stage pump series operation constitutes compressor, and 9 grades of common molecular pump impeller size are identical with the air-breathing level impeller of general molecular pump.The axial clearance that 5 millimeter should be arranged between axial flow molecular pump impeller and the runoff molecular pump impeller, the passage of formation gas flow.
Pumped gas sucks the pump housing by suction port, by 9 grades of common molecular pump impellers, then by the radial-flow turbine molecular pump of two-stage tandem work, comes together in air outlet 11 vertically, and is last, taken away by fore pump.
Claims (9)
1, a kind of runoff type molecule pump, by movable vane wheel 1, compositions such as rotating shaft 2, stationary blade wheel 3 and pump case 4 is characterized in that:
A) dynamic and static impeller 1,3 is in the form of annular discs, the one side has the row blade row concentric with rotating shaft 2 at least, every row's blade row is uniform by several, uniform thickness, the single-ended blade that links to each other with paddle wheel plane 9, blade 9 is vertical with paddle wheel plane, and the angle between the impeller radius is 50 °～75 °, and same blade row upper blade angle of inclination equates that same impeller side upper blade true dip direction is identical, the optimum value of blade 9 empty string ratios is 0.8～1.2, and the radial position of blade row should be diverged on the dynamic and static impeller 1,3;
B) blade 9 length are shorter, form overall structures with dynamic and static impeller 1,3, do not need the supporting device that adds, and stationary blade wheel 3 upper blades are thinner;
C) movable vane wheel 1 is fixed in the rotating shaft 2, stationary blade wheel 3 is fixed on the pump case 4, blade row on the dynamic and static impeller 1,3 replaces interfix, in the working clearance of axially and radially leaving 0.5～1 millimeter, wherein movable vane is taken turns 1 outside and pump case 4, and stationary blade wheel 3 is inboard and rotating shaft 2 between radial clearance be about 5～20 millimeters, after assembling, the blade lean direction on the dynamic and static impeller 1,3 is opposite.
2, a kind of runoff type molecule pump is made up of movable vane wheel 5, rotating shaft 2, stationary blade wheel 6 and pump case 4 etc., it is characterized in that:
A) movable vane wheel 5 is the flat disk shape, and perhaps outer thin interior thick moving back dialled discoid;
B) stationary blade wheel 6 is in the form of annular discs, one side has the helical groove of bleeding at least, flute profile is approximately logarithmic spiral, bleeding, angle is 50 °～75 ° between groove and radius, groove depth is 0.03～0.06 with the optimum value of the ratio of impeller radius, it is 10～30 that groove is counted optimum value, and stationary blade wheel 6 outer side slot numbers can be higher than the inner side slot number;
C) movable vane wheel 5 is fixed in the rotating shaft 2, and stationary blade wheel 6 is fixed on the pump case 4, and dynamic and static impeller 5,6 axially leaves 0.5～1 millimeter working clearance near installation.Movable vane is taken turns 5 outsides and pump case 4, and leaves bigger radial clearance, about 5～20 millimeters between stationary blade wheel 6 inboards and the rotating shaft 2.
3, a kind of runoff type molecule pump, by movable vane wheel 7, rotating shaft 2, stationary blade wheel 8, compositions such as shell 4 and motive sealing 21 is characterized in that:
A) movable vane wheel 7 is by two flat disks, or two outer thin in thick moving back dial the shape disks and constitute, have at least a dish to add motive sealing 21 in this disk outside being provided with uniform pore 20 ， And near rotating shaft 2 places in two disks.
B) stationary blade wheel 8 is in the form of annular discs, stationary blade wheel constitutes (inner ring sleeve can) by inside and outside ring set 23,24, fixing some spiral blades 18 between two ring sets, the shape approximation of blade 18 is a logarithmic spiral, angle between blade 18 and impeller radius is 50 °～75 °, and width of blade is 0.03～0.08 with the optimum value of the ratio of impeller radius.The best number of blade is 8～25, and the impeller outer side number of blade can be more than the inboard;
C) movable vane wheel 7 is fixed in the rotating shaft 2, stationary blade wheel 8 and motive sealing 21 are fixed on the shell 4, between dynamic and static impeller 7,8 and the motive sealing 21 in the working clearance of axially leaving 0.5～1 millimeter, movable vane is taken turns 7 outsides and shell 4, and leaves about 5～20 mm clearance between stationary blade wheel 8 inboards and the rotating shaft 2;
D) motive sealing 21 is installed, and also can adopt the structure of stationary blade wheel 6.
4, runoff type molecule pump according to claim 1, it is thick more the closer to paddle wheel plane to it is characterized in that movable vane is taken turns the thickness of 1 upper blade 9.
5, runoff type molecule pump according to claim 1 is characterized in that blade 9 adopts not uniform thickness, and perhaps gradually crooked shape blade makes the perpendicular distance between adjacent blades less at close air inlet side place, and is bigger near the side place of giving vent to anger.
6, according to the described runoff type molecule pump of claim 1～5, it is characterized in that the coaxial installation of impeller sets at different levels, the blade 9,18 on the dynamic and static impeller 14,15 of adjacent two-stage, or the true dip direction of leaf groove 13 is opposite respectively.
7, according to the described runoff type molecule pump of claim 1～5, it is characterized in that the coaxial installation of impeller sets at different levels, blade 9,18 on the dynamic and static impeller 14,15 of adjacent secondary, or the true dip direction of leaf groove 13 is identical respectively, movable vane wheel 14 is provided with several uniform pores 20 near rotating shaft 2 places, when stationary blade wheel 15 outsides do not have ready-made gas channel, also be provided with some connection pores 20 near pump case 4 places, but needn't be uniform.
8, according to the described runoff type molecule pump of claim 1～7, it is characterized in that the coaxial installation of impeller sets at different levels, constitute the multistage runoff type molecule pump that Chuan, And joint group closes.
9, according to the described runoff type molecule pump of claim 1～8, it is characterized in that runoff type molecule pump impeller sets 14,15 and common axial flow turbine molecule pump impeller 16 coaxial installations, leave bigger axial clearance between runoff and axial-flow blower, for example 5～10 millimeters.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 87101116 CN1025574C (en) | 1987-10-10 | 1987-10-10 | Runoff type molecule pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 87101116 CN1025574C (en) | 1987-10-10 | 1987-10-10 | Runoff type molecule pump |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 92101746 Division CN1070991A (en) | 1992-03-07 | 1992-03-07 | Radial-flow turbine molecular pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1032574A true CN1032574A (en) | 1989-04-26 |
| CN1025574C CN1025574C (en) | 1994-08-03 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 87101116 Expired - Fee Related CN1025574C (en) | 1987-10-10 | 1987-10-10 | Runoff type molecule pump |
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| Country | Link |
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| CN (1) | CN1025574C (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007041932A1 (en) * | 2005-10-10 | 2007-04-19 | Jiguo Chu | Double-drag molecular pump |
| CN100354589C (en) * | 2003-11-24 | 2007-12-12 | 深圳大学 | Vacuum smelting furnace |
| CN102889219A (en) * | 2011-07-18 | 2013-01-23 | 李晨 | Disc type molecular pump |
| CN102918278A (en) * | 2010-09-28 | 2013-02-06 | 埃地沃兹日本有限公司 | Exhaust pump |
| CN103994085A (en) * | 2014-06-05 | 2014-08-20 | 核工业理化工程研究院 | Embedded molecular pump capable of measuring pressure ratio |
| CN109441875A (en) * | 2018-12-25 | 2019-03-08 | 大连金刚科技有限责任公司 | Impeller and gas pump |
| CN110778527A (en) * | 2019-12-06 | 2020-02-11 | 台州轩辕国际贸易有限公司 | High-lift submersible pump and control method |
-
1987
- 1987-10-10 CN CN 87101116 patent/CN1025574C/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100354589C (en) * | 2003-11-24 | 2007-12-12 | 深圳大学 | Vacuum smelting furnace |
| WO2007041932A1 (en) * | 2005-10-10 | 2007-04-19 | Jiguo Chu | Double-drag molecular pump |
| CN102918278A (en) * | 2010-09-28 | 2013-02-06 | 埃地沃兹日本有限公司 | Exhaust pump |
| CN102918278B (en) * | 2010-09-28 | 2015-10-21 | 埃地沃兹日本有限公司 | Exhaust pump |
| CN102889219A (en) * | 2011-07-18 | 2013-01-23 | 李晨 | Disc type molecular pump |
| CN103994085A (en) * | 2014-06-05 | 2014-08-20 | 核工业理化工程研究院 | Embedded molecular pump capable of measuring pressure ratio |
| CN109441875A (en) * | 2018-12-25 | 2019-03-08 | 大连金刚科技有限责任公司 | Impeller and gas pump |
| CN110778527A (en) * | 2019-12-06 | 2020-02-11 | 台州轩辕国际贸易有限公司 | High-lift submersible pump and control method |
| CN110778527B (en) * | 2019-12-06 | 2020-05-08 | 台州轩辕国际贸易有限公司 | Control method of high-lift submersible pump |
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| Publication number | Publication date |
|---|---|
| CN1025574C (en) | 1994-08-03 |
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