CN202301073U

CN202301073U - Disk type molecular pump

Info

Publication number: CN202301073U
Application number: CN2011202538542U
Authority: CN
Inventors: 李晨; 胡忠浩
Original assignee: Individual
Current assignee: Individual
Priority date: 2011-07-18
Filing date: 2011-07-18
Publication date: 2012-07-04
Anticipated expiration: 2021-07-18

Abstract

The utility model provides a disk type molecular pump, which consists of a movable disk, a stationary disk, a rotary shaft and a pump body. The disk type molecular pump is characterized in that: radial rectangular or trapezoid gas channels are formed on the movable disk and the stationary disk with certain thicknesses to communicate gas molecules on both sides of the disks with one another; inclination angles between two radial side faces of each gas channel and a horizontal plane of each disk can be changed from 0 DEG to 180 DEG; the inclination direction of one of two radial side faces of the gas channel on the movable disk for conveying gas molecules is opposite to that of one of two radial side faces of the gas channel on the stationary disk for conveying gas molecules, and the other side face is used for assisting in conveying of the gas molecules; and when a gas extraction unit which consists of multi-stage movable disks and multi-stage stationary disks operates, the gas molecules are dragged, conveyed and compressed to move directionally, so the aim of extracting gas is fulfilled. The disk type molecular pump has the characteristics of simple structure, convenience for processing and manufacturing and high mechanical strength, can bear impact of high-flow gas, and has a wide application prospect in the medium and high vacuum fields.

Description

The disc type molecular pump

Technical field

The utility model relates to molecular pump, particularly a kind of disc type molecular pump.

Background technique

At present for obtaining the widely used turbomolecular pump of middle and high vacuum; Its unit of bleeding is made up of movable vane wheel, the stationary blade wheel of a series of alternate settings; Moving vane on the impeller or stator blade, the impeller horizontal plane is inclined to several angle relatively, and the true dip direction of moving vane and stator blade is opposite each other.When being fixed on epitrochanterian movable vane wheel when being fixed between the stationary blade wheel on the pump housing high speed rotating; The moving vane of high speed rotating is given gas molecule with Momentum Transfer; Greatly increased the collision opportunity between gas molecule and moving vane, stator blade; Make gas molecule do orientation movement, to reach the purpose of bleeding.Work because the moving vane of high speed rotating only adapts under the molecular flow condition of gas, in case receive the impact of big flow gas, moving vane is prone to that sheet takes place to beat and damages because of making material and structure shape reason, also involves the impaired of stator blade simultaneously.Therefore, turbomolecular pump to the technical requirementss such as Manufacturing material, machining accuracy and dynamic balancing of dynamic and static blade, must be given concern especially when making production.

Summary of the invention

The purpose of the utility model is to provide a kind of and is applicable to middle and high vacuum field, and can bear the disc type molecular pump of big flow gas percussion.

For realizing above-mentioned purpose, a kind of disc type molecular pump that comprises the pump housing, rotating shaft, squirrel-cage gather qi together flow guide device, moving disk, quiet disk, gas suction port, gas discharge outlet provided by the present invention is characterized in that:

A. described moving disk is fixed in the rotating shaft,

B. the outer rim of described quiet disk is fixed on the pump housing,

C. described moving disk, quiet disk are alternately closely arranged in order, its last be disk.

In above-mentioned disc type molecular pump, have radially rectangle or trapezoidal air flue are set on the moving disk of suitable thickness, the quiet disk, two radial side of air flue and the tilt angle between the disc level face can change between 0 ° to 180 ° separately.

In above-mentioned disc type molecular pump; A side as main transport gas molecular action is arranged in two radial side of air flue on the moving disk of suitable thickness; With in two radial side of air flue on the quiet disk as a side of main transport gas molecular action, both true dip directions are opposite each other.

In above-mentioned disc type molecular pump, the boundary dimension and the internal structure of moving disk and quiet disk are basic identical.

In above-mentioned disc type molecular pump, between moving disk and the quiet disk and the pump housing, between quiet disk and the rotating shaft, leave the working clearance.

In above-mentioned disc type molecular pump, squirrel-cage air flow guiding device and moving disk are installed in the rotating shaft.

In above-mentioned disc type molecular pump, radially the air flue sectional drawing of two of rectangle air flue or trapezoidal air flue radial side is quadrilateral or trapezoid shaped.

The technological scheme that the utility model disc type molecular pump is adopted is: by the unit of bleeding that a series of suitable thickness and boundary dimension and the essentially identical moving disk of internal structure and quiet disk are formed, substitute the unit of being made up of a series of dynamic and static impellers of bleeding of turbomolecular pump.Dynamic and static disk makes it to bear calmly the impact of air flow because of its thickness has increased the mechanical strength of beat resistance, avoids similar turbomolecular pump rotor blade to receive air flow to impact and beat the generation of sheet damage phenomenon.Simultaneously, through being arranged on the radially air flue on the dynamic and static disk, when bleeding the unit operation, produce, make gas molecule do orientation movement, thereby reach the purpose of bleeding of middle and high vacuum the dragging of gas molecule, transmission and compression.

The beneficial effect of the utility model: the utility model disc type molecular pump; Be employed in the dynamic and static disk of suitable thickness air flue is set; The tilt angle of choose reasonable air flue number and air flue radial side; Constitute the unit of bleeding that multistage dynamic and static disk is formed; To replace the unit of bleeding that precision machining in the turbomolecular pump, dynamic and static blade different, that quality is thin are formed, not only can effectively promote the speed of exhaust, flow and limiting vacuum, but also the blade wheel structure of turbomolecular pump bleed mechanical strength that the unit is beyond one's reach, low cost and make simple advantage are arranged; Rotor blade is beaten the drawback of sheet damage when having avoided similar turbomolecular pump to receive big flow gas percussion, and the utility model is had a wide range of applications in middle and high vacuum field.The utility model disc type molecular pump is the turbomolecular pump latest development, and the design concept of its unit of bleeding is equally applicable to the technological progress of vertical turbine molecular pump, also can be used as the reference of vacuum pump and other molecular pump technological progress.

Description of drawings

Fig. 1 is the utility model general structure schematic representation;

Fig. 2 (a), Fig. 2 (b) are provided with the radially moving disc structure schematic representation of rectangle air flue for the utility model;

Fig. 3 (a), Fig. 3 (b) are respectively the utility model radially external structure of rectangle air flue and two radial side A-A direction air flue sectional drawings of rectangle air flue;

A-A direction air flue sectional drawing when Fig. 4 (a), Fig. 4 (b), Fig. 4 (c) are two radial side different inclination angle combination of the utility model air flue;

Air-flow moved towards schematic representation when the unit of bleeding that Fig. 5 forms for the dynamic and static disk of the utility model moved;

Fig. 6 (a), Fig. 6 (b) are the radially disc structure schematic representation of trapezoidal air flue of the utility model setting;

Fig. 7 (a), Fig. 7 (b) are provided with the radially disc structure schematic representation of rectangle, the combination of trapezoidal air flue for the utility model.

Embodiment

Describe in further detail below in conjunction with the structure of accompanying drawing the utility model.

The pumping process of the utility model disc type molecular pump is such: the gas that gets into intakeport passes through the squirrel-cage gather qi together flow guide device of high speed rotating earlier; Gas is imported the unit of bleeding that left and right coaxial mounted multistage dynamic and static disk is formed; Implement the dragging of gas molecule, transmission and compression; Make gas molecule do orientation movement, guide gas discharge outlet at last into, taken away by preevacuation pump.

Referring to Fig. 1,1 is the pump housing.2 are rotating shaft.3 for carrying the bearing of rotating shaft 2.14 is bearing support.15 is beam, is used for reducing vibrations and noise that the rotor of high speed rotating brings.4 for to be fixed on the squirrel-cage gather qi together flow guide device (this is for quoting technology) in the rotating shaft 2, and 9 is the air-flow path on the gather qi together flow guide device 4.5 for being fixed on the moving disk in the rotating shaft 2.6 is quiet disk, and its outer rim is fixed on the pump housing 1.Press disk, quiet disk, moving disk ... Order is alternately closely arranged, and forms the unit of bleeding of the utility model, its last be disk.Between moving disk 5 and the quiet disk 6 and the pump housing 1, between quiet disk 6 and the rotating shaft 2, leave the working clearance, rotate freely with the high speed that guarantees rotor.Select the suitable working clearance for use, the gas molecule that also can stop the unit of bleeding effectively from the High Voltage district to the backflowing of low pressure district, to improve pumping efficiency.7 is the gas suction port of the utility model disc type molecular pump, and the gas molecule of suction drains into preevacuation pump from gas discharge outlet 8 at last by the path of bleeding shown in the arrow among the figure.

Referring to Fig. 2 (a), Fig. 2 (b), Fig. 3 (a), Fig. 3 (b), 10 for being arranged on the radially rectangle air flue on the moving disk 5 of suitable thickness, and the gas molecule on disk both sides is communicated with one another.11 is two radial side of air flue 10, and the tilt angle between two radial side 11 and moving disk 5 horizontal planes all can change between 0 ° to 180 °.The air flue sectional drawing of the A-A direction of two radial side 11 is the parallelogram shape.Through changing two radial side 11 tilt angle separately of air flue 10, the air flue sectional drawing that can make the A-A direction of two radial side 11 is quadrilateral or trapezoid shaped, referring to Fig. 4 (a), Fig. 4 (b), Fig. 4 (c).Moving disk 5 is basic identical with the boundary dimension and the internal structure of quiet disk 6; Their difference only is: the true dip direction of two radial side of air flue radially on the true dip direction of two radial side of air flue and the quiet disk 6 on the moving disk 5, the true dip direction that wherein has a side at least is opposite each other.

In unit when operation of bleeding by multistage dynamic and static disk is formed, in two radial side of air flue, a side is arranged on the moving disk as main transport gas molecular action face; In two of air flue radial side, a side is arranged equally as main transport gas molecular action face, and the true dip direction of above-mentioned two main transport gas molecular action faces is opposite each other on the quiet disk.Another side of air flue plays a part to cooperate the transport gas molecule on moving disk and the quiet disk.

Referring to Fig. 5; When moving disk 5 in figure during direction high speed rotating shown in the curved arrow line; A side on the moving disk 5 in two radial side of air flue (main transport gas molecular action face); Shown in thick black solid line among the figure, produce the transport gas molecular action of going up moving vane as turbomolecular pump movable vane wheel, the right of the driven disk 5 of gas molecule is transferred to the left side through air flue.A side on the quiet disk 6 in two radial side of air flue (main transport gas molecular action face); Shown in thick black solid line among the figure; Generation is as the transport gas molecular action of stator blade on the turbomolecular pump stationary blade wheel, and gas molecule is transferred to the left side from the right of quiet disk 6 through air flue.Another side on the above-mentioned dynamic and static disk in two radial side of air flue shown in strigula among the figure, plays a part to cooperate the transport gas molecule.So; The transmission and the pressurized gas molecular action of bleeding and producing during the unit operation formed through multistage dynamic and static disk; Gas molecule is passed through step by step flow through the air flue that dynamic and static disk makes up; See among Fig. 5 shown in the tortuous arrow line, and form very high compression ratio, flow to the gas discharge outlet 8 of the utility model disc type molecular pump at last.

In addition, move of the drag effect of the surface of disk 5, give gas molecule Momentum Transfer, increased the collision opportunity of gas molecule and dynamic and static disk, also help improving the effect of bleeding of the utility model gas molecule through high speed rotating.

If change the radially rectangle air flue that is provided with on the disk into radially trapezoidal air flue; Shown in the trapezoidal air flue 12 among Fig. 6 (a), Fig. 6 (b); Equally can be through two radial side of trapezoidal air flue; Produce the dragging of gas molecule, transmission and compression, reach the purpose of bleeding of the utility model.Radially trapezoidal air flue and radially bleed principle and the process of rectangle air flue is identical has repeated no more at this.

Referring to Fig. 7 (a), Fig. 7 (b); Select the progression of the moving disk of different size (size and thickness), quiet disk and their combinations for use; Optimize the rectangle be provided with on the disk or the combination of trapezoidal air flue number and different air flues; And the angle of inclination of rationally adjusting the air flue radial side on the disk, will obviously improve the unit of bleeding of dynamic and static disk composition and implement the performance that gas molecule drags, transmits and compresses, thereby reach the best effect of bleeding.

The bleed design of unit of the utility model disc type molecular pump generally is disk air flue number and the air flue radial side tilt angle of selecting to adapt to big pumping speed near the place, gas access, and the relatively littler and pumping speed of compression ratio more greatly when it was bled.After the compression of bleeding through multistage dynamic and static disk; Gas pressure has raise, and pumping speed is low, just should select lower disk air flue number of pumping speed and air flue radial side tilt angle; Make it adapt to the higher operating mode of bleeding of compression ratio, to reach the desirable effect of comprehensively bleeding.In addition, because the mechanical strength of disk is big, just can be according to the demand of reality; Adjustment disk air flue number and air flue radial side tilt angle; Under gas pressure rising situation, still can obtain the pumping performance of needs, as the effect of bleeding that requires big pumping speed, high compression ratio and big flow to have concurrently.

Above embodiment only supplies to explain the usefulness of the utility model; But not to the restriction of the utility model; The technician in relevant technologies field under the situation of spirit that does not break away from the utility model and scope, can also make various conversion or modification; Therefore all technological schemes that are equal to also should belong to the category of the utility model, should be limited each claim.

Claims

1. disc type molecular pump that comprises the pump housing (1), rotating shaft (2), squirrel-cage gather qi together flow guide device (4), moving disk (5), quiet disk (6), gas suction port (7), gas discharge outlet (8) is characterized in that:

A. described moving disk (5) is fixed in the rotating shaft (2),

The outer rim of b. described quiet disk (6) is fixed on the pump housing (1),

C. described moving disk (5), quiet disk (6) are alternately closely arranged in order, its last be disk.

2. disc type molecular pump according to claim 1; It is characterized in that on moving disk (5), the quiet disk (6) radially rectangle or trapezoidal air flue (10,12) being set, two radial side of air flue and the tilt angle between the disc level face can change between 0 ° to 180 ° separately.

3. disc type molecular pump according to claim 1; It is characterized in that moving the side that disk (5) is gone up the main transport gas molecular action of conduct in two radial side of air flue; Go up in two radial side of air flue as a side of main transport gas molecular action with quiet disk (6), both true dip directions are opposite each other.

4. disc type molecular pump according to claim 1 is characterized in that moving disk (5) is basic identical with the boundary dimension and the internal structure of quiet disk (6).

5. disc type molecular pump according to claim 1 is characterized in that between quiet disk (6) and the rotating shaft (2), leaving the working clearance between moving disk (5) and the quiet disk (6) and the pump housing (1).

6. disc type molecular pump according to claim 1 is characterized in that squirrel-cage air flow guiding device (4) and moving disk (5) are installed in the rotating shaft (2).

7. disc type molecular pump according to claim 1 and 2 is characterized in that the air flue sectional drawing of two radial side of rectangle air flue radially or trapezoidal air flue (10,12) is quadrilateral or trapezoid shaped.