TWI457503B - An improved turbo molecular pump - Google Patents

Description

Turbine vacuum pump structure improvement

BACKGROUND OF THE INVENTION 1. Field of the Invention This invention relates to a turbo vacuum pumping, and more particularly to a turbine vacuum pumping structure that can replace a vane while maintaining compression efficiency and having a simple structure for fixing between the vanes.

In recent years, due to the vigorous development of the semiconductor industry, the demand for related equipment in the front-end process of semiconductors has increased greatly. Among them, the heart component of the high-vacuum system, the turbo vacuum pump, has become a highly demanding high-vacuum system component, so the turbo vacuum pump is heavily It is used in high-precision research or industry, so its pumping efficiency is very important.

However, the turbo vacuum pump in the prior art still has the following defects when it is used:

(1) When the turbo vacuum pumping rotor is rotated at a high speed to achieve vacuuming, the rotor blade will be deformed due to considerable pressure, and in severe cases, the blade will be broken, which will affect the efficiency of pumping. In the latter case, since the rotor is integrally formed, it is necessary to replace the entire vacuum pump, which results in considerable cost.

(2) Turbine vacuum pump rotor must be adjusted for dynamic balance to maintain stability after rotor operation. In the prior art, dynamic balance adjustment It must be carried out step by step during the assembly process. If the rotor runs out of problems, it must be re-adjusted, which is not only inconvenient to use, but also expensive in terms of time.

In view of this, the inventors of this case have accumulated based on the experience of many years of research, and with their own creativity and continuous attempts, to provide a turbo vacuum pump structure improvement, the rotor blade group can be separated by its structural optimization design. Replacement, and the dynamic balance can be directly adjusted after the assembly is completed, so as to reduce the time and material cost for maintenance and the inconvenience in assembly, and the invention has green manufacturing, green assembly, green trimming, green production, etc. Advantage.

A first object of the present invention is to provide a turbine vacuum pumping structure improvement in which a rotor blade group is designed as an alternative structure, and a male and female die tapered cone is designed on each rotor blade group so that the rotor blade sets are in mutual The combination can be performed in a sure and simple manner.

A second object of the present invention is to provide an improved turbo vacuum pumping structure in which a plurality of spiral holes are designed to adjust the tightening of the rotor and the adjustment of the dynamic balance by locking the screws.

The turbo vacuum pumping structure improvement system comprises: a central shaft seat having: a shaft seat female mold tapered cone, the ring is formed on the central shaft seat; and a plurality of shaft seat spiral holes are also formed in the central shaft seat Upper chassis is sleeved on the central axle seat and has: a chassis female die tapered cone formed on the chassis a top surface of the chassis; a chassis male taper cone formed on the bottom surface of the chassis and limited to be located in the inclined cone of the axle housing; and a plurality of chassis spiral holes formed on the side of the chassis; a plurality of rotors The blade set is sleeved on the central axle seat, and both have: a blade female die tapered cone formed on the top surface of the rotor blade set; and a blade male die tapered cone formed on the bottom surface of the rotor blade set And may be limited to one of the blade female mold taper of the other rotor blade group and the chassis female mold taper; and a cover plate connected to one end of the central shaft seat and between the chassis The plurality of rotor blade sets are locked, and a plurality of holes corresponding to the screw holes of the shaft seat are formed on the upper portion, and the cover plate is fixed on the central shaft seat by locking the screw from the hole into the screw hole of the shaft seat .

In order to more clearly describe a turbine vacuum pumping structure modification proposed by the present invention, a preferred embodiment of the present invention will be described in detail below with reference to the drawings.

Referring to the first, second and third figures, a schematic perspective view, a side cross-sectional view and an exploded view of the turbo vacuum pump structure of the present invention comprise: a central shaft seat 11 on which eight shafts are formed. The spiral hole 112 is formed into a regular octagonal shape; a chassis 21 is sleeved on the central axle seat 11 and has eight chassis spiral holes 213 formed on the side thereof to form a regular octagon, wherein The screw hole 213 of the chassis locks the screw to adjust the tightness of the chassis 21 to the central shaft seat 11, and on the other hand, When the assembly is completed, the position of the screw is adjusted to directly adjust the dynamic balance of the rotor body; a fifth rotor blade set 35 is sleeved on the central axle base 11 and connected to the chassis 21; a fourth rotor blade set 34 is attached The sleeve is attached to the central rotor base 11 and connected to the fifth rotor blade set 35; a third rotor blade set 33 is sleeved on the central axle mount 11 and connected to the fourth rotor blade set 34; a second rotor The blade set 32 is sleeved on the central axle seat 11 and connected to the third rotor blade set 33; a first rotor blade set 31 is sleeved on the central axle mount 11 and connected to the second rotor blade set And a cover plate 41 is sleeved on the central axle seat 11 and connected to the first rotor blade group 31, and has eight holes 411 corresponding to the screw hole 112 of the axle seat formed thereon, forming a positive octagon a shape in which the cover plate 41 can be fixed to the center shaft base 11 by locking the screw from the hole 411 into the shaft seat screw hole 112; the above-mentioned component combination sequence of the present invention has been described in detail, and then For further explanation of the connection structure and connection method between components, please continue Continuing to refer to the fourth A diagram and the fourth B diagram, which is a schematic diagram of the side section explosion of the improved turbine vacuum pump structure of the present invention and a schematic diagram of the combination of the male and female mold cones. As shown in the figure, the central axle seat 11 is further provided with a shaft seat. The female die taper 111 is formed around the central axle seat 11; the chassis 21 is also provided with a chassis die tapered cone 211 formed on the top surface of the chassis 21 and a chassis male die tapered cone 212 formed on the bottom surface of the chassis 21. Wherein, when the chassis 21 is sleeved on the center axle seat 11, the chassis male mold taper 212 is limited to be located in the axle housing female taper 111; A fifth blade die taper 351 is formed on the top surface of the fifth rotor blade group 35, and a fifth blade die taper cone 352 is formed on the bottom surface, wherein the fifth rotor blade set 35 is sleeved on the center axle seat. At 11 o'clock, the fifth blade male die taper 352 is constrained to be integrated in the chassis female die taper 211; the fourth rotor blade set 34 has a fourth blade die taper 341 formed on the top surface thereof, and The bottom surface forms a fourth blade male mold taper 342, wherein when the fourth rotor blade set 34 is sleeved on the central axle seat 11, the fourth blade male die tapered cone 342 can be limitedly combined with the fifth blade female The third rotor blade set 33 has a third blade die taper 331 formed thereon, and a third blade die taper 332 is formed on the bottom surface, wherein the third rotor blade set 33 When the central shaft seat 11 is sleeved, the third blade male mold taper 332 can be constrained and combined in the fourth blade female mold taper 341; the second rotor blade set 32 has a second blade formed on the top surface thereof. a female die cone 321 and a second blade male die taper 322 on the bottom surface, wherein the second rotor blade set 32 is sleeved The second blade male die cone 322 is constrainably combined in the third blade female die taper 331; the bottom surface of the first rotor blade set 31 forms a first blade male die oblique a cone 312, wherein when the first rotor blade set 31 is sleeved on the central axle mount 11, the first blade male die taper 312 can be limitedly combined in the second blade female die taper 321; The plate 41 is connected to one end of the center axle seat 11 and between the chassis 21 and the fifth rotor blade group 35, the fourth rotor blade group 34, the third rotor blade group 33, and the second rotor blade group 32 First rotor blade The group 31 is locked, and a plurality of holes 411 corresponding to the screw holes 112 of the shaft seat are formed thereon, and the cover plate 41 can be fixed to the center shaft seat 11 by locking the screw from the hole 411 into the screw hole 112 of the shaft seat. on.

The foregoing has made a fairly complete disclosure of the present invention, and it will be appreciated that the present invention has the following advantages:

1. Each rotor blade group is independent structure. When one of the rotor blade groups is damaged, the rotor blade group of the group can be directly replaced, which greatly reduces the conventional rotor replacement in the prior art. , can effectively reduce the cost of component costs, the cost of renovation time.

2. The chassis screw hole is arranged on the chassis, and the function can not only lock the screw to adjust the tightness of the chassis and the central shaft seat, but also adjust the dynamic balance of the rotor by locking the screw.

3. Male and female mold taper cones are arranged on each rotor blade group and the chassis, so that the components can be assembled more easily when assembled between components.

However, the detailed description of the present invention is intended to be illustrative of the preferred embodiments of the present invention, and is not intended to limit the scope of the invention. The patent scope of this case.

11‧‧‧ center shaft seat

111‧‧‧Axis of the shaft

112‧‧‧Sleeve spiral hole

21‧‧‧Chassis

211‧‧‧Chassis female cone

212‧‧‧Chassis male mold taper

213‧‧‧Chassis spiral hole

31‧‧‧First rotor blade set

312‧‧‧The first blade male mold cone

32‧‧‧Second rotor blade set

321‧‧‧Second blade female die cone

322‧‧‧Second blade male mold cone

33‧‧‧ Third rotor blade set

331‧‧‧ Third blade female mold cone

332‧‧‧ Third blade male mold cone

34‧‧‧fourth rotor blade set

341‧‧‧fourth blade female die cone

342‧‧‧fourth blade male mold cone

35‧‧‧ fifth rotor blade set

351‧‧‧The fifth blade female mold cone

352‧‧‧ fifth blade male mold cone

41‧‧‧ Cover

411‧‧‧ hole

The first figure is a perspective view of a modified turbo vacuum pumping structure of the present invention; 2 is a side cross-sectional view showing the improved structure of the turbo vacuum pumping structure of the present invention; and the third drawing is a schematic exploded view of the turbo vacuum pumping structure of the present invention; and FIG. 4A is a modified side section of the turbo vacuum pumping structure of the present invention; The schematic diagram of the explosion; and the fourth B diagram is a schematic diagram of the modified male and female mold oblique cone combination of the turbo vacuum pump structure of the present invention.

21‧‧‧Chassis

31‧‧‧First rotor blade set

32‧‧‧Second rotor blade set

33‧‧‧ Third rotor blade set

34‧‧‧fourth rotor blade set

35‧‧‧ fifth rotor blade set

41‧‧‧ Cover

411‧‧‧ hole

Claims (8)

The utility model relates to a turbo vacuum pumping structure improvement, which comprises: a central shaft seat, wherein: a shaft seat female mold inclined cone is formed on the central shaft seat; and a plurality of shaft seat spiral holes are also formed on the central shaft seat. a chassis is sleeved on the central axle seat and has: a chassis female die tapered cone formed on the top surface of the chassis; and a chassis male die tapered cone formed on the bottom surface of the chassis, and is limited The plurality of chassis spiral holes are formed on the side of the chassis; the plurality of rotor blade sets are sleeved on the central shaft seat, and both have: a blade mother mold tapered cone, Formed on the top surface of the rotor blade group; and a blade male mold taper cone formed on the bottom surface of the rotor blade group, and may be limited to the blade master mold inclined cone of the other rotor blade group and the chassis master mold oblique One of the cones; and a cover plate connected to one end of the central shaft seat, and between the chassis and the chassis, a plurality of rotor blade sets are locked, and a plurality of screw holes corresponding to the shaft seat are formed thereon Hole, by locking the screw from the hole into the shaft snail Hole, the cover can be secured to the central axis of the seat. The turbo vacuum pumping structure as described in claim 1, wherein the shaft has eight spiral holes and is disposed in a regular octagon. The turbo vacuum pumping structure improvement according to claim 1, wherein the chassis has eight spiral holes and the positions thereof are all formed into a regular octagon shape, and further, the adjusting screw is locked into the spiral hole of the chassis. The inner balance of the chassis fixed to the central axle seat and the dynamic balance of the overall structure can be fine-tuned. The turbo vacuum pumping structure improvement according to claim 1, wherein the holes are eight and the positions are arranged in a regular octagon. The utility model relates to a turbo vacuum pumping structure improvement, which comprises: a central shaft seat, wherein: a shaft seat female mold inclined cone is formed on the central shaft seat; and a plurality of shaft seat spiral holes are also formed on the central shaft seat. a chassis is sleeved on the central axle seat and has: a chassis female die taper formed on the top surface of the chassis; a chassis male die taper is formed on the bottom surface of the chassis and is limited to a plurality of chassis spiral holes are formed on the side of the chassis; a fifth rotor blade set is sleeved on the central axle seat, and a fifth blade female die is formed on the top surface a tapered cone, and a fifth blade male mold tapered cone formed on the bottom surface, wherein the fifth blade male mold tapered cone can be limited to the chassis female mold tapered cone; a fourth rotor blade set is sleeved on the central axle seat, and a fourth blade female die tapered cone is formed on the top surface, and a fourth blade male die tapered cone is formed on the bottom surface, wherein the fourth blade male The die taper system can be limited to the fifth blade master mold oblique cone; a third rotor blade group is sleeved on the central shaft seat, and a third blade mother mold oblique cone is formed on the top surface, and the bottom surface Forming a third blade male mold taper cone, wherein the third blade male mold taper cone system is limited to the fourth blade master mold oblique cone; a second rotor blade group is sleeved on the central shaft seat, And forming a second blade die taper on the top surface and a second blade die taper on the bottom surface, wherein the second blade male die taper can be limited to the third blade die tapered cone a first rotor blade set is sleeved on the central axle seat, and a first blade male die taper is formed on the bottom surface, and is limited to be located in the second blade female die tapered cone; and a cover plate Connected to one end of the central axle seat and between the chassis and the chassis, the first rotor blade set, the second rotor blade The set, the third rotor blade set, the fourth rotor blade set and the fifth rotor blade set are locked, and a plurality of holes corresponding to the screw holes of the shaft seat are formed on the upper portion, and the screw is locked from the hole into the shaft The cover can be fixed to the central shaft seat in the screw hole. The turbo vacuum pumping structure improvement according to claim 5, wherein the shaft seat has eight spiral holes and the positions thereof are all formed into a regular octagon shape. The turbo vacuum pumping structure improvement according to claim 5, wherein the chassis has eight spiral holes, and the positions thereof are all formed into a regular octagon shape, and further, the adjusting screw is locked into the spiral hole of the chassis. Inside, the fine adjustment of the elasticity of the chassis fixed to the central axle seat and the dynamic balance of the overall structure can be adjusted. The turbo vacuum pumping structure improvement according to claim 5, wherein the holes are eight and the positions are arranged in a regular octagon.