M360947 五、新型說明： 、认w々月巧j 種涉及光電產業或半〜 cfe ^ a產業等技術領域 王泵尤拍一種有關於磁 J々、姑％及磁筒安奘 的轉子裝配構造。 η女戒弋 l元w技術】 在光電產品及半導體產品的製造 ，M360947 V. New description: 认 々 々 巧 巧 j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j η female ring 弋 l yuan w technology] in the manufacture of optoelectronic products and semiconductor products,
不同的餘刻程序、化學氣相沉積及物理；J，在往要經過 驟’這些處理流程—般均必須在被==沉積等處理步 行，目前的吉六老 、社被卩同雒的真空處理室中進 、”二處理室一般係利用渦 的汲吸排放作業。 ”工泵來進订乳體 呪啕的渦輪真空泵的Different residual procedures, chemical vapor deposition and physics; J, in the process of going through these processes, all must be treated by == deposition, etc., the current vacuum of Jiliu, the society is the same In the processing room, the "two processing chambers generally use the vortex suction operation." The pump is used to order the turbine vacuum pump of the emulsion.
【新型所屬 本創作係— 所使用的渴輪真 位的渴輪真空果 心个上你由 =的外殼：―設於外殼底部的底座、-安裳於底座内的 杜以及心外喊内且為馬達所驅動的轉子組件等構 牛所組成；其中的轉子組件構造—般係如第五、六圖所干 ，該轉子組件(9〇)係包括··-可與馬達連結的心轴(91)、、 -套合於心軸(91)的多層葉輪(92)、複數個以緊配方式嵌 固結合於多層葉輪(92)端部所設槽室的磁環(93)、兩個‘ 合於多層葉輪(92)的罩環(94) ’以及結合於心軸(9”的 (95)等構件； 前述的多層葉輪（92)係由複數個葉輪單元（92〇)依序疊 s敢固組成，各葉輪單元（92 〇)於抽心位設有一供心軸（9 ]) 璁過的軸孔（92 1 )，於外周圍設有以多數個葉片環繞構成的 輅葉組（922) ’並於各葉輪單元（920)鄰接軸孔（921)的頂側 3 M360947 氐側。卩位，相對應地各設有能夠相互匹配嵌合的一凸環 (.)及1^槽（924) ’藉以利用加熱裝配的方式，將各葉 知早兀(920)以緊配形式疊合嵌固成如第六圖所示的多層葉 輪（92); 别述的磁環（93)、心軸（91)及磁筒（95)的裝配方式，同 樣知利用加熱方式’將多層葉輪及緊固環的孔徑增大 .藉以將各磁環（93)嵌入槽室、將心軸（91)穿入軸孔（921) .以及將緊固％套設於心軸(9”，等到多層葉輪(Μ)及緊 口衣冷部後’完成將磁環(93卜心軸(9”以緊配形式安裝 —方；夕層葉輪（92) ’以及將磁筒（95)裝配定位的效果； 見有轉子組件（90)利用加熱方式進行緊配結合的裝配 構造，在實施利用上顯然存在有以下所述的問題： 要將各磁％ (93)及磁筒（95)以緊配結合的裝配作業 ’不僅整個工序相杏砧甚 田 費工費s吁，並且必須利用加熱設備 及冷康設備等昂貴的特殊機具才能夠進行，導致轉子組件 (90)的製&成本一直居高不了，難以符合產業上的利 求。 田·現有的夕層葉輪（92)係由複數個葉輪單元（92〇)依 序疊合緊配嵌固組#，& s t , 、成夕層葉輪（92)的裝配加工作業，同 樣存在有加工麻煩費時及成本過高的問題。 3’現有多層葉輪（92)的複數個葉輪單元（920)，係以 配的t式裝配結合’各葉輪單元（92〇)之間難免存在 2間隙f誤差’導致轉子組件（9〇)難以獲得良好的動平 衡效果’容易影響渦輪真空泵運轉的平穩性及運轉效率。 4 M360947 【新型内容】 '為解決現有渴輪真空系有關於磁筒及磁環係、 式安裝結合，有關於裝配作業麻煩及加工' :M緊靶方 限制，本創作提供一種結構精 成本向等問題 的轉子裝配構造。 以間便之渴輪真空氛 本創作主要係直接於安裝位置設置螺… •環嵌置於多層葉輪的槽室或在 轉Q在啜 瓖定位環或緊固環以螺鎖方式处 灸，直樓 . 。合固定於多層葦认 笮 ，有效地以簡便的方式，快速 ”輪我心軸 位作業。 嗞苟的裝配定 本創作進一步係利用構造 3你社入 、 及加工方式的改變，製作中 …、接5 —體式構造的多層葉 ， $ Μ ^ ΑΑ ΗΦ ” A，有效地解決現有組合式 曰茱輪的裝配問題，並且能 约讓轉子組件獲得最佳化的 動平衡特性及運轉效率。 本創作所運用的技術手 .,,手奴係在於提供一種渦輪真空泵 的轉子裝配構造，係包括： 夕層葉輪，係為益接人& _ a , …接5的—體式構造，並包括一輪 車叉及一層以上間隔環繞士 該輪轂的兩端分別形成—…輪穀外周面於輪葉組’於 ji ^ ^ ^ ^ y 位於中間部位的槽室及一端板， 並於该槽室鄰接端緣的 一、、以^ 門周壁位置設有一内螺紋面； 〜，係設於該多層# 複數個磁環，4“人輪的轴心位置’ 一定位广“敗合叠裝於該槽室内；以及 疋位％，係以螺紋人 並且抵靠迫緊前述的各Μ - ^方式與該内螺紋面相結合， 前述的轉子裝配構造] Μ中的内螺紋面的螺旋方向與 5 M360947 多層莱輪的旋轉方向係為相同。 前述的轉子裝配構造，其中的心 凸設形成—環Λ 接、為板的位置 磁筒套合於該心軸且抿靠方/V 4 部，該心軸於突出今诚〜 ？丑抵Λ於该環凸 -緊固環…方二同的軸身外周面設有-外螺紋面， 。 。 t合於該外螺紋面且迫緊固定該磁筒 前述的轉子装阶错、Α _ 将于成配構造’其中的多層葉輪 心轴的外螺紋面的螺旋方向係、設為相反方向。 面與 本創作所提供渴輪真空 的優點及功效增進包括： ☆配構&，可以獲得 "I本創作利用定位環以螺鎖迫緊的方式，將複數個磁 緊白… 曰業輪的槽至’以及利用緊固環以螺鎖迫 务'的方式’將磁筒裝配固定 貞、 配效率及便利性。 有效地k间磁％的裝 構、創作的多層葉輪係為直接加工成型的單件式一體 構&，有效解決現有組合式 ΛΑ Η日 夕曰系％义須逐一加工及奘西？ 的問喊，大幅降低多層葉輪的製造成本。 ，並3日夕本創作的磁筒及磁環係以螺鎖迫緊方式而裝配定位 έ株夕層錢係設為單件式6卜體構造，解決現有轉子 來=必須仰賴加熱設備或冷卻設備等昂貴的特殊機具 本。 韦政即令轉子組件裝配安裝的設備成 4 -本創作的多層葉輪择氧置杜—& 欠择 係為早件式的一體構造，輪轂及 各層輪葉組之間，不會存在 ㈢存在有間隙或落差，能夠讓多層葉 幸神後得最佳化的動平衡效果，右 一 '' 有效地確保渦輪真空泵運轉 6 M360947 的平穩性及運轉效率 【實施方式】 為能詳細瞭解本創作的技術特徵及垂田 貝用功效，並可仿 照說明書的内容來實施’玆進—步以如圖 _ ^八所示的較佳實 施例’詳細說明如后·· κ .本創作所提出的渴輪真空泵的轉子裝配構造的較ρ 施例係如第-至三圖所示，該轉子組件係包括—多居^ Μ10)、一穿設裝配於該多層葉輪（1〇)轴心位的心軸（2〇)、'^ 數個結合於該多層葉輪（10)的磁環（3 後 、 ν ) 以及—用以將各 磁環（30)抵緊定位的定位環（4〇)等構件；其中. 如第二、三圖所示，該多層葉輪（1〇)係為無接合一 式構造，該多層葉輪（10)係設有—呈圓柱狀的輪 於輪齩⑴)的轴心位貫設有—供該心抽(2〇)穿設的軸孔 (⑴)’並於朝向涡輪真空泵吸入側一端爾⑴)端部中 間部位，凹設-與該轴孔⑴2)相通且直徑大於該轴孔 (112)的槽室（114)，於該槽室⑴句鄰接吸入端的内周壁位 置設有-内螺紋面⑴6)’該内螺紋面（116)的螺旋方向係 相同於多層葉輪的旋轉方向； 刖述的夕層葉輪（1〇)於外周面以設定間隔形態一體伸 設有七層輪葉組（12)，於相鄰的輪葉組（12)之間形成一能 夠與定子組件[圖φ去+ 1 4 U甲禾不〕相匹配的環槽（1 3)，並於朝向 '/尚輪真空果壓力你丨的__ ^ 側的知形成一圓形端板（14);該多層葉 輪（1 0 )於弟一層給莖4a / 1 Q \ ΤΣ 学”葉、，且（1 2)及鄰接端板（彳4)的輪轂（1 ])外周 面間隔設有複數啦At m + 周此夠用來調整校正動平衡的調配孔（1 1 8) 7 M360947 ’並於該端板（1 4)同軸套設連結有二層罩環（1 8)。 如第二、三圖所示，該心軸（2〇)係穿設結合於該多層 葉輪（1 0)的軸孔（1 1 2 )，並於抵靠於端板（1 4) 一侧的軸身適 當位置凸設形成一圈環凸部（21 )，藉以供一磁筒（22)能夠 套合於該心軸（20)且抵靠於該環凸部，該心轴（2〇)於突 出該磁筒（22)的軸身外周面設有一外螺紋面（23)，能夠提 供一緊固環（24)以螺合方式結合於該外螺紋面（23)，並且 將忒磁筒（22)予以迫緊固定，該緊固環（24)於内周面設有 舁。玄外螺紋面（23)相匹配的内螺紋面（242)，並且於外周面 間隔設有複數個能夠用來調整校正動平衡的調配孔（2 4 4); 本創作設於該心軸（20)的外螺紋面（124)的螺旋方向與前述 内，丁'..文面（1 42)的螺旋方向相反，並且均係配合轉子本體 (10)的旋轉方向，藉以在渦輪真空策運轉時，該緊固環 (2”能夠保持在緊固狀態而不會有鬆脫的問題。 、 如第一、二圖所不，該複數個磁環的外徑係實質 於前述的槽室⑴4)的内徑，讓各磁環㈣能夠敌合 豐罪裝設於該槽室（114)，並設有—具外螺紋面（41)的定仇 % (40)以螺合方式結合於 ㈧m不、，、ώ跃 沁'^鬥4丁、紋面（116)，將各磁環 (30)予以追固定，藉以配 ._ , L x表底座的内圈磁環〔圖ψ 未不〕，組構成磁浮式的軸承構造。 間宁 如此’本創作利用前述的單 ,9门、十告Η 早件式多層葉輪（10) '心缸 (2〇)、稷數個磁環（3〇)及定 軸 、二圖所干、1田 衣1 ϋ)寺構件，組構成如第— —口所不連用於渦輪真空栗的轉子組件。 本創作的多層葉輪（10)不限制於 、 設有七層輪葉組(12)的實施形能 弟…圖所示的 "〃、要是設有二層以上从 ―1— ΤΗ» M360947 葉組（1 2)的單件-體式多層葉輪（1 〇)，即為本創作所欲保 護的對象。言亥單件-體式多層葉輪（1 〇)的加工成型方式， 可以如第四圖所示，先以車削的方式，將圓柱狀的紹合金 料件，加工成型出具有外型輪扉、複數個間隔設置的環槽 (13)、位於相鄰的環槽〇3)之間的碟形板塊（12A)等構造的 多層葉輪初胚(刺；接著利用五軸加工機具，於各碟形板 •塊（12A)精確地加工成型出相對應數f及角度形式的輪葉組 • (12)，#可製造完成出如帛：圖所示的單件式—體構造的 φ 多層葉輪（1 0)。 本創作係直接於安裝位置設置内螺紋面（1 16)或外螺紋 面（23)的方式’可以在各磁環（3Q)嵌置於多層葉輪〇◦)的槽 室（1叫或在磁筒（22)套置於心軸（2〇)之後，直接將定位環 (40)或U & (41)以螺鎖方式結合@定於多層葉輪或心 轴（20) ^效地以簡便的方式，快速地完成磁環（3〇)及磁 筒（20)的裝配定位作業。 圖係本創作較佳實施例之立體結構圖。 工：圖係本創作較佳實施例之組成構件分解圖。 第一圖係本創作較佳實施例之組合咅J面示音圖。 第四圖係本創作所運田少成 所運用多層某輪初胚之示意圖。 第五圖係現有渴私古+ ^ 少 馮輪真空泵（局部分解）之結構示意圖 弟六圖係現有讲私古 輪真空泵之組合剖面示意圖。 【主要元件符號說 9 M360947 (10)多層葉輪 (10A)多層葉輪初胚 (11)輪轂 (1 12)轴孔 (1 14)槽室 (1 1 6)内螺紋面 (1 1 8)調配孔 (12)輪葉組 (12A)碟形板塊 (13)環槽 (14)端板 (15)罩環 (2 0)心幸由 (21)環凸部 (22)磁筒 (23)外螺紋面 (24)緊固環 (244)調配孔 (30)磁環 (242)内螺紋面 (40)定位環 (4 1 )外螺紋面 (90)轉子組件 (91)心車由 (92)多層葉輪 (920)葉輪元件 (921)軸孔 (922)輪葉組 (923)凸環 (924)凹槽 (93)磁環 (94)罩環 10[New type of this creation department - the thirsty wheel of the thirsty wheel used by the thirsty wheel vacuum heart is on the shell of your =: the base set at the bottom of the shell, - Anshang in the base of the du and the outside of the shout It is composed of a rotor assembly driven by a motor, etc.; the rotor assembly is generally constructed as shown in Figures 5 and 6, and the rotor assembly (9〇) includes a mandrel (which can be coupled to the motor) ( 91), - a multi-layer impeller (92) fitted to the mandrel (91), a plurality of magnetic rings (93) fitted in a tightly fitting manner to the groove chamber provided at the end of the multilayer impeller (92), two 'The cover ring (94)' combined with the multilayer impeller (92) and the member (95) coupled to the mandrel (9); the aforementioned multilayer impeller (92) is stacked in series by a plurality of impeller units (92〇) s sturdy solid composition, each impeller unit (92 〇) is provided with a shaft hole (92 1 ) for the mandrel (9 ]), and a peripheral blade group surrounded by a plurality of blades (922) 'And each impeller unit (920) abuts the top side of the shaft hole (921) 3 M360947 氐 side. The 卩 position, correspondingly each is provided with a convex ring that can be matched with each other ( .) and 1^ groove (924) 'by means of heating assembly, each leaf is known to be embedded in a tightly fitting form into a multi-layer impeller (92) as shown in Fig. 6; The arrangement of the magnetic ring (93), the mandrel (91) and the magnetic cylinder (95) is also known to increase the aperture of the multilayer impeller and the fastening ring by heating means, thereby embedding the magnetic rings (93) into the groove. The chamber, the mandrel (91) is inserted into the shaft hole (921), and the tightening % is placed on the mandrel (9", and after the multi-layer impeller (Μ) and the cold portion of the tight garment, the magnetic ring (93) is completed. The hub (9" is mounted in a tightly fitting manner; the impeller (92)' and the effect of positioning the magnetic cylinder (95); see the assembly of the rotor assembly (90) by means of heating In the implementation and utilization, there are obviously the following problems: The assembly work of the magnetic % (93) and the magnetic cylinder (95) in a tight fit is not only the entire process, but also the need to pay for it. It can be carried out by using expensive special equipment such as heating equipment and cold equipment, which makes the cost of the rotor assembly (90) always high and difficult. In order to meet the industrial demand. Tian·the existing imperial impeller (92) is composed of a plurality of impeller units (92〇) in series and tightly fitted with the embedded group #, & st, and the layered impeller (92) The assembly and processing operations also have the problem of time-consuming and costly processing. 3' The existing impeller units (920) of the multi-layer impeller (92) are combined with the t-type assembly and the impeller units (92). 〇) There is inevitably a gap between the two gaps f', which makes it difficult for the rotor assembly (9〇) to obtain a good dynamic balance effect' easily affects the smoothness and operational efficiency of the turbine vacuum pump. 4 M360947 [New Content] 'To solve the existing thirteen-wheel vacuum system, there is a combination of magnetic cylinder and magnetic ring system, and the installation and assembly, and there are troubles in assembly work and processing': M tight target limit, this creation provides a structural precision cost The rotor assembly structure of the problem. The creation of the thirsty wheel vacuum atmosphere is mainly based on the installation position of the screw... • The ring is embedded in the groove chamber of the multi-layer impeller or the moxibustion is performed at the rotation of the Q in the locating ring or the fastening ring. Floor. It is fixed in the multi-layer 苇 笮 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , 5—Multi-layered leaf of the body structure, $ Μ ^ ΑΑ ΗΦ ” A, effectively solves the assembly problem of the existing combined wheel and can optimize the dynamic balance characteristics and operation efficiency of the rotor assembly. The technical hand used in this creation, the hand slave system is to provide a rotor assembly structure of a turbo vacuum pump, which includes: an empire layer impeller, which is a body structure of the splicer & _ a , ... A wheel fork and a layer of the outer circumference of the wheel hub are respectively formed by the two ends of the wheel hub. The outer peripheral surface of the wheel valley is in the groove portion and the end plate of the vane group ji ^ ^ ^ ^ y in the middle portion, and the adjacent end of the groove chamber The first edge of the edge is provided with an internal thread surface at the position of the peripheral wall of the door; 〜, is disposed in the multilayer ## plurality of magnetic rings, 4" axial position of the human wheel", a wide positioning, and a stacking in the slot And the % of the clamp, which is threaded by the person and pressed against the aforementioned Μ - ^ way in combination with the internal thread surface, the aforementioned rotor assembly structure] the spiral direction of the internal thread surface in the 与 and 5 M360947 multi-layered reel The direction of rotation is the same. In the foregoing rotor assembly structure, the convex portion of the core is formed to be loop-connected, and the position of the plate is fitted to the mandrel and the square/V 4 portion is folded. The mandrel is protruded from the present. The ugly abutment on the ring convex-fastening ring...the outer peripheral surface of the shaft body is provided with a - external thread surface. . T is attached to the externally threaded surface and is tightly fixed to the magnetic cylinder. The above-described rotor mounting step, Α _ will be in the opposite direction of the helical direction of the externally threaded surface of the multilayer impeller mandrel in the mating structure. The advantages and enhancements of the thirteen-wheel vacuum provided by this creation include: ☆Construction &, can get "I create a positioning ring with a screw-locking method, and tighten multiple magnets... The groove is fixed to the magnetic cylinder by the way of 'and the way of fastening the ring by the fastening ring', the efficiency and convenience. The effective k-magnification structure and the created multi-layer impeller are a one-piece integrated structure that is directly processed and formed, and effectively solves the existing combined type of ΛΑ Η 曰 % % % % 义 义 义 义 义 义 义 义 逐 逐 逐 ? ? ? ? ? ? ? ? ? ? ? ? Asked to greatly reduce the manufacturing cost of the multilayer impeller. And on the 3rd, the magnetic cylinder and the magnetic ring created by the eve are arranged in a screw-locking manner, and the positioning of the magnetic system is set as a one-piece 6-body structure, which solves the existing rotor = must rely on heating equipment or cooling equipment Wait for expensive special equipment. Wei Zheng immediately installed the equipment for the rotor assembly into 4 - the creation of the multi-layer impeller oxygen selection Du - & the under selection system is an integral structure of the early part, between the hub and the layers of the wheel set, there will be no (three) exists The gap or the drop can make the multi-layer leaf lucky, and the right balance can effectively ensure the smoothness and operation efficiency of the turbine vacuum pump 6 M360947. [Embodiment] In order to understand the technical characteristics of this creation in detail And the effect of 田田贝, and can be carried out in accordance with the contents of the specification. The detailed embodiment shown in Fig. _ ^8 is described in detail as 后·· κ. The thirsty wheel vacuum pump proposed by the present invention The ρ embodiment of the rotor assembly structure is as shown in the first to third figures, the rotor assembly includes - a plurality of Μ 10), and a mandrel that is mounted on the axial center of the multilayer impeller (1 〇) (2) 〇), '^ Several magnetic rings (3 rear, ν) combined with the multi-layer impeller (10) and a positioning ring (4〇) for positioning each magnetic ring (30); As shown in the second and third figures, the multi-layer impeller (1〇) is non-connected. In a one-piece construction, the multi-layer impeller (10) is provided with a cylindrical wheel on the axis of the rim (1) and a shaft hole ((1)) for the core pumping (2) An intermediate portion of the end portion (1) of the suction side of the turbo vacuum pump is recessed - a chamber (114) communicating with the shaft hole (1) 2) and having a diameter larger than the shaft hole (112), adjacent to the slot chamber (1) The inner peripheral wall of the end is provided with a - internal thread surface (1) 6) 'the spiral direction of the internal thread surface (116) is the same as the rotation direction of the multilayer impeller; the elliptical impeller (1〇) described above is integrated at a predetermined interval on the outer peripheral surface A seven-layered bucket set (12) is formed, and a ring groove (1 3) matching the stator assembly [Fig. φ goes + 1 4 U Jiahe) is formed between the adjacent vane groups (12). ), and forming a circular end plate (14) on the side of the __ ^ side of the '/ 尚 真空 vacuum pressure; the multi-layer impeller (1 0) is given to the stem 4a / 1 Q \ ΤΣ "Leaves, and (1 2) and the hub (1) of the abutting end plate (彳4) are provided with a plurality of squares at the interval of the outer surface of the groove (1 1 8). 7 M360947 ' And a two-layer cover ring (18) is coaxially sleeved on the end plate (14). As shown in the second and third figures, the mandrel (2〇) is threaded and coupled to the multi-layer impeller (1 0 a shaft hole (1 1 2 ), and a ring-shaped convex portion (21) is formed at a suitable position on the side of the shaft body abutting against the end plate (14), so that a magnetic cylinder (22) can be sleeved Cooperating with the mandrel (20) and abutting against the ring protrusion, the mandrel (2) is provided with an external thread surface (23) on the outer peripheral surface of the shaft body protruding from the magnetic cylinder (22), which can provide a tight The fixing ring (24) is screwed to the external thread surface (23), and the neodymium cylinder (22) is forcibly fixed. The fastening ring (24) is provided with a weir on the inner circumferential surface. The male external thread surface (23) matches the internal thread surface (242), and a plurality of matching holes (2 4 4) which can be used to adjust the correction dynamic balance are arranged on the outer peripheral surface; the creation is arranged on the spindle ( The spiral direction of the external thread surface (124) of 20) is opposite to the spiral direction of the inner portion, the front surface of the rotor surface (1 42), and both of them cooperate with the rotation direction of the rotor body (10), thereby being operated during the turbine vacuum operation. The fastening ring (2" can be kept in a tightened state without loosening. As shown in the first and second figures, the outer diameter of the plurality of magnetic rings is substantially in the aforementioned groove chamber (1) 4) The inner diameter of the magnetic ring (4) is capable of being hosted in the tank chamber (114), and is provided with a deficiencies (40) with a male thread surface (41) to be screwed to the (eight) m , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The group constitutes a magnetic floating bearing structure. This is the use of the above-mentioned single, 9-door, and 10-advanced early-type multi-layer impellers (10) 'heart cylinder (2 〇), 稷 several magnetic rings (3 〇) The fixed axis, the second figure is dry, and the 1 field clothing 1 ϋ) temple member, the group is composed of the rotor component of the turbine vacuum pump which is not connected to the first port. The multilayer impeller (10) of this creation is not limited to, and has seven The implementation of the layered bucket group (12) can be shown in the figure. If there is a single-piece multi-layer impeller with two or more layers from the 1-1 ΤΗ» M360947 leaf group (1 2) (1 〇 ), that is, the object that the creation is intended to protect. The processing method of the single-piece multi-body impeller (1 〇) can be as shown in the fourth figure, and the cylindrical alloy material is first turned by turning. a multi-layer impeller primordial with an outer rim, a plurality of spaced annular grooves (13), a disc-shaped plate (12A) located between adjacent annular grooves 3), and the like; Then, using a five-axis machining tool, the disc group (12A) is precisely machined to form a corresponding number of f and angled vane sets. (12), # can be manufactured as shown in the figure: One-piece body-structured φ multi-layer impeller (1 0). This creation is to set the internal thread surface (1 16) or outside directly at the installation position. The way of the thread surface (23) can be placed in the groove chamber of each magnetic ring (3Q) embedded in the multilayer impeller (1 or after the magnetic cylinder (22) is placed on the mandrel (2〇), directly The positioning ring (40) or U & (41) is screwed into the multi-layer impeller or mandrel (20) in a screw-locking manner. The magnetic ring (3〇) and the magnetic cylinder (20) are quickly completed in a simple manner. The assembly of the preferred embodiment of the present invention is shown in the drawings. The first diagram is a combination of the preferred embodiment of the present invention. The sound map. The fourth picture is a schematic diagram of the multi-layered initial embryo used by Yuntian Shaocheng. The fifth picture shows the structure of the existing thirsty private ancient + ^ less Feng Wheel vacuum pump (partial decomposition). The sixth figure is a schematic sectional view of the existing private roller vacuum pump. [Main component symbol says 9 M360947 (10) Multi-layer impeller (10A) Multi-layer impeller Initial embryo (11) Hub (1 12) Shaft hole (1 14) Groove chamber (1 1 6) Internal thread surface (1 18) Blending hole (12) Vane group (12A) Disc plate (13) Ring groove (14) End plate (15) Cover ring (20) Thanks for (21) Ring projection (22) Magnetic cylinder (23) External thread Face (24) fastening ring (244) fitting hole (30) magnetic ring (242) internal thread surface (40) positioning ring (4 1) external thread surface (90) rotor assembly (91) carriage by (92) multilayer Impeller (920) impeller element (921) shaft hole (922) vane set (923) convex ring (924) groove (93) magnetic ring (94) cover ring 10