M356017 五、新型說明: 【新型所屬之技術領域】 本創作係-種涉及光電產業或半導體產業等技術領域 二使=的渴輪真空泵’尤指—種將洞輪真空泵的轉子本體 設為單件式(one pjec句一體構造的單體型轉子。 奴 【先前技術】 在光電產品及半導體產品的製造過程中,往往要婉過 不同的触刻程序、化學氣相沉積及物理氣相沉積等處㈣ 驟,运些處理流程-般均必須在被隔離的真空處理室中進 行,目前的真空處理室一般係利用渦輪真 的汲吸排放作業。 疋仃孔體 …現有的難真空泵的結構設計,基本上係由—概呈圓 同形的外殼、一設於外殼底部的底座、— 艮; 女裝於底座内的 以及一位於外殼内且為馬達所驅動的轉子組件等構 件所組成;其中的轉子組件構造一般係如第五、六圖所示 丄::子組件(90)係包括:_可與馬達連結的心軸⑻)、 固結合於多層葉綱端部響室:,個以緊配方式叙 叮°又馉至的磁環(93)、兩個社 σ於多層葉輪(92)的罩環(94),以及έ士人 (95)等構件; 合於心軸(91)的磁筒 人山^述的多層葉輪(92)係由複數個葉輪單元(92〇)依序疊 二固所組成’各葉輪單元(92〇)於轴心一供心抽 (91)通過的轴孔(921),於外周 ,,’ U多數個葉片環繞構 成的輪葉組(922) ’並於各葉輪單 苒 (920)鄰接軸孔(921)的 3 M356017 頂側及底側部位,相對應地各設有能夠相互匹配嵌合的一 凸環(923)及一凹槽(924),藉以利用加熱方式將各葉輪單 元(920)的凹槽(924)增大而依序堆疊嵌合,在冷卻後即可 將複數個葉輪單元(920)以緊配形式疊合嵌固成如圖所示的 多層葉輪(92),前述的心軸(9彳)也是利用將多層葉輪(92)加 熱後穿置於軸孔(921)而冷卻後形成緊配固定的方式,裝配 結合於多層葉輪(92)的軸心位置。 現有利用複數個葉輪單元(92〇)堆疊嵌合構成的多層葉 籲輪(92)構造及多層葉輪(92)與心軸(91)的裝配構造,在實施 利用上顯然存在有以下所述的問題: 1.要將複數個葉輪單元(920)依序堆疊嵌合,以及將 多層葉輪(92)與心轴(91)相結合的裝配作業,不僅整個工 序相當地費工費時相當地費工費時,並且必須利用加熱設 備及冷凍設備等昂貴的特殊機具才能夠進行,導致轉子組 件(9〇)的製造成本-直居高不下,難以符合產業上的利用 需求。 • 2·由於心轴(91)與多層葉輪(92)及多層葉輪(92 數個葉輪單元(920),係以嵌合緊配的方式裝配結合由 (91)及各葉輪單兀(92〇)之間難免存在一些間隙或誤差 致轉子組件(90)難以獲得良好的動平衡效果,容易影 -輪真空泵運轉的平穩性及運轉效率。 3·現有裝配於多層葉輪(92)吸人側槽室的複數個· (93山),以及用以^磁筒(95)的緊固環,也均係以緊配二 式瓜口疋位同樣存在有裝配麻煩及成本高的問題。 M356017 【新型内容】 為解決現有渦輪真空泵的組合式 配麻煩、加工成本高,以及難以獲得 不足及限制,本創作提供一種結構精 渦輪真空泵的單體型轉子。 本創作主要係利用結構整合及加 子本體叹5+成包括輪敎部、轴柱部及 單件式一體構造,不僅可以有效解決 所存在的各種裝配及加工問題,並且 子本體,能夠讓單體型轉子獲得最佳 轉效率。M356017 V. New description: [New technical field] This creative department is related to the technical field of optoelectronics industry or semiconductor industry. The thirsty wheel vacuum pump is especially suitable for the rotor body of the cave vacuum pump. One-piece type rotor with one pjec sentence. Slave [Prior Art] In the manufacturing process of optoelectronic products and semiconductor products, different etch procedures, chemical vapor deposition and physical vapor deposition are often used. (4) The process flow must generally be carried out in an isolated vacuum processing chamber. The current vacuum processing chamber is generally operated by a turbine that sucks. The boring body...the structural design of the existing difficult vacuum pump, Basically consisting of: a substantially circular outer casing, a base provided at the bottom of the outer casing, a cymbal; a female body in the base and a rotor assembly in the outer casing and driven by a motor; the rotor The component structure is generally as shown in the fifth and sixth figures. The subassembly (90) includes: a mandrel (8) that can be coupled to the motor, and is fixedly coupled to the end of the multi-layered leaf. Room: a magnetic ring (93) that is closely related to the 叮°, and a cover ring (94) of the multi-layer impeller (92), and a member of the gentleman (95); The multi-layer impeller (92) of the mandrel (91) of the mandrel (91) is composed of a plurality of impeller units (92 〇) which are sequentially stacked and two solids. The impeller units (92 〇) are supplied to the shaft center. (91) The passing shaft hole (921), on the outer circumference, 'U a plurality of blades surround the formed vane set (922)' and the respective impeller unit (920) abuts the shaft hole (921) on the top side of the 3 M356017 And a bottom side portion, correspondingly provided with a convex ring (923) and a groove (924) which can be matched with each other, thereby increasing the groove (924) of each impeller unit (920) by heating. In the order of stacking and fitting, after cooling, a plurality of impeller units (920) can be stacked and assembled into a multi-layer impeller (92) as shown in the figure, and the aforementioned mandrel (9彳) is also utilized. The multi-layer impeller (92) is heated and then placed in the shaft hole (921) to be cooled to form a tight fit, and the assembly is coupled to the axial center position of the multilayer impeller (92). In the prior art, a multi-layered impeller (92) structure in which a plurality of impeller units (92 〇) are stacked and assembled, and an assembly structure of a multi-layer impeller (92) and a mandrel (91) are used. Problem: 1. The assembly operation of stacking a plurality of impeller units (920) in sequence and combining the multi-layer impeller (92) with the mandrel (91) not only requires considerable labor and time, but also considerable labor costs. At the time, it is necessary to use expensive special tools such as heating equipment and freezing equipment, and the manufacturing cost of the rotor assembly (9〇) is high enough to meet the industrial utilization demand. • 2. Because the mandrel (91) and the multi-layer impeller (92) and the multi-layer impeller (92 several impeller units (920) are assembled in a fitting fit by (91) and each impeller unit (92〇) There is inevitably some gap or error between the rotor assembly (90), it is difficult to obtain a good dynamic balance effect, easy to smooth the operation of the shadow-wheel vacuum pump and the operating efficiency. 3. Existing assembly in the multi-layer impeller (92) suction side slot The multiples of the room (93 mountain) and the fastening ring for the magnetic cylinder (95) are also closely related to the problem of assembly trouble and high cost. In order to solve the problem of the combination of the existing turbo vacuum pump, the high processing cost, and the difficulty in obtaining the shortage and limitation, the present invention provides a single-type rotor with a structural fine turbo vacuum pump. The main purpose of this creation is to use structural integration and sigh of the sub-body. The 5+ assembly includes a rim portion, a shaft column portion and a one-piece integrated structure, which not only can effectively solve various assembly and processing problems, but also enables the single rotor to achieve optimum conversion efficiency.
轉子組件,亡Μ 有關於| 良好的動平衡效果等 簡且動平衡性極佳之 工技術的改變,將轉 多層輪葉組等構造的 現有組合式轉子組件 單件式一體構造的轉 化的動平衡特性及運 本創作所運用的技術手段係在於提供—種渴輪真 的單體型轉子’係包括—呈無接合—體式構造的轉子^體 ^玄轉子本體係包括呈同轴設置的—輪較部、—轴柱部及 -心軸部;其中’該軸柱部係以一體同軸形態連結於: 轂部-端的轴心位£ ’並於該輪毅部另一端的 二 =成-槽室’該心轴部係位於該槽室且以一體同轴形態 連总於該輪轂部的軸心位置; 於該輪轂部的外周面間隔環設有二層以上 於相鄰的輪葉紐夕p弓卫,丄 、-且 、、,'間形成一環槽,並在該輪轂部朝向該軸 柱。卩的一端設有一端板。 别述的單體型轉子, 以及於端板結合設有二個 前述的單體型轉子, 環,並於該槽室鄰接端緣 其中於輪轂部設有七層輪葉组, 罩環。 其中於槽室敌合疊裝有複數個磁 的内周壁位置設有一内螺紋面, 5 M356017 以该内螺紋面纟士八 一 ’σ〇有—將各磁環迫腎旧— 前述的單體型轉子,其、緊口疋的定位環。 設形成一環凸部,—〜/、中於軸桎部鄰近端板的位置凸 凸部,以及—緊门係套合於該軸柱部且抵靠於該學 緊固%係螺合於哕 ^ 前述的單體型轉子,其、μ 部且抵緊於該磁筒。 於槽室的内螺紋面传讯Α又、门中位於轴柱部的外螺紋面與位 太^ 係6又為不同的螺旋方向。 本創作所提供渦輪真办 優點及功效增進包括:—…早體型轉子,可以獲得的 • 1·本創作的轉子本體係為 〇 構造,可以有效$σ成型的單件式一體 力欢解決現有組合式鏟 裝配的問題,大彳Μ ',、且件必須逐一加工及 哺大中田降低轉子組件的製造成本。 .本創作的轉子本體係為 現有的組合式轉子έ # 式的一體構造,不必如 、得子組件必須仰賴力^ 貴的特殊機具來進#,,,,、s又備或冷卻設備等昂 .^ 成本的花費。 .本創作的轉子本體係為單件式' 、輪轂部及各層輪葉組之間, 構&,軸柱部 •夠讓轉子本體择n 胃存在有間隙或落差,能 真”運= 平衡效果,有效地確保渦輪 具二粟運轉的平穩性及運轉效率。 (本創作利用定位環以螺鎖迫緊 '壤裝配固定於轉子本體的槽室,有气將複數個磁 '率及便利性。 效地美円磁環的裝配效 【實施方式】 為能詳細瞭解本創作的技術特 昭爷昍舍用功效,並可依 月書的内容來實施,.兹進-步以如圖式所示的較佳實 6 M356017 施例,詳細說明如后: =作所提出的渦輪真空靖體 例係如苐-至三圖所*,該轉子組件二土广 (1 〇),以及梦配紝人# & 枯轉子本體 茗配、、Ό 5该轉子本體(1〇)的磁 環(30)等構件;其中: )及歿數個磁 如第二、三圖所示,該轉子本體(1〇) 整合及加工技術所成都 ’’、〗用結構 ㈣所成型的早件式一體構造,並包 層輪葉組(15),以及一端板(17)等構造;其中)於夕數 (川係設為實心形態,該轴柱部陳以二:輪#:: 結於該輯⑴)朝向渦輪真空栗塵力側—端二= ,於該輪數部⑴)朝向渴輪真空果吸入側 , 部位:成:槽室⑽,該心轴则係位於該I;二 且以&同軸形態連結於該輪毅部⑴)的轴心位 該槽室⑽鄰接吸人端的内周壁位置設有—内螺紋面= ’該内螺紋面(142)的螺旋方向係相同於轉 ) 轉方向; 〖⑴)的凝 前述的轉子本體(10)於輪轂部⑴)的外周面以— 隔形態-體伸設有七層輪葉組(15),並於相鄰的= (15)之間形成一能夠與定子組件〔圖中未示〕相匹配的产 槽(16) ’以及於該輪轂部⑴)朝向渦輪真空泵壓力側的2 端形成前述的圓形端板(17);又,該轉子本體⑽)於第= 層輪葉組(15)及鄰接端板(17)的輪㈣⑴)外周面間隔 複數個能夠用來調整校正動平衡的調配孔〇12),並二:山 板(17)同軸套設連結有二層罩環(1 8); ““而 7 M356017 前述的轉子本體⑽於轴柱部(12)鄰近端板(17)的柱身 適當位置凸設形成一圈環凸部( 22),猎以供前述的磁筒 (20)套&於帅㈣(12)且抵靠於該環凸部( 部(12)於鄰接該磁筒(2〇)端緣 轴柱 ^ 社母°又有一外螺紋面(1 24〉 ’措以供一緊固環(2彳)以螺合方彳 ,, 。方式結合於該外螺紋面(124) ,達到將該磁筒(2〇)予以迫緊固定的效果,並且於緊固J (2”的外周面間隔設有複數個能夠用㈣整校平二 .調配孔(212);本創作將該外螺紋面⑽)的螺旋 述内螺紋面(142)的螺旋方向相 &方白與所 (1〇)的旋轉方向,藉以在渴輪真空:體 ㈣夠保持在緊固狀態而不會有鬆脫的問題。以固- f ®所不’該複數個磁環(3G)料徑传實# 上相寻於前述槽宮r 4、ΑΑ〜 仅係貫質 j Μ至(14)的内徑’讓各磁 裝於該槽室(14)内,# 约甘入合疊 ,μ、 又有一具外螺紋面(312)的定你 (31)’以螺合方式姓人 ;的疋位環 (30)予以迫緊固定,藉 將各螆環 ,-,^ 合設於底座的内圈磁環[Si Λ 未不〕而形成磁浮式的轴 〔圖中 (142)的螺旋方向’本創作將該内螺紋面 以在渦輪真空泵運轉 轉方向,藉 能而太合亡# 4疋位環(31)能夠保持在腎m u 態而不會有鬆脫的問題。 仕务、固狀 本創作的單體型轉 麻认 轉子(10)不限制於如第二、:圖π 二又有七層輪葉組(15)的實施形態,口要是—圖所示 輪葉組(1 5)的單件單 X有一層以上 保護的對象。 4轉子(1〇),即為本創作所欲申請 U、的早件單體型轉子(10)的加工成型方式 M356017 八:士第四圖所不,先以車削的方式,;if圓柱狀的銘合 岳料件力口工成型出具有外型輪靡、複數個間隔設置的環 才曰()位於相鄰的%槽(16)之間的碟形板塊(15A),以及 卜^、·文面(124)與内螺紋面(142)等構造的轉子初胚㈠〇a); 接:#利用五軸加卫機具’於各碟形板塊〇 Μ)精確地加工成 3L出:對應數置及角度形式的輪葉組。5),即可製造完成 .出如第二圖所示單件式—體構造的轉子本體(10)。 U上所述’僅是本創作的較佳實施例,並非對本創作 作任:形式上的限制,任何所屬技術領域中具有通常知識 者,若在不脫離本創作所提技術特徵的範圍内,利用本創 作所揭示技術内容所作出局部更動或修飾的等效實施例, 並且未脫離本創作的技術特徵内容’均仍屬於 特徵的範圍内。 彳乍技衡 【圖式簡單說明】 第一圖係本創作較佳實施例之立體結構圖。 第二圖係本創作較佳實施例之組成構件分解圖。 第二圖係本創作較佳實施例之組合剖面示音圖。 第四圖係本創作較佳實施例之轉子初胚 ^ 〜不思圖。 弟五圖係現有渦輪真空泵之組合式轉 )之立體結構示意圖。 、 局°卩分解 第六圖係現有渦輪真空泵之組合式 面示意圖。 料組件之纽合剖 【主要元件符號說明】 9 M356017 (10)轉子本體 (10A)轉子初胚 (11)輪轂部 (1 1 2 )調配孔 (12)軸柱部 (122)環凸部 (124)外螺紋面 (1 3)心軸部 (14)槽室 (142)内螺紋面 (15)輪葉組 (15A)碟形板塊 (16)環槽 (18)罩環 (17)端板 (20)磁筒 (21 2)調配孔 (21)緊固環 (30)磁環 (31 2)外螺紋面 (31)定位環 (90)轉子組件 (91)心軸 (92)多層葉輪 (920)葉輪單元 (921)軸孔 (922)輪葉組 (923)凸環 (924)凹槽 (93)磁環 (9 5)磁筒 (94)罩環 10Rotor assembly, Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ The balance technique and the technical means used in the creation of the textbook are to provide a rotor type that is a single-type rotor of the thirsty wheel. The system consists of a rotor with a non-joined structure. The system consists of a coaxial arrangement. a wheel comparison portion, a shaft column portion, and a mandrel portion; wherein the 'shaft column portion is integrally coupled to the shaft center portion of the hub portion and the second axis of the other end of the wheel portion a groove chamber is located in the groove chamber and is integrally coupled to the axial center of the hub portion in an integrated coaxial shape; the outer circumferential surface of the hub portion is provided with two or more layers adjacent to each other. In the evening, a ring groove is formed between the 丄, -, , , , and , and the hub portion faces the shaft column. One end of the crucible is provided with an end plate. The singular type rotor is not described, and two kinds of the above-mentioned unit type rotors and rings are combined with the end plates, and a plurality of wheel sets and a cover ring are provided in the hub portion at the end edges of the groove chamber. Wherein the inner chamber wall of the tank chamber is provided with a plurality of magnetic inner peripheral wall positions, and an internal thread surface is provided, 5 M356017, the internal thread surface is gentleman's 〇 ' — 将 将 将 将 将 将 将 — — — — — — — Type rotor, its positioning ring with tight jaws. Forming a ring protrusion, -~/, a convex portion at a position adjacent to the end plate of the shaft portion, and - the door is sleeved on the shaft portion and is screwed to the shaft ^ The aforementioned monolithic rotor has a μ portion and abuts against the magnetic cylinder. The internal thread surface of the groove chamber is communicated, and the external thread surface of the shaft column in the door is in a different spiral direction from the position. The advantages and enhancements of the turbine provided by this creation include: -... Early-body rotor, available. 1. The rotor of this creation is a 〇 structure, which can effectively solve the existing combination with a one-piece one-piece force. The problem of shovel assembly, big 彳Μ ', and the pieces must be processed one by one and feeding the large field to reduce the manufacturing cost of the rotor assembly. The rotor system of the present invention is an integrated structure of the existing combined rotor έ# type, and it is not necessary to have a special machine that depends on the force of the component to enter the #,,,, s, or the cooling device. .^ Cost of cost. The rotor system of this creation is a one-piece ', between the hub and each layer of the wheel set, the structure &, the shaft column section; enough to allow the rotor body to have a gap or drop in the stomach, can be true The effect is to effectively ensure the smoothness and running efficiency of the turbine with the second millet. (This creation uses the positioning ring to tighten the 'soil' and fixes the groove chamber fixed to the rotor body, and the gas will have multiple magnetic rates and convenience. Effectiveness of the assembly of the magnetic ring of the United States [Embodiment] In order to understand in detail the effect of the technology of this creation, and the implementation of the content of the book, according to the contents of the book, The better example 6 M356017 is shown in the following example. The following is a detailed description of the following: = The proposed turbine vacuum system is as follows: 苐-至三图*, the rotor assembly is two earth wide (1 〇), and the dream match # & The dry rotor body 茗, Ό 5 the rotor body (1 〇) of the magnetic ring (30) and other components; wherein:) and a number of magnetic as shown in the second and third figures, the rotor body (1 〇) Integrated and processing technology Chengdu's, 'structure, (4) formed by the early structure, and a cladding vane group (15), and an end plate (17) and the like; wherein) in the eve (the Chuan system is set to a solid shape, the shaft column is two: the wheel #:: is attached to the series (1)) Turbine vacuum dust force side - end two =, in the wheel number (1)) toward the thirsty wheel vacuum fruit suction side, the part: into: the trough room (10), the mandrel is located in the I; two and in & coaxial form The axial center of the wheel portion (1) is connected to the inner peripheral wall of the suction chamber (10) adjacent to the suction end. The internal thread surface = 'the spiral direction of the internal thread surface (142) is the same as the rotation direction); (1)) The rotor body (10) condensed on the outer peripheral surface of the hub portion (1) is provided with a seven-layered vane group (15) in a spaced-apart manner, and forms a gap between adjacent = (15) a groove (16)' capable of matching a stator assembly (not shown) and a hub end portion (1) forming a circular end plate (17) toward the pressure side of the turbo vacuum pump; further, the rotor body (10)) a plurality of matching holes 12) which can be used to adjust the corrected dynamic balance on the outer circumferential surface of the first layer of the bucket group (15) and the wheel (four) (1) of the adjacent end plate (17), and : The mountain plate (17) is coaxially sleeved with a two-layer cover ring (1 8); "" and 7 M356017 the aforementioned rotor body (10) is protruded at the appropriate position of the column body portion (12) adjacent to the end plate (17) Forming a ring of ring protrusions (22), hunting for the aforementioned magnetic cylinder (20) sleeve & Yu handsome (four) (12) and abutting the ring protrusion (part (12) adjacent to the magnetic cylinder (2〇 The end edge shaft column ^the mother and the other has a male thread surface (1 24> 'to provide a fastening ring (2彳) to screw the square,, the way to the external thread surface (124), The effect of tightening the magnetic cylinder (2〇) is fixed, and a plurality of (four) whole leveling holes (212) can be used for the outer peripheral surface of the fastening J (2"; The spiral surface of the threaded surface (10) indicates the direction of the spiral of the inner thread surface (142) and the direction of rotation of the square and the (1〇), so that the vacuum in the thirsty wheel: the body (four) is kept in a fastened state without loosening The problem of taking off. The solid-f ® is not the 'multiple magnetic ring (3G) material diameter transmission # The upper phase is found in the aforementioned groove r 4, ΑΑ ~ only the internal quality j Μ to (14) the inner diameter ' let each magnetic Installed in the trough chamber (14), #abouts into the stack, μ, and has an externally threaded surface (312) that you (31)' is screwed to the surname; the clamp ring (30) gives Tightening and fixing, by forming the inner ring magnetic ring [Si Λ not] of each ring, -, ^ to form a magnetic floating axis (the spiral direction of (142) in the figure] The surface is in the direction of the turbine vacuum pump, and it is too close to death. #4 The ring (31) can maintain the kidney mu state without loosening. The singular-type rotor-recognized rotor (10) of the official and solid-shaped creations is not limited to the embodiment of the second, the figure π and the seven-layered blade group (15), and the mouth is the wheel shown in the figure. A single piece of leaf group (1 5) has more than one layer of protected objects. 4 rotor (1〇), which is the processing and molding method of the early one-piece rotor (10) for which the creative office intends to apply for U. M356017 Eight: The fourth figure does not, firstly, the way of turning; if column The Minghe Yue material piece is formed by a disc-shaped plate (15A) with an outer rim and a plurality of spaced-apart rings () located between adjacent % slots (16), and ·The rotor (124) and the internal thread surface (142) and other structures of the rotor initial embryo (1) 〇a); Connection: #5-axis edging tool 'in each dish-shaped plate 〇Μ) accurately processed into 3L out: corresponding number The set of vanes in the form of angles. 5), can be manufactured. The rotor body (10) of the one-piece structure is shown in the second figure. The above description is only a preferred embodiment of the present invention, and is not intended to be a limitation of the present invention: it is a form of limitation, and any one of ordinary skill in the art, without departing from the technical features of the present invention, Equivalent embodiments that make local modifications or modifications made by the subject matter of the present disclosure, and which do not depart from the technical features of the present invention, are still within the scope of the features.彳乍 衡 【 【 简单 简单 第一 第一 第一 第一 第一 第一 第一 第一 第一 第一 第一 第一 第一 第一 第一 第一 第一The second drawing is an exploded view of the components of the preferred embodiment of the present invention. The second drawing is a combined cross-sectional sound map of the preferred embodiment of the present invention. The fourth figure is the rotor initial embryo of the preferred embodiment of the present invention. The fifth figure is a three-dimensional structure diagram of the conventional turbo vacuum pump. The sixth figure is a schematic diagram of the combined surface of the existing turbo vacuum pump. Cross section of material assembly [Description of main component symbols] 9 M356017 (10) Rotor body (10A) Rotor initial embryo (11) Hub portion (1 1 2 ) Blending hole (12) Shaft column portion (122) Ring convex portion ( 124) Male thread surface (1 3) Mandrel part (14) Groove chamber (142) Internal thread surface (15) Vane group (15A) Disc plate (16) Ring groove (18) Cover ring (17) End plate (20) Magnetic cylinder (21 2) Matching hole (21) Fastening ring (30) Magnetic ring (31 2) External thread surface (31) Positioning ring (90) Rotor assembly (91) Mandrel (92) Multi-layer impeller ( 920) Impeller unit (921) Shaft hole (922) Vane set (923) Protruding ring (924) Groove (93) Magnetic ring (9 5) Magnetic cylinder (94) Cover ring 10