EP0931939A3 - Vacuum pump - Google Patents

Vacuum pump Download PDF

Info

Publication number
EP0931939A3
EP0931939A3 EP98111113A EP98111113A EP0931939A3 EP 0931939 A3 EP0931939 A3 EP 0931939A3 EP 98111113 A EP98111113 A EP 98111113A EP 98111113 A EP98111113 A EP 98111113A EP 0931939 A3 EP0931939 A3 EP 0931939A3
Authority
EP
European Patent Office
Prior art keywords
stages
diaphragm
pumping
molecular
pump casing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP98111113A
Other languages
German (de)
French (fr)
Other versions
EP0931939B1 (en
EP0931939A2 (en
Inventor
Mauro De Simon
Vincenzo Spaziani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian SpA
Original Assignee
Varian SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian SpA filed Critical Varian SpA
Publication of EP0931939A2 publication Critical patent/EP0931939A2/en
Publication of EP0931939A3 publication Critical patent/EP0931939A3/en
Application granted granted Critical
Publication of EP0931939B1 publication Critical patent/EP0931939B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B27/00—Multi-cylinder pumps specially adapted for elastic fluids and characterised by number or arrangement of cylinders
    • F04B27/04—Multi-cylinder pumps specially adapted for elastic fluids and characterised by number or arrangement of cylinders having cylinders in star- or fan-arrangement
    • F04B27/053—Multi-cylinder pumps specially adapted for elastic fluids and characterised by number or arrangement of cylinders having cylinders in star- or fan-arrangement with an actuating element at the inner ends of the cylinders
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Abstract

The invention concerns a vacuum pump (1) for achieving high vacuum conditions comprising a pump casing (5), a first plurality of molecular pumping stages (2) formed by rotor disks (8a,8b) cooperating with stator rings (9a,9b) and housed in a first portion (4a) of said pump casing, and a second plurality of pumping diaphragm stages (3) housed in a second portion (4b) of said pump casing, a first electric motor (13) for driving said rotor disks of the molecular stages, a second electric motor (30) for actuating the diaphragms (40) of the diaphragm stages, and at least a common passage (7) for the passage of the gas discharged from said molecular pumping stages (2) and sucked by said diaphragm pumping stages (3).
EP98111113A 1997-12-24 1998-06-17 Vacuum pump Expired - Lifetime EP0931939B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
ITTO971139 1997-12-24
IT97TO001139A IT1297347B1 (en) 1997-12-24 1997-12-24 VACUUM PUMP.

Publications (3)

Publication Number Publication Date
EP0931939A2 EP0931939A2 (en) 1999-07-28
EP0931939A3 true EP0931939A3 (en) 2000-08-30
EP0931939B1 EP0931939B1 (en) 2003-06-25

Family

ID=11416233

Family Applications (1)

Application Number Title Priority Date Filing Date
EP98111113A Expired - Lifetime EP0931939B1 (en) 1997-12-24 1998-06-17 Vacuum pump

Country Status (4)

Country Link
EP (1) EP0931939B1 (en)
DE (1) DE69815806T2 (en)
HK (1) HK1021401A1 (en)
IT (1) IT1297347B1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6248157B1 (en) * 1999-08-20 2001-06-19 Systec Inc. Vacuum degassing
FR2822200B1 (en) * 2001-03-19 2003-09-26 Cit Alcatel PUMPING SYSTEM FOR LOW THERMAL CONDUCTIVITY GASES
JP4250353B2 (en) 2001-06-22 2009-04-08 エドワーズ株式会社 Vacuum pump
CN101852199B (en) * 2009-03-31 2011-11-09 储继国 Composite vacuum pump
JP6009193B2 (en) * 2012-03-30 2016-10-19 株式会社荏原製作所 Vacuum exhaust device
DE102013213257A1 (en) * 2013-07-05 2015-01-08 Pfeiffer Vacuum Gmbh Diaphragm vacuum pump
EP3267040B1 (en) 2016-07-04 2023-12-20 Pfeiffer Vacuum Gmbh Turbomolecular pump

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4797068A (en) * 1986-06-12 1989-01-10 Hitachi, Ltd. Vacuum evacuation system
DE3826710A1 (en) * 1987-08-07 1989-02-16 Japan Atomic Energy Res Inst Vacuum pump
EP0340685A2 (en) * 1988-04-30 1989-11-08 Nippon Ferrofluidics Corporation Composite vacuum pump
EP0344345A1 (en) * 1988-06-01 1989-12-06 Leybold Aktiengesellschaft Pumpsystem for a leak detecting apparatus
EP0435291A1 (en) * 1989-12-28 1991-07-03 Alcatel Cit Combined turbomolecular vacuum pump with two shafts and discharge at atmospheric pressure
US5039280A (en) * 1988-12-16 1991-08-13 Alcatel Cit Pump assembly for obtaining a high vacuum
EP0445855A1 (en) * 1990-03-09 1991-09-11 VARIAN S.p.A. Improved turbomolecular pump
DE4320963A1 (en) * 1993-04-15 1994-10-20 Knf Neuberger Gmbh Double positive displacement pump

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4797068A (en) * 1986-06-12 1989-01-10 Hitachi, Ltd. Vacuum evacuation system
DE3826710A1 (en) * 1987-08-07 1989-02-16 Japan Atomic Energy Res Inst Vacuum pump
EP0340685A2 (en) * 1988-04-30 1989-11-08 Nippon Ferrofluidics Corporation Composite vacuum pump
EP0344345A1 (en) * 1988-06-01 1989-12-06 Leybold Aktiengesellschaft Pumpsystem for a leak detecting apparatus
US5039280A (en) * 1988-12-16 1991-08-13 Alcatel Cit Pump assembly for obtaining a high vacuum
EP0435291A1 (en) * 1989-12-28 1991-07-03 Alcatel Cit Combined turbomolecular vacuum pump with two shafts and discharge at atmospheric pressure
EP0445855A1 (en) * 1990-03-09 1991-09-11 VARIAN S.p.A. Improved turbomolecular pump
DE4320963A1 (en) * 1993-04-15 1994-10-20 Knf Neuberger Gmbh Double positive displacement pump

Also Published As

Publication number Publication date
IT1297347B1 (en) 1999-09-01
EP0931939B1 (en) 2003-06-25
HK1021401A1 (en) 2000-06-09
ITTO971139A1 (en) 1999-06-24
EP0931939A2 (en) 1999-07-28
DE69815806T2 (en) 2004-05-19
DE69815806D1 (en) 2003-07-31

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