EP1096152A3 - Turbo molecular pump - Google Patents

Turbo molecular pump Download PDF

Info

Publication number
EP1096152A3
EP1096152A3 EP00122662A EP00122662A EP1096152A3 EP 1096152 A3 EP1096152 A3 EP 1096152A3 EP 00122662 A EP00122662 A EP 00122662A EP 00122662 A EP00122662 A EP 00122662A EP 1096152 A3 EP1096152 A3 EP 1096152A3
Authority
EP
European Patent Office
Prior art keywords
discs
stator
turbo molecular
molecular pump
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00122662A
Other languages
German (de)
French (fr)
Other versions
EP1096152A2 (en
EP1096152B1 (en
Inventor
Heinrich Lotz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1096152A2 publication Critical patent/EP1096152A2/en
Publication of EP1096152A3 publication Critical patent/EP1096152A3/en
Application granted granted Critical
Publication of EP1096152B1 publication Critical patent/EP1096152B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Steroid Compounds (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

The turbo molecular pump has rotor discs (10) and stator discs (14) stacked in alternation within a cylindrical pump housing, cooperating for providing a pump effect. Each stator disc has a distance ring (16) which determines the distance between adjacent stator discs, with part (17) of the cylindrical housing forming an integral stator element (12). The rotor discs are attached to a rotor shaft (4) via clamp elements (24).
EP00122662A 1999-10-28 2000-10-18 Turbo molecular pump Expired - Lifetime EP1096152B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19951954 1999-10-28
DE19951954A DE19951954A1 (en) 1999-10-28 1999-10-28 Turbomolecular pump

Publications (3)

Publication Number Publication Date
EP1096152A2 EP1096152A2 (en) 2001-05-02
EP1096152A3 true EP1096152A3 (en) 2001-10-17
EP1096152B1 EP1096152B1 (en) 2008-04-23

Family

ID=7927176

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00122662A Expired - Lifetime EP1096152B1 (en) 1999-10-28 2000-10-18 Turbo molecular pump

Country Status (5)

Country Link
US (1) US6461123B1 (en)
EP (1) EP1096152B1 (en)
JP (1) JP2001153087A (en)
AT (1) ATE393314T1 (en)
DE (2) DE19951954A1 (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10142567A1 (en) * 2001-08-30 2003-03-20 Pfeiffer Vacuum Gmbh Turbo molecular pump
DE10331932B4 (en) * 2003-07-15 2017-08-24 Pfeiffer Vacuum Gmbh Turbo molecular pump
GB0618745D0 (en) * 2006-09-22 2006-11-01 Boc Group Plc Molecular drag pumping mechanism
DE202008011489U1 (en) * 2008-08-28 2010-01-07 Oerlikon Leybold Vacuum Gmbh Stator-rotor arrangement for a vacuum pump and vacuum pump
DE102008058149A1 (en) * 2008-11-20 2010-05-27 Oerlikon Leybold Vacuum Gmbh Turbo-molecular pump, has rotor element arranged in pump housing, and stator rings surrounding rotor element, where rings exhibit attachment piece extending in longitudinal direction such that adjacent stator ring is arranged within piece
US8221098B2 (en) * 2009-03-09 2012-07-17 Honeywell International Inc. Radial turbomolecular pump with electrostatically levitated rotor
TWI424121B (en) * 2010-12-10 2014-01-21 Prosol Corp Turbo molecular pump with improved blade structures
WO2012165105A1 (en) * 2011-06-03 2012-12-06 エドワーズ株式会社 Vacuum pump
US9512848B2 (en) * 2011-09-14 2016-12-06 Texas Capital Semiconductor, Inc. Turbine cap for turbo-molecular pump
US11274671B2 (en) 2011-09-14 2022-03-15 Roger L. Bottomfield Turbine cap for turbo-molecular pump
US9512853B2 (en) * 2013-03-14 2016-12-06 Texas Capital Semiconductor, Inc. Turbine cap for turbo-molecular pump
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
US9083212B2 (en) * 2012-09-11 2015-07-14 Concepts Eti, Inc. Overhung turbine and generator system with turbine cartridge
DE102014100622A1 (en) 2014-01-21 2015-07-23 Pfeiffer Vacuum Gmbh Method for producing a rotor assembly for a vacuum pump and rotor assembly for a vacuum pump
CN114593075B (en) * 2022-03-15 2023-03-24 北京中科科仪股份有限公司 Molecular pump

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3168978A (en) * 1961-08-04 1965-02-09 Snecma Turbomolecular vacuum pump

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH618893A5 (en) * 1977-04-29 1980-08-29 Buehler Ag Geb
US4562368A (en) * 1982-05-26 1985-12-31 Board Of Regents Brush mechanism for a homopolar generator
US4732529A (en) * 1984-02-29 1988-03-22 Shimadzu Corporation Turbomolecular pump
JPS61275594A (en) * 1985-05-29 1986-12-05 Nippon Soken Inc Turbo molecular pump
JPS61283794A (en) * 1985-06-10 1986-12-13 Nippon Soken Inc Turbo molecular pump
JPS62173594U (en) * 1986-03-22 1987-11-04
JPS63227991A (en) * 1987-03-13 1988-09-22 Mitsubishi Electric Corp Turbomolecular pump
JPS6412123A (en) * 1987-07-03 1989-01-17 Ebara Corp Rotary machine
JPH04330397A (en) * 1991-04-30 1992-11-18 Fujitsu Ltd Turbo molecular pump
JPH05141389A (en) * 1991-11-15 1993-06-08 Vacuum Prod Kk Vacuum pump
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
FR2736103B1 (en) * 1995-06-30 1997-08-08 Cit Alcatel TURBOMOLECULAR PUMP
DE29516599U1 (en) * 1995-10-20 1995-12-07 Leybold Ag Friction vacuum pump with intermediate inlet
IT1288737B1 (en) * 1996-10-08 1998-09-24 Varian Spa VACUUM PUMPING DEVICE.
JP3400924B2 (en) * 1997-03-05 2003-04-28 東芝テック株式会社 Electric pump
JP3452468B2 (en) * 1997-08-15 2003-09-29 株式会社荏原製作所 Turbo molecular pump
GB9725146D0 (en) * 1997-11-27 1998-01-28 Boc Group Plc Improvements in vacuum pumps
US6071092A (en) * 1998-03-10 2000-06-06 Varian, Inc. Vacuum pump with improved back-up bearing assembly
FR2776029B1 (en) * 1998-03-16 2000-06-23 Alsthom Cge Alcatel TURBOMOLECULAR PUMP
JP4104098B2 (en) * 1999-03-31 2008-06-18 エドワーズ株式会社 Vacuum pump

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3168978A (en) * 1961-08-04 1965-02-09 Snecma Turbomolecular vacuum pump

Also Published As

Publication number Publication date
DE50015120D1 (en) 2008-06-05
EP1096152A2 (en) 2001-05-02
EP1096152B1 (en) 2008-04-23
US6461123B1 (en) 2002-10-08
JP2001153087A (en) 2001-06-05
DE19951954A1 (en) 2001-05-03
ATE393314T1 (en) 2008-05-15

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