EP1096152B1 - Turbo molecular pump - Google Patents

Turbo molecular pump Download PDF

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Publication number
EP1096152B1
EP1096152B1 EP00122662A EP00122662A EP1096152B1 EP 1096152 B1 EP1096152 B1 EP 1096152B1 EP 00122662 A EP00122662 A EP 00122662A EP 00122662 A EP00122662 A EP 00122662A EP 1096152 B1 EP1096152 B1 EP 1096152B1
Authority
EP
European Patent Office
Prior art keywords
stator
discs
rotor
pump
turbomolecular pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP00122662A
Other languages
German (de)
French (fr)
Other versions
EP1096152A2 (en
EP1096152A3 (en
Inventor
Heinrich Lotz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1096152A2 publication Critical patent/EP1096152A2/en
Publication of EP1096152A3 publication Critical patent/EP1096152A3/en
Application granted granted Critical
Publication of EP1096152B1 publication Critical patent/EP1096152B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Definitions

  • the invention relates to a turbomolecular pump according to the preamble of the first claim.
  • the active pumping elements of a turbomolecular pump consist of blade-equipped rotor and stator disks, which are arranged alternately one behind the other, such as the document US 3,168,978 represents.
  • the rotor and stator generally each have an inner support ring which is equipped on the outside with blades.
  • the blades of the rotor disks which revolve at high speed, produce the pumping effect in cooperation with the stator blades.
  • spacer rings which lie on the outer circumference between the stator, they are kept at a distance, that the rotor discs can rotate between them without contact.
  • Stator discs and spacers together so form the stator, which is centered by the inner wall of the pump housing and z. B. additionally compressed axially with springs so that the stator discs and the spacers form a solid composite.
  • the stator discs are divided into two parts for reasons of assembly and thus consist of two half discs.
  • the invention has for its object to present a turbomolecular pump in which the number of components compared to conventional constructions is significantly reduced. This should reduce manufacturing costs and assembly times and simplify maintenance. Avoidance of leaks within the pump, which are caused by the division of the stator, is also part of the task. An improvement in the heat conduction from the pump interior to the outside is sought, which contributes to the safety of the pump operation.
  • the inventive arrangement the number of components of a turbomolecular pump is significantly reduced. As a result, the production can be simplified and a lighter time-saving installation can be made possible. Compliance with the necessary tolerances is greatly facilitated by the reduced number of components.
  • the radial centering and the axial fixation of the stator disks are predetermined by the invention and require no further adjustment work.
  • the transport of the heat generated during operation of the pump to the outside can be significantly improved by a compact design and by avoiding heat conduction-inhibiting transitions between the parts of conventional construction.
  • cooling or heating elements in the region of the stator elements, a very effective temperature control of the entire pump structure, but especially the pump-active parts, depending on the operating conditions of the pump.
  • the intake opening is denoted by 1 and the gas outlet opening by 2.
  • the rotor shaft 4 is fixed in bearings 8 and 9 and is driven by the motor 6.
  • the rotor disks 10 are fastened with clamping devices 24.
  • the one-piece stator elements 12 each comprise a part 17 of the cylindrical housing, the stator disks 14 and the spacer rings 16, which fix the distance between the stator disks. Between the individual stator elements 14, which are stacked in the axial direction, there are sealing elements 20.
  • the stator elements are held together axially by means of screw 18 and fixed on the lower part 22 of the pump.
  • the rotor disks 10 are fastened on the rotor shaft 4 with the aid of clamping devices 24.

Abstract

The turbo molecular pump has rotor discs (10) and stator discs (14) stacked in alternation within a cylindrical pump housing, cooperating for providing a pump effect. Each stator disc has a distance ring (16) which determines the distance between adjacent stator discs, with part (17) of the cylindrical housing forming an integral stator element (12). The rotor discs are attached to a rotor shaft (4) via clamp elements (24).

Description

Die Erfindung betrifft eine Turbomolekularpumpe nach dem Oberbegriff des 1. Patentanspruches.The invention relates to a turbomolecular pump according to the preamble of the first claim.

Die aktiven Pumpelemente einer Turbomolekularpumpe bestehen aus mit Schaufeln versehenen Rotor- und Statorscheiben, die abwechselnd hintereinander angeordnet sind, wie zum Beispiel das Dokument US 3168978 darstellt. Die Rotor- und Statorscheiben weisen im allgemeinen jeweils einen inneren Tragring auf, der auf der Außenseite mit Schaufeln bestückt ist. Die Schaufeln der Rotorscheiben, welche mit hoher Geschwindigkeit umlaufen, ergeben im Zusammenwirken mit den Statorschaufeln den Pumpeffekt. Durch Distanzringe, welche am äußeren Umfang zwischen den Statorscheiben liegen, werden diese so auf Abstand gehalten, dass die Rotorscheiben zwischen ihnen berührungsfrei rotieren können. Statorscheiben und Distanzringe bilden so gemeinsam den Stator, der durch die Innenwand des Pumpengehäuses zentriert wird und z. B. mit Federn zusätzlich axial so zusammengedrückt wird, dass die Statorscheiben und die Distanzringe einen festen Verbund bilden. Die Statorscheiben sind aus Gründen der Montage zweigeteilt und bestehen somit aus zwei Halbscheiben.The active pumping elements of a turbomolecular pump consist of blade-equipped rotor and stator disks, which are arranged alternately one behind the other, such as the document US 3,168,978 represents. The rotor and stator generally each have an inner support ring which is equipped on the outside with blades. The blades of the rotor disks, which revolve at high speed, produce the pumping effect in cooperation with the stator blades. By spacer rings, which lie on the outer circumference between the stator, they are kept at a distance, that the rotor discs can rotate between them without contact. Stator discs and spacers together so form the stator, which is centered by the inner wall of the pump housing and z. B. additionally compressed axially with springs so that the stator discs and the spacers form a solid composite. The stator discs are divided into two parts for reasons of assembly and thus consist of two half discs.

Diese herkömmliche Art einer Konstruktion von Turbomolekularpumpen ist jedoch mit einer Reihe von Nachteilen behaftet, welche zum großen Teil auf die hohe Anzahl der Bauteile zurückzuführen ist. Als Folge entstehen hohe Fertigungskosten und lange Montagezeiten, die sich wiederum auf die Reparatur- und Wartungsarbeiten nachteilig auswirken. Die exakte Einhaltung von Toleranzen, welche für einen sicheren Betrieb einer Turbomolekularpumpe notwendig sind, erfordert mit steigende Anzahl von Bauteilen einen extrem hohen Aufwand. Die radiale Zentrierung und die axiale Fixierung der Statorscheiben bedeuten zusätzliche Justierarbeiten. Die Tatsache, dass die Statorscheiben zum Zwecke der Montage zweigeteilt sind, zieht weitere Unsicherheiten bei den Toleranzen mit sich und bewirkt vor allem zusätzliche Undichtigkeiten innerhalb der Pumpe. Dadurch werden störende Rückströmungen ermöglicht, die die Wirksamkeit der Pumpe verringern.However, this conventional type of turbomolecular pump design suffers from a number of disadvantages, due in large part to the high number of components. As a result, high production costs and long assembly times, which in turn have a detrimental effect on the repair and maintenance work. The exact compliance with tolerances, which are necessary for the safe operation of a turbomolecular pump, requires an extremely high effort with increasing number of components. The radial centering and the axial fixation of the stator discs mean additional adjustments. The fact that the stator disks are split in two for the purposes of assembly adds further uncertainties to the tolerances and, above all, causes additional leaks within the pump. This allows disturbing backflow, which reduces the effectiveness of the pump.

Die Erfindung hat sich zur Aufgabe gestellt, eine Turbomolekularpumpe vorzustellen, bei der die Anzahl der Bauteile gegenüber herkömmlichen Konstruktionen deutlich reduziert ist. Dadurch sollen Fertigungskosten und Montagezeiten verringert sowie die Wartungsarbeiten vereinfacht werden. Vermeidung von Undichtigkeiten innerhalb der Pumpe, welche durch die Zweiteilung der Statorscheiben bedingt sind, gehört ebenfalls zur Aufgabenstellung. Eine Verbesserung der Wärmeleitung vom Pumpeninneren nach außen wird angestrebt, was zur Sicherheit des Pumpenbetriebs beiträgt.The invention has for its object to present a turbomolecular pump in which the number of components compared to conventional constructions is significantly reduced. This should reduce manufacturing costs and assembly times and simplify maintenance. Avoidance of leaks within the pump, which are caused by the division of the stator, is also part of the task. An improvement in the heat conduction from the pump interior to the outside is sought, which contributes to the safety of the pump operation.

Die Aufgabe wird durch die kennzeichnenden Merkmale des 1. Patentanspruches gelöst. Die Ansprüche 2 - 4 stellen weitere Ausgestaltungsformen der Erfindung dar.The object is solved by the characterizing features of the first claim. The claims 2-4 represent further embodiments of the invention.

Durch die erfindungsgemäße Anordnung wird die Anzahl der Bauteile einer Turbomolekularpumpe erheblich verringert. Dadurch kann die Fertigung vereinfacht und eine leichtere zeitsparende Montage ermöglicht werden. Die Einhaltung der notwendigen Toleranzen wird durch die reduzierte Anzahl von Bauteilen wesentlich erleichtert. Die radiale Zentrierung und die axiale Fixierung der Statorscheiben werden durch die Erfindung an sich vorgegeben und bedürfen keiner weiteren Justierarbeit. Der Transport der beim Betrieb der Pumpe entstehenden Wärme nach außen kann durch eine kompakte Bauweise und durch die Vermeidung von wärmeleitungshemmenden Übergängen zwischen den Teilen herkömmlicher Bauweise erheblich verbessert werden. Darüber hinaus kann durch Anbringen von Kühl- oder Heizelementen im Bereich der Statorelemente eine sehr wirksame Temperaturregelung des gesamten Pumpenaufbaues, besonders jedoch der pumpaktiven Teile, in Abhängigkeit von den Betriebsbedingungen der Pumpe erfolgen.The inventive arrangement, the number of components of a turbomolecular pump is significantly reduced. As a result, the production can be simplified and a lighter time-saving installation can be made possible. Compliance with the necessary tolerances is greatly facilitated by the reduced number of components. The radial centering and the axial fixation of the stator disks are predetermined by the invention and require no further adjustment work. The transport of the heat generated during operation of the pump to the outside can be significantly improved by a compact design and by avoiding heat conduction-inhibiting transitions between the parts of conventional construction. In addition, by applying cooling or heating elements in the region of the stator elements, a very effective temperature control of the entire pump structure, but especially the pump-active parts, depending on the operating conditions of the pump.

Wenn man die Rotorscheiben durch Klemmvorrichtungen einzeln nach einander auf der Welle befestigt und nicht, wie seither, als Scheibenpaket zusammen aufschrumpft oder aus dem Vollen erstellt, kann man die Statorbauteile als ganze Teile montieren, und sie müssen nicht vorher in der Mitte geteilt werden. Dadurch werden zusätzliche Undichtigkeiten innerhalb der Pumpe und somit störende Rückströmungen vermieden.If one fixes the rotor disks by clamping devices individually one after the other on the shaft and not, as ever shrinking together as disk package or created from the solid, you can assemble the stator components as a whole parts, and they need not be divided in the middle. As a result, additional leaks within the pump and thus disturbing backflows are avoided.

Anhand der Abbildung soll die Erfindung an einem Beispiel näher erläutert werden.With reference to the figure, the invention will be explained in more detail by way of example.

Bei der dargestellten Turbomolekularpumpe ist die Ansaugöffnung mit 1 und die Gasaustrittsöffnung mit 2 bezeichnet. Die Rotorwelle 4 ist in Lagern 8 und 9 fixiert und wird durch den Motor 6 angetrieben. Auf der Rotorwelle 4 sind die Rotorscheiben 10 mit Klemmvorrichtungen 24 befestigt. Die einstückigen Statorelemente 12 umfassen jeweils einen Teil 17 des zylindrischen Gehäuses, die Statorscheiben 14 sowie die Distanzringe 16, welche den Abstand zwischen den Statorscheiben fixieren. Zwischen den einzelnen Statorelementen 14, welche in axialer Richtung aufeinander geschichtet sind, befinden sich Dichtelemente 20. Die Statorelemente werden axial mit Hilfe von Verschraubungen 18 zusammen gehalten und auf dem Unterteil 22 der Pumpe befestigt. Die Rotorscheiben 10 sind mit Hilfe von Klemmvorrichtungen 24 auf der Rotorwelle 4 befestigt.In the turbomolecular pump shown, the intake opening is denoted by 1 and the gas outlet opening by 2. The rotor shaft 4 is fixed in bearings 8 and 9 and is driven by the motor 6. On the rotor shaft 4, the rotor disks 10 are fastened with clamping devices 24. The one-piece stator elements 12 each comprise a part 17 of the cylindrical housing, the stator disks 14 and the spacer rings 16, which fix the distance between the stator disks. Between the individual stator elements 14, which are stacked in the axial direction, there are sealing elements 20. The stator elements are held together axially by means of screw 18 and fixed on the lower part 22 of the pump. The rotor disks 10 are fastened on the rotor shaft 4 with the aid of clamping devices 24.

Claims (4)

  1. Turbomolecular pump having rotor- (10) and stator discs (14), which are arranged alternately in succession in a cylindrical housing and by their interaction generate a pumping effect, characterized in that a stator disc (14), a spacer ring (16) that fixes the spacing between the stator discs, and a part (17) of the cylindrical housing respectively form an integral stator element (12).
  2. Turbomolecular pump according to claim 1, characterized in that sealing rings (20) are fitted between the individual stator elements (12).
  3. Turbomolecular pump according to claim 1 or 2, characterized in that the individual stator elements (12) are held together by screw connections (18).
  4. Turbomolecular pump according to one of the preceding claims, characterized in that the rotor discs (10) are fastened on the rotor shaft (4) with the aid of clamping devices (24).
EP00122662A 1999-10-28 2000-10-18 Turbo molecular pump Expired - Lifetime EP1096152B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19951954 1999-10-28
DE19951954A DE19951954A1 (en) 1999-10-28 1999-10-28 Turbomolecular pump

Publications (3)

Publication Number Publication Date
EP1096152A2 EP1096152A2 (en) 2001-05-02
EP1096152A3 EP1096152A3 (en) 2001-10-17
EP1096152B1 true EP1096152B1 (en) 2008-04-23

Family

ID=7927176

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00122662A Expired - Lifetime EP1096152B1 (en) 1999-10-28 2000-10-18 Turbo molecular pump

Country Status (5)

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US (1) US6461123B1 (en)
EP (1) EP1096152B1 (en)
JP (1) JP2001153087A (en)
AT (1) ATE393314T1 (en)
DE (2) DE19951954A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI424121B (en) * 2010-12-10 2014-01-21 Prosol Corp Turbo molecular pump with improved blade structures

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10142567A1 (en) * 2001-08-30 2003-03-20 Pfeiffer Vacuum Gmbh Turbo molecular pump
DE10331932B4 (en) * 2003-07-15 2017-08-24 Pfeiffer Vacuum Gmbh Turbo molecular pump
GB0618745D0 (en) * 2006-09-22 2006-11-01 Boc Group Plc Molecular drag pumping mechanism
DE202008011489U1 (en) 2008-08-28 2010-01-07 Oerlikon Leybold Vacuum Gmbh Stator-rotor arrangement for a vacuum pump and vacuum pump
DE102008058149A1 (en) * 2008-11-20 2010-05-27 Oerlikon Leybold Vacuum Gmbh Turbo-molecular pump, has rotor element arranged in pump housing, and stator rings surrounding rotor element, where rings exhibit attachment piece extending in longitudinal direction such that adjacent stator ring is arranged within piece
US8221098B2 (en) * 2009-03-09 2012-07-17 Honeywell International Inc. Radial turbomolecular pump with electrostatically levitated rotor
WO2012165105A1 (en) * 2011-06-03 2012-12-06 エドワーズ株式会社 Vacuum pump
US9512848B2 (en) * 2011-09-14 2016-12-06 Texas Capital Semiconductor, Inc. Turbine cap for turbo-molecular pump
US11274671B2 (en) 2011-09-14 2022-03-15 Roger L. Bottomfield Turbine cap for turbo-molecular pump
US9512853B2 (en) * 2013-03-14 2016-12-06 Texas Capital Semiconductor, Inc. Turbine cap for turbo-molecular pump
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
US9083212B2 (en) * 2012-09-11 2015-07-14 Concepts Eti, Inc. Overhung turbine and generator system with turbine cartridge
DE102014100622A1 (en) * 2014-01-21 2015-07-23 Pfeiffer Vacuum Gmbh Method for producing a rotor assembly for a vacuum pump and rotor assembly for a vacuum pump
CN114593075B (en) * 2022-03-15 2023-03-24 北京中科科仪股份有限公司 Molecular pump

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1304689A (en) * 1961-08-04 1962-09-28 Snecma Advanced Turbomolecular Vacuum Pump
CH618893A5 (en) * 1977-04-29 1980-08-29 Buehler Ag Geb
US4562368A (en) * 1982-05-26 1985-12-31 Board Of Regents Brush mechanism for a homopolar generator
US4732529A (en) * 1984-02-29 1988-03-22 Shimadzu Corporation Turbomolecular pump
JPS61275594A (en) * 1985-05-29 1986-12-05 Nippon Soken Inc Turbo molecular pump
JPS61283794A (en) * 1985-06-10 1986-12-13 Nippon Soken Inc Turbo molecular pump
JPS62173594U (en) * 1986-03-22 1987-11-04
JPS63227991A (en) * 1987-03-13 1988-09-22 Mitsubishi Electric Corp Turbomolecular pump
JPS6412123A (en) * 1987-07-03 1989-01-17 Ebara Corp Rotary machine
JPH04330397A (en) * 1991-04-30 1992-11-18 Fujitsu Ltd Turbo molecular pump
JPH05141389A (en) * 1991-11-15 1993-06-08 Vacuum Prod Kk Vacuum pump
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
FR2736103B1 (en) * 1995-06-30 1997-08-08 Cit Alcatel TURBOMOLECULAR PUMP
DE29516599U1 (en) * 1995-10-20 1995-12-07 Leybold Ag Friction vacuum pump with intermediate inlet
IT1288737B1 (en) * 1996-10-08 1998-09-24 Varian Spa VACUUM PUMPING DEVICE.
JP3400924B2 (en) * 1997-03-05 2003-04-28 東芝テック株式会社 Electric pump
JP3452468B2 (en) * 1997-08-15 2003-09-29 株式会社荏原製作所 Turbo molecular pump
GB9725146D0 (en) * 1997-11-27 1998-01-28 Boc Group Plc Improvements in vacuum pumps
US6071092A (en) * 1998-03-10 2000-06-06 Varian, Inc. Vacuum pump with improved back-up bearing assembly
FR2776029B1 (en) * 1998-03-16 2000-06-23 Alsthom Cge Alcatel TURBOMOLECULAR PUMP
JP4104098B2 (en) * 1999-03-31 2008-06-18 エドワーズ株式会社 Vacuum pump

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI424121B (en) * 2010-12-10 2014-01-21 Prosol Corp Turbo molecular pump with improved blade structures

Also Published As

Publication number Publication date
JP2001153087A (en) 2001-06-05
US6461123B1 (en) 2002-10-08
EP1096152A2 (en) 2001-05-02
DE50015120D1 (en) 2008-06-05
ATE393314T1 (en) 2008-05-15
EP1096152A3 (en) 2001-10-17
DE19951954A1 (en) 2001-05-03

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