EP1096152B1 - Pompe turbo-moléculaire - Google Patents

Pompe turbo-moléculaire Download PDF

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Publication number
EP1096152B1
EP1096152B1 EP00122662A EP00122662A EP1096152B1 EP 1096152 B1 EP1096152 B1 EP 1096152B1 EP 00122662 A EP00122662 A EP 00122662A EP 00122662 A EP00122662 A EP 00122662A EP 1096152 B1 EP1096152 B1 EP 1096152B1
Authority
EP
European Patent Office
Prior art keywords
stator
discs
rotor
pump
turbomolecular pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP00122662A
Other languages
German (de)
English (en)
Other versions
EP1096152A3 (fr
EP1096152A2 (fr
Inventor
Heinrich Lotz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1096152A2 publication Critical patent/EP1096152A2/fr
Publication of EP1096152A3 publication Critical patent/EP1096152A3/fr
Application granted granted Critical
Publication of EP1096152B1 publication Critical patent/EP1096152B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Definitions

  • the invention relates to a turbomolecular pump according to the preamble of the first claim.
  • the active pumping elements of a turbomolecular pump consist of blade-equipped rotor and stator disks, which are arranged alternately one behind the other, such as the document US 3,168,978 represents.
  • the rotor and stator generally each have an inner support ring which is equipped on the outside with blades.
  • the blades of the rotor disks which revolve at high speed, produce the pumping effect in cooperation with the stator blades.
  • spacer rings which lie on the outer circumference between the stator, they are kept at a distance, that the rotor discs can rotate between them without contact.
  • Stator discs and spacers together so form the stator, which is centered by the inner wall of the pump housing and z. B. additionally compressed axially with springs so that the stator discs and the spacers form a solid composite.
  • the stator discs are divided into two parts for reasons of assembly and thus consist of two half discs.
  • the invention has for its object to present a turbomolecular pump in which the number of components compared to conventional constructions is significantly reduced. This should reduce manufacturing costs and assembly times and simplify maintenance. Avoidance of leaks within the pump, which are caused by the division of the stator, is also part of the task. An improvement in the heat conduction from the pump interior to the outside is sought, which contributes to the safety of the pump operation.
  • the inventive arrangement the number of components of a turbomolecular pump is significantly reduced. As a result, the production can be simplified and a lighter time-saving installation can be made possible. Compliance with the necessary tolerances is greatly facilitated by the reduced number of components.
  • the radial centering and the axial fixation of the stator disks are predetermined by the invention and require no further adjustment work.
  • the transport of the heat generated during operation of the pump to the outside can be significantly improved by a compact design and by avoiding heat conduction-inhibiting transitions between the parts of conventional construction.
  • cooling or heating elements in the region of the stator elements, a very effective temperature control of the entire pump structure, but especially the pump-active parts, depending on the operating conditions of the pump.
  • the intake opening is denoted by 1 and the gas outlet opening by 2.
  • the rotor shaft 4 is fixed in bearings 8 and 9 and is driven by the motor 6.
  • the rotor disks 10 are fastened with clamping devices 24.
  • the one-piece stator elements 12 each comprise a part 17 of the cylindrical housing, the stator disks 14 and the spacer rings 16, which fix the distance between the stator disks. Between the individual stator elements 14, which are stacked in the axial direction, there are sealing elements 20.
  • the stator elements are held together axially by means of screw 18 and fixed on the lower part 22 of the pump.
  • the rotor disks 10 are fastened on the rotor shaft 4 with the aid of clamping devices 24.

Claims (4)

  1. Pompe turbomoléculaire comprenant des disques de rotor (10) et des disques de stator (14) agencés en alternance les uns à la suite des autres et dont la coopération produit un effet de pompage, caractérisée en ce que respectivement un disque de stator (14), une bague d'écartement (16) - déterminant la distance entre les disques de rotor- et une portion (17) du carter cylindrique constituent un élément de stator (12) monobloc.
  2. Pompe turbomoléculaire selon la revendication 1, caractérisée en ce que des bagues d'étanchéité (20) sont disposées entre les différents éléments de stator (12).
  3. Pompe turbomoléculaire selon la revendication 1 ou 2, caractérisée en ce que les différents éléments stator (12) sont maintenus ensemble par des boulons (18).
  4. Pompe turbomoléculaire selon l'une quelconque des revendications précédentes, caractérisée en ce que les disques de rotor (10) sont fixés sur l'arbre de rotor (4) par le biais de dispositifs de serrage (24).
EP00122662A 1999-10-28 2000-10-18 Pompe turbo-moléculaire Expired - Lifetime EP1096152B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19951954A DE19951954A1 (de) 1999-10-28 1999-10-28 Turbomolekularpumpe
DE19951954 1999-10-28

Publications (3)

Publication Number Publication Date
EP1096152A2 EP1096152A2 (fr) 2001-05-02
EP1096152A3 EP1096152A3 (fr) 2001-10-17
EP1096152B1 true EP1096152B1 (fr) 2008-04-23

Family

ID=7927176

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00122662A Expired - Lifetime EP1096152B1 (fr) 1999-10-28 2000-10-18 Pompe turbo-moléculaire

Country Status (5)

Country Link
US (1) US6461123B1 (fr)
EP (1) EP1096152B1 (fr)
JP (1) JP2001153087A (fr)
AT (1) ATE393314T1 (fr)
DE (2) DE19951954A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI424121B (zh) * 2010-12-10 2014-01-21 Prosol Corp 渦輪分子泵浦之葉片結構改良

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10142567A1 (de) * 2001-08-30 2003-03-20 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE10331932B4 (de) * 2003-07-15 2017-08-24 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
GB0618745D0 (en) * 2006-09-22 2006-11-01 Boc Group Plc Molecular drag pumping mechanism
DE202008011489U1 (de) 2008-08-28 2010-01-07 Oerlikon Leybold Vacuum Gmbh Stator-Rotor-Anordnung für eine Vakuumpumpe sowie Vakuumpumpe
DE102008058149A1 (de) * 2008-11-20 2010-05-27 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
US8221098B2 (en) * 2009-03-09 2012-07-17 Honeywell International Inc. Radial turbomolecular pump with electrostatically levitated rotor
JP6113071B2 (ja) * 2011-06-03 2017-04-12 エドワーズ株式会社 真空ポンプ
US9512848B2 (en) * 2011-09-14 2016-12-06 Texas Capital Semiconductor, Inc. Turbine cap for turbo-molecular pump
US9512853B2 (en) * 2013-03-14 2016-12-06 Texas Capital Semiconductor, Inc. Turbine cap for turbo-molecular pump
US11274671B2 (en) 2011-09-14 2022-03-15 Roger L. Bottomfield Turbine cap for turbo-molecular pump
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
US9083212B2 (en) * 2012-09-11 2015-07-14 Concepts Eti, Inc. Overhung turbine and generator system with turbine cartridge
DE102014100622A1 (de) 2014-01-21 2015-07-23 Pfeiffer Vacuum Gmbh Verfahren zur Herstellung einer Rotoranordnung für eine Vakuumpumpe und Rotoranordnung für eine Vakuumpumpe
CN114593075B (zh) * 2022-03-15 2023-03-24 北京中科科仪股份有限公司 一种分子泵

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1304689A (fr) * 1961-08-04 1962-09-28 Snecma Pompe à vide turbomoléculaire perfectionnée
CH618893A5 (fr) * 1977-04-29 1980-08-29 Buehler Ag Geb
US4562368A (en) * 1982-05-26 1985-12-31 Board Of Regents Brush mechanism for a homopolar generator
US4732529A (en) * 1984-02-29 1988-03-22 Shimadzu Corporation Turbomolecular pump
JPS61275594A (ja) * 1985-05-29 1986-12-05 Nippon Soken Inc タ−ボ分子ポンプ
JPS61283794A (ja) * 1985-06-10 1986-12-13 Nippon Soken Inc タ−ボ分子ポンプ
JPS62173594U (fr) * 1986-03-22 1987-11-04
JPS63227991A (ja) * 1987-03-13 1988-09-22 Mitsubishi Electric Corp タ−ボ分子ポンプ
JPS6412123A (en) * 1987-07-03 1989-01-17 Ebara Corp Rotary machine
JPH04330397A (ja) * 1991-04-30 1992-11-18 Fujitsu Ltd ターボ分子ポンプ
JPH05141389A (ja) * 1991-11-15 1993-06-08 Vacuum Prod Kk 真空ポンプ
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
FR2736103B1 (fr) * 1995-06-30 1997-08-08 Cit Alcatel Pompe turbomoleculaire
DE29516599U1 (de) * 1995-10-20 1995-12-07 Leybold Ag Reibungsvakuumpumpe mit Zwischeneinlaß
IT1288737B1 (it) * 1996-10-08 1998-09-24 Varian Spa Dispositivo di pompaggio da vuoto.
JP3400924B2 (ja) * 1997-03-05 2003-04-28 東芝テック株式会社 電動ポンプ
JP3452468B2 (ja) * 1997-08-15 2003-09-29 株式会社荏原製作所 ターボ分子ポンプ
GB9725146D0 (en) * 1997-11-27 1998-01-28 Boc Group Plc Improvements in vacuum pumps
US6071092A (en) * 1998-03-10 2000-06-06 Varian, Inc. Vacuum pump with improved back-up bearing assembly
FR2776029B1 (fr) * 1998-03-16 2000-06-23 Alsthom Cge Alcatel Pompe turbomoleculaire
JP4104098B2 (ja) * 1999-03-31 2008-06-18 エドワーズ株式会社 真空ポンプ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI424121B (zh) * 2010-12-10 2014-01-21 Prosol Corp 渦輪分子泵浦之葉片結構改良

Also Published As

Publication number Publication date
DE50015120D1 (de) 2008-06-05
EP1096152A3 (fr) 2001-10-17
ATE393314T1 (de) 2008-05-15
DE19951954A1 (de) 2001-05-03
EP1096152A2 (fr) 2001-05-02
US6461123B1 (en) 2002-10-08
JP2001153087A (ja) 2001-06-05

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