EP1130269B1 - Pompe turbo-moléculaire - Google Patents

Pompe turbo-moléculaire Download PDF

Info

Publication number
EP1130269B1
EP1130269B1 EP01102551A EP01102551A EP1130269B1 EP 1130269 B1 EP1130269 B1 EP 1130269B1 EP 01102551 A EP01102551 A EP 01102551A EP 01102551 A EP01102551 A EP 01102551A EP 1130269 B1 EP1130269 B1 EP 1130269B1
Authority
EP
European Patent Office
Prior art keywords
stator
turbomolecular pump
elastically deformable
metal element
discs
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP01102551A
Other languages
German (de)
English (en)
Other versions
EP1130269A3 (fr
EP1130269A2 (fr
Inventor
Peter Fahrenbach
Armin Blecker
Wolfgang Bremer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1130269A2 publication Critical patent/EP1130269A2/fr
Publication of EP1130269A3 publication Critical patent/EP1130269A3/fr
Application granted granted Critical
Publication of EP1130269B1 publication Critical patent/EP1130269B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Definitions

  • the invention relates to a turbomolecular pump according to the preamble of the first claim.
  • the active pumping elements of a turbomolecular pump consist of rotor blades and stator disks provided with blades, which are arranged alternately one behind the other.
  • the rotor and stator discs generally each have an inner support ring, which is equipped on the outside with the blades.
  • the blades of the rotor disks which revolve at high speed, produce the pumping effect in cooperation with the stator blades.
  • spacer rings which lie on the outer circumference between the stator, they are kept at a distance, that the rotor discs can rotate between them without contact.
  • Stator discs and spacers together form the stator, which is centered by the inner wall of the pump housing and z. B. additionally compressed axially with springs so that the stator discs and the spacers form a solid composite.
  • the disadvantage of this solution is a very poor thermal conductivity of the O-ring material.
  • the heat generated during the pumping operation in the interior is only inadequately delivered to the housing and to the lower part of the pump.
  • the lack of corrosion resistance of the O-ring material causes problems in pumping out aggressive media.
  • the O-rings can not be used on the high vacuum side because of the high outgassing rate.
  • the object of the invention is to present an arrangement which compensates for manufacturing tolerances which adhere to the individual components of the stator packs of turbomolecular pumps. By them, the disadvantages which exist in conventional arrangements, such as in the use of O-rings, are avoided.
  • the inventive arrangement should continue to the FR 26 83 277 some advantages, such. B. have greater freedom in the choice of materials and influenceability of the thermal conductivity.
  • the rotor disks 4 are attached to a turbomolecular pump.
  • the stator discs 6, which are each held by spacers 8 at a distance, are mounted between the rotor discs.
  • Rotor disks 4 and stator disks 6 are provided with gas-conveying structures and together effect the pumping effect.
  • Stator discs and spacers together form the stator core, which is centered on the inner wall of the pump housing 10.
  • Between at least two of the spacers 8 are each elastically deformable metallic elements 16. These form together with the spacers and the stator disks, the stator.
  • an axial groove 14 may be incorporated, in which an elastically deformable element 16 is located.
  • an element can consist of several parts or be formed in one piece.
  • such an element can consist of a wave-shaped bent wire.
  • the element 16 consists of a wavy curved wire.

Claims (4)

  1. Pompe turbomoléculaire comprenant des disques de rotor (4) et des disques de stator (6) agencés en alternance les uns derrière les autres, dans laquelle les disques de stator sont maintenus à distance par le biais de bagues d'écartement (8) en formant avec ces dernières l'ensemble stator, caractérisée en ce qu'il est agencé, entre au moins deux des bagues d'écartement (8), chaque fois un élément métallique (16) apte à la déformation élastique et en ce que celui-ci fait également partie de l'ensemble stator.
  2. Pompe turbomoléculaire selon la revendication 1, caractérisée en ce qu'il est ménagé, dans au moins une des bagues d'écartement (12), une gorge axiale (14) dans laquelle est disposé un élément métallique (16) apte à la déformation élastique.
  3. Pompe turbomoléculaire selon la revendication 1 ou 2, caractérisée en ce que l'élément métallique (16) apte à la déformation élastique est composé d'un fil de fer ondulé.
  4. Pompe turbomoléculaire selon l'une quelconque des revendications précédentes, caractérisée en ce que l'élément métallique (16) apte à la déformation élastique est constitué de plusieurs pièces.
EP01102551A 2000-03-02 2001-02-06 Pompe turbo-moléculaire Expired - Lifetime EP1130269B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10010371 2000-03-02
DE10010371A DE10010371A1 (de) 2000-03-02 2000-03-02 Turbomolekularpumpe

Publications (3)

Publication Number Publication Date
EP1130269A2 EP1130269A2 (fr) 2001-09-05
EP1130269A3 EP1130269A3 (fr) 2002-10-30
EP1130269B1 true EP1130269B1 (fr) 2006-09-13

Family

ID=7633364

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01102551A Expired - Lifetime EP1130269B1 (fr) 2000-03-02 2001-02-06 Pompe turbo-moléculaire

Country Status (4)

Country Link
US (1) US6454525B2 (fr)
EP (1) EP1130269B1 (fr)
JP (1) JP2001271786A (fr)
DE (2) DE10010371A1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITTO20030420A1 (it) * 2003-06-05 2004-12-06 Varian Spa Metodo per la realizzazione di statori per pompe da vuot0 e statori cosi' ottenuti
DE10331932B4 (de) 2003-07-15 2017-08-24 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE102007048703A1 (de) * 2007-10-11 2009-04-16 Oerlikon Leybold Vacuum Gmbh Mehrstufiger Turbomolekularpumpen-Pumpenrotor
US8221098B2 (en) * 2009-03-09 2012-07-17 Honeywell International Inc. Radial turbomolecular pump with electrostatically levitated rotor
WO2012165105A1 (fr) * 2011-06-03 2012-12-06 エドワーズ株式会社 Pompe à vide
DE202011109517U1 (de) 2011-12-23 2013-03-25 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE102014118083A1 (de) * 2014-12-08 2016-06-09 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
GB2552793A (en) 2016-08-08 2018-02-14 Edwards Ltd Vacuum pump
FR3135306A1 (fr) * 2022-05-05 2023-11-10 Pfeiffer Vacuum Pompe à vide turbomoléculaire et procédé d’assemblage

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US760776A (en) * 1903-09-09 1904-05-24 Ben J Campbell Fluid-viscosity motor or turbine.
US3189264A (en) * 1963-06-04 1965-06-15 Arthur Pfeiffer Company Vacuum pump drive and seal arrangement
DE1503704C3 (de) * 1966-12-30 1972-03-23 Arthur Pfeiffer Hochvakuumtechnik Gmbh, 6330 Wetzlar Schaufelkranz fuer ein lauf und oder leitrad einer turbomolekularpumpe
FR2086525A5 (fr) * 1970-04-01 1971-12-31 Commissariat Energie Atomique
CH583856A5 (fr) * 1974-09-27 1977-01-14 Balzers Patent Beteilig Ag
JPS57212395A (en) * 1981-06-24 1982-12-27 Hitachi Ltd Molecular pump
NO821262L (no) * 1982-04-19 1983-10-20 Regnor Pedersen Element for bruk ved oppbygging av vibrasjonsdempende fjaeranordninger.
JPS61148932U (fr) * 1985-03-08 1986-09-13
DE3891263T1 (de) * 1988-02-26 1990-03-15 Nikolaj Michailovic Novikov Turbomolekular-vakuumpumpe
JPH0348162A (ja) * 1989-04-24 1991-03-01 Fuji Electric Co Ltd モータの速度検出装置
DE9013671U1 (fr) * 1990-09-29 1992-01-30 Leybold Ag, 6450 Hanau, De
JPH0465992U (fr) * 1990-10-15 1992-06-09
US5149066A (en) * 1991-02-11 1992-09-22 Aeroflex International Incorporated Isolator with improved symmetrical response to shock and vibration forces
JPH04330397A (ja) * 1991-04-30 1992-11-18 Fujitsu Ltd ターボ分子ポンプ
FR2683277B1 (fr) * 1991-11-04 1995-01-13 Cit Alcatel Entretoise a epaisseur ajustable.
JP2579864B2 (ja) * 1992-04-23 1997-02-12 ダイジョー株式会社 弾性構造体
JPH07180739A (ja) * 1994-12-06 1995-07-18 Daijiyoo Kk 弾性構造体

Also Published As

Publication number Publication date
EP1130269A3 (fr) 2002-10-30
DE10010371A1 (de) 2001-09-06
EP1130269A2 (fr) 2001-09-05
US6454525B2 (en) 2002-09-24
US20010019694A1 (en) 2001-09-06
DE50110975D1 (de) 2006-10-26
JP2001271786A (ja) 2001-10-05

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