EP1101944A2 - Pompe turbo-moléculaire - Google Patents

Pompe turbo-moléculaire Download PDF

Info

Publication number
EP1101944A2
EP1101944A2 EP00124676A EP00124676A EP1101944A2 EP 1101944 A2 EP1101944 A2 EP 1101944A2 EP 00124676 A EP00124676 A EP 00124676A EP 00124676 A EP00124676 A EP 00124676A EP 1101944 A2 EP1101944 A2 EP 1101944A2
Authority
EP
European Patent Office
Prior art keywords
turbomolecular pump
pump according
components
stator
seals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00124676A
Other languages
German (de)
English (en)
Other versions
EP1101944A3 (fr
EP1101944B1 (fr
Inventor
Heinrich Lotz
Jörg Stanzel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1101944A2 publication Critical patent/EP1101944A2/fr
Publication of EP1101944A3 publication Critical patent/EP1101944A3/fr
Application granted granted Critical
Publication of EP1101944B1 publication Critical patent/EP1101944B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Definitions

  • the invention relates to a turbomolecular pump according to the preamble of the first Claim.
  • the active pump elements of a turbomolecular pump consist of with blades provided rotor and stator disks, which are arranged alternately one behind the other are.
  • the rotor and stator disks generally each have an inner one Support ring, which is equipped with blades on the outside.
  • the shovels of the Rotor disks that rotate at high speed result in interaction with the stator blades the pump effect.
  • spacer rings which on outer circumference between the rotor disks, they are spaced maintained that the rotor disks can rotate between them without contact.
  • Stator disks and spacer rings together form the stator through the inner wall the pump housing is centered and z. B. with springs additionally axially is compressed so that stator washers and spacers form a firm bond form.
  • turbomolecular pump which consists of a arranged in a housing and a stator cooperating therewith Rotor consists, the stator composed of two cylindrical shells is.
  • the disadvantage is that the stator is installed in a separate housing radial centering and axial fixation must be carried out have to. This means high manufacturing costs and assembly times as well as time-consuming Maintenance work. Inevitable gaps between the stator and housing lead to disturbing backflows. Furthermore, the removal of the during pump operation in The heat generated inside is hampered by insufficient heat conduction to the outside.
  • EP 07 51 297 A1 shows a turbomolecular pump, the stator of which consists of two parts consists. This pump is designed without a housing. It is intended to be direct to immerse into a recipient. Should it be provided with a housing, you experience the problems described above.
  • the object of the invention is to present a turbomolecular pump, where the number of components is clear compared to conventional designs is reduced. This should reduce manufacturing costs and assembly times as well the maintenance work is simplified. An improvement in heat conduction will strives for what contributes to the safety of pump operation. Backflows are also intended be reduced within the pump.
  • the arrangement according to the invention increases the number of components of a turbomolecular pump significantly reduced.
  • Spacer rings which have a conventional design lying on the outer circumference between the stator washers are completely eliminated. Thereby can simplify production and enable easier, time-saving assembly become. This leads to the simplification and reduction of maintenance work.
  • the reduced number ensures compliance with the necessary tolerances of components much easier.
  • the radial centering and the axial fixation are specified by the invention itself and do not require any further adjustment work. Internal leaks caused by gaps between the numerous Stator components are eliminated, so that disturbing back flows in this area can be largely avoided.
  • the transportation of the in operation of the The heat generated outside can be pumped through the compact design and by avoiding thermal conduction-inhibiting transitions between the parts conventional design can be significantly improved.
  • Attaching cooling or heating elements in the area of the stator components a very effective temperature control of the entire pump structure, but especially of the pump-active parts, depending on the operating conditions of the pump respectively.
  • Figure 1 shows a section of the arrangement according to the invention from A - A Figure 2.
  • Figure 2 shows a top view of the arrangement according to the invention.
  • the suction opening is 1 and Gas outlet opening designated 2.
  • the rotor shaft 4 is fixed in bearings 8 and 9 and is driven by the motor 6.
  • Rotor disks 10 are on the rotor shaft 4 attached.
  • the two shell-shaped housing parts each form with the two Halves of the stator disks 14 two one-piece units 12 and 12 '. These two Units are connected to each other by tangential connecting elements 18 connected. Between the connecting elements there are seals in the axial direction 26 attached.
  • the structural units 12 and 12 ' are also vacuum-tightly glued or welded together become.
  • the structural units 12 and 12 ' are on the high vacuum side with the suction flange 22 and on the fore-vacuum side with the lower part 24 screwed.
  • seals 28 and 30 are attached between the components 12 and 12 'and the intake flange 22 and the lower part 24, on the other hand. These seals 28 and 30 can with the axial seals 26 as a coherent be formed in one piece sealing element.
  • the invention is illustrated using the example of a two-part embodiment. Also three-part or multi-part embodiments are possible within the scope of the invention, if, for example, manufacturing technology should require it.
EP00124676A 1999-11-22 2000-11-11 Pompe turbo-moléculaire Expired - Lifetime EP1101944B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19956015 1999-11-22
DE19956015A DE19956015A1 (de) 1999-11-22 1999-11-22 Turbomolekularpumpe

Publications (3)

Publication Number Publication Date
EP1101944A2 true EP1101944A2 (fr) 2001-05-23
EP1101944A3 EP1101944A3 (fr) 2001-10-17
EP1101944B1 EP1101944B1 (fr) 2006-07-19

Family

ID=7929835

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00124676A Expired - Lifetime EP1101944B1 (fr) 1999-11-22 2000-11-11 Pompe turbo-moléculaire

Country Status (5)

Country Link
US (1) US6561755B1 (fr)
EP (1) EP1101944B1 (fr)
JP (1) JP2001153088A (fr)
AT (1) ATE333590T1 (fr)
DE (2) DE19956015A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010023200A1 (fr) * 2008-08-28 2010-03-04 Oerlikon Leybold Vacuum Gmbh Ensemble stator-rotor pour une pompe à vide ainsi que pompe à vide

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10142567A1 (de) * 2001-08-30 2003-03-20 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE10351451A1 (de) * 2003-11-04 2005-06-16 Friesen, Waldemar NDM - Neue Dimension für Motoren
GB2568066A (en) * 2017-11-02 2019-05-08 Edwards Ltd Stator blade unit for a turbomolecular pump
CN110043485A (zh) * 2019-05-16 2019-07-23 江苏博联硕焊接技术有限公司 一种涡轮分子泵转子及其扩散焊接方法
CN114673671B (zh) * 2020-12-25 2024-04-02 广东美的白色家电技术创新中心有限公司 风机和吸尘装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2218615A1 (de) 1972-04-18 1973-10-31 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe mit rotor und stator
EP0751297A1 (fr) 1995-06-30 1997-01-02 Alcatel Cit Pompe turbomoléculaire

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2224009A5 (fr) * 1973-03-30 1974-10-25 Cit Alcatel
US4579508A (en) * 1982-04-21 1986-04-01 Hitachi, Ltd. Turbomolecular pump
JPH0689756B2 (ja) * 1986-05-02 1994-11-14 株式会社日立製作所 ドライ真空ポンプ
JPS6412123A (en) * 1987-07-03 1989-01-17 Ebara Corp Rotary machine
JPH01190990A (ja) * 1988-01-26 1989-08-01 Osaka Shinku Kiki Seisakusho:Kk 真空ポンプ
JPH0242195A (ja) * 1988-07-31 1990-02-13 Shimadzu Corp ターボ分子ポンプ
US5063661A (en) * 1990-07-05 1991-11-12 The United States Of America As Represented By The Secretary Of The Air Force Method of fabricating a split compressor case
US5104288A (en) * 1990-12-10 1992-04-14 Westinghouse Electric Corp. Dual plane bolted joint for separately-supported segmental stationary turbine blade assemblies
JPH05141389A (ja) * 1991-11-15 1993-06-08 Vacuum Prod Kk 真空ポンプ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2218615A1 (de) 1972-04-18 1973-10-31 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe mit rotor und stator
EP0751297A1 (fr) 1995-06-30 1997-01-02 Alcatel Cit Pompe turbomoléculaire

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010023200A1 (fr) * 2008-08-28 2010-03-04 Oerlikon Leybold Vacuum Gmbh Ensemble stator-rotor pour une pompe à vide ainsi que pompe à vide
US8790070B2 (en) 2008-08-28 2014-07-29 Oerlikon Leybold Vacuum Gmbh Stator-rotor arrangement for a vacuum pump and vacuum pump

Also Published As

Publication number Publication date
DE19956015A1 (de) 2001-05-23
JP2001153088A (ja) 2001-06-05
ATE333590T1 (de) 2006-08-15
US6561755B1 (en) 2003-05-13
EP1101944A3 (fr) 2001-10-17
DE50013185D1 (de) 2006-08-31
EP1101944B1 (fr) 2006-07-19

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