EP2235377B1 - Pompe turbomoléculaire - Google Patents
Pompe turbomoléculaire Download PDFInfo
- Publication number
- EP2235377B1 EP2235377B1 EP08870887.0A EP08870887A EP2235377B1 EP 2235377 B1 EP2235377 B1 EP 2235377B1 EP 08870887 A EP08870887 A EP 08870887A EP 2235377 B1 EP2235377 B1 EP 2235377B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- rotor
- stator
- annular groove
- turbomolecular pump
- pump according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000005086 pumping Methods 0.000 description 2
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000003134 recirculating effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers
Definitions
- the object of the invention is to provide a turbomolecular pump, with which a reduction of the flowing back gas volume and thus an improvement in the efficiency can be achieved, with contacts between rotating rotor blades and stator elements to be avoided during operation.
- the rotor blades on a radial approach.
- This pointing in the direction of the annular groove approach is particularly annular.
- the annular projection thus surrounds the individual blades of the rotor blades, so that preferably during operation only the annular projection and not the blades are inserted into the annular groove.
- a mounting gap b is provided between the radial ends of the rotor blades 16 and an inner side of the stator rings 26. This is necessary in order to put the stator rings 26 over the rotor 12 for mounting.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Claims (8)
- Turbopompe moléculaire comportant
un rotor (12) disposé sur un arbre d'entraînement (10) et pourvu d'une pluralité d'aubes de rotor (16), et
un élément formant stator entourant le rotor (12),
l'élément formant stator comportant au moins une gorge annulaire périphérique (32, 38), qui est associée à l'une des aubes de rotor (16) et qui est disposée dans le plan (36) de l'aube de rotor (16) associée, et l'élément formant stator comportant une pluralité de bagues de stator (26) disposée l'une derrière l'autre dans la direction axiale (14), l'au moins une gorge annulaire (32) étant ménagée dans l'une des bagues de stator (26), caractérisée en ce que le diamètre intérieur des bagues de stator (26) est supérieur au diamètre extérieur des aubes de rotor (16), une fois le montage terminé, de la largeur d'un interstice de montage et en ce que la gorge annulaire périphérique (32, 38) permet une dilatation radiale de l'aube de rotor (16) en fonctionnement. - Turbopompe moléculaire selon la revendication 1, caractérisée en ce que l'au moins une aube de rotor (16) comporte une saillie (34) dirigée radialement en direction de la gorge annulaire (32, 38).
- Turbopompe moléculaire selon la revendication 2, caractérisée en ce que la saillie (34) a une forme annulaire.
- Turbopompe moléculaire selon l'une des revendications 1 à 3, caractérisée en ce que au moins une gorge (32, 38) est associée à chaque aube de la pluralité des aubes de rotor (16).
- Turbopompe moléculaire selon l'une des revendications 1 à 4, caractérisée en ce que l'élément formant stator est formée par un boîtier (22) de sorte que l'au moins une gorge annulaire (38) est ménagée du côté intérieur du boîtier qui est orienté en direction du rotor (12).
- Turbopompe moléculaire selon l'une des revendications 1 à 5, caractérisée en ce que chaque bague de stator (26) est reliée à un disque de stator (28) disposée entre deux aubes de rotor (16) adjacentes.
- Turbopompe moléculaire selon l'une des revendications 1 à 6, caractérisée en ce que chaque aube de rotor (16) est pourvue d'une bague de stator (26).
- Turbopompe moléculaire selon l'une des revendications 1 à 7, caractérisée en ce que chaque bague de stator (26) comporte une gorge annulaire (32).
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008004297A DE102008004297A1 (de) | 2008-01-15 | 2008-01-15 | Turbomolekularpumpe |
PCT/EP2008/066309 WO2009089958A1 (fr) | 2008-01-15 | 2008-11-27 | Pompe turbomoléculaire |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2235377A1 EP2235377A1 (fr) | 2010-10-06 |
EP2235377B1 true EP2235377B1 (fr) | 2014-12-31 |
Family
ID=40405030
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP08870887.0A Active EP2235377B1 (fr) | 2008-01-15 | 2008-11-27 | Pompe turbomoléculaire |
Country Status (7)
Country | Link |
---|---|
US (1) | US20100322799A1 (fr) |
EP (1) | EP2235377B1 (fr) |
JP (1) | JP5546464B2 (fr) |
CN (1) | CN101952602A (fr) |
DE (1) | DE102008004297A1 (fr) |
TW (1) | TW200934957A (fr) |
WO (1) | WO2009089958A1 (fr) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8444127B2 (en) * | 2009-12-14 | 2013-05-21 | The Boeing Company | High temperature composite patch tool |
DE202011002809U1 (de) * | 2011-02-17 | 2012-06-12 | Oerlikon Leybold Vacuum Gmbh | Statorelement sowie Hochvakuumpumpe |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0770781A1 (fr) * | 1992-04-29 | 1997-05-02 | Varian Associates, Inc. | Pompes à vide turbomoléculaires |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3842902A (en) * | 1973-07-05 | 1974-10-22 | Hayes Albion Corp | Labyrinthian fan |
DE3032967A1 (de) * | 1980-09-02 | 1982-04-15 | Leybold-Heraeus GmbH, 5000 Köln | Molekularpumpe, insbesondere turbomolekularpumpe, und damit ausgeruestetes pumpsystem |
JPS6314893U (fr) * | 1986-07-11 | 1988-01-30 | ||
DE4314418A1 (de) * | 1993-05-03 | 1994-11-10 | Leybold Ag | Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten |
JPH0687691U (ja) * | 1993-05-28 | 1994-12-22 | セイコー精機株式会社 | ターボ分子ポンプ |
US6332752B2 (en) * | 1997-06-27 | 2001-12-25 | Ebara Corporation | Turbo-molecular pump |
DE10004263A1 (de) * | 2000-02-01 | 2001-08-02 | Leybold Vakuum Gmbh | Dynamische Dichtung |
US6508624B2 (en) * | 2001-05-02 | 2003-01-21 | Siemens Automotive, Inc. | Turbomachine with double-faced rotor-shroud seal structure |
JP2003129991A (ja) * | 2001-10-24 | 2003-05-08 | Boc Edwards Technologies Ltd | 分子ポンプ |
DE10331932B4 (de) | 2003-07-15 | 2017-08-24 | Pfeiffer Vacuum Gmbh | Turbomolekularpumpe |
US20050031710A1 (en) * | 2003-08-08 | 2005-02-10 | D'adamo Peter James | Method of personal care and cosmetic product preparation and composition using human blood type |
US7717684B2 (en) * | 2003-08-21 | 2010-05-18 | Ebara Corporation | Turbo vacuum pump and semiconductor manufacturing apparatus having the same |
-
2008
- 2008-01-15 DE DE102008004297A patent/DE102008004297A1/de not_active Withdrawn
- 2008-11-27 WO PCT/EP2008/066309 patent/WO2009089958A1/fr active Application Filing
- 2008-11-27 US US12/812,814 patent/US20100322799A1/en not_active Abandoned
- 2008-11-27 CN CN2008801248308A patent/CN101952602A/zh active Pending
- 2008-11-27 EP EP08870887.0A patent/EP2235377B1/fr active Active
- 2008-11-27 JP JP2010541731A patent/JP5546464B2/ja active Active
-
2009
- 2009-01-07 TW TW098100324A patent/TW200934957A/zh unknown
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0770781A1 (fr) * | 1992-04-29 | 1997-05-02 | Varian Associates, Inc. | Pompes à vide turbomoléculaires |
Also Published As
Publication number | Publication date |
---|---|
TW200934957A (en) | 2009-08-16 |
JP2011510201A (ja) | 2011-03-31 |
EP2235377A1 (fr) | 2010-10-06 |
CN101952602A (zh) | 2011-01-19 |
DE102008004297A1 (de) | 2009-07-16 |
US20100322799A1 (en) | 2010-12-23 |
WO2009089958A1 (fr) | 2009-07-23 |
JP5546464B2 (ja) | 2014-07-09 |
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