JP5546464B2 - ターボ分子ポンプ - Google Patents
ターボ分子ポンプ Download PDFInfo
- Publication number
- JP5546464B2 JP5546464B2 JP2010541731A JP2010541731A JP5546464B2 JP 5546464 B2 JP5546464 B2 JP 5546464B2 JP 2010541731 A JP2010541731 A JP 2010541731A JP 2010541731 A JP2010541731 A JP 2010541731A JP 5546464 B2 JP5546464 B2 JP 5546464B2
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- stator
- annular groove
- blade
- stator ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000000694 effects Effects 0.000 description 6
- 238000007789 sealing Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Description
Claims (7)
- 駆動軸に設けられ、複数の動翼を含むロータと、
該ロータを囲むステータ要素とを備えたターボ分子ポンプにおいて、
前記ステータ要素は、複数のステータリングを含んでおり、該ステータリングの内の1つに、前記動翼の夫々に対応する少なくとも1つの環状溝が、前記ステータリングの前記ロータの方に面する内側に設けられており、
動作中における前記動翼の径方向の膨張を可能にするために、前記環状溝は、前記対応する動翼の翼面に配置されており、
前記ステータリングの取付けのために前記ステータリングが前記ロータ上で移動可能であるように、前記ステータリングの内側のうちの前記環状溝を除いた部分の内径が、前記動翼の前記環状溝に面する部分の外径より、前記ステータリングを取り付けるための間隙分大きいことを特徴とするターボ分子ポンプ。 - 少なくとも1つの前記動翼は、前記環状溝に向かう方向に径方向に延びる好ましくは環状の突起を含んでいることを特徴とする請求項1に記載のターボ分子ポンプ。
- 前記複数の動翼、特には少なくとも2つの動翼に、少なくとも1つの前記環状溝が対応していることを特徴とする請求項1又は2に記載のターボ分子ポンプ。
- 前記ステータ要素は更に、ハウジングに形成されており、前記環状溝は、前記ロータの方に面する前記ハウジングの内側に更に設けられていることを特徴とする請求項1乃至3のいずれかに記載のターボ分子ポンプ。
- 前記複数のステータリングは、該ステータリングの軸方向に、一列に配置されていることを特徴とする請求項1乃至3のいずれかに記載のターボ分子ポンプ。
- 各ステータリングは、隣り合う2つの動翼間に配置されたステータディスクに接続されていることを特徴とする請求項5に記載のターボ分子ポンプ。
- 前記ステータリングは、動翼毎に1つずつ設けられており、
各ステータリングは、好ましくは環状溝を含んでいることを特徴とする請求項5又は6に記載のターボ分子ポンプ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008004297A DE102008004297A1 (de) | 2008-01-15 | 2008-01-15 | Turbomolekularpumpe |
DE102008004297.8 | 2008-01-15 | ||
PCT/EP2008/066309 WO2009089958A1 (de) | 2008-01-15 | 2008-11-27 | Turbomolekularpumpe |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011510201A JP2011510201A (ja) | 2011-03-31 |
JP5546464B2 true JP5546464B2 (ja) | 2014-07-09 |
Family
ID=40405030
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010541731A Active JP5546464B2 (ja) | 2008-01-15 | 2008-11-27 | ターボ分子ポンプ |
Country Status (7)
Country | Link |
---|---|
US (1) | US20100322799A1 (ja) |
EP (1) | EP2235377B1 (ja) |
JP (1) | JP5546464B2 (ja) |
CN (1) | CN101952602A (ja) |
DE (1) | DE102008004297A1 (ja) |
TW (1) | TW200934957A (ja) |
WO (1) | WO2009089958A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8444127B2 (en) * | 2009-12-14 | 2013-05-21 | The Boeing Company | High temperature composite patch tool |
DE202011002809U1 (de) * | 2011-02-17 | 2012-06-12 | Oerlikon Leybold Vacuum Gmbh | Statorelement sowie Hochvakuumpumpe |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3842902A (en) * | 1973-07-05 | 1974-10-22 | Hayes Albion Corp | Labyrinthian fan |
DE3032967A1 (de) * | 1980-09-02 | 1982-04-15 | Leybold-Heraeus GmbH, 5000 Köln | Molekularpumpe, insbesondere turbomolekularpumpe, und damit ausgeruestetes pumpsystem |
JPS6314893U (ja) * | 1986-07-11 | 1988-01-30 | ||
US5358373A (en) * | 1992-04-29 | 1994-10-25 | Varian Associates, Inc. | High performance turbomolecular vacuum pumps |
DE4314418A1 (de) * | 1993-05-03 | 1994-11-10 | Leybold Ag | Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten |
JPH0687691U (ja) * | 1993-05-28 | 1994-12-22 | セイコー精機株式会社 | ターボ分子ポンプ |
US6332752B2 (en) * | 1997-06-27 | 2001-12-25 | Ebara Corporation | Turbo-molecular pump |
DE10004263A1 (de) * | 2000-02-01 | 2001-08-02 | Leybold Vakuum Gmbh | Dynamische Dichtung |
US6508624B2 (en) * | 2001-05-02 | 2003-01-21 | Siemens Automotive, Inc. | Turbomachine with double-faced rotor-shroud seal structure |
JP2003129991A (ja) * | 2001-10-24 | 2003-05-08 | Boc Edwards Technologies Ltd | 分子ポンプ |
DE10331932B4 (de) | 2003-07-15 | 2017-08-24 | Pfeiffer Vacuum Gmbh | Turbomolekularpumpe |
US20050031710A1 (en) * | 2003-08-08 | 2005-02-10 | D'adamo Peter James | Method of personal care and cosmetic product preparation and composition using human blood type |
US7717684B2 (en) * | 2003-08-21 | 2010-05-18 | Ebara Corporation | Turbo vacuum pump and semiconductor manufacturing apparatus having the same |
-
2008
- 2008-01-15 DE DE102008004297A patent/DE102008004297A1/de not_active Withdrawn
- 2008-11-27 WO PCT/EP2008/066309 patent/WO2009089958A1/de active Application Filing
- 2008-11-27 US US12/812,814 patent/US20100322799A1/en not_active Abandoned
- 2008-11-27 JP JP2010541731A patent/JP5546464B2/ja active Active
- 2008-11-27 EP EP08870887.0A patent/EP2235377B1/de active Active
- 2008-11-27 CN CN2008801248308A patent/CN101952602A/zh active Pending
-
2009
- 2009-01-07 TW TW098100324A patent/TW200934957A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
WO2009089958A1 (de) | 2009-07-23 |
EP2235377A1 (de) | 2010-10-06 |
CN101952602A (zh) | 2011-01-19 |
JP2011510201A (ja) | 2011-03-31 |
EP2235377B1 (de) | 2014-12-31 |
TW200934957A (en) | 2009-08-16 |
US20100322799A1 (en) | 2010-12-23 |
DE102008004297A1 (de) | 2009-07-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US9909592B2 (en) | Vacuum pump | |
EP2064449B1 (en) | Molecular drag pumping mechanism | |
US8215928B2 (en) | Foil gas bearing supported high temperature centrifugal blower and method for cooling thereof | |
EP3401549B1 (en) | Turbo compressor | |
US20130011245A1 (en) | Axial shaft seal for a turbomachine | |
US20160177962A1 (en) | Circulating pump | |
JP2015155696A (ja) | 燃料電池用圧縮機のための密閉構成 | |
EP3592982B1 (en) | A bearing arrangement for a drive shaft of a turbo-machine, and a turbo-machine including such a bearing arrangement | |
KR20160006714A (ko) | 평 베어링 장치를 포함하는 펌프 장치 | |
JP2011112048A (ja) | 真空ポンプ | |
JP5680334B2 (ja) | 真空ポンプ | |
JP2011521161A (ja) | 多段真空ポンプ | |
JP5546464B2 (ja) | ターボ分子ポンプ | |
JP2015504137A (ja) | ターボ分子ポンプ | |
CN109844321B (zh) | 真空泵、以及真空泵中具备的螺旋状板、间隔件及旋转圆筒体 | |
CN113785146A (zh) | 特别是用于热介质的滑环密封组件,以及泵组件 | |
JP2005036798A (ja) | ターボ分子ポンプ | |
KR20090082921A (ko) | 사이드-채널 펌프 | |
US8459931B2 (en) | Turbo-molecular pump | |
JP2002526720A (ja) | ステータとロータを有する摩擦真空ポンプ | |
US20080112790A1 (en) | Vacuum Side-Channel Compressor | |
US9932987B2 (en) | Rotor disc and rotor for a vacuum pump | |
JP6785038B2 (ja) | 流体機械 | |
US9562539B2 (en) | Method and apparatus for sealing a rotating machine using floating seals | |
KR102122623B1 (ko) | 터보 기계 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20110930 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20130716 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130723 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20131001 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20131224 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140324 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20140422 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140513 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5546464 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |