EP2235377B1 - Turbomolekularpumpe - Google Patents

Turbomolekularpumpe Download PDF

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Publication number
EP2235377B1
EP2235377B1 EP08870887.0A EP08870887A EP2235377B1 EP 2235377 B1 EP2235377 B1 EP 2235377B1 EP 08870887 A EP08870887 A EP 08870887A EP 2235377 B1 EP2235377 B1 EP 2235377B1
Authority
EP
European Patent Office
Prior art keywords
rotor
stator
annular groove
turbomolecular pump
pump according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP08870887.0A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP2235377A1 (de
Inventor
Heinrich Engländer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP2235377A1 publication Critical patent/EP2235377A1/de
Application granted granted Critical
Publication of EP2235377B1 publication Critical patent/EP2235377B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Definitions

  • the object of the invention is to provide a turbomolecular pump, with which a reduction of the flowing back gas volume and thus an improvement in the efficiency can be achieved, with contacts between rotating rotor blades and stator elements to be avoided during operation.
  • the rotor blades on a radial approach.
  • This pointing in the direction of the annular groove approach is particularly annular.
  • the annular projection thus surrounds the individual blades of the rotor blades, so that preferably during operation only the annular projection and not the blades are inserted into the annular groove.
  • a mounting gap b is provided between the radial ends of the rotor blades 16 and an inner side of the stator rings 26. This is necessary in order to put the stator rings 26 over the rotor 12 for mounting.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP08870887.0A 2008-01-15 2008-11-27 Turbomolekularpumpe Active EP2235377B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008004297A DE102008004297A1 (de) 2008-01-15 2008-01-15 Turbomolekularpumpe
PCT/EP2008/066309 WO2009089958A1 (de) 2008-01-15 2008-11-27 Turbomolekularpumpe

Publications (2)

Publication Number Publication Date
EP2235377A1 EP2235377A1 (de) 2010-10-06
EP2235377B1 true EP2235377B1 (de) 2014-12-31

Family

ID=40405030

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08870887.0A Active EP2235377B1 (de) 2008-01-15 2008-11-27 Turbomolekularpumpe

Country Status (7)

Country Link
US (1) US20100322799A1 (ja)
EP (1) EP2235377B1 (ja)
JP (1) JP5546464B2 (ja)
CN (1) CN101952602A (ja)
DE (1) DE102008004297A1 (ja)
TW (1) TW200934957A (ja)
WO (1) WO2009089958A1 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8444127B2 (en) * 2009-12-14 2013-05-21 The Boeing Company High temperature composite patch tool
DE202011002809U1 (de) * 2011-02-17 2012-06-12 Oerlikon Leybold Vacuum Gmbh Statorelement sowie Hochvakuumpumpe

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0770781A1 (en) * 1992-04-29 1997-05-02 Varian Associates, Inc. Turbomolecular vacuum pumps

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3842902A (en) * 1973-07-05 1974-10-22 Hayes Albion Corp Labyrinthian fan
DE3032967A1 (de) * 1980-09-02 1982-04-15 Leybold-Heraeus GmbH, 5000 Köln Molekularpumpe, insbesondere turbomolekularpumpe, und damit ausgeruestetes pumpsystem
JPS6314893U (ja) * 1986-07-11 1988-01-30
DE4314418A1 (de) * 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten
JPH0687691U (ja) * 1993-05-28 1994-12-22 セイコー精機株式会社 ターボ分子ポンプ
US6332752B2 (en) * 1997-06-27 2001-12-25 Ebara Corporation Turbo-molecular pump
DE10004263A1 (de) * 2000-02-01 2001-08-02 Leybold Vakuum Gmbh Dynamische Dichtung
US6508624B2 (en) * 2001-05-02 2003-01-21 Siemens Automotive, Inc. Turbomachine with double-faced rotor-shroud seal structure
JP2003129991A (ja) * 2001-10-24 2003-05-08 Boc Edwards Technologies Ltd 分子ポンプ
DE10331932B4 (de) 2003-07-15 2017-08-24 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
US20050031710A1 (en) * 2003-08-08 2005-02-10 D'adamo Peter James Method of personal care and cosmetic product preparation and composition using human blood type
US7717684B2 (en) * 2003-08-21 2010-05-18 Ebara Corporation Turbo vacuum pump and semiconductor manufacturing apparatus having the same

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0770781A1 (en) * 1992-04-29 1997-05-02 Varian Associates, Inc. Turbomolecular vacuum pumps

Also Published As

Publication number Publication date
TW200934957A (en) 2009-08-16
JP2011510201A (ja) 2011-03-31
EP2235377A1 (de) 2010-10-06
CN101952602A (zh) 2011-01-19
DE102008004297A1 (de) 2009-07-16
US20100322799A1 (en) 2010-12-23
WO2009089958A1 (de) 2009-07-23
JP5546464B2 (ja) 2014-07-09

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