EP1017944B1 - Compoundpumpe - Google Patents
Compoundpumpe Download PDFInfo
- Publication number
- EP1017944B1 EP1017944B1 EP98954252A EP98954252A EP1017944B1 EP 1017944 B1 EP1017944 B1 EP 1017944B1 EP 98954252 A EP98954252 A EP 98954252A EP 98954252 A EP98954252 A EP 98954252A EP 1017944 B1 EP1017944 B1 EP 1017944B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- stage
- pump
- vacuum pump
- friction vacuum
- webs
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
Definitions
- the invention relates to a friction vacuum pump with at least one turbomolecular pump stage, one adjoining the pressure pump stage on the pressure side and one between the turbomolecular pump stage and the filling pump stage.
- turbomolecular pumps with downstream thread stages also called compound pumps
- Delivery space delivery gap
- thread is located.
- Known Designs of this transition area have the Disadvantage that flow stalls occur. These affect to a considerable extent the pumping speed of the Pump.
- the present invention is based on the object to significantly simplify the design of the filling level, without an effective loading of the thread pump stage to have to do without.
- the filling stage is designed as a centrifugal stage. ingredients the centrifugal stage are rotating bars, which is at the level of the suction-side area of the thread pump stage are located.
- the centrifugal pump has the effect that exiting from the turbomolecular pump stage Gases redirected, compressed and the delivery room be fed to the thread pump. The gas flow is largely continuously, so that it is no longer one of the disruptive stalls.
- stator of the turbomolecular pump in a manner known per se from spacer rings and bucket half rings there is the possibility that Stator of both pump stages without dismantling the rotor to assemble or disassemble the turbomolecular pump stage.
- FIG. 1 In the embodiment of Figure 1 are the pump itself with 1, its inlet with 2 and its outlet with 3.
- the housing of the pump 1 comprises the two sections 4 and 5.
- the housing section 4 surrounds the stator 6 and the rotor 7 of the turbomolecular pump stage.
- the stator 6 comprises the only schematically indicated bucket half rings 8 and the spacer rings 9, which together a form a self-centering stator package.
- the rotor 7 is equipped with the rotor blades 10.
- the housing section 4 also surrounds the stator 11 and the rotor 12 of the thread pump stage, the delivery chamber or conveyor gap is designated 13.
- the thread 14 of this stage can be arranged on the stator or rotor side his. In the illustrated embodiment is it arranged on the stator side and part of an independent stator sleeve mountable from the housing section 15.
- the rotor 7 of the turbomolecular pump stage 7, 8 and the rotor 12 of the thread pump stage 11, 12 are components of a jointly rotating system 7, 12.
- the rotor 12 of the threaded pump stage 11, 12 forms the pressure side End of this system and can be as a disc or bell-shaped (as shown in Figure 1) his.
- the housing section 5 surrounds the drive motor 16, the stator with 17 and the rotor with 18 are.
- the housing section 5 is part of a Chassis 19 with an interior in which the drive motor 16 and other components are located.
- the chassis 19 In the chassis 19 is also the rotors 7 and 12 of the compound pump supporting shaft 21 mounted. Only the upper camp 22 is visible. Otherwise, the chassis is 19 carriers all other components of pump 1.
- the stator sleeve 15 is based on the chassis 19.
- the inside diameter is slightly larger than the outer diameter of the rotor 7 the turbomolecular pump stage so that the stator sleeve 15 - With the housing section 4 removed and demounted Stator 6 of the turbomolecular pump stage 6.7 - removable is. This gives everyone the opportunity Stator components 8,9,15 only after assembly and also after balancing the rotating system 7, 12.
- the suction end of the stator sleeve 15 is located a ring 23, the inner edge of the inner diameter corresponds to the spacer rings 2. In the complained state of Pump, the stator 6 is supported on the ring 23.
- a filling level that is designed as a centrifugal stage 24. It includes extending substantially radially outward Crosspieces 25 facing the last row of rotor blades Form pockets 26. Different embodiments of the Centrifugal stage 24 are shown in Figures 2 to 5. The pockets are located between the webs 25 26, which are open upwards and outwards. The Arrow 27 indicates the direction of rotation.
- the centrifugal stage 24 part of the rotor 12 of the thread pump stage. It is on the blades 10 of the turbomolecular pump stage 7,10 facing side of the disc or Bell-shaped rotor 12 is formed.
- the depth of the pockets 26 can increase radially outwards (Fig.1). Their location is chosen so that the peripheral Openings of the pockets 26 at the entrance the thread pump stage 11,12.
- the bridges at the embodiment of Figure 2 extend radially.
- the webs 25 in the embodiments according to the Firgures 3 and 4 are 27 with respect to the direction of rotation inclined to the rear, in the embodiment according to FIG. 5 Forward.
- the exit angle of the webs determines the static and dynamic Proportion of the pressure level. Is the jetty backwards curved, there is a high static component. Moreover is the degree of deflection in the circumferential direction a backward curvature is enhanced. If the bridge is curved forward there is a high dynamic share.
- Figure 1 shows that the radial dimensions of pockets 26 is essentially the active pumping length of the blades 10 of the last located on the pressure side Rotor blade row corresponds.
- the centrifugal stage 24 will be those leaving the turbomolecular pump stage Gases due to the action of the webs 26 and pockets 27 deflected, specifically in the direction of the conveyor gap 13 the thread pump stage 11.12.
- Compression instead, so that stalls largely are avoided.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Steroid Compounds (AREA)
Description
- Figur 1
- einen Teillängsschnitt durch ein Ausführungs beispiel für eine Reibungsvakuumpumpe nach der Erfindung und
- Figuren 2 bis 5
- Draufsichten auf verschiedene Varianten für die Zentrifugalstufe.
Claims (10)
- Reibungsvakuumpumpe (1) mit mindestens einer Turbomolekularpumpenstufe (6,7), mit einer sich daran druckseitig anschließenden Gewindepumpenstufe (11,12) und mit einer zwischen Turbomolekularpumpenstufe (6,7) und Gewindepumpenstufe (11,12) angeordneten Füllstufe 24), dadurch gekennzeichnet, daß die Füllstufe 24) als Zentrifugalstufe ausgebildet ist.
- Reibungsvakuumpumpe (1) nach Anspruch 1, dadurch gekennzeichnet, daß die Zentrifugalstufe (24) sich im wesentlichen radial erstreckende Stege (25) umfaßt, die peripher offene Taschen (26) bilden und die sich in Höhe des saugseitigen Bereichs der Gewindepumpenstufe (11,12) befinden.
- Reibungsvakuumpumpe (1) nach Anspruch 2 dadurch gekennzeichnet, daß sich die Stege (25) der Füllstufe an die druckseitig letzte Rotorschaufelreihe anschließen und daß die radiale Erstreckung der Stege (25)der aktiven Länge der Schaufeln dieser letzten Rotorschaufelreihe entsprechen.
- Reibungspumpe (1) nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, daß die Tiefe der sich zwischen den Stegen (25) befindlichen Taschen (26) mit steigendem Radius zunimmt.
- Reibungspumpe (1) nach einem der Ansprüche 2 bis 4, dadurch gekennzeichnet, daß die sich im wesentichen radial erstreckenden Stege (25) in Bezug auf die Drehrichtung des rotierenden Systems (7,12) nach hinten geneigt sind.
- Reibungspumpe (1) nach einem der Ansprüche 2 bis 4, dadurch gekennzeichnet, daß die sich im wesentlichen radial erstreckenden Stege (25) in Bezug auf die Drehrichtung des rotierenden Systems (7,12) nach vorne geneigt sind.
- Reibungspumpe (1) nach einem der Ansprüche 2 bis 6, dadurch gekennzeichnet, daß der Rotor (12) der Gewindepumpenstufe (11,12) scheiben- oder glockenförmig ausgebildet ist und daß die Füllstufe (24) Bestandteil des Rotors (12) ist.
- Reibungspumpe (1) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß die Statoren (6,11) unabhängig von ihren Rotoren (7,12) demontierbar sind.
- Reibungspumpe (1) nach Anspruch 8, dadurch gekennzeichnet, daß die Statoren (6,11) aus von einem Gehäuse (6) umfaßten Bauteilen (8,9,15) bestehen.
- Reibungspumpe (1) nach Anspruch 8 oder 9, dadurch gekennzeichnet, daß der Stator (11) der Gewindepumpenstufe (11,12) als separate Hülse (15) ausgebildet ist.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE29717079U DE29717079U1 (de) | 1997-09-24 | 1997-09-24 | Compoundpumpe |
DE29717079U | 1997-09-24 | ||
PCT/EP1998/005611 WO1999015793A1 (de) | 1997-09-24 | 1998-09-04 | Compoundpumpe |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1017944A1 EP1017944A1 (de) | 2000-07-12 |
EP1017944B1 true EP1017944B1 (de) | 2003-06-25 |
Family
ID=8046394
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP98954252A Expired - Lifetime EP1017944B1 (de) | 1997-09-24 | 1998-09-04 | Compoundpumpe |
Country Status (5)
Country | Link |
---|---|
US (1) | US6422829B1 (de) |
EP (1) | EP1017944B1 (de) |
JP (1) | JP2001517757A (de) |
DE (2) | DE29717079U1 (de) |
WO (1) | WO1999015793A1 (de) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9810872D0 (en) * | 1998-05-20 | 1998-07-22 | Boc Group Plc | Improved vacuum pump |
DE19915307A1 (de) * | 1999-04-03 | 2000-10-05 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe mit aus Welle und Rotor bestehender Rotoreinheit |
DE10008691B4 (de) * | 2000-02-24 | 2017-10-26 | Pfeiffer Vacuum Gmbh | Gasreibungspumpe |
DE10046506A1 (de) * | 2000-09-20 | 2002-03-28 | Leybold Vakuum Gmbh | Turbomolekularvakuumpumpe mit Rotorschaufelreihen und Statorschaufelreihen |
DE10046766A1 (de) * | 2000-09-21 | 2002-04-11 | Leybold Vakuum Gmbh | Compound-Reibungsvakuumpumpe |
JP2002138987A (ja) * | 2000-10-31 | 2002-05-17 | Seiko Instruments Inc | 真空ポンプ |
US6503050B2 (en) * | 2000-12-18 | 2003-01-07 | Applied Materials Inc. | Turbo-molecular pump having enhanced pumping capacity |
GB0229355D0 (en) | 2002-12-17 | 2003-01-22 | Boc Group Plc | Vacuum pumping arrangement |
JP2005042709A (ja) * | 2003-07-10 | 2005-02-17 | Ebara Corp | 真空ポンプ |
US7021888B2 (en) * | 2003-12-16 | 2006-04-04 | Universities Research Association, Inc. | Ultra-high speed vacuum pump system with first stage turbofan and second stage turbomolecular pump |
ITTO20100070A1 (it) * | 2010-02-01 | 2011-08-02 | Varian Spa | Pompa da vuoto, in particolare pompa da vuoto turbomolecolare. |
DE202011002809U1 (de) * | 2011-02-17 | 2012-06-12 | Oerlikon Leybold Vacuum Gmbh | Statorelement sowie Hochvakuumpumpe |
EP2620649B1 (de) | 2012-01-27 | 2019-03-13 | Edwards Limited | Gastransfervakuumpumpe |
GB2498816A (en) | 2012-01-27 | 2013-07-31 | Edwards Ltd | Vacuum pump |
CN104791264A (zh) * | 2015-04-20 | 2015-07-22 | 东北大学 | 一种带有过渡结构的复合分子泵 |
JP2022143507A (ja) * | 2021-03-17 | 2022-10-03 | エドワーズ株式会社 | 真空ポンプ |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3969039A (en) | 1974-08-01 | 1976-07-13 | American Optical Corporation | Vacuum pump |
NL8303927A (nl) | 1983-11-16 | 1985-06-17 | Ultra Centrifuge Nederland Nv | Hoog-vacuum moleculair pomp. |
JPS60125795A (ja) * | 1983-12-09 | 1985-07-05 | Osaka Shinku Kiki Seisakusho:Kk | 複合真空ポンプ |
DE3791053T1 (de) * | 1987-12-25 | 1989-12-21 | Valerij Borisovic Solochov | Vakuum-molekularpumpe |
US5020969A (en) | 1988-09-28 | 1991-06-04 | Hitachi, Ltd. | Turbo vacuum pump |
JPH02102385A (ja) * | 1988-10-08 | 1990-04-13 | Toyo Eng Corp | 排気装置 |
DE4216237A1 (de) | 1992-05-16 | 1993-11-18 | Leybold Ag | Gasreibungsvakuumpumpe |
US5513951A (en) * | 1993-03-29 | 1996-05-07 | Nippondenso Co., Ltd. | Blower device |
DE19632874A1 (de) | 1996-08-16 | 1998-02-19 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe |
US5681146A (en) * | 1996-10-04 | 1997-10-28 | Future Sea Farms Inc. | Low head pumping system for fish farms |
-
1997
- 1997-09-24 DE DE29717079U patent/DE29717079U1/de not_active Expired - Lifetime
-
1998
- 1998-09-04 DE DE59808840T patent/DE59808840D1/de not_active Expired - Fee Related
- 1998-09-04 EP EP98954252A patent/EP1017944B1/de not_active Expired - Lifetime
- 1998-09-04 JP JP2000513061A patent/JP2001517757A/ja active Pending
- 1998-09-04 US US09/508,451 patent/US6422829B1/en not_active Expired - Fee Related
- 1998-09-04 WO PCT/EP1998/005611 patent/WO1999015793A1/de active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
DE59808840D1 (en) | 2003-07-31 |
WO1999015793A1 (de) | 1999-04-01 |
US6422829B1 (en) | 2002-07-23 |
JP2001517757A (ja) | 2001-10-09 |
DE29717079U1 (de) | 1997-11-06 |
EP1017944A1 (de) | 2000-07-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP1017944B1 (de) | Compoundpumpe | |
EP1252445B1 (de) | Turbomolekularpumpe | |
WO1994025760A1 (de) | Reibungsvakuumpumpe mit unterschiedlich gestalteten pumpenabschnitten | |
EP2826999B1 (de) | Vakuumpumpe | |
WO1993023672A1 (de) | Gasreibungsvakuumpumpe | |
EP1230487B1 (de) | Schnelllaufende turbopumpe | |
EP0408792B1 (de) | Gasreibungspumpe mit mindestens einer auslassseitigen Gewindestufe | |
EP1998049A2 (de) | Strömungsarbeitsmaschinenschaufel mit Multi-Profil-Gestaltung | |
DE102012003680A1 (de) | Vakuumpumpe | |
WO2018108617A1 (de) | Kreiselpumpe mit radialem laufrad | |
DE69106179T2 (de) | Diagonal-Verdichter. | |
EP3309359B1 (de) | Laufschaufelbaugruppe für ein triebwerk | |
EP3608545A1 (de) | Vakuumpumpe | |
EP0825346B1 (de) | Eingangsstufe für eine zweiflutige Gasreibungspumpe | |
EP1319131B1 (de) | Compound-reibungsvakuumpumpe | |
EP1200739A1 (de) | Reibungsvakuumpumpe mit pumpaktiven elementen | |
EP3001039B1 (de) | Vakuumpumpe | |
EP3872351A1 (de) | Ventilatorrad eines axial- oder diagonalventilators mit wuchtring | |
EP3734078B1 (de) | Turbomolekularpumpe und verfahren zur herstellung einer statorscheibe für eine solche | |
WO2003031823A1 (de) | Axial fördernde reibungsvakuumpumpe | |
EP3088746B1 (de) | Vakuumpumpe | |
EP2235377B1 (de) | Turbomolekularpumpe | |
EP2420677A1 (de) | Mehrstufige Kreiselpumpe | |
EP3623634B1 (de) | Vakuumpumpe umfassend eine holweckpumpstufe und zwei seitenkanalpumpstufen | |
EP1541871B1 (de) | Seitenkanalpumpstufe |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20000120 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): DE FR GB IT |
|
GRAH | Despatch of communication of intention to grant a patent |
Free format text: ORIGINAL CODE: EPIDOS IGRA |
|
GRAH | Despatch of communication of intention to grant a patent |
Free format text: ORIGINAL CODE: EPIDOS IGRA |
|
GRAA | (expected) grant |
Free format text: ORIGINAL CODE: 0009210 |
|
AK | Designated contracting states |
Designated state(s): DE FR GB IT |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: IT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT;WARNING: LAPSES OF ITALIAN PATENTS WITH EFFECTIVE DATE BEFORE 2007 MAY HAVE OCCURRED AT ANY TIME BEFORE 2007. THE CORRECT EFFECTIVE DATE MAY BE DIFFERENT FROM THE ONE RECORDED. Effective date: 20030625 Ref country code: GB Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20030625 Ref country code: FR Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20030625 |
|
REG | Reference to a national code |
Ref country code: GB Ref legal event code: FG4D Free format text: NOT ENGLISH |
|
REF | Corresponds to: |
Ref document number: 59808840 Country of ref document: DE Date of ref document: 20030731 Kind code of ref document: P |
|
GBV | Gb: ep patent (uk) treated as always having been void in accordance with gb section 77(7)/1977 [no translation filed] |
Effective date: 20030625 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: DE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20040401 |
|
PLBE | No opposition filed within time limit |
Free format text: ORIGINAL CODE: 0009261 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT |
|
26N | No opposition filed |
Effective date: 20040326 |
|
EN | Fr: translation not filed |