DE59808840D1 - Compoundpumpe - Google Patents

Compoundpumpe

Info

Publication number
DE59808840D1
DE59808840D1 DE59808840T DE59808840T DE59808840D1 DE 59808840 D1 DE59808840 D1 DE 59808840D1 DE 59808840 T DE59808840 T DE 59808840T DE 59808840 T DE59808840 T DE 59808840T DE 59808840 D1 DE59808840 D1 DE 59808840D1
Authority
DE
Germany
Prior art keywords
compoundpumpe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE59808840T
Other languages
English (en)
Inventor
Guenter Schuetz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Application granted granted Critical
Publication of DE59808840D1 publication Critical patent/DE59808840D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE59808840T 1997-09-24 1998-09-04 Compoundpumpe Expired - Fee Related DE59808840D1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE29717079U DE29717079U1 (de) 1997-09-24 1997-09-24 Compoundpumpe
PCT/EP1998/005611 WO1999015793A1 (de) 1997-09-24 1998-09-04 Compoundpumpe

Publications (1)

Publication Number Publication Date
DE59808840D1 true DE59808840D1 (en) 2003-07-31

Family

ID=8046394

Family Applications (2)

Application Number Title Priority Date Filing Date
DE29717079U Expired - Lifetime DE29717079U1 (de) 1997-09-24 1997-09-24 Compoundpumpe
DE59808840T Expired - Fee Related DE59808840D1 (en) 1997-09-24 1998-09-04 Compoundpumpe

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE29717079U Expired - Lifetime DE29717079U1 (de) 1997-09-24 1997-09-24 Compoundpumpe

Country Status (5)

Country Link
US (1) US6422829B1 (de)
EP (1) EP1017944B1 (de)
JP (1) JP2001517757A (de)
DE (2) DE29717079U1 (de)
WO (1) WO1999015793A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9810872D0 (en) * 1998-05-20 1998-07-22 Boc Group Plc Improved vacuum pump
DE19915307A1 (de) 1999-04-03 2000-10-05 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit aus Welle und Rotor bestehender Rotoreinheit
DE10008691B4 (de) * 2000-02-24 2017-10-26 Pfeiffer Vacuum Gmbh Gasreibungspumpe
DE10046506A1 (de) * 2000-09-20 2002-03-28 Leybold Vakuum Gmbh Turbomolekularvakuumpumpe mit Rotorschaufelreihen und Statorschaufelreihen
DE10046766A1 (de) 2000-09-21 2002-04-11 Leybold Vakuum Gmbh Compound-Reibungsvakuumpumpe
JP2002138987A (ja) * 2000-10-31 2002-05-17 Seiko Instruments Inc 真空ポンプ
US6503050B2 (en) * 2000-12-18 2003-01-07 Applied Materials Inc. Turbo-molecular pump having enhanced pumping capacity
GB0229355D0 (en) 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
JP2005042709A (ja) * 2003-07-10 2005-02-17 Ebara Corp 真空ポンプ
US7021888B2 (en) * 2003-12-16 2006-04-04 Universities Research Association, Inc. Ultra-high speed vacuum pump system with first stage turbofan and second stage turbomolecular pump
ITTO20100070A1 (it) 2010-02-01 2011-08-02 Varian Spa Pompa da vuoto, in particolare pompa da vuoto turbomolecolare.
DE202011002809U1 (de) * 2011-02-17 2012-06-12 Oerlikon Leybold Vacuum Gmbh Statorelement sowie Hochvakuumpumpe
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
EP2620649B1 (de) 2012-01-27 2019-03-13 Edwards Limited Gastransfervakuumpumpe
CN104791264A (zh) * 2015-04-20 2015-07-22 东北大学 一种带有过渡结构的复合分子泵

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
NL8303927A (nl) * 1983-11-16 1985-06-17 Ultra Centrifuge Nederland Nv Hoog-vacuum moleculair pomp.
JPS60125795A (ja) * 1983-12-09 1985-07-05 Osaka Shinku Kiki Seisakusho:Kk 複合真空ポンプ
GB2232205B (en) * 1987-12-25 1991-11-13 Sholokhov Valery B Molecular vacuum pump
US5020969A (en) 1988-09-28 1991-06-04 Hitachi, Ltd. Turbo vacuum pump
JPH02102385A (ja) * 1988-10-08 1990-04-13 Toyo Eng Corp 排気装置
DE4216237A1 (de) * 1992-05-16 1993-11-18 Leybold Ag Gasreibungsvakuumpumpe
US5513951A (en) * 1993-03-29 1996-05-07 Nippondenso Co., Ltd. Blower device
DE19632874A1 (de) 1996-08-16 1998-02-19 Leybold Vakuum Gmbh Reibungsvakuumpumpe
US5681146A (en) * 1996-10-04 1997-10-28 Future Sea Farms Inc. Low head pumping system for fish farms

Also Published As

Publication number Publication date
JP2001517757A (ja) 2001-10-09
EP1017944A1 (de) 2000-07-12
US6422829B1 (en) 2002-07-23
DE29717079U1 (de) 1997-11-06
EP1017944B1 (de) 2003-06-25
WO1999015793A1 (de) 1999-04-01

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee