EP1017944B1 - Compound pump - Google Patents

Compound pump Download PDF

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Publication number
EP1017944B1
EP1017944B1 EP98954252A EP98954252A EP1017944B1 EP 1017944 B1 EP1017944 B1 EP 1017944B1 EP 98954252 A EP98954252 A EP 98954252A EP 98954252 A EP98954252 A EP 98954252A EP 1017944 B1 EP1017944 B1 EP 1017944B1
Authority
EP
European Patent Office
Prior art keywords
stage
pump
vacuum pump
friction vacuum
webs
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP98954252A
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German (de)
French (fr)
Other versions
EP1017944A1 (en
Inventor
Günter Schütz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
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Leybold Vakuum GmbH
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Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP1017944A1 publication Critical patent/EP1017944A1/en
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Publication of EP1017944B1 publication Critical patent/EP1017944B1/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Definitions

  • the invention relates to a friction vacuum pump with at least one turbomolecular pump stage, one adjoining the pressure pump stage on the pressure side and one between the turbomolecular pump stage and the filling pump stage.
  • turbomolecular pumps with downstream thread stages also called compound pumps
  • Delivery space delivery gap
  • thread is located.
  • Known Designs of this transition area have the Disadvantage that flow stalls occur. These affect to a considerable extent the pumping speed of the Pump.
  • the present invention is based on the object to significantly simplify the design of the filling level, without an effective loading of the thread pump stage to have to do without.
  • the filling stage is designed as a centrifugal stage. ingredients the centrifugal stage are rotating bars, which is at the level of the suction-side area of the thread pump stage are located.
  • the centrifugal pump has the effect that exiting from the turbomolecular pump stage Gases redirected, compressed and the delivery room be fed to the thread pump. The gas flow is largely continuously, so that it is no longer one of the disruptive stalls.
  • stator of the turbomolecular pump in a manner known per se from spacer rings and bucket half rings there is the possibility that Stator of both pump stages without dismantling the rotor to assemble or disassemble the turbomolecular pump stage.
  • FIG. 1 In the embodiment of Figure 1 are the pump itself with 1, its inlet with 2 and its outlet with 3.
  • the housing of the pump 1 comprises the two sections 4 and 5.
  • the housing section 4 surrounds the stator 6 and the rotor 7 of the turbomolecular pump stage.
  • the stator 6 comprises the only schematically indicated bucket half rings 8 and the spacer rings 9, which together a form a self-centering stator package.
  • the rotor 7 is equipped with the rotor blades 10.
  • the housing section 4 also surrounds the stator 11 and the rotor 12 of the thread pump stage, the delivery chamber or conveyor gap is designated 13.
  • the thread 14 of this stage can be arranged on the stator or rotor side his. In the illustrated embodiment is it arranged on the stator side and part of an independent stator sleeve mountable from the housing section 15.
  • the rotor 7 of the turbomolecular pump stage 7, 8 and the rotor 12 of the thread pump stage 11, 12 are components of a jointly rotating system 7, 12.
  • the rotor 12 of the threaded pump stage 11, 12 forms the pressure side End of this system and can be as a disc or bell-shaped (as shown in Figure 1) his.
  • the housing section 5 surrounds the drive motor 16, the stator with 17 and the rotor with 18 are.
  • the housing section 5 is part of a Chassis 19 with an interior in which the drive motor 16 and other components are located.
  • the chassis 19 In the chassis 19 is also the rotors 7 and 12 of the compound pump supporting shaft 21 mounted. Only the upper camp 22 is visible. Otherwise, the chassis is 19 carriers all other components of pump 1.
  • the stator sleeve 15 is based on the chassis 19.
  • the inside diameter is slightly larger than the outer diameter of the rotor 7 the turbomolecular pump stage so that the stator sleeve 15 - With the housing section 4 removed and demounted Stator 6 of the turbomolecular pump stage 6.7 - removable is. This gives everyone the opportunity Stator components 8,9,15 only after assembly and also after balancing the rotating system 7, 12.
  • the suction end of the stator sleeve 15 is located a ring 23, the inner edge of the inner diameter corresponds to the spacer rings 2. In the complained state of Pump, the stator 6 is supported on the ring 23.
  • a filling level that is designed as a centrifugal stage 24. It includes extending substantially radially outward Crosspieces 25 facing the last row of rotor blades Form pockets 26. Different embodiments of the Centrifugal stage 24 are shown in Figures 2 to 5. The pockets are located between the webs 25 26, which are open upwards and outwards. The Arrow 27 indicates the direction of rotation.
  • the centrifugal stage 24 part of the rotor 12 of the thread pump stage. It is on the blades 10 of the turbomolecular pump stage 7,10 facing side of the disc or Bell-shaped rotor 12 is formed.
  • the depth of the pockets 26 can increase radially outwards (Fig.1). Their location is chosen so that the peripheral Openings of the pockets 26 at the entrance the thread pump stage 11,12.
  • the bridges at the embodiment of Figure 2 extend radially.
  • the webs 25 in the embodiments according to the Firgures 3 and 4 are 27 with respect to the direction of rotation inclined to the rear, in the embodiment according to FIG. 5 Forward.
  • the exit angle of the webs determines the static and dynamic Proportion of the pressure level. Is the jetty backwards curved, there is a high static component. Moreover is the degree of deflection in the circumferential direction a backward curvature is enhanced. If the bridge is curved forward there is a high dynamic share.
  • Figure 1 shows that the radial dimensions of pockets 26 is essentially the active pumping length of the blades 10 of the last located on the pressure side Rotor blade row corresponds.
  • the centrifugal stage 24 will be those leaving the turbomolecular pump stage Gases due to the action of the webs 26 and pockets 27 deflected, specifically in the direction of the conveyor gap 13 the thread pump stage 11.12.
  • Compression instead, so that stalls largely are avoided.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Description

Die Erfindung bezieht sich auf eine Reibungsvakuumpumpe mit mindestens einer Turbomolekularpumpenstufe, einer sich daran druckseitig anschließenden Gewindepumpenstufe sowie einer zwischen der Turbomolekularpumpenstufe und der Gewindepumpenstufe befindlichen Füllstufe.The invention relates to a friction vacuum pump with at least one turbomolecular pump stage, one adjoining the pressure pump stage on the pressure side and one between the turbomolecular pump stage and the filling pump stage.

Bei Turbomolekularpumpen mit nachgeschalteten Gewindestufen, auch Compoundpumpen genannt, muß das geförderte Gas aus einem Förderraum mit relativ großem Volumen, in dem sich die Axialverdichterstufen befinden, in einen Förderraum (Förderspalt) mit relativ kleinem Volumen, in dem sich das Gewinde befindet, überführt werden. Bekannte Gestaltungen dieses Übergangsbereichs haben den Nachteil, daß es zu Strömungsabrissen kommt. Diese beeinträchtigen in erheblichem Maße das Saugvermögen der Pumpe.For turbomolecular pumps with downstream thread stages, also called compound pumps, must be funded Gas from a pumping room with a relatively large volume, in in which the axial compressor stages are located Delivery space (delivery gap) with a relatively small volume, in which the thread is located. Known Designs of this transition area have the Disadvantage that flow stalls occur. These affect to a considerable extent the pumping speed of the Pump.

Aus der DE-A-196 32 874 ist bekannt, zwischen der Turbomolekularpumpenstufe und der sich daran anschließenden Gewindepumpenstufe eine Füllstufe vorzusehen, die mit Flügeln ausgerüstet ist. Die Herstellung einer Zwischenstufe dieser Art ist aufwendig. Außerdem erschweren die Flügel der Zwischenstufe die Montage.From DE-A-196 32 874 it is known between the turbomolecular pump stage and the subsequent one Thread pump stage to provide a filling level that is equipped with wings. The production of an intermediate stage this type is complex. Also complicate the wings of the intermediate stage assembly.

Der vorliegenden Erfindung liegt die Aufgabe zugrunde, die Ausbildung der Füllstufe wesentlich zu vereinfachen, ohne auf eine effekive Beschickung der Gewindepumpenstufe verzichten zu müssen.The present invention is based on the object to significantly simplify the design of the filling level, without an effective loading of the thread pump stage to have to do without.

Erfindungsgemäß wird diese Ausgabe dadurch gelöst, daß die Füllstufe als Zentrifugalstufe ausgebildet ist. Bestandteile der Zentrifugalstufe sind rotierende Stege, die sich in Höhe des saugseitigen Bereichs der Gewindepumpenstufe befinden. Die Zentrifugalpumpe hat die Wirkung, daß die aus der Turbomolekularpumpenstufe austretenden Gase umgelenkt, verdichtet und dem Förderraum der Gewindepumpe zugeführt werden. Der Gasstrom ist weitgehend kontinuierlich, so daß es nicht mehr zu den störenden Strömungsabrissen kommt.According to the invention, this issue is solved in that the filling stage is designed as a centrifugal stage. ingredients the centrifugal stage are rotating bars, which is at the level of the suction-side area of the thread pump stage are located. The centrifugal pump has the effect that exiting from the turbomolecular pump stage Gases redirected, compressed and the delivery room be fed to the thread pump. The gas flow is largely continuously, so that it is no longer one of the disruptive stalls.

Dadurch, daß die Zentrifugalstufe eine Umlenkung der Gasströmung nach außen bewirkt, besteht die Möglichkeit, für den Förderspalt der Gewindepumpenstufe einen relativ großen Durchmesser zu wählen, so daß die rotierende Pumpfläche der Gewindepumpenstufe eine hohe Umfangsgeschwindigkeit hat.Because the centrifugal stage deflects the Causes gas flow to the outside, there is the possibility one for the delivery gap of the thread pump stage relatively large diameter to choose, so that the rotating Pump surface of the thread pump stage has a high peripheral speed Has.

Ist der Innendurchmesser des außenliegenden Stators der Gewindepumpenstufe größer als der Außendurchmesser des Rotors der Turbomolekularpumpenstufe, dann besteht unter der Voraussetzung, daß der Stator der Turbomolekularpumpe in an sich bekannter Weise aus Distanzringen und Schaufelhalbringen besteht, die Möglichkeit, den Stator beider Pumpenstufen ohne Demontage des Rotors der Turbomolekularpumpenstufe zu montieren bzw. demontieren. Diese Abmessungen erlauben es, das rotierende System der erfindungsgemäßen Compoundpumpe zu wuchten und dann erst die Statorbauteile zu montieren.Is the inside diameter of the outside stator the Thread pump stage larger than the outside diameter of the Rotor of the turbomolecular pump stage, then exists under provided that the stator of the turbomolecular pump in a manner known per se from spacer rings and bucket half rings there is the possibility that Stator of both pump stages without dismantling the rotor to assemble or disassemble the turbomolecular pump stage. These dimensions allow the rotating Balancing system of the compound pump according to the invention and only then to assemble the stator components.

Weitere Vorteile und Einzelheiten der Erfindung sollen anhand von in den Figuren 1 bis 6 dargestellten Ausführungsbeispielen erläutert werden. Es zeigen

Figur 1
einen Teillängsschnitt durch ein Ausführungs beispiel für eine Reibungsvakuumpumpe nach der Erfindung und
Figuren 2 bis 5
Draufsichten auf verschiedene Varianten für die Zentrifugalstufe.
Further advantages and details of the invention will be explained on the basis of the exemplary embodiments shown in FIGS. 1 to 6. Show it
Figure 1
a partial longitudinal section through an embodiment example of a friction vacuum pump according to the invention and
Figures 2 to 5
Top views of different variants for the centrifugal stage.

Beim Ausführungsbeispiel nach Figur 1 sind die Pumpe selbst mit 1, ihr Einlaß mit 2 und ihr Auslaß mit 3 bezeichnet. Das Gehäuse der Pumpe 1 umfaßt die beiden Abschnitte 4 und 5.In the embodiment of Figure 1 are the pump itself with 1, its inlet with 2 and its outlet with 3. The housing of the pump 1 comprises the two sections 4 and 5.

Der Gehäuseabschnitt 4 umgibt den Stator 6 und den Rotor 7 der Turbomolekularpumpenstufe. Der Stator 6 umfaßt die nur schematisch angedeuteten Schaufelhalbringe 8 sowie die Distanzringe 9, die zusammen ein sich selbst zentrierendes Statorpaket bilden. Der Rotor 7 ist mit den Rotorschaufeln 10 ausgerüstet.The housing section 4 surrounds the stator 6 and the rotor 7 of the turbomolecular pump stage. The stator 6 comprises the only schematically indicated bucket half rings 8 and the spacer rings 9, which together a form a self-centering stator package. The rotor 7 is equipped with the rotor blades 10.

Der Gehäuseabschnitt 4 umgibt ebenfalls den Stator 11 und den Rotor 12 der Gewindepumpenstufe, deren Förderraum bzw. Förderspalt mit 13 bezeichnet ist. Das Gewinde 14 dieser Stufe kann stator- oder rotorseitig angeordnet sein. Beim dargestellten Ausführungsbeispiel ist es statorseitig angeordnet und Bestandteil einer unabhängig vom Gehäuseabschnitt montierbaren Statorhülse 15. Der Rotor 7 der Turbomolekularpumpenstufe 7,8 und der Rotor 12 der Gewindepumpenstufe 11,12 sind Bestandteile eines gemeinsam rotierenden Systems 7,12. Der Rotor 12 der Gewindepumpenstufe 11,12 bildet das druckseitige Ende dieses Systems und kann als Scheibe oder glockenförmig (wie in Figur 1 dargestellt) ausgebildet sein.The housing section 4 also surrounds the stator 11 and the rotor 12 of the thread pump stage, the delivery chamber or conveyor gap is designated 13. The thread 14 of this stage can be arranged on the stator or rotor side his. In the illustrated embodiment is it arranged on the stator side and part of an independent stator sleeve mountable from the housing section 15. The rotor 7 of the turbomolecular pump stage 7, 8 and the rotor 12 of the thread pump stage 11, 12 are components of a jointly rotating system 7, 12. The rotor 12 of the threaded pump stage 11, 12 forms the pressure side End of this system and can be as a disc or bell-shaped (as shown in Figure 1) his.

Der Gehäuseabschnitt 5 umgibt den Antriebsmotor 16, dessen Stator mit 17 und dessen Rotor mit 18 bezeichnet sind. Der Gehäuseabschnitt 5 ist Bestandteil eines Chassis 19 mit einem Innenraum, in dem sich der Antriebsmotor 16 und weitere Bauteile befinden. Im Chassis 19 ist auch die die Rotoren 7 und 12 der Compoundpumpe tragende Welle 21 gelagert. Nur das obere Lager 22 ist sichtbar. Im übrigen ist das Chassis 19 Träger aller weiteren Bauteile der Pumpe 1.The housing section 5 surrounds the drive motor 16, the stator with 17 and the rotor with 18 are. The housing section 5 is part of a Chassis 19 with an interior in which the drive motor 16 and other components are located. In the chassis 19 is also the rotors 7 and 12 of the compound pump supporting shaft 21 mounted. Only the upper camp 22 is visible. Otherwise, the chassis is 19 carriers all other components of pump 1.

Im montierten Zustand der Pumpe 1 sind die Gehäuseabschnitte miteinander verbunden. Die Statorhülse 15 stützt sich auf dem Chassis 19 ab. Der Innendurchmesser ist etwas größer als der Außendurchmesser des Rotors 7 der Turbemolekularpumpenstufe, damit die Statorhülse 15 - bei entferntem Gehäuseabschnitt 4 und demoniertem Stator 6 der Turbomolekularpumpenstufe 6,7 - demontierbar ist. Dadurch besteht die Möglichkeit, sämtliche Statorbauteile 8,9,15 erst nach der Montage und auch nach dem Wuchten des rotierenden Systems 7,12 zu montieren.When the pump 1 is assembled, the housing sections are connected with each other. The stator sleeve 15 is based on the chassis 19. The inside diameter is slightly larger than the outer diameter of the rotor 7 the turbomolecular pump stage so that the stator sleeve 15 - With the housing section 4 removed and demounted Stator 6 of the turbomolecular pump stage 6.7 - removable is. This gives everyone the opportunity Stator components 8,9,15 only after assembly and also after balancing the rotating system 7, 12.

Der saugseitigen Stirnseite der Statorhülse 15 liegt ein Ring 23 auf, dessen Innenrand dem Innendurchmesser der Distanzringe 2 entspricht. Im monierten Zustand der Pumpe stützt sich das Statorpaket 6 auf dem Ring 23 ab.The suction end of the stator sleeve 15 is located a ring 23, the inner edge of the inner diameter corresponds to the spacer rings 2. In the complained state of Pump, the stator 6 is supported on the ring 23.

Zwischen der Turbomolekularpumpenstufe 6,7 und der Gewindepumpenstufe 11,12 befindet sich eine Füllstufe, die als Zentrifugalstufe 24 ausgebildet ist. Sie umfaßt sich im wesentlichen radial nach außen erstreckende Stege 25, die der letzten Rotorschaufelreihe zugewandte Taschen 26 bilden. Verschiedene Ausführungsformen der Zentrifugalstufe 24 sind in den Figuren 2 bis 5 dargestellt. Zwischen den Stegen 25 befinden sich die Taschen 26, die nach oben und nach außen offen sind. Der Pfeil 27 gibt jeweils die Drehrichtung an.Between the turbomolecular pump stage 6.7 and the thread pump stage 11, 12 there is a filling level that is designed as a centrifugal stage 24. It includes extending substantially radially outward Crosspieces 25 facing the last row of rotor blades Form pockets 26. Different embodiments of the Centrifugal stage 24 are shown in Figures 2 to 5. The pockets are located between the webs 25 26, which are open upwards and outwards. The Arrow 27 indicates the direction of rotation.

Beim dargestellten Ausführungsbeispiel ist die Zentrifugalstufe 24 Bestandteil des Rotors 12 der Gewindepumpenstufe. Sie ist auf der den Schaufeln 10 der Turbomolekularpumpenstufe 7,10 zugewandten Seite des scheibenoder glockenförmig ausgebildeten Rotors 12 ausgebildet.In the illustrated embodiment, the centrifugal stage 24 part of the rotor 12 of the thread pump stage. It is on the blades 10 of the turbomolecular pump stage 7,10 facing side of the disc or Bell-shaped rotor 12 is formed.

Die Tiefe der Taschen 26 kann radial nach außen zunehmen (Fig.1). Ihre Lage ist so gewählt, daß sich die peripheren Öffnungen der Taschen 26 in Höhe des Eintritts der Gewindepumpenstufe 11,12 befinden. Die Stege bei der Ausführungsform nach Figur 2 erstrecken sich radial. Die Stege 25 bei den Ausführungsformen nach den Firguren 3 und 4 sind in Bezug auf die Drehrichtung 27 nach hinten geneigt, bei der Ausführung nach Figur 5 nach vorne. Der Austrittswinkel der Stege (Schaufel der Zentrifugalstufe) bestimmt den statischen und den dynamischen Anteil der Druckhöhe. Ist der Steg rückwärts gekrümmt, ergibt sich ein hoher statischer Anteil. Außerdem wird der Umlenkungsgrad in Umfangsrichtung durch eine Rückwärtskrümmung verstärkt. Ist der Steg vorwärtsgekrümmt, ergibt sich ein hoher dynamischer Anteil.The depth of the pockets 26 can increase radially outwards (Fig.1). Their location is chosen so that the peripheral Openings of the pockets 26 at the entrance the thread pump stage 11,12. The bridges at the embodiment of Figure 2 extend radially. The webs 25 in the embodiments according to the Firgures 3 and 4 are 27 with respect to the direction of rotation inclined to the rear, in the embodiment according to FIG. 5 Forward. The exit angle of the webs (blade of the Centrifugal stage) determines the static and dynamic Proportion of the pressure level. Is the jetty backwards curved, there is a high static component. Moreover is the degree of deflection in the circumferential direction a backward curvature is enhanced. If the bridge is curved forward there is a high dynamic share.

Figur 1 läßt noch erkennen, daß die radialen Abmessungen der Taschen 26 im wesentlichen der pumpaktiven Länge der Schaufeln 10 der letzten druckseitig gelegenen Rotorschaufelreihe entspricht. In der Zentrifugalstufe 24 werden die die Turbomolekularpumpenstufe verlassenden Gase infolge der Wirkung der Stege 26 und Taschen 27 umgelenkt, und zwar in Richtung des Förderspaltes 13 der Gewindepumpenstufe 11,12. Gleichzeitig findet eine Verdichtung statt, so daß Strömungsabrisse weitestgehend vermieden sind.Figure 1 shows that the radial dimensions of pockets 26 is essentially the active pumping length of the blades 10 of the last located on the pressure side Rotor blade row corresponds. In the centrifugal stage 24 will be those leaving the turbomolecular pump stage Gases due to the action of the webs 26 and pockets 27 deflected, specifically in the direction of the conveyor gap 13 the thread pump stage 11.12. At the same time, one finds Compression instead, so that stalls largely are avoided.

Claims (10)

  1. Friction vacuum pump (1) having at least one turbomolecular pump stage (6, 7), having a threaded pump stage (11, 12) adjoining the latter at the discharge end, and having a priming stage (24) disposed between turbomolecular pump stage (6, 7) and threaded pump stage (11, 12), characterized in that the priming stage (24) is designed as a centrifugal stage.
  2. Friction vacuum pump (1) according to claim 1, characterized in that the centrifugal stage (24) comprises substantially radially extending webs (25), which form peripherally open pockets (26) and which are situated at the level of the suction-side region of the threaded pump stage (11, 12).
  3. Friction vacuum pump (1) according to claim 2, characterized in that the webs (25) of the priming stage adjoin the last rotor blade row at the discharge end and that the radial extension of the webs (25) corresponds to the active length of the blades of said last rotor blade row.
  4. Friction vacuum pump (1) according to one of claims 1 to 3, characterized in that the depth of the pockets (26) situated between the webs (25) increases with an ascending radius.
  5. Friction vacuum pump (1) according to one of claims 2 to 4, characterized in that the substantially radially extending webs (25) are inclined backwards in relation to the direction of rotation of the rotating system (7, 12).
  6. Friction vacuum pump (1) according to one of claims 2 to 4, characterized in that the substantially radially extending webs (25) are inclined forwards in relation to the direction of rotation of the rotating system (7, 12).
  7. Friction vacuum pump (1) according to one of claims 2 to 6, characterized in that the rotor (12) of the threaded pump stage (11, 12) is of a disk- or bell-shaped design and that the priming stage (24) is a component part of the rotor (12).
  8. Friction vacuum pump (1) according to one of the preceding claims, characterized in that the stators (6, 11) are dismountable independently of their rotors (7, 12).
  9. Friction vacuum pump (1) according to claim 8, characterized in that the stators (6, 11) comprise components (8, 9, 15), which are enclosed by a housing (6).
  10. Friction vacuum pump (1) according to claim 8 or 9, characterized in that the stator (11) of the threaded pump stage (11, 12) is designed as a separate sleeve (15).
EP98954252A 1997-09-24 1998-09-04 Compound pump Expired - Lifetime EP1017944B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE29717079U DE29717079U1 (en) 1997-09-24 1997-09-24 Compound pump
DE29717079U 1997-09-24
PCT/EP1998/005611 WO1999015793A1 (en) 1997-09-24 1998-09-04 Compound pump

Publications (2)

Publication Number Publication Date
EP1017944A1 EP1017944A1 (en) 2000-07-12
EP1017944B1 true EP1017944B1 (en) 2003-06-25

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EP98954252A Expired - Lifetime EP1017944B1 (en) 1997-09-24 1998-09-04 Compound pump

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US (1) US6422829B1 (en)
EP (1) EP1017944B1 (en)
JP (1) JP2001517757A (en)
DE (2) DE29717079U1 (en)
WO (1) WO1999015793A1 (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9810872D0 (en) * 1998-05-20 1998-07-22 Boc Group Plc Improved vacuum pump
DE19915307A1 (en) 1999-04-03 2000-10-05 Leybold Vakuum Gmbh Turbomolecular friction vacuum pump, with annular groove in region of at least one endface of rotor
DE10008691B4 (en) * 2000-02-24 2017-10-26 Pfeiffer Vacuum Gmbh Gas friction pump
DE10046506A1 (en) 2000-09-20 2002-03-28 Leybold Vakuum Gmbh Turbo-molecular vacuum pump has part of blades thickened in region of pressure side edge
DE10046766A1 (en) * 2000-09-21 2002-04-11 Leybold Vakuum Gmbh Compound-friction vacuum pump
JP2002138987A (en) * 2000-10-31 2002-05-17 Seiko Instruments Inc Vacuum pump
US6503050B2 (en) * 2000-12-18 2003-01-07 Applied Materials Inc. Turbo-molecular pump having enhanced pumping capacity
GB0229355D0 (en) 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
JP2005042709A (en) * 2003-07-10 2005-02-17 Ebara Corp Vacuum pump
US7021888B2 (en) * 2003-12-16 2006-04-04 Universities Research Association, Inc. Ultra-high speed vacuum pump system with first stage turbofan and second stage turbomolecular pump
ITTO20100070A1 (en) 2010-02-01 2011-08-02 Varian Spa VACUUM PUMP, IN PARTICULAR TURBOMOLECULAR VACUUM PUMP.
DE202011002809U1 (en) * 2011-02-17 2012-06-12 Oerlikon Leybold Vacuum Gmbh Stator element and high vacuum pump
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
EP2620649B1 (en) 2012-01-27 2019-03-13 Edwards Limited Gas transfer vacuum pump
CN104791264A (en) * 2015-04-20 2015-07-22 东北大学 Compound molecular pump with transition structure

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3969039A (en) 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
NL8303927A (en) 1983-11-16 1985-06-17 Ultra Centrifuge Nederland Nv HIGH VACUUM MOLECULAR PUMP.
JPS60125795A (en) * 1983-12-09 1985-07-05 Osaka Shinku Kiki Seisakusho:Kk Composite vacuum pump
WO1989006319A1 (en) 1987-12-25 1989-07-13 Sholokhov Valery B Molecular vacuum pump
US5020969A (en) 1988-09-28 1991-06-04 Hitachi, Ltd. Turbo vacuum pump
JPH02102385A (en) * 1988-10-08 1990-04-13 Toyo Eng Corp Gas exhaust system
DE4216237A1 (en) 1992-05-16 1993-11-18 Leybold Ag Gas friction vacuum pump
US5513951A (en) * 1993-03-29 1996-05-07 Nippondenso Co., Ltd. Blower device
DE19632874A1 (en) 1996-08-16 1998-02-19 Leybold Vakuum Gmbh Friction vacuum pump
US5681146A (en) * 1996-10-04 1997-10-28 Future Sea Farms Inc. Low head pumping system for fish farms

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Publication number Publication date
JP2001517757A (en) 2001-10-09
DE29717079U1 (en) 1997-11-06
WO1999015793A1 (en) 1999-04-01
DE59808840D1 (en) 2003-07-31
US6422829B1 (en) 2002-07-23
EP1017944A1 (en) 2000-07-12

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