EP0825346B1 - Inlet-stage for a double-flow gas friction pump - Google Patents

Inlet-stage for a double-flow gas friction pump Download PDF

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Publication number
EP0825346B1
EP0825346B1 EP97112843A EP97112843A EP0825346B1 EP 0825346 B1 EP0825346 B1 EP 0825346B1 EP 97112843 A EP97112843 A EP 97112843A EP 97112843 A EP97112843 A EP 97112843A EP 0825346 B1 EP0825346 B1 EP 0825346B1
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EP
European Patent Office
Prior art keywords
gas
pump
rotor
flow
double
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP97112843A
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German (de)
French (fr)
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EP0825346A1 (en
Inventor
Heinrich Lotz
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Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Publication of EP0825346A1 publication Critical patent/EP0825346A1/en
Application granted granted Critical
Publication of EP0825346B1 publication Critical patent/EP0825346B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/02—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps having non-centrifugal stages, e.g. centripetal
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps

Definitions

  • the invention relates to an input stage for a double-flow gas friction pump according to the preamble of the first claim.
  • a cylindrical rotor rotates in a cylindrical housing with an annular groove which is interrupted at one point.
  • several stages can be connected in series in this arrangement.
  • a further development is the construction by Holweck, in which several helical steps are used instead of several.
  • a Siegbahn construction features spiral grooves on either side of a disc-shaped rotor.
  • Single-flow pumps have the advantage that the connecting flange and thus the recipient to be evacuated directly connects to the high-vacuum side of the pump rotor. In this way, the gas to be pumped can be taken over and conveyed directly by pump-active parts without significant flow resistance.
  • Double-flow pumps have the disadvantage that the gas flow from the intake flange must first be deflected in order to reach the pump-active parts. This is associated with a high flow resistance and thus with great losses in the pumping speed. Nevertheless, double-flow pumps have fundamental advantages over single-flow designs. Both with conventional bearings with ball bearings and with magnetic bearings of the most varied designs, the stability criteria for double-flow pumps can be fulfilled more easily. In addition, the bearings and drive elements are always on the fore-vacuum side and so there is no impairment of the high vacuum.
  • DD patent 109 918 describes a turbomolecular pump in which radial and axial pressure stages are arranged one behind the other on the shaft within the pump. The deflection of the radial gas flow into an axial gas flow is associated with considerable flow losses.
  • the invention has for its object the advantages of double-flow gas friction pumps, in particular the fact that double the active pumping area is available in the suction area compared to single-flow pumps stands to be able to use better and to keep the flow resistance in the entrance area low.
  • the additional device with a gas-conveying structure in the area of the intake opening can significantly improve the vacuum performance data of a gas friction pump, in particular its suction capacity.
  • the flow losses caused by the deflection of the gas flow in the entrance area are significantly reduced. Due to the rotating blades, the gas flow coming from the suction opening is fed directly to the pump-active parts. The flow losses can be further reduced if the cylindrical impeller extends in the axial direction to both sides so far that it coaxially surrounds the stator and rotor elements.
  • the device can be used in gas friction pumps of any type. The present description was based on the interaction of the device according to the invention with gas friction pumps of the type of a turbomolecular pump and of the type of a molecular pump according to Holweck.
  • Figure 1 shows the arrangement according to the invention in connection with a turbomolecular pump.
  • Figure 2 shows the arrangement according to the invention in connection with a molecular pump of the type of a Holweck pump.
  • Figure 3 shows an example of a device with a gas-producing structure.
  • FIG. 1 shows a gas friction pump in the form of a double-flow turbomolecular pump. It is in the housing 1 with a suction opening 2 and gas outlet opening 3, a rotor shaft 10 is supported in bearing devices 13. The drive for the rotor shaft is designated by 12. There are impellers 8 on the rotor shaft, which are equipped with blades. Stator disks 4 with corresponding blades are attached to the impellers 8. The interaction of the impellers 8 with the stator disks 4 causes the pump effect. As shown here, these rotor and stator elements are arranged perpendicular to the plane of the suction opening 2 in the case of double-flow turbomolecular pumps. In order that the gas flow can be better supplied to the rotor and stator elements from the suction opening 2, a device 15 is additionally provided according to the invention, which has a gas-promoting structure and rotates with the rotor elements.
  • FIG. 3 An example of such a device is shown in Figure 3. It is a paddle wheel in which either an inner ring 17 or two outer rings 18 are equipped with blades 16. To fasten this device to the rotating parts of the pump, the inner ring can be designed as a disk 19 which is fixedly connected to the rotor shaft 10. Alternatively, the outer rings 18 can each be firmly connected to the inner wheels 8.
  • Figure 2 shows a gas friction pump in the form of a double-flow molecular pump designed by Holweck. Opposite a helical groove 5 as a stator element there is a smooth cylinder 9 as a rotor element. The pumping effect is brought about by the interaction of these two.
  • a device 15 is additionally present according to the invention, as in example Figure 1, which has a gas-promoting structure and rotates with the rotor elements. Fixing this The device with the rotating parts can, as in the first example, take place via an inner disk 19 directly with the rotor shaft 10 or via outer rings 18 with the rotating cylinder 9.

Abstract

The pump has in the area of the suction opening (2) a gas- conveyor (15) connected to the rotor shaft (10). The structure of the conveyor is such that the gas to be conveyed is supplied direct from the intake opening to the stator and rotor element. The gas-conveyor can be a cylindrical rotor wheel whose structure is determined by the arrangement of the blades. The conveyor widens out axially in both directions so that it encloses at least in part the stator and rotor elements. The pump can be formed as a turbo molecular pump.

Description

Die Erfindung betrifft eine Eingangsstufe für eine zweiflutige Gasreibungspumpe nach dem Oberbegriff des ersten Patentanspruches.The invention relates to an input stage for a double-flow gas friction pump according to the preamble of the first claim.

Bei der ersten Gasreibungspumpe nach Gaede rotiert ein zylindrischer Läufer in einem zylindrischen Gehäuse mit einer ringförmigen Nut, welche an einer Stelle unterbrochen ist. Zur Erhöhung des Druckverhältnisses kann man in dieser Anordnung mehrere Stufen hintereinander schalten. Eine Weiterentwicklung stellt die Konstruktion von Holweck dar, bei welcher an die Stelle mehrerer solcher Stufen eine wendelförmige Nut tritt. Eine Konstruktion von Siegbahn weist spiralförmige Nuten zu beiden Seiten eines diskusförmigen Läufers auf. Diese Pumpen zeichnen sich durch ein hohes Druckverhältnis aus und sind daher, was besonders für die beiden letztgenannten Typen gilt, für solche Einsatzgebiete gut geeignet, bei denen ein hoher Vorvakuumdruck bewältigt werden muß. Dagegen ist jedoch, bedingt durch die engen Kanäle, ihr Saugvermögen sehr begrenzt. Ein weitaus höheres Saugvermögen liefern Turbomolekularpumpen, welche durch ihre turbinenartige Konstruktion ein höheres Schöpfvolumen aufweisen.In the first gas friction pump according to Gaede, a cylindrical rotor rotates in a cylindrical housing with an annular groove which is interrupted at one point. To increase the pressure ratio, several stages can be connected in series in this arrangement. A further development is the construction by Holweck, in which several helical steps are used instead of several. A Siegbahn construction features spiral grooves on either side of a disc-shaped rotor. These pumps are characterized by a high pressure ratio and are therefore, which applies particularly to the latter two types, well suited for those areas of application in which a high backing pressure has to be managed. However, due to the narrow channels, their pumping speed is very limited. A much higher pumping speed is provided by turbomolecular pumps, which, thanks to their turbine-like design, have a higher pumping volume.

Molekularpumpen und Turbomolekularpumpen gibt es in einflutiger und zweiflutiger Bauweise. Einflutige Pumpen haben den Vorteil, daß der Anschlußflansch und somit der zu evakuierende Rezipient direkt an die Hochvakuumseite des Pumpenrotors anschließt. So kann das zu pumpende Gas unmittelbar und ohne wesentlichen Strömungswiderstand von pumpaktiven Teilen übernommen und weitergefördert werden.Molecular pumps and turbomolecular pumps are available in single-flow and double-flow designs. Single-flow pumps have the advantage that the connecting flange and thus the recipient to be evacuated directly connects to the high-vacuum side of the pump rotor. In this way, the gas to be pumped can be taken over and conveyed directly by pump-active parts without significant flow resistance.

Zweiflutige Pumpen hingegen haben den Nachteil, daß der Gasstrom vom Ansaugflansch aus zunächst umgelenkt werden muß, um die pumpaktiven Teile zu erreichen. Dies ist mit einem hohen Strömungswiderstand und somit mit großen Einbußen beim Saugvermögen verbunden. Dennoch besitzen zweiflutige Pumpen grundsätzliche Vorteile gegenüber einflutigen Konstruktionen. Sowohl bei konventioneller Lagerung mit Kugellagern als auch bei Magnetlagerungen der verschiedensten Ausführungen lassen sich die Stabilitätskriterien bei zweiflutigen Pumpen leicher erfüllen. Hinzu kommt, daß die Lager und Antriebselemente sich immer auf der Vorvakuumseite befinden und so keine Beeinträchtigung des Hochvakuums durch diese auftritt.Double-flow pumps, on the other hand, have the disadvantage that the gas flow from the intake flange must first be deflected in order to reach the pump-active parts. This is associated with a high flow resistance and thus with great losses in the pumping speed. Nevertheless, double-flow pumps have fundamental advantages over single-flow designs. Both with conventional bearings with ball bearings and with magnetic bearings of the most varied designs, the stability criteria for double-flow pumps can be fulfilled more easily. In addition, the bearings and drive elements are always on the fore-vacuum side and so there is no impairment of the high vacuum.

Im Ansaugbereich einer zweiflutigen Pumpe steht bei gleichem Aufwand für Lagerung und Antrieb wie bei einflutigen Pumpen die doppelte pumpaktive Fläche zur Förderung der Gase zur Verfügung. Dieser Vorteil kann jedoch nur teilweise ausgenutzt werden, da, wie oben erwähnt, durch die Umlenkung des Gasstromes ein hoher Strömungsverlust entsteht.In the suction area of a double-flow pump, double the active pumping area for pumping the gases is available for storage and drive as with single-flow pumps. However, this advantage can only be partially exploited, since, as mentioned above, a high flow loss occurs due to the deflection of the gas flow.

In der DD-Patentschrift 109 918 ist eine Turbomolekularpumpe beschrieben, bei der innerhalb der Pumpe auf einer Welle hintereinander radiale und axiale Druckstufen angeordnet sind. Die Umlenkung des radialen Gasstromes in einen axialen Gasstrom ist mit erheblichen Strömungsverlusten verbunden.DD patent 109 918 describes a turbomolecular pump in which radial and axial pressure stages are arranged one behind the other on the shaft within the pump. The deflection of the radial gas flow into an axial gas flow is associated with considerable flow losses.

Der Erfindung liegt die Aufgabe zugrunde, die Vorteile von zweiflutigen Gasreibungspumpen, insbesondere die Tatsache, daß im Ansaugbereich die doppelte pumpaktive Fläche gegenüber einflutigen Pumpen zur Verfügung steht, besser nutzen zu können und den Strömungswiderstand im Eingangsbereich niedrig zu halten.The invention has for its object the advantages of double-flow gas friction pumps, in particular the fact that double the active pumping area is available in the suction area compared to single-flow pumps stands to be able to use better and to keep the flow resistance in the entrance area low.

Die Aufgabe wird durch die kennzeichnenden Merkmale des Patentanspruches gelöst.The object is achieved by the characterizing features of the patent claim.

Durch die zusätzliche Vorrichtung mit gasfördernder Struktur im Bereich der Ansaugöffnung können die vakuumtechnischen Leistungsdaten einer Gasreibungspumpe insbesondere deren Saugvermögen erheblich verbessert werden. Die Strömungsverluste, welche durch das Umlenken des Gasstromes im Eingangsbereich entstehen, werden deutlich herabgesetzt. Durch die rotierenden Schaufeln wird der Gasstrom von der Ansaugöffnung herkommend direkt den pumpaktiven Teilen zugeführt. Die Strömungsverluste können weiter verringert werden, wenn das zylindrische Laufrad in axialer Richtung nach beiden Seiten sich so weit ausdehnt, daß es die Stator- und Rotorelemente koaxial umschließt. Die Vorrichtung kann bei Gasreibungspumpen jeglicher Bauart Anwendung finden. Der hier vorliegenden Beschreibung wurde das Zusammenwirken der erfindungsgemäßen Einrichtung mit Gasreibungspumpen von der Art einer Turbomolekularpumpe und von der Art einer Molekularpumpe nach Holweck zugrundegelegt.The additional device with a gas-conveying structure in the area of the intake opening can significantly improve the vacuum performance data of a gas friction pump, in particular its suction capacity. The flow losses caused by the deflection of the gas flow in the entrance area are significantly reduced. Due to the rotating blades, the gas flow coming from the suction opening is fed directly to the pump-active parts. The flow losses can be further reduced if the cylindrical impeller extends in the axial direction to both sides so far that it coaxially surrounds the stator and rotor elements. The device can be used in gas friction pumps of any type. The present description was based on the interaction of the device according to the invention with gas friction pumps of the type of a turbomolecular pump and of the type of a molecular pump according to Holweck.

An Hand der Abbildungen 1 bis 3 soll die Erfindung näher erläutert werden.The invention will be explained in more detail with reference to FIGS. 1 to 3.

Abbildung 1 zeigt die erfindungsgemäße Anordnung in Verbindung mit einer Turbomolekularpumpe.Figure 1 shows the arrangement according to the invention in connection with a turbomolecular pump.

Abbildung 2 zeigt die erfindungsgemäße Anordnung in Verbindung mit einer Molekularpumpe vom Typ einer Holweck-Pumpe.Figure 2 shows the arrangement according to the invention in connection with a molecular pump of the type of a Holweck pump.

Abbildung 3 zeigt ein Beispiel eine Vorrichtung mit gasfördernder Struktur.Figure 3 shows an example of a device with a gas-producing structure.

In Abbildung 1 ist eine Gasreibungspumpe in Form einer zweiflutigen Turbomolekularpumpe dargestellt. Dabei ist in dem Gehäuse 1 mit Ansaugöffnung 2 und Gasaustrittsöffnung 3 eine Rotorwelle 10 in Lagervorrichtungen 13 gelagert. Mit 12 ist der Antrieb für die Rotorwelle bezeichnet. Auf der Rotorwelle befinden sich Laufräder 8, welche mit Schaufeln bestückt sind. Den Laufrädern 8 gegenüber sind Statorscheiben 4 mit entsprechenden Schaufeln angebracht. Das Zusammenwirken der Laufräder 8 mit den Statorscheiben 4 bewirkt den Pumpeffekt. Diese Rotor- und Statorelemente sind - wie hier gezeigt - bei zweiflutigen Turbomolekularpumpen senkrecht zur Ebene der Ansaugöffnung 2 angeordnet. Damit der Gasstrom von der Ansaugöffnung 2 her den Rotorund Statorelementen besser zugeführt werden kann, ist erfindungsgemäß zusätzlich eine Vorrichtung 15 vorhanden, welche eine gasfördernde Struktur aufweist und mit den Rotorelementen umläuft.Figure 1 shows a gas friction pump in the form of a double-flow turbomolecular pump. It is in the housing 1 with a suction opening 2 and gas outlet opening 3, a rotor shaft 10 is supported in bearing devices 13. The drive for the rotor shaft is designated by 12. There are impellers 8 on the rotor shaft, which are equipped with blades. Stator disks 4 with corresponding blades are attached to the impellers 8. The interaction of the impellers 8 with the stator disks 4 causes the pump effect. As shown here, these rotor and stator elements are arranged perpendicular to the plane of the suction opening 2 in the case of double-flow turbomolecular pumps. In order that the gas flow can be better supplied to the rotor and stator elements from the suction opening 2, a device 15 is additionally provided according to the invention, which has a gas-promoting structure and rotates with the rotor elements.

Ein Beispiel für eine solche Vorrichtung ist in Abbildung 3 dargestellt. Es handelt sich dabei um ein Schaufelrad, bei dem entweder ein innerer Ring 17 oder zwei äußere Ringe 18 mit Schaufeln 16 bestückt sind. Zur Befestigung dieser Vorrichtung mit den rotierenden Teilen der Pumpe kann der innere Ring als Scheibe 19 ausgebildet sein, welche mit der Rotorwelle 10 fest verbunden ist. Alternativ können die äußeren Ringe 18 jeweils mit den inneren Laufrädern 8 fest verbunden sein.An example of such a device is shown in Figure 3. It is a paddle wheel in which either an inner ring 17 or two outer rings 18 are equipped with blades 16. To fasten this device to the rotating parts of the pump, the inner ring can be designed as a disk 19 which is fixedly connected to the rotor shaft 10. Alternatively, the outer rings 18 can each be firmly connected to the inner wheels 8.

In Abbildung 2 ist eine Gasreibungspumpe in Form einer zweiflutigen Molekularpumpe nach der Ausführung von Holweck dargestellt. Gegenüber einer wendelförmigen Nut 5 als Statorelement befindet sich ein glatter Zylinder 9 als Rotorelement. Durch das Zusammenwirken dieser beiden wird der Pumpeffekt hervorgerufen. Damit der Gasstrom von der Ansaugöffnung 2 her den Rotor- und Statorelementen besser zugeführt werden kann, ist erfindungsgemäß zusätzlich wie im Beispiel Abbildung 1 eine Vorrichtung 15 vorhanden, welche eine gasfördernde Struktur aufweist und mit den Rotorelementen umläuft. Die Befestigung dieser Vorrichtung mit den rotierenden Teilen kann wie im ersten Beispiel über eine innere Scheibe 19 direkt mit der Rotorwelle 10 oder über äußere Ringe 18 mit dem rotierenden Zylinder 9 erfolgen.Figure 2 shows a gas friction pump in the form of a double-flow molecular pump designed by Holweck. Opposite a helical groove 5 as a stator element there is a smooth cylinder 9 as a rotor element. The pumping effect is brought about by the interaction of these two. In order that the gas flow can be better supplied to the rotor and stator elements from the suction opening 2, a device 15 is additionally present according to the invention, as in example Figure 1, which has a gas-promoting structure and rotates with the rotor elements. Fixing this The device with the rotating parts can, as in the first example, take place via an inner disk 19 directly with the rotor shaft 10 or via outer rings 18 with the rotating cylinder 9.

Claims (1)

  1. Double-flow gas friction pump, consisting of a casing (1) with an intake opening (2) and a gas outlet opening (3), wherein rotor elements (8, 9) and stator elements (4, 5) for delivering gas and for building up and maintaining a pressure ratio are fitted in the casing such that the rotor elements are located on a shaft (10), which is mounted at a right angle to the axis of the intake opening, and that a device (15), which is connected to the rotor shaft (10) and has a gas-conveying structure, is fitted in the region of the intake opening (2), wherein the structure is of a nature such that the gas which is to be conveyed is fed directly from the intake opening (2) to the stator and rotor elements, characterised in that the device (15) extends so far axially in both directions that it partly embraces the stator and rotor elements (4, 5, 8, 9) co-axially.
EP97112843A 1996-08-23 1997-07-25 Inlet-stage for a double-flow gas friction pump Expired - Lifetime EP0825346B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19634095A DE19634095A1 (en) 1996-08-23 1996-08-23 Entry stage for a double-flow gas friction pump
DE19634095 1996-08-23

Publications (2)

Publication Number Publication Date
EP0825346A1 EP0825346A1 (en) 1998-02-25
EP0825346B1 true EP0825346B1 (en) 2003-09-10

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EP97112843A Expired - Lifetime EP0825346B1 (en) 1996-08-23 1997-07-25 Inlet-stage for a double-flow gas friction pump

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US (1) US5927940A (en)
EP (1) EP0825346B1 (en)
JP (1) JP4050811B2 (en)
AT (1) ATE249583T1 (en)
DE (2) DE19634095A1 (en)

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US6328527B1 (en) * 1999-01-08 2001-12-11 Fantom Technologies Inc. Prandtl layer turbine
DE19930952A1 (en) * 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vacuum pump
DE10008691B4 (en) * 2000-02-24 2017-10-26 Pfeiffer Vacuum Gmbh Gas friction pump
DE10111546A1 (en) 2000-05-15 2002-01-03 Pfeiffer Vacuum Gmbh Gas friction pump
JP5149472B2 (en) * 2000-05-15 2013-02-20 プファイファー・ヴァキューム・ゲーエムベーハー Gas friction pump
FR2854933B1 (en) * 2003-05-13 2005-08-05 Cit Alcatel MOLECULAR, TURBOMOLECULAR OR HYBRID PUMP WITH INTEGRATED VALVE
DE10334455B4 (en) * 2003-07-29 2013-01-31 Pfeiffer Vacuum Gmbh Leak detection method and leak detection arrangement for carrying out the method
CN100513798C (en) * 2005-10-10 2009-07-15 储继国 Dual-drive molecular pump
DE102018119747B3 (en) 2018-08-14 2020-02-13 Bruker Daltonik Gmbh TURBOMOLECULAR PUMP FOR MASS SPECTROMETERS

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FR1293546A (en) * 1961-02-09 1962-05-18 Alsacienne Constr Meca Improvements to rotary molecular pumps
DE1428072A1 (en) * 1962-01-22 1969-03-20 Akad Wissenschaften Ddr Turbo molecular pump
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Also Published As

Publication number Publication date
US5927940A (en) 1999-07-27
EP0825346A1 (en) 1998-02-25
DE59710716D1 (en) 2003-10-16
JP4050811B2 (en) 2008-02-20
JPH10141277A (en) 1998-05-26
DE19634095A1 (en) 1998-02-26
ATE249583T1 (en) 2003-09-15

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