EP0825346A1 - Inlet-stage for a double-flow gas friction pump - Google Patents

Inlet-stage for a double-flow gas friction pump Download PDF

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Publication number
EP0825346A1
EP0825346A1 EP97112843A EP97112843A EP0825346A1 EP 0825346 A1 EP0825346 A1 EP 0825346A1 EP 97112843 A EP97112843 A EP 97112843A EP 97112843 A EP97112843 A EP 97112843A EP 0825346 A1 EP0825346 A1 EP 0825346A1
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EP
European Patent Office
Prior art keywords
double
pump
gas
rotor
flow
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Granted
Application number
EP97112843A
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German (de)
French (fr)
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EP0825346B1 (en
Inventor
Heinrich Lotz
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Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Publication of EP0825346A1 publication Critical patent/EP0825346A1/en
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Publication of EP0825346B1 publication Critical patent/EP0825346B1/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/02—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps having non-centrifugal stages, e.g. centripetal
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps

Definitions

  • the invention relates to an input stage for a double-flow gas friction pump according to the preamble of the first claim.
  • Single-flow pumps have the advantage that the connection flange and thus the recipient to be evacuated directly to the high vacuum side of the pump rotor. So the gas to be pumped immediately and taken over by pump-active parts without significant flow resistance and be promoted.
  • Double-flow pumps have the disadvantage that the gas flow from Intake flange must first be redirected to the pump active Parts to reach. This is with a high flow resistance and thus associated with great losses in pumping speed.
  • Still own double-flow pumps have fundamental advantages over single-flow designs. Both with conventional bearings with ball bearings and with Magnetic bearings of various designs can be Easier to meet stability criteria with double-flow pumps. Come in addition, that the bearings and drive elements are always on the fore-vacuum side and therefore no impairment of the high vacuum by this occurs.
  • the invention has for its object the advantages of double-flow gas friction pumps especially the fact that in the intake area double active pumping area available compared to single-flow pumps stands to be able to use better.
  • Figure 1 shows the arrangement according to the invention in connection with a Turbomolecular pump.
  • Figure 2 shows the arrangement according to the invention in connection with a Molecular pump of the Holweck pump type.
  • Figure 3 shows an example of a device with a gas-producing structure.
  • FIG. 1 is a gas friction pump in the form of a double flow turbomolecular pump shown. It is in the housing 1 with a suction opening 2 and gas outlet opening 3, a rotor shaft 10 is supported in bearing devices 13. The drive for the rotor shaft is designated by 12. On the rotor shaft there are impellers 8, which are equipped with blades. The wheels 8 opposite stator disks 4 are attached with appropriate blades. The interaction of the impellers 8 with the stator disks 4 causes the Pump effect.
  • These rotor and stator elements are - as shown here - with double flow Turbomolecular pumps perpendicular to the plane of the intake opening 2 arranged. So that the gas flow from the suction opening 2 the rotor and Stator elements can be supplied better, is according to the invention
  • a device 15 is present, which has a gas-producing structure has and rotates with the rotor elements.
  • FIG. 3 An example of such a device is shown in Figure 3. It deals is a paddle wheel, in which either an inner ring 17 or two outer rings 18 are equipped with blades 16.
  • the inner ring can be a disk 19 be formed, which is fixedly connected to the rotor shaft 10.
  • FIG 2 is a gas friction pump in the form of a double flow molecular pump after the execution of Holweck.
  • a helical one Groove 5 as a stator element is a smooth cylinder 9 as a rotor element.
  • the interaction of these two creates the pumping effect.
  • a device 15 is present which is a gas-producing Has structure and rotates with the rotor elements. Fixing this Device with the rotating parts can, as in the first example, via a inner disc 19 directly with the rotor shaft 10 or via outer rings 18 the rotating cylinder 9.

Abstract

The pump has in the area of the suction opening (2) a gas- conveyor (15) connected to the rotor shaft (10). The structure of the conveyor is such that the gas to be conveyed is supplied direct from the intake opening to the stator and rotor element. The gas-conveyor can be a cylindrical rotor wheel whose structure is determined by the arrangement of the blades. The conveyor widens out axially in both directions so that it encloses at least in part the stator and rotor elements. The pump can be formed as a turbo molecular pump.

Description

Die Erfindung betrifft eine Eingangsstufe für eine zweiflutige Gasreibungspumpe nach dem Oberbegriff des ersten Patentanspruches.The invention relates to an input stage for a double-flow gas friction pump according to the preamble of the first claim.

Bei der ersten Gasreibungspumpe nach Gaede rotiert ein zylindrischer Läufer in einem zylindrischen Gehäuse mit einer ringförmigen Nut, welche an einer Stelle unterbrochen ist. Zur Erhöhung des Druckverhältnisses kann man in dieser Anordnung mehrere Stufen hintereinander schalten. Eine Weiterentwicklung stellt die Konstruktion von Holweck dar, bei welcher an die Stelle mehrerer solcher Stufen eine wendelförmige Nut tritt. Eine Konstruktion von Siegbahn weist spiralförmige Nuten zu beiden Seiten eines diskusförmigen Läufers auf. Diese Pumpen zeichnen sich durch ein hohes Druckverhältnis aus und sind daher, was besonders für die beiden letztgenannten Typen gilt, für solche Einsatzgebiete gut geeignet, bei denen ein hoher Vorvakuumdruck bewältigt werden muß. Dagegen ist jedoch, bedingt durch die engen Kanäle, ihr Saugvermögen sehr begrenzt. Ein weitaus höheres Saugvermögen liefern Turbomolekularpumpen, welche durch ihre turbinenartige Konstruktion ein höheres Schöpfvolumen aufweisen.In the first gas friction pump according to Gaede, a cylindrical rotor rotates in a cylindrical housing with an annular groove, which at one point is interrupted. To increase the pressure ratio you can in this arrangement switch several stages in a row. A further development poses the construction of Holweck, in which several such Steps a helical groove occurs. A construction by Siegbahn shows spiral grooves on both sides of a disc-shaped rotor. This Pumps are characterized by a high pressure ratio and are therefore something applies particularly to the latter two types, good for such areas of application suitable where a high backing pressure has to be managed. On the other hand however, due to the narrow channels, their pumping speed is very limited. A Turbomolecular pumps deliver much higher pumping speeds their turbine-like construction have a higher volume.

Molekularpumpen und Turbomolekularpumpen gibt es in einflutiger und zweiflutiger Bauweise. Einflutige Pumpen haben den Vorteil, daß der Anschlußflansch und somit der zu evakuierende Rezipient direkt an die Hochvakuumseite des Pumpenrotors anschließt. So kann das zu pumpende Gas unmittelbar und ohne wesentlichen Strömungswiderstand von pumpaktiven Teilen übernommen und weitergefördert werden. Molecular pumps and turbomolecular pumps are available in single-flow and double-flow Construction. Single-flow pumps have the advantage that the connection flange and thus the recipient to be evacuated directly to the high vacuum side of the pump rotor. So the gas to be pumped immediately and taken over by pump-active parts without significant flow resistance and be promoted.

Zweiflutige Pumpen hingegen haben den Nachteil, daß der Gasstrom vom Ansaugflansch aus zunächst umgelenkt werden muß, um die pumpaktiven Teile zu erreichen. Dies ist mit einem hohen Strömungswiderstand und somit mit großen Einbußen beim Saugvermögen verbunden. Dennoch besitzen zweiflutige Pumpen grundsätzliche Vorteile gegenüber einflutigen Konstruktionen. Sowohl bei konventieller Lagerung mit Kugellagern als auch bei Magnetlagerungen der verschiedensten Ausführungen lassen sich die Stabilitätskriterien bei zweiflutigen Pumpen leichter erfüllen. Hinzu kommt, daß die Lager und Antriebselemente sich immer auf der Vorvakuumseite befinden und so keine Beeinträchtigung des Hochvakuums durch diese auftritt.Double-flow pumps, however, have the disadvantage that the gas flow from Intake flange must first be redirected to the pump active Parts to reach. This is with a high flow resistance and thus associated with great losses in pumping speed. Still own double-flow pumps have fundamental advantages over single-flow designs. Both with conventional bearings with ball bearings and with Magnetic bearings of various designs can be Easier to meet stability criteria with double-flow pumps. Come in addition, that the bearings and drive elements are always on the fore-vacuum side and therefore no impairment of the high vacuum by this occurs.

Im Ansaugbereich einer zweiflutigen Pumpe steht bei gleichem Aufwand für Lagerung und Antrieb wie bei einflutigen Pumpen die doppelte pumpaktive Fläche zur Förderung der Gase zur Verfügung. Dieser Vorteil kann jedoch nur teilweise ausgenutzt werden, da wie oben erwähnt, durch die Umlenkung des Gasstromes ein hoher Strömungsverlust entsteht.In the suction area of a double-flow pump stands with the same effort for storage and drive as with single-flow pumps, the double pump active Area available for the promotion of gases. This advantage can however, can only be partially used, as mentioned above, by the Deflection of the gas flow creates a high flow loss.

Der Erfindung liegt die Aufgabe zugrunde, die Vorteile von zweiflutigen Gasreibungspumpen insbesondere die Tatsache, daß im Ansaugbereich die doppelte pumpaktive Fläche gegenüber einflutigen Pumpen zur Verfügung steht, besser nutzen zu können.The invention has for its object the advantages of double-flow gas friction pumps especially the fact that in the intake area double active pumping area available compared to single-flow pumps stands to be able to use better.

Die Aufgabe wird durch die kennzeichnenden Merkmale des ersten Patentanspruches gelöst. Die Ansprüche zwei bis fünf stellen weitere Ausgestaltungsmöglichkeiten der Erfindung dar. The object is achieved by the characterizing features of the first claim solved. Claims two to five provide further design options of the invention.

Durch die zusätzliche Vorrichtung mit gasfördernder Struktur im Bereich der Ansaugöffnung können die vakuumtechnischen Leistungsdaten einer Gasreibungspumpe insbesondere deren Saugvermögen erheblich verbessert werden. Die Strömungsverluste, welche durch das Umlenken des Gasstromes im Eingangsbereich entstehen, werden deutlich herabgesetzt. Durch die rotierenden Schaufeln wird der Gasstrom von der Ansaugöffnung herkommend direkt den pumpaktiven Teilen zugeführt. Die Strömungsverluste können weiter verringert werden, wenn das zylindrische Laufrad in axialer Richtung nach beiden Seiten sich so weit ausdehnt, daß es die Stator- und Rotorelemente koaxial umschließt. Die Vorrichtung kann bei Gasreibungspumpen jeglicher Bauart Anwendung finden. Der hier vorliegenden Beschreibung wurde das Zusammenwirken der erfindungsgemäßen Einrichtung mit Gasreibungspumpen von der Art einer Turbomolekularpumpe und von der Art einer Molekularpumpe nach Holweck zugrundegelegt.Due to the additional device with gas-producing structure in the area of Intake opening can be the vacuum performance data of a gas friction pump in particular, their pumping speed improved considerably will. The flow losses caused by the redirection of the gas flow created in the entrance area are significantly reduced. By rotating The gas stream will come from the suction opening by scooping fed directly to the pump-active parts. The flow losses can continue be reduced if the cylindrical impeller in the axial direction after both Pages extends so far that it coaxially encloses the stator and rotor elements. The device can be used in gas friction pumps of any type Find. The interaction here has become the description the device according to the invention with gas friction pumps of the type Turbomolecular pump and of the type of a molecular pump according to Holweck based on.

An Hand der Abbildungen 1 bis 3 soll die Erfindung näher erläutert werden.The invention will be explained in more detail with reference to FIGS. 1 to 3.

Abbildung 1 zeigt die erfindungsgemäße Anordnung in Verbindung mit einer Turbomolekularpumpe.Figure 1 shows the arrangement according to the invention in connection with a Turbomolecular pump.

Abbildung 2 zeigt die erfindungsgemäße Anordnung in Verbindung mit einer Molekularpumpe vom Typ einer Holweck-Pumpe.Figure 2 shows the arrangement according to the invention in connection with a Molecular pump of the Holweck pump type.

Abbildung 3 zeigt ein Beispiel eine Vorrichtung mit gasfördernder Struktur.Figure 3 shows an example of a device with a gas-producing structure.

In Abbildung 1 ist eine Gasreibungspumpe in Form einer zweiflutigen Turbomolekularpumpe dargestellt. Dabei ist in dem Gehäuse 1 mit Ansaugöffnung 2 und Gasaustrittsöffnung 3 eine Rotorwelle 10 in Lagervorrichtungen 13 gelagert. Mit 12 ist der Antrieb für die Rotorwelle bezeichnet. Auf der Rotorwelle befinden sich Laufräder 8, welche mit Schaufeln bestückt sind. Den Laufrädern 8 gegenüber sind Statorscheiben 4 mit entsprechenden Schaufeln angebracht. Das Zusammenwirken der Laufräder 8 mit den Statorscheiben 4 bewirkt den Pumpeffekt. Diese Rotor- und Statorelemente sind - wie hier gezeigt - bei zweiflutigen Turbomolekularpumpen senkrecht zur Ebene der Ansaugöffnung 2 angeordnet. Damit der Gasstrom von der Ansaugöffnung 2 her den Rotor- und Statorelementen besser zugeführt werden kann, ist erfindungsgemäß zusätzlich eine Vorrichtung 15 vorhanden, welche eine gasfördernde Struktur aufweist und mit den Rotorelementen umläuft.In Figure 1 is a gas friction pump in the form of a double flow turbomolecular pump shown. It is in the housing 1 with a suction opening 2 and gas outlet opening 3, a rotor shaft 10 is supported in bearing devices 13. The drive for the rotor shaft is designated by 12. On the rotor shaft there are impellers 8, which are equipped with blades. The wheels 8 opposite stator disks 4 are attached with appropriate blades. The interaction of the impellers 8 with the stator disks 4 causes the Pump effect. These rotor and stator elements are - as shown here - with double flow Turbomolecular pumps perpendicular to the plane of the intake opening 2 arranged. So that the gas flow from the suction opening 2 the rotor and Stator elements can be supplied better, is according to the invention In addition, a device 15 is present, which has a gas-producing structure has and rotates with the rotor elements.

Ein Beispiel für eine solche Vorrichtung ist in Abbildung 3 dargestellt. Es handelt sich dabei um ein Schaufelrad, bei dem entweder ein innerer Ring 17 oder zwei äußere Ringe 18 mit Schaufeln 16 bestückt sind. Zur Befestigung dieser Vorrichtung mit den rotierenden Teilen der Pumpe kann der innere Ring als Scheibe 19 ausgebildet sein, welche mit der Rotorwelle 10 fest verbunden ist. Alternativ können die äußeren Ringe 18 jeweils mit den inneren Laufrädern 8 fest verbunden sein.An example of such a device is shown in Figure 3. It deals is a paddle wheel, in which either an inner ring 17 or two outer rings 18 are equipped with blades 16. To attach this device with the rotating parts of the pump, the inner ring can be a disk 19 be formed, which is fixedly connected to the rotor shaft 10. Alternatively, you can the outer rings 18 each firmly connected to the inner wheels 8 be.

In Abbildung 2 ist eine Gasreibungspumpe in Form einer zweiflutigen Molekularpumpe nach der Ausführung von Holweck dargestellt. Gegenüber einer wendelförmigen Nut 5 als Statorelement befindet sich ein glatter Zylinder 9 als Rotorelement. Durch das Zusammenwirken dieser beiden wird der Pumpeffekt hervorgerufen. Damit der Gasstrom von der Ansaugöffnung 2 her den Rotor- und Statorelementen besser zugeführt werden kann, ist erfindungsgemäß zusätzlich wie im Beispiel Abbildung 1 eine Vorrichtung 15 vorhanden, welche eine gasfördernde Struktur aufweist und mit den Rotorelementen umläuft. Die Befestigung dieser Vorrichtung mit den rotierenden Teilen kann wie im ersten Beispiel über eine innere Scheibe 19 direkt mit der Rotorwelle 10 oder über äußere Ringe 18 mit dem rotierenden Zylinder 9 erfolgen.In Figure 2 is a gas friction pump in the form of a double flow molecular pump after the execution of Holweck. Opposite a helical one Groove 5 as a stator element is a smooth cylinder 9 as a rotor element. The interaction of these two creates the pumping effect. So that the gas flow from the suction opening 2 forth the rotor and stator elements According to the invention, it can also be better supplied as In the example in Figure 1, a device 15 is present which is a gas-producing Has structure and rotates with the rotor elements. Fixing this Device with the rotating parts can, as in the first example, via a inner disc 19 directly with the rotor shaft 10 or via outer rings 18 the rotating cylinder 9.

Claims (5)

Zweiflutige Gasreibungspumpe, bestehend aus einem Gehäuse (1) mit einer Ansaugöffnung (2) und einer Gasaustrittsöffnung (3), wobei in dem Gehäuse Rotor- (8 ,9) und Statorelemente (4, 5) zur Gasförderung und zum Aufbau und zur Aufrechterhaltung eines Druckverhältnisses so angebracht sind, daß sich die Rotorelemente auf einer Welle (10) befinden, welche im rechten Winkel zur Achse der Ansaugöffnung gelagert ist, dadurch gekennzeichnet, daß im Bereich der Ansaugöffnung (2) mit der Rotorwelle (10) verbunden eine Vorrichtung (15) mit gasfördernder Struktur angebracht ist, wobei die Struktur so beschaffen ist, daß das zu fördernde Gas von der Ansaugöffnung (2) herkommend direkt den Stator- und Rotorelementen zugeführt wird.Double-flow gas friction pump, consisting of a housing (1) with a Intake opening (2) and a gas outlet opening (3), being in the housing Rotor (8, 9) and stator elements (4, 5) for gas delivery and for construction and are appropriate to maintain a pressure ratio so that the rotor elements are on a shaft (10) which is at right angles to Axis of the suction opening is mounted, characterized in that in the area a device is connected to the suction opening (2) with the rotor shaft (10) (15) is attached with a gas-producing structure, the structure obtained in this way is that the gas to be delivered comes from the suction opening (2) is fed directly to the stator and rotor elements. Zweiflutige Gasreibungspumpe nach Anspruch 1, dadurch gekennzeichnet, daß die Vorrichtung (15) im wesentlichen aus einem zylinderförmigen Laufrad besteht, dessen Struktur durch eine Anordnung von Schaufeln (16) bestimmt ist.Double-flow gas friction pump according to claim 1, characterized in that the device (15) consists essentially of a cylindrical impeller, the structure of which is determined by an arrangement of blades (16). Zweiflutige Gasreibungspumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß die Vorrichtung (15) sich axial in beiden Richtungen so weit ausdehnt, daß sie die Stator- und Rotorelemente (4, 5, 8, 9) teilweise koaxial umschließt.Double-flow gas friction pump according to one of the preceding claims, characterized in that the device (15) extends axially in both directions so far that it extends the stator and rotor elements (4, 5, 8, 9) partially coaxially. Zweiflutige Gasreibungspumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß sie als Molekularpumpe nach Art einer Turbomolekularpumpe ausgebildet ist. Double-flow gas friction pump according to one of the preceding claims, characterized in that it is a molecular pump in the manner of a turbomolecular pump is trained. Zweiflutige Gasreibungspumpe nach einem der Ansprüche 1 - 3, dadurch gekennzeichnet, daß sie als Molekularpumpe nach Art einer Holweck-Pumpe ausgebildet ist.Double-flow gas friction pump according to one of claims 1-3, characterized characterized in that it is a molecular pump in the manner of a Holweck pump is trained.
EP97112843A 1996-08-23 1997-07-25 Inlet-stage for a double-flow gas friction pump Expired - Lifetime EP0825346B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19634095A DE19634095A1 (en) 1996-08-23 1996-08-23 Entry stage for a double-flow gas friction pump
DE19634095 1996-08-23

Publications (2)

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EP0825346A1 true EP0825346A1 (en) 1998-02-25
EP0825346B1 EP0825346B1 (en) 2003-09-10

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EP97112843A Expired - Lifetime EP0825346B1 (en) 1996-08-23 1997-07-25 Inlet-stage for a double-flow gas friction pump

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US (1) US5927940A (en)
EP (1) EP0825346B1 (en)
JP (1) JP4050811B2 (en)
AT (1) ATE249583T1 (en)
DE (2) DE19634095A1 (en)

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EP1503199A3 (en) * 2003-07-29 2008-05-07 Pfeiffer Vacuum GmbH Procedure and device for leak detection

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US6328527B1 (en) * 1999-01-08 2001-12-11 Fantom Technologies Inc. Prandtl layer turbine
DE19930952A1 (en) * 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vacuum pump
DE10008691B4 (en) * 2000-02-24 2017-10-26 Pfeiffer Vacuum Gmbh Gas friction pump
DE10111546A1 (en) 2000-05-15 2002-01-03 Pfeiffer Vacuum Gmbh Gas friction pump
JP5149472B2 (en) * 2000-05-15 2013-02-20 プファイファー・ヴァキューム・ゲーエムベーハー Gas friction pump
FR2854933B1 (en) * 2003-05-13 2005-08-05 Cit Alcatel MOLECULAR, TURBOMOLECULAR OR HYBRID PUMP WITH INTEGRATED VALVE
CN100513798C (en) * 2005-10-10 2009-07-15 储继国 Dual-drive molecular pump
DE102018119747B3 (en) 2018-08-14 2020-02-13 Bruker Daltonik Gmbh TURBOMOLECULAR PUMP FOR MASS SPECTROMETERS

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EP1503199A3 (en) * 2003-07-29 2008-05-07 Pfeiffer Vacuum GmbH Procedure and device for leak detection

Also Published As

Publication number Publication date
US5927940A (en) 1999-07-27
JP4050811B2 (en) 2008-02-20
JPH10141277A (en) 1998-05-26
EP0825346B1 (en) 2003-09-10
ATE249583T1 (en) 2003-09-15
DE59710716D1 (en) 2003-10-16
DE19634095A1 (en) 1998-02-26

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