EP0825346A1 - Etage d'entrée pour une pompe à gaz à friction à double circulation - Google Patents

Etage d'entrée pour une pompe à gaz à friction à double circulation Download PDF

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Publication number
EP0825346A1
EP0825346A1 EP97112843A EP97112843A EP0825346A1 EP 0825346 A1 EP0825346 A1 EP 0825346A1 EP 97112843 A EP97112843 A EP 97112843A EP 97112843 A EP97112843 A EP 97112843A EP 0825346 A1 EP0825346 A1 EP 0825346A1
Authority
EP
European Patent Office
Prior art keywords
double
pump
gas
rotor
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP97112843A
Other languages
German (de)
English (en)
Other versions
EP0825346B1 (fr
Inventor
Heinrich Lotz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP0825346A1 publication Critical patent/EP0825346A1/fr
Application granted granted Critical
Publication of EP0825346B1 publication Critical patent/EP0825346B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/02—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps having non-centrifugal stages, e.g. centripetal
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps

Definitions

  • the invention relates to an input stage for a double-flow gas friction pump according to the preamble of the first claim.
  • Single-flow pumps have the advantage that the connection flange and thus the recipient to be evacuated directly to the high vacuum side of the pump rotor. So the gas to be pumped immediately and taken over by pump-active parts without significant flow resistance and be promoted.
  • Double-flow pumps have the disadvantage that the gas flow from Intake flange must first be redirected to the pump active Parts to reach. This is with a high flow resistance and thus associated with great losses in pumping speed.
  • Still own double-flow pumps have fundamental advantages over single-flow designs. Both with conventional bearings with ball bearings and with Magnetic bearings of various designs can be Easier to meet stability criteria with double-flow pumps. Come in addition, that the bearings and drive elements are always on the fore-vacuum side and therefore no impairment of the high vacuum by this occurs.
  • the invention has for its object the advantages of double-flow gas friction pumps especially the fact that in the intake area double active pumping area available compared to single-flow pumps stands to be able to use better.
  • Figure 1 shows the arrangement according to the invention in connection with a Turbomolecular pump.
  • Figure 2 shows the arrangement according to the invention in connection with a Molecular pump of the Holweck pump type.
  • Figure 3 shows an example of a device with a gas-producing structure.
  • FIG. 1 is a gas friction pump in the form of a double flow turbomolecular pump shown. It is in the housing 1 with a suction opening 2 and gas outlet opening 3, a rotor shaft 10 is supported in bearing devices 13. The drive for the rotor shaft is designated by 12. On the rotor shaft there are impellers 8, which are equipped with blades. The wheels 8 opposite stator disks 4 are attached with appropriate blades. The interaction of the impellers 8 with the stator disks 4 causes the Pump effect.
  • These rotor and stator elements are - as shown here - with double flow Turbomolecular pumps perpendicular to the plane of the intake opening 2 arranged. So that the gas flow from the suction opening 2 the rotor and Stator elements can be supplied better, is according to the invention
  • a device 15 is present, which has a gas-producing structure has and rotates with the rotor elements.
  • FIG. 3 An example of such a device is shown in Figure 3. It deals is a paddle wheel, in which either an inner ring 17 or two outer rings 18 are equipped with blades 16.
  • the inner ring can be a disk 19 be formed, which is fixedly connected to the rotor shaft 10.
  • FIG 2 is a gas friction pump in the form of a double flow molecular pump after the execution of Holweck.
  • a helical one Groove 5 as a stator element is a smooth cylinder 9 as a rotor element.
  • the interaction of these two creates the pumping effect.
  • a device 15 is present which is a gas-producing Has structure and rotates with the rotor elements. Fixing this Device with the rotating parts can, as in the first example, via a inner disc 19 directly with the rotor shaft 10 or via outer rings 18 the rotating cylinder 9.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP97112843A 1996-08-23 1997-07-25 Etage d'entrée pour une pompe à gaz à friction à double flux Expired - Lifetime EP0825346B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19634095 1996-08-23
DE19634095A DE19634095A1 (de) 1996-08-23 1996-08-23 Eingangsstufe für eine zweiflutige Gasreibungspumpe

Publications (2)

Publication Number Publication Date
EP0825346A1 true EP0825346A1 (fr) 1998-02-25
EP0825346B1 EP0825346B1 (fr) 2003-09-10

Family

ID=7803497

Family Applications (1)

Application Number Title Priority Date Filing Date
EP97112843A Expired - Lifetime EP0825346B1 (fr) 1996-08-23 1997-07-25 Etage d'entrée pour une pompe à gaz à friction à double flux

Country Status (5)

Country Link
US (1) US5927940A (fr)
EP (1) EP0825346B1 (fr)
JP (1) JP4050811B2 (fr)
AT (1) ATE249583T1 (fr)
DE (2) DE19634095A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1503199A3 (fr) * 2003-07-29 2008-05-07 Pfeiffer Vacuum GmbH Procédé et dispositif de détection de fuites

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6328527B1 (en) * 1999-01-08 2001-12-11 Fantom Technologies Inc. Prandtl layer turbine
DE19930952A1 (de) * 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE10008691B4 (de) * 2000-02-24 2017-10-26 Pfeiffer Vacuum Gmbh Gasreibungspumpe
DE10111546A1 (de) 2000-05-15 2002-01-03 Pfeiffer Vacuum Gmbh Gasreibungspumpe
JP5149472B2 (ja) * 2000-05-15 2013-02-20 プファイファー・ヴァキューム・ゲーエムベーハー ガス摩擦ポンプ
FR2854933B1 (fr) * 2003-05-13 2005-08-05 Cit Alcatel Pompe moleculaire, turbomoleculaire ou hybride a vanne integree
CN100513798C (zh) * 2005-10-10 2009-07-15 储继国 双重拖动分子泵
DE102018119747B3 (de) 2018-08-14 2020-02-13 Bruker Daltonik Gmbh Turbomolekularpumpe für massenspektrometer

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB475840A (en) * 1935-12-21 1937-11-26 Wolfgang Gaede High vacuum pumps
FR1293546A (fr) * 1961-02-09 1962-05-18 Alsacienne Constr Meca Perfectionnements aux pompes moléculaires rotatives
US3189264A (en) * 1963-06-04 1965-06-15 Arthur Pfeiffer Company Vacuum pump drive and seal arrangement
DE2034285A1 (de) * 1970-07-10 1972-01-13 Pfeiffer Vakuumtechnik Molekularpumpe
DD109918A1 (fr) * 1974-02-22 1974-11-20
RU1807242C (ru) * 1990-10-24 1993-04-07 Научно-Исследовательский Институт Точного Электронного Машиностроения "Слава" Турбомолекул рный вакуумный насос

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB536238A (en) * 1939-11-06 1941-05-07 Fritz Albert Max Heppner Improvements in and relating to internal combustion turbine plants
DE1428072A1 (de) * 1962-01-22 1969-03-20 Akad Wissenschaften Ddr Turbo-Molekularpumpe
DE2052120A1 (de) * 1970-10-23 1972-04-27 Pfeiffer Vakuumtechnik Lageranordnung für Molekularpumpen und Turbomolekularpumpen
GB1400011A (en) * 1972-01-18 1975-07-16 British Oxygen Co Ltd Rotary vacuum pumps
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
GB8507010D0 (en) * 1985-03-19 1985-04-24 Framo Dev Ltd Compressor unit
GB9525337D0 (en) * 1995-12-12 1996-02-14 Boc Group Plc Improvements in vacuum pumps

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB475840A (en) * 1935-12-21 1937-11-26 Wolfgang Gaede High vacuum pumps
FR1293546A (fr) * 1961-02-09 1962-05-18 Alsacienne Constr Meca Perfectionnements aux pompes moléculaires rotatives
US3189264A (en) * 1963-06-04 1965-06-15 Arthur Pfeiffer Company Vacuum pump drive and seal arrangement
DE2034285A1 (de) * 1970-07-10 1972-01-13 Pfeiffer Vakuumtechnik Molekularpumpe
DD109918A1 (fr) * 1974-02-22 1974-11-20
RU1807242C (ru) * 1990-10-24 1993-04-07 Научно-Исследовательский Институт Точного Электронного Машиностроения "Слава" Турбомолекул рный вакуумный насос

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
DATABASE WPI Section PQ Week 9425, 10 August 1994 Derwent World Patents Index; Class Q56, AN 94-207184, XP002048547 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1503199A3 (fr) * 2003-07-29 2008-05-07 Pfeiffer Vacuum GmbH Procédé et dispositif de détection de fuites

Also Published As

Publication number Publication date
DE59710716D1 (de) 2003-10-16
US5927940A (en) 1999-07-27
JPH10141277A (ja) 1998-05-26
ATE249583T1 (de) 2003-09-15
EP0825346B1 (fr) 2003-09-10
JP4050811B2 (ja) 2008-02-20
DE19634095A1 (de) 1998-02-26

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