DE59710716D1 - Eingangsstufe für eine zweiflutige Gasreibungspumpe - Google Patents

Eingangsstufe für eine zweiflutige Gasreibungspumpe

Info

Publication number
DE59710716D1
DE59710716D1 DE59710716T DE59710716T DE59710716D1 DE 59710716 D1 DE59710716 D1 DE 59710716D1 DE 59710716 T DE59710716 T DE 59710716T DE 59710716 T DE59710716 T DE 59710716T DE 59710716 D1 DE59710716 D1 DE 59710716D1
Authority
DE
Germany
Prior art keywords
conveyor
double
pump
flow gas
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE59710716T
Other languages
English (en)
Inventor
Heinrich Lotz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Application granted granted Critical
Publication of DE59710716D1 publication Critical patent/DE59710716D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/02—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps having non-centrifugal stages, e.g. centripetal
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
DE59710716T 1996-08-23 1997-07-25 Eingangsstufe für eine zweiflutige Gasreibungspumpe Expired - Lifetime DE59710716D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19634095A DE19634095A1 (de) 1996-08-23 1996-08-23 Eingangsstufe für eine zweiflutige Gasreibungspumpe

Publications (1)

Publication Number Publication Date
DE59710716D1 true DE59710716D1 (de) 2003-10-16

Family

ID=7803497

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19634095A Withdrawn DE19634095A1 (de) 1996-08-23 1996-08-23 Eingangsstufe für eine zweiflutige Gasreibungspumpe
DE59710716T Expired - Lifetime DE59710716D1 (de) 1996-08-23 1997-07-25 Eingangsstufe für eine zweiflutige Gasreibungspumpe

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE19634095A Withdrawn DE19634095A1 (de) 1996-08-23 1996-08-23 Eingangsstufe für eine zweiflutige Gasreibungspumpe

Country Status (5)

Country Link
US (1) US5927940A (de)
EP (1) EP0825346B1 (de)
JP (1) JP4050811B2 (de)
AT (1) ATE249583T1 (de)
DE (2) DE19634095A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6328527B1 (en) * 1999-01-08 2001-12-11 Fantom Technologies Inc. Prandtl layer turbine
DE19930952A1 (de) * 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE10008691B4 (de) * 2000-02-24 2017-10-26 Pfeiffer Vacuum Gmbh Gasreibungspumpe
DE10111546A1 (de) 2000-05-15 2002-01-03 Pfeiffer Vacuum Gmbh Gasreibungspumpe
JP5149472B2 (ja) * 2000-05-15 2013-02-20 プファイファー・ヴァキューム・ゲーエムベーハー ガス摩擦ポンプ
FR2854933B1 (fr) * 2003-05-13 2005-08-05 Cit Alcatel Pompe moleculaire, turbomoleculaire ou hybride a vanne integree
DE10334455B4 (de) * 2003-07-29 2013-01-31 Pfeiffer Vacuum Gmbh Lecksuchverfahren und Lecksuchanordnung zur Durchführung des Verfahrens
CN100513798C (zh) * 2005-10-10 2009-07-15 储继国 双重拖动分子泵
DE102018119747B3 (de) 2018-08-14 2020-02-13 Bruker Daltonik Gmbh Turbomolekularpumpe für massenspektrometer

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB475840A (en) * 1935-12-21 1937-11-26 Wolfgang Gaede High vacuum pumps
GB536238A (en) * 1939-11-06 1941-05-07 Fritz Albert Max Heppner Improvements in and relating to internal combustion turbine plants
FR1293546A (fr) * 1961-02-09 1962-05-18 Alsacienne Constr Meca Perfectionnements aux pompes moléculaires rotatives
DE1428072A1 (de) * 1962-01-22 1969-03-20 Akad Wissenschaften Ddr Turbo-Molekularpumpe
US3189264A (en) * 1963-06-04 1965-06-15 Arthur Pfeiffer Company Vacuum pump drive and seal arrangement
DE2034285A1 (de) * 1970-07-10 1972-01-13 Pfeiffer Vakuumtechnik Molekularpumpe
DE2052120A1 (de) * 1970-10-23 1972-04-27 Pfeiffer Vakuumtechnik Lageranordnung für Molekularpumpen und Turbomolekularpumpen
GB1400011A (en) * 1972-01-18 1975-07-16 British Oxygen Co Ltd Rotary vacuum pumps
DD109918A1 (de) * 1974-02-22 1974-11-20
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
GB8507010D0 (en) * 1985-03-19 1985-04-24 Framo Dev Ltd Compressor unit
RU1807242C (ru) * 1990-10-24 1993-04-07 Научно-Исследовательский Институт Точного Электронного Машиностроения "Слава" Турбомолекул рный вакуумный насос
GB9525337D0 (en) * 1995-12-12 1996-02-14 Boc Group Plc Improvements in vacuum pumps

Also Published As

Publication number Publication date
EP0825346B1 (de) 2003-09-10
US5927940A (en) 1999-07-27
JPH10141277A (ja) 1998-05-26
ATE249583T1 (de) 2003-09-15
JP4050811B2 (ja) 2008-02-20
EP0825346A1 (de) 1998-02-25
DE19634095A1 (de) 1998-02-26

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition