EP2253851A2 - Vacuum pump - Google Patents

Vacuum pump Download PDF

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Publication number
EP2253851A2
EP2253851A2 EP10004025A EP10004025A EP2253851A2 EP 2253851 A2 EP2253851 A2 EP 2253851A2 EP 10004025 A EP10004025 A EP 10004025A EP 10004025 A EP10004025 A EP 10004025A EP 2253851 A2 EP2253851 A2 EP 2253851A2
Authority
EP
European Patent Office
Prior art keywords
blade
vacuum pump
impeller
pump according
side channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP10004025A
Other languages
German (de)
French (fr)
Other versions
EP2253851B1 (en
EP2253851A3 (en
Inventor
Ronald Dr. Sachs
Aleksandr Dr. Shirinov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
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Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2253851A2 publication Critical patent/EP2253851A2/en
Publication of EP2253851A3 publication Critical patent/EP2253851A3/en
Application granted granted Critical
Publication of EP2253851B1 publication Critical patent/EP2253851B1/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/28—Rotors specially for elastic fluids for centrifugal or helico-centrifugal pumps for radial-flow or helico-centrifugal pumps

Definitions

  • the invention relates to a vacuum pump according to the preamble of the first claim.
  • turbomolecular pumps which are additionally provided with a side channel pumping stage, so that they can expel against a higher prevacuum pressure.
  • a vacuum pump is for example in EP 1 576 292 shown.
  • a chamfer at the outer edge of the trailing rearward of the movement direction improves the vacuum characteristics, in particular the printing ratio, and is inexpensive to produce in many machining processes.
  • the improved pressure ratio makes it possible to work with few side channel pumping stages to cover a wide pressure range in a vacuum pump. This will reduce costs.
  • the chamfer is also inexpensive to produce in machining processes that are used in small and medium series, such as milling and sawing. The production is made even easier if the back and bevel are flat surfaces.
  • the vacuum pump 1 of the embodiment has a gas inlet 2 and gas outlet 3 and a housing.
  • the housing is constructed with four housing parts 20, 21, 22 and 23 which house the components of the vacuum pump. These components are explained below.
  • Gas entering the vacuum pump through the gas inlet first enters the molecular stage 5.
  • This has an inner stator 505 provided with an internal thread groove 507 and an outer stator 506 provided with an outer thread groove 508.
  • a smooth surface cylinder 502 is provided, which is connected to the rotor 500.
  • the molecular level is thus designed as Holweckcut.
  • Holweck stage shown is symmetrical with a second cylinder 502 'surrounded by stator components and therefore works in duplicate.
  • the rotor is connected to the shaft 8, which is rotatably mounted in rolling bearings 10 and 11.
  • rolling bearings 10 and 11 instead of rolling bearings, passive and active magnetic bearings can also be used.
  • On the shaft at least one permanent magnet 13 is arranged, which cooperates with a stationary coil 12 and forms the drive 7 together with this.
  • Rolling bearing 10, drive 7 and molecular stage 5 are arranged in the housing parts 20 and 21.
  • the shaft passes through the housing part 22, which includes the side channel pumping stage 4.
  • the side channel pumping stage is formed by a side channel 401 and an impeller 400, wherein at least one blade 402 is disposed on the impeller, which rotates in the side channel by the rotation of the shaft and thus generates the pumping action.
  • Gas passes through a transfer channel 24 from the molecular stage 5 into the side channel stage and is expelled through another transfer channel 25.
  • the gas passes through the transfer channel 25 in the fore-vacuum stage 6.
  • This is also designed as a side channel pump, in which case the geometry of the impeller 600 and arranged in the side channel 601 rotating blade 602 deviates from the geometry of the blade 402. From this pumping stage, the gas is expelled through the gas outlet from the vacuum pump.
  • the Fig. 2 shows a section through housing part 22 along the line I-I '.
  • the impeller 400 sits on the shaft 8, the impeller 400 sits. This has an edge 403, on which along the circumference evenly distributed blades 402 are arranged.
  • the side channel 401 surrounds the impeller, which surrounds the blade area of the impeller in a substantially annular manner. Only over part of the circumference of the housing is close to the impeller.
  • This section forms the breaker 404, which separates the suction and discharge side, and at which the gas flow, which forms in the side channel and follows the rotation of the impeller, detached therefrom and transferred to the transfer channel 25.
  • FIG. 3 shows therefore an alternatively designed housing portion 22 ', which receives the side channel pumping stage and is penetrated by the shaft 8'.
  • the side channel 401 ' is here not in the plane of the impeller 400' but axially offset in the shaft direction next to the impeller.
  • the blade 402 ' is not in the radial direction from the substantially disc-shaped impeller, but stands from the impeller in the direction of the surface normal.
  • FIG. 4 is a section along the line II-II 'by the arrangement with the housing part 22' and the shaft 8 'to FIG. 3 shown.
  • the blades 402 ' stand on the impeller and protrude through an annular space 409 in the side channel 401'.
  • the side channel forms in contrast to the annular space 409 no closed ring but is interrupted by the scraper 404 '. Gas, which through the transfer channel 24 'in the side channel entered and is moved by the blades along the side channel, is directed at the scraper in the direction of the transfer channel to the next pumping stage.
  • a single vane 402 is in FIG. 5 shown. This can according to both in the arrangement FIG. 1 and 2 as well as in the arrangement FIGS. 3 and 4 and thus used as a blade 402 '.
  • the blade has a trailing back 405 with respect to the direction of movement 407 with an outer edge 408 on. At this outer edge a chamfer 406 is arranged. This chamfer decisively improves the vacuum characteristics, in particular the pressure ratio achievable with the impeller.
  • the rear side 405 and the chamfer 406 each comprise a flat surface. Such flat surfaces are inexpensive to produce by sawing.
  • FIG. 6 A further development of the blade and the impeller is in FIG. 6 shown.
  • a first blade 420 and a second blade 412 are spaced apart in the direction of movement 407. Between them a central bar 430 is formed.
  • First and second blades are uniform. They have two blade sections 421 and 422, which in turn each one Section rear side 425 and 426 own. Each section is provided with a chamfer 406 at its section rear.
  • the blade sections form an angle of less than 90 ° with the direction of movement 407, measured in the direction of movement. By this angle results in a V-shaped position of the blade sections to each other, wherein the V is open in the direction of movement. This position of the blade sections cooperates with the chamfer and improves the achievable with the impeller pressure ratio.
  • a plurality of blades is provided distributed at a regular distance over the circumference of the impeller.
  • this geometry can be produced in a particularly cost-effective manner if at least the chamfer and the rear side of the section are designed as flat surfaces and the blades are arranged on the edge of the rotor in such a way that they rise radially in the radial plane from the latter.
  • the center bar is then oriented circumferentially around the impeller.
  • the designed according to the development impeller can be produced inexpensively by sawing from a solid disk.
  • the Fig. 7 shows the arrangement Fig. 6 in section along the line III-III '.
  • the central web 430 provided between the blades 420 and 412 can be seen in cross-section.
  • the middle web has, at least in sections, a middle web height 431 which is smaller than the blade height 432.
  • FIG. 8 Another advantageous design feature is based on Fig. 8 be clarified.
  • the blade 450 has two blade sections 451 and 452, each having a section rear side 453 and 454. At the section backs is on each Outside a chamfer 456 arranged.
  • the blade sections are offset in the direction of movement by an offset 461 to each other.
  • the section back sides of the blade sections extend beyond the center 460 of the impeller rim.
  • at least one blade section forms an angle 451 'of less than 90 ° with the direction of movement.
  • This blade design and combination of design elements also has improved vacuum characteristics.

Abstract

The pump (1) has a side channel pumping stage (4) comprising running wheels (400) with an edge and vanes (402), where the wheels are displaced during rotation. The vanes exhibit a rear side with an outer edge. The vanes comprise flanges at the outer edge of the rear side. A middle rod is provided between the vanes and other vane. The former vanes comprise two vane sections, which are arranged in a movement direction. The former vanes are arranged at the edge of the wheels in a radial direction. The rear side and the flanges comprise flat surfaces.

Description

Die Erfindung betrifft eine Vakuumpumpe nach dem Oberbegriff des ersten Anspruchs.The invention relates to a vacuum pump according to the preamble of the first claim.

Im Stand der Technik sind Vakuumpumpen mit Seitenkanalpumpstufen bekannt, beispielsweise aus der DE 19930952 A1 . Die dort vorgestellte Vakuumpumpe ermöglicht es, einen Rezipienten von Atmosphärendruck bis auf weniger als 10-4 mbar zu evakuieren. Dies wird durch die Hintereinanderschaltung mehrerer Seitenkanalpumpstufen erreicht. Jede dieser Seitenkanalpumpstufen besitzt ein Laufrad, welches an seinem Rand in einem Kanal umlaufende Schaufeln aufweist.In the prior art vacuum pumps are known with side channel pumping stages, for example from the DE 19930952 A1 , The vacuum pump presented there makes it possible to evacuate a recipient from atmospheric pressure down to less than 10 -4 mbar. This is achieved by the series connection of several side channel pumping stages. Each of these side channel pumping stages has an impeller which has peripheral blades in a channel at its edge.

Der Stand der Technik kennt zudem Turbomolekularpumpen, die zusätzlich mit einer Seitenkanalpumpstufe versehen sind, damit sie gegen einen höheren Vorvakuumdruck ausstoßen kann. Solch eine Vakuumpumpe ist beispielsweise in der EP 1 576 292 gezeigt.The prior art also knows turbomolecular pumps, which are additionally provided with a side channel pumping stage, so that they can expel against a higher prevacuum pressure. Such a vacuum pump is for example in EP 1 576 292 shown.

Um eine hinreichend gute Pumpleistung zu erzielen, sind in der Regel mehrere Stufen und aufwändig gestaltete Laufräder der Seitenkanalpumpstufe notwendig. Der zu betreibende Aufwand wird beispielsweise an der Vielzahl von Schaufeln ersichtlich, die zumindest bei kleinen Stückzahlen aufwändig aus Vollmaterial herausgearbeitet werden müssen. Die Vakuumkennwerte wie Saugvermögen und Druckverhältnis zwischen Einlass und Auslass der Seitenkanalpumpstufe hängen von der Gestaltung der Schaufeln, des Kanals und der Spalte zwischen rotierenden und stehenden Teile ab. In der Regel führen gute Vakuumkennwerte zu steigenden Herstellkosten.In order to achieve a sufficiently good pumping power, several stages and elaborately designed impellers of the side channel pumping stage are usually necessary. The effort to be operated is evident, for example, from the large number of blades which, at least in the case of small quantities, must be laboriously worked out of solid material. The vacuum characteristics, such as suction capacity and pressure ratio between the inlet and outlet of the side channel pumping stage depend on the design of the blades, the channel and the gap between rotating and stationary parts. As a rule, good vacuum characteristics lead to rising production costs.

Andererseits besteht die Notwendigkeit, die Kosten für die Herstellung der pumpaktiven Teile der Seitenkanalpumpe gering zu halten.On the other hand, there is a need to keep the cost of producing the pump-active parts of the side channel pump low.

Es ist daher Aufgabe, eine Vakuumpumpe zu schaffen, deren Seitenkanalpumpstufe verbesserte Vakuumkennwerte und gleichzeitig eine einfach herzustellende Geometrie der pumpaktiven Bauteile besitzt.It is therefore an object to provide a vacuum pump whose Seitenkanalpumpstufe has improved vacuum characteristics and at the same time easy to manufacture geometry of the pump-active components.

Die Aufgabe wird gelöst durch eine Vakuumpumpe mit den Merkmalen des Anspruchs 1. Die abhängigen Ansprüche 2 bis 9 geben vorteilhafte Weiterbildungen an.The object is achieved by a vacuum pump with the features of claim 1. The dependent claims 2 to 9 indicate advantageous developments.

Eine Fase an der Außenkante der in Bezug zur Bewegungsrichtung nacheilenden Rückseite verbessert die Vakuumkennwerte, insbesondere das Druckverhältnis, und ist kostengünstig in vielen Bearbeitungsverfahren herzustellen. Das verbesserte Druckverhältnis ermöglicht es, mit wenigen Seitenkanalpumpstufen zu arbeiten, um einen weiten Druckbereich in einer Vakuumpumpe überdecken zu können. Hierdurch werden Kosten gesenkt. Zudem ist die Fase auch in Bearbeitungsverfahren kostengünstig herstellbar, die bei kleinen und mittleren Serien zum Einsatz kommen, beispielsweise Fräsen und Sägen. Die Fertigung wird noch weiter erleichtert, wenn es sich bei Rückseite und Fase um ebene Flächen handelt.A chamfer at the outer edge of the trailing rearward of the movement direction improves the vacuum characteristics, in particular the printing ratio, and is inexpensive to produce in many machining processes. The improved pressure ratio makes it possible to work with few side channel pumping stages to cover a wide pressure range in a vacuum pump. This will reduce costs. In addition, the chamfer is also inexpensive to produce in machining processes that are used in small and medium series, such as milling and sawing. The production is made even easier if the back and bevel are flat surfaces.

Weitere Verbesserungen der Vakuumkennwerte lassen sich durch die Maßnahmen der abhängigen Ansprüche erzielen. Auch diese Gestaltungen sind kostengünstig in Fräs- und Sägebearbeitung herstellbar. Es wurde beobachtet, dass sich die gezeigten Geometrien besonders vorteilhaft in der Kombination mit einer Molekularpumpstufe, beispielsweise einer Holweckstufe, auswirken. Die Arbeitsbereiche der erfindungsgemäßen Seitenkanalpumpstufe und der Molekularpumpstufe berühren sich in vorteilhafter Weise, so dass insgesamt eine gut abgestufte Vakuumpumpe entsteht.Further improvements of the vacuum characteristics can be achieved by the measures of the dependent claims. These designs are inexpensive to produce in milling and sawing. It has been observed that the geometries shown are particularly advantageous in combination with a molecular pumping stage, for example a Holweck stage. The working areas of the side channel pumping stage according to the invention and the molecular pumping stage touch each other in an advantageous manner, so that overall a well-graded vacuum pump results.

An Hand eines Ausführungsbeispiels seiner Weiterbildungen soll die Erfindung näher erläutert und die Darstellung ihrer Vorteile vertieft werden.With reference to an embodiment of its developments, the invention will be explained in more detail and the representation of its benefits to be deepened.

Es zeigen:

Fig. 1:
Schnitt in Wellenrichtung durch eine Vakuumpumpe mit einer Seitenkanalpumpstufe
Fig. 2:
Schnitt quer zur Wellenachse durch die Seitenkanalpumpstufe entlang I-I'
Fig. 3:
Schnitt durch die Seitenkanalpumpstufe mit einer alternativen Gestaltung des Laufrades
Fig. 4:
Schnitt entlang II-II' durch die Seitenkanalpumpe mit alternativ gestaltetem Laufrad
Fig. 5:
Perspektivische Darstellung einer Schaufel mit einer Fase
Fig. 6:
Blick auf ein Laufrad mit erster und zweiter Schaufel
Fig. 7:
Schnitt durch das Laufrad mit erster und zweiter Schaufel entlang der Linie III-III'
Fig. 8:
Sicht auf einen Abschnitt mit einigen Schaufeln in einer Weiterbildung der Erfindung
Show it:
Fig. 1:
Cut in the shaft direction by a vacuum pump with a side channel pumping stage
Fig. 2:
Section across the shaft axis through the side channel pumping stage along I-I '
3:
Section through the side channel pumping stage with an alternative design of the impeller
4:
Section along II-II 'through the side channel pump with alternative designed impeller
Fig. 5:
Perspective view of a bucket with a chamfer
Fig. 6:
View of an impeller with first and second blades
Fig. 7:
Section through the impeller with first and second blades along the line III-III '
Fig. 8:
View of a section with some blades in a development of the invention

Die Vakuumpumpe 1 des Ausführungsbeispiels besitzt einen Gaseinlass 2 und Gasauslass 3 und ein Gehäuse. Das Gehäuse ist mit vier Gehäuseteilen 20, 21, 22 und 23 aufgebaut, welche die Komponenten der Vakuumpumpe beherbergen. Diese Komponenten werden nachfolgend erläutert.The vacuum pump 1 of the embodiment has a gas inlet 2 and gas outlet 3 and a housing. The housing is constructed with four housing parts 20, 21, 22 and 23 which house the components of the vacuum pump. These components are explained below.

Durch den Gaseinlass in die Vakuumpumpe eintretendes Gas gelangt zunächst in die Molekularstufe 5. Diese besitzt einen Innenstator 505, der mit einer inneren Gewindenut 507 versehen ist, und einen Außenstator 506, der mit einer äußeren Gewindenut 508 versehen ist. Zwischen Innenstator und Außenstator ist ein Zylinder 502 mit glatter Oberfläche vorgesehen, der mit dem Rotor 500 verbunden ist. Die Molekularstufe ist somit als Holweckstufe gestaltet. Die in Fig. 1 dargestellte Holweckstufe ist symmetrisch mit einem von Statorbauteilen umgebenen zweiten Zylinder 502' aufgebaut und arbeitet daher zweiflutig.Gas entering the vacuum pump through the gas inlet first enters the molecular stage 5. This has an inner stator 505 provided with an internal thread groove 507 and an outer stator 506 provided with an outer thread groove 508. Between inner stator and outer stator, a smooth surface cylinder 502 is provided, which is connected to the rotor 500. The molecular level is thus designed as Holweckstufe. In the Fig. 1 Holweck stage shown is symmetrical with a second cylinder 502 'surrounded by stator components and therefore works in duplicate.

Der Rotor ist mit der Welle 8 verbunden, die in Wälzlagern 10 und 11 drehbar gelagert ist. Anstelle der Wälzlager können auch passive und aktive Magnetlager zum Einsatz kommen. An der Welle ist wenigstens ein Permanentmagnet 13 angeordnet, der mit einer stehenden Spule 12 zusammenwirkt und zusammen mit dieser den Antrieb 7 bildet. Wälzlager 10, Antrieb 7 und Molekularstufe 5 sind in den Gehäuseteilen 20 und 21 angeordnet.The rotor is connected to the shaft 8, which is rotatably mounted in rolling bearings 10 and 11. Instead of rolling bearings, passive and active magnetic bearings can also be used. On the shaft at least one permanent magnet 13 is arranged, which cooperates with a stationary coil 12 and forms the drive 7 together with this. Rolling bearing 10, drive 7 and molecular stage 5 are arranged in the housing parts 20 and 21.

Die Welle durchsetzt den Gehäuseteil 22, welches die Seitenkanalpumpstufe 4 beinhaltet. Die Seitenkanalpumpstufe wird von einem Seitenkanal 401 und einem Laufrad 400 gebildet, wobei am Laufrad wenigstens eine Schaufel 402 angeordnet ist, die in dem Seitenkanal durch die Drehung der Welle umläuft und so die Pumpwirkung erzeugt. Gas gelangt durch einen Übergabekanal 24 aus der Molekularstufe 5 in die Seitenkanalstufe hinein und wird durch einen weiteren Übergabekanal 25 ausgestoßen.The shaft passes through the housing part 22, which includes the side channel pumping stage 4. The side channel pumping stage is formed by a side channel 401 and an impeller 400, wherein at least one blade 402 is disposed on the impeller, which rotates in the side channel by the rotation of the shaft and thus generates the pumping action. Gas passes through a transfer channel 24 from the molecular stage 5 into the side channel stage and is expelled through another transfer channel 25.

Von der Seitenkanalpumpstufe gelangt das Gas durch den Übergabekanal 25 in die Vorvakuumstufe 6. Diese ist ebenfalls als Seitenkanalpumpe gestaltet, wobei hier die Geometrie der am Laufrad 600 angeordneten und im Seitenkanal 601 umlaufenden Schaufel 602 von der Geometrie der Schaufel 402 abweicht. Aus dieser Pumpstufe wird das Gas durch den Gasauslass aus der Vakuumpumpe ausgestoßen.From the Seitenkanalpumpstufe the gas passes through the transfer channel 25 in the fore-vacuum stage 6. This is also designed as a side channel pump, in which case the geometry of the impeller 600 and arranged in the side channel 601 rotating blade 602 deviates from the geometry of the blade 402. From this pumping stage, the gas is expelled through the gas outlet from the vacuum pump.

Zwischen den Laufrädern 400 und 600 und den Gehäuseteilen 21, 22 und 23 befinden sich enge Spalte. Diese erlauben ein freies Drehen des betreffenden Laufrads, sind jedoch so eng gestaltet, dass keine störenden Gasströmungen auftreten.Between the wheels 400 and 600 and the housing parts 21, 22 and 23 are narrow gaps. These allow a free rotation of the impeller in question, but are designed so narrow that no disturbing gas flows occur.

Die Fig. 2 zeigt einen Schnitt durch Gehäuseteil 22 entlang der Linie I-I'. Auf der Welle 8 sitzt das Laufrad 400. Diese besitzt einen Rand 403, an dem entlang des Umfangs gleichmäßig verteilt Schaufeln 402 angeordnet sind. Der Seitenkanal 401 umgibt das Laufrad, wobei dieser im wesentlichen ringförmig den Schaufelbereich des Laufrades umgibt. Nur über einen Teil des Umfangs grenzt das Gehäuse dicht an das Laufrad. Dieser Abschnitt bildet den Unterbrecher 404, der Ansaug- und Ausstoßseite voneinander trennt, und an dem das Gasstrom, der sich im Seitenkanal ausbildet und der Drehung des Laufrades folgt, von diesem abgelöst und an den Übergabekanal 25 übergeben wird.The Fig. 2 shows a section through housing part 22 along the line I-I '. On the shaft 8, the impeller 400 sits. This has an edge 403, on which along the circumference evenly distributed blades 402 are arranged. The side channel 401 surrounds the impeller, which surrounds the blade area of the impeller in a substantially annular manner. Only over part of the circumference of the housing is close to the impeller. This section forms the breaker 404, which separates the suction and discharge side, and at which the gas flow, which forms in the side channel and follows the rotation of the impeller, detached therefrom and transferred to the transfer channel 25.

In dem Beispiel nach den Figuren 1 und 2 ist die Schaufel in radialer Richtung am Rand des Laufrades angeordnet. Eine Alternative zu dieser Anordnung zeigen die Figuren 3 und 4.In the example after the FIGS. 1 and 2 the blade is arranged in the radial direction at the edge of the impeller. An alternative to this arrangement show the FIGS. 3 and 4 ,

Die Figur 3 zeigt daher einen alternativ gestalteten Gehäuseabschnitt 22', der die Seitenkanalpumpstufe aufnimmt und von der Welle 8' durchsetzt ist. Der Seitenkanal 401' ist hier nicht in der Ebene des Laufrades 400' sondern axial in Wellenrichtung versetzt neben dem Laufrad angeordnet. Die Schaufel 402' steht nicht in radialer Richtung vom im wesentlichen scheibenförmigen Laufrad ab, sondern steht vom Laufrad in Richtung der Flächennormalen ab.The FIG. 3 shows therefore an alternatively designed housing portion 22 ', which receives the side channel pumping stage and is penetrated by the shaft 8'. The side channel 401 'is here not in the plane of the impeller 400' but axially offset in the shaft direction next to the impeller. The blade 402 'is not in the radial direction from the substantially disc-shaped impeller, but stands from the impeller in the direction of the surface normal.

In Figur 4 ist ein Schnitt entlang der Linie II-II'durch die Anordnung mit dem Gehäuseteil 22' und der Welle 8' nach Figur 3 gezeigt. Die Schaufeln 402' stehen auf dem Laufrad und ragen durch eine ringförmige Freiraum 409 in den in Seitenkanal 401'. Der Seitenkanal bildet im Gegensatz zum ringförmigen Freiraum 409 keinen geschlossenen Ring sondern wird von dem Abstreifer 404' unterbrochen. Gas, welches durch den Übergabekanal 24' in den Seitenkanal hineingelangt und durch die Schaufeln entlang der Seitenkanals bewegt wird, wird am Abstreifer in Richtung des Übergabekanals zur nächsten Pumpstufe gelenkt.In FIG. 4 is a section along the line II-II 'by the arrangement with the housing part 22' and the shaft 8 'to FIG. 3 shown. The blades 402 'stand on the impeller and protrude through an annular space 409 in the side channel 401'. The side channel forms in contrast to the annular space 409 no closed ring but is interrupted by the scraper 404 '. Gas, which through the transfer channel 24 'in the side channel entered and is moved by the blades along the side channel, is directed at the scraper in the direction of the transfer channel to the next pumping stage.

Zur übersichtlicheren Darstellung wurden in Figur 1 und 3 die in die Seitenkanalpumpstufe hinein und aus hier herausführenden Übergabekanäle in Bezug auf den Umfang des Laufrades gegenüberliegend dargestellt. Günstig ist es jedoch, diese in einem kleinen Winkelabstand voneinander anzuordnen, so dass sie nur durch den Abstreifer 404 und 404' getrennt sind.For a clearer presentation in FIG. 1 and 3 the in the Seitenkanalpumpstufe in and out here leading transfer channels with respect to the circumference of the impeller opposite. It is advantageous, however, to arrange them at a small angular distance from each other, so that they are separated only by the scraper 404 and 404 '.

Eine einzelne Schaufel 402 ist in Figur 5 gezeigt. Diese kann sowohl in der Anordnung nach Figur 1 und 2 als auch in der Anordnung nach Figur 3 und 4 und damit als Schaufel 402' eingesetzt werden. Die Schaufel weist eine in Bezug zur Bewegungsrichtung 407 nacheilende Rückseite 405 mit einer Außenkante 408 auf. An dieser Außenkante ist eine Fase 406 angeordnet. Durch diese Fase werden die Vakuumkennwerte, insbesondere das mit dem Laufrad erzielbare Druckverhältnis, entscheidend verbessert.A single vane 402 is in FIG. 5 shown. This can according to both in the arrangement FIG. 1 and 2 as well as in the arrangement FIGS. 3 and 4 and thus used as a blade 402 '. The blade has a trailing back 405 with respect to the direction of movement 407 with an outer edge 408 on. At this outer edge a chamfer 406 is arranged. This chamfer decisively improves the vacuum characteristics, in particular the pressure ratio achievable with the impeller.

In einer Weiterbildung umfassen die Rückseite 405 und die Fase 406 jeweils eine ebene Fläche. Solche ebene Flächen sind kostengünstig durch Sägen herstellbar.In a further development, the rear side 405 and the chamfer 406 each comprise a flat surface. Such flat surfaces are inexpensive to produce by sawing.

Dies lässt sich vorteilhaft weiterbilden, indem alle Oberflächen der Schaufel als ebene Flächen gestaltet sind, so dass die Herstellung möglichst einfach wird.This can be advantageously further developed by all the surfaces of the blade are designed as flat surfaces, so that the production is as simple as possible.

Eine Weiterbildung der Schaufel und des Laufrades ist in Figur 6 gezeigt. Eine erste Schaufel 420 und eine zweite Schaufel 412 sind in Bewegungsrichtung 407 voneinander beabstandet angeordnet. Zwischen ihnen ist ein Mittelsteg 430 ausgebildet. Erste und zweite Schaufel sind gleichförmig gestaltet. Sie weisen zwei Schaufelabschnitte 421 und 422 auf, welche ihrerseits jeweils eine Abschnittsrückseite 425 und 426 besitzen. Jeder Abschnitt ist an seiner Abschnittsrückseite mit einer Fase 406 versehen. Die Schaufelabschnitte bilden mit der Bewegungsrichtung 407 einen Winkel von weniger als 90°, gemessen in Bewegungsrichtung. Durch diesen Winkel ergibt sich eine V-förmige Stellung der Schaufelabschnitte zueinander, wobei das V in Bewegungsrichtung geöffnet ist. Diese Stellung der Schaufelabschnitte wirkt mit der Fase zusammen und verbessert das mit dem Laufrad erzielbare Druckverhältnis. Wie in den Figuren 2 und 4 angedeutet, ist eine Mehrzahl von Schaufeln in regelmäßigem Abstand über den Umfang des Laufrades verteilt vorgesehen.A further development of the blade and the impeller is in FIG. 6 shown. A first blade 420 and a second blade 412 are spaced apart in the direction of movement 407. Between them a central bar 430 is formed. First and second blades are uniform. They have two blade sections 421 and 422, which in turn each one Section rear side 425 and 426 own. Each section is provided with a chamfer 406 at its section rear. The blade sections form an angle of less than 90 ° with the direction of movement 407, measured in the direction of movement. By this angle results in a V-shaped position of the blade sections to each other, wherein the V is open in the direction of movement. This position of the blade sections cooperates with the chamfer and improves the achievable with the impeller pressure ratio. As in the Figures 2 and 4 indicated, a plurality of blades is provided distributed at a regular distance over the circumference of the impeller.

In einer Weiterbildung ist diese Geometrie besonders kostengünstig herstellbar, wenn wenigstens die Fase und die Abschnittsrückseite als ebene Flächen gestaltet und die Schaufeln derart am Rand des Laufrades angeordnet sind, dass sie sich in der Laufradebene liegend radial von diesem erheben. Der Mittelsteg ist dann am Rand um das Laufrad umlaufend orientiert. Das gemäß Weiterbildung gestaltete Laufrad lässt sich kostengünstig durch Sägen aus einer Vollscheibe herstellen.In a further development, this geometry can be produced in a particularly cost-effective manner if at least the chamfer and the rear side of the section are designed as flat surfaces and the blades are arranged on the edge of the rotor in such a way that they rise radially in the radial plane from the latter. The center bar is then oriented circumferentially around the impeller. The designed according to the development impeller can be produced inexpensively by sawing from a solid disk.

Die Fig. 7 zeigt die Anordnung aus Fig. 6 im Schnitt entlang der Linie III-III'. In dieser Ansicht ist der zwischen den Schaufeln 420 und 412 vorgesehene Mittelsteg 430 im Querschnitt zu sehen. Der Mittelsteg weist wenigstens abschnittsweise eine Mittelsteghöhe 431 auf, die geringer als die Schaufelhöhe 432 ist. Hierdurch werden die Räume zwischen den Schaufeln beidseits des Mittelsteges miteinander verbunden. Dies resultiert ebenfalls in einer Verbesserung des erzielbaren Druckverhältnisses.The Fig. 7 shows the arrangement Fig. 6 in section along the line III-III '. In this view, the central web 430 provided between the blades 420 and 412 can be seen in cross-section. The middle web has, at least in sections, a middle web height 431 which is smaller than the blade height 432. As a result, the spaces between the blades on both sides of the central web are connected. This also results in an improvement of the achievable pressure ratio.

Ein weiteres vorteilhaftes Gestaltungsmerkmal soll anhand von Fig. 8 verdeutlicht werden. Diese Abbildung zeigt den Blick auf den Rand des Laufrades. Die Schaufel 450 weist zwei Schaufelabschnitte 451 und 452 mit jeweils eines Abschnittsrückseite 453 und 454 auf. An den Abschnittsrückseiten ist jeweils am Außenrand eine Fase 456 angeordnet. Die Schaufelabschnitte sind in Bewegungsrichtung um einen Versatz 461 zueinander versetzt. Die Abschnittsrückseiten der Schaufelabschnitte erstrecken sich bis über die Mitte 460 des Laufradrandes. Zudem bildet wenigstens ein Schaufelabschnitt einen Winkel 451' von weniger als 90° mit der Bewegungsrichtung. Diese Schaufelgestaltung und Kombination von Gestaltungselementen weist ebenfalls verbesserte Vakuumkennwerte auf.Another advantageous design feature is based on Fig. 8 be clarified. This picture shows the view of the rim of the wheel. The blade 450 has two blade sections 451 and 452, each having a section rear side 453 and 454. At the section backs is on each Outside a chamfer 456 arranged. The blade sections are offset in the direction of movement by an offset 461 to each other. The section back sides of the blade sections extend beyond the center 460 of the impeller rim. In addition, at least one blade section forms an angle 451 'of less than 90 ° with the direction of movement. This blade design and combination of design elements also has improved vacuum characteristics.

Claims (9)

Vakuumpumpe (1) mit einem Gaseinlass (2), einem Gasauslass (3), und mit einer Seitenkanalpumpstufe (4), welche ein in Drehung versetztes Laufrad (400, 400') mit einem Rand (403) und wenigstens einer Schaufel (402, 402'; 420;450) umfasst, wobei die Schaufel eine in Bewegungsrichtung (407) nacheilende Rückseite (405) mit einer Außenkante (408) aufweist, dadurch gekennzeichnet, dass die Schaufel an der Außenkante der Rückseite eine Fase (406; 416; 456) aufweist.Vacuum pump (1) having a gas inlet (2), a gas outlet (3), and a side channel pumping stage (4) having a rotating impeller (400, 400 ') with a rim (403) and at least one blade (402, 402 ';420; 450), wherein the blade has a trailing rear side (405) with an outer edge (408) in the direction of movement (407), characterized in that the blade has a bevel (406; 416; 456) at the outer edge of the rear side ) having. Vakuumpumpe nach Anspruch 1, dadurch gekennzeichnet, dass die Rückseite (405) und die Fase (406; 416; 456) je eine ebene Fläche umfassen.Each comprise a flat surface vacuum pump according to claim 1, characterized in that the back (405) and the bevel (456,406;; 416). Vakuumpumpe nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass die Schaufel (402, 402'; 420;450) zwei Schaufelabschnitte (421, 422; 451, 452) mit jeweils einer Abschnittsrückseite (425, 426; 453, 454) umfasst und wenigstens ein Schaufelabschnitt einen Winkel (415; 415') von weniger als 90° mit der Bewegungsrichtung (407) bildet.Vacuum pump according to claim 1 or 2, characterized in that the blade (402, 402 ';420; 450) comprises two blade sections (421, 422; 451, 452) each having a section rear side (425, 426; 453, 454) and at least a blade portion forms an angle (415; 415 ') of less than 90 ° with the direction of movement (407). Vakuumpumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass das Laufrad (400, 400') eine zweite Schaufel (412) umfasst und zwischen Schaufel (402; 402'; 420) und zweiter Schaufel ein Mittelsteg (430) vorgesehen ist.Vacuum pump according to one of the preceding claims, characterized in that the impeller (400, 400 ') comprises a second blade (412) and between the blade (402; 402'; 420) and second blade a central web (430) is provided. Vakuumpumpe nach einem der Ansprüche 3 oder 4, dadurch gekennzeichnet, dass die Schaufel (402, 402'; 420; 450) zwei Schaufelabschnitte (451, 452) umfasst, welche in Bewegungsrichtung (407) versetzt zueinander angeordnet sind.Vacuum pump according to one of claims 3 or 4, characterized in that the blade (402, 402 ';420; 450) comprises two blade sections (451, 452), which are arranged offset in the direction of movement (407) to each other. Vakuumpumpe nach einem der Ansprüche 3 bis 5, dadurch gekennzeichnet, dass sich die Abschnittsrückseiten (453, 454) der Schaufelabschnitte (451, 452) bis über eine Mitte (460) des Laufrades (400, 400') erstrecken.Vacuum pump according to one of claims 3 to 5, characterized in that the section back sides (453, 454) of the blade sections (451, 452) extend beyond a center (460) of the impeller (400, 400 '). Vakuumpumpe nach einem der Ansprüche 4 bis 6, dadurch gekennzeichnet, dass der Mittelsteg (430) zwischen zwei aufeinanderfolgenden Schaufeln (420, 412) wenigstens abschnittsweise eine Mittelsteghöhe (431) aufweist, die geringer als eine Schaufelhöhe (432) ist.Vacuum pump according to one of claims 4 to 6, characterized in that the central web (430) between two successive blades (420, 412) at least in sections a middle web height (431) which is smaller than a blade height (432). Vakuumpumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Schaufel (402; 402'; 420; 450; 412) in radialer Richtung am Rand (403) des Laufrades (400, 400') angeordnet ist.Vacuum pump according to one of the preceding claims, characterized in that the blade (402; 402 ';420;450; 412) is arranged in the radial direction on the edge (403) of the impeller (400, 400'). Vakuumpumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass sie eine für den molekularen Druckbereich angepasste Pumpstufe (5) aufweist, welche zwischen Seitenkanalpumpstufe (4) und Gaseinlass (2) angeordnet ist.Vacuum pump according to one of the preceding claims, characterized in that it comprises a pumping stage (5) adapted for the molecular pressure range, which is arranged between side-channel pumping stage (4) and gas inlet (2).
EP10004025.2A 2009-05-16 2010-04-16 Vacuum pump Active EP2253851B1 (en)

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Also Published As

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JP2010265895A (en) 2010-11-25
DE102009021642A1 (en) 2010-11-18
EP2253851B1 (en) 2016-12-14
DE102009021642B4 (en) 2021-07-22
EP2253851A3 (en) 2014-07-09
JP5670095B2 (en) 2015-02-18

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