EP2251547B1 - Vacuum pump - Google Patents

Vacuum pump Download PDF

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Publication number
EP2251547B1
EP2251547B1 EP10004024.5A EP10004024A EP2251547B1 EP 2251547 B1 EP2251547 B1 EP 2251547B1 EP 10004024 A EP10004024 A EP 10004024A EP 2251547 B1 EP2251547 B1 EP 2251547B1
Authority
EP
European Patent Office
Prior art keywords
rotor
vane
blade
impeller
side channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP10004024.5A
Other languages
German (de)
French (fr)
Other versions
EP2251547A2 (en
EP2251547A3 (en
Inventor
Ronald Dr. Sachs
Aleksandr Dr. Shirinov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
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Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2251547A2 publication Critical patent/EP2251547A2/en
Publication of EP2251547A3 publication Critical patent/EP2251547A3/en
Application granted granted Critical
Publication of EP2251547B1 publication Critical patent/EP2251547B1/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/28—Rotors specially for elastic fluids for centrifugal or helico-centrifugal pumps for radial-flow or helico-centrifugal pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps

Definitions

  • the invention relates to a vacuum pump according to the preamble of the first claim.
  • Vacuum pumps with side channel pumping stages are known in the art and are gaining increasing economic importance. When used in a turbomolecular pump, a side channel pumping stage allows the turbomolecular pump to be ejected against higher pressures. Vacuum pumps with Holweck and side channel pumping stage achieve ultimate pressures in the molecular flow range in very compact sizes.
  • An example of such a vacuum pump is the DE 19930952 A1 which is equipped in the intake with a parallel working Holweckpump note and in the gas stream subsequently with a plurality of side channel pumping stages.
  • the impellers used in these bykanalpumpgen are simple: the blades of the disc-shaped impeller are arranged at the edge and are in the radial direction of the disc from. Between the blades a center bar runs around, which has the full blade height along the entire impeller circumference.
  • the vacuum characteristics of the side channel pumping stage in particular the suction capacity and pressure ratio between inlet and outlet, depend on the design of the blades, the channel and the gaps between rotating and stationary parts. As a rule, good vacuum characteristics lead to rising production costs.
  • JP 2 536571 B2 includes a vacuum pump that includes a side channel pumping stage.
  • the design of the impeller of the side channel pumping stage is not optimally designed.
  • the prior art ( DE 24 05 890 A1 ) includes a side channel ring compressor having an impeller with arranged on the impeller blades. Also, this side channel ring compressor can be further improved in terms of vacuum characteristics.
  • JP H02 9992 A A pump with an impeller on which blades are arranged, which in turn are offset from one another. This pump can also be further improved in terms of their vacuum characteristics.
  • the geometry of the blade according to claim 1 is inexpensive to produce. Compared to the prior art mentioned above, an angle between at least one partial blade and the direction of movement of the blade of less than 90 ° results in an improvement in the pressure ratio between the inlet and outlet of the side channel pumping stage in the region of the rough vacuum.
  • a central web between adjacent blades at least in sections has a lower height than the blade.
  • the improvement in the vacuum characteristics, in particular the pressure ratio, is achieved when at least one partial blade has a rearward-trailing back which extends beyond the center of the edge of the impeller.
  • the vacuum pump 1 of the embodiment is shown in FIG Fig. 1 shown in longitudinal section.
  • the housing of the vacuum pump provided with a gas inlet 2 and a gas outlet 3 has a plurality of housing parts 20, 21, 22 and 23, in which the components described below are accommodated.
  • the gas first passes into the molecular pump stage 4, which is designed here according to Holweck design.
  • This comprises an inner stator 405 with an inner thread groove 407 and an outer stator 406 with an outer thread groove 408.
  • the thread grooves run helically and cooperate with a rotating cylinder 402 located between inner stator and outer stator in such a way that a pumping action occurs in the molecular flow region.
  • the cylinder is mounted on a carrier 400, which in turn is connected to the shaft 8.
  • the molecular pumping stage is symmetrical and has a second cylinder 402 'which cooperates with associated stator components. This design results in a parallel conveying mechanism.
  • the shaft is rotated by a drive 7 in rotation.
  • This drive comprises an electric coil 12 on the stator side and a permanent magnet 13 on the shaft side.
  • the shaft is mounted in roller bearings 10 and 11.
  • the gas From the molecular pump stage, the gas enters downstream through the first transfer channel 24 into a high-vacuum-side side channel stage 5.
  • This has a rotor 500, which is provided with at least one rotor blade. This runs in the side channel 501.
  • the gas further compressed in this pumping stage is transferred via the second transfer channel 25 to the side channel pumping stage 6, where it is further compressed and finally discharged via the gas outlet from the vacuum pump.
  • Fig. 2 the side channel pumping stage 6 is shown in a section along the line II '.
  • the housing part 22, which houses the side channel pumping stage, has an annular side channel 601.
  • the ring of this side channel is interrupted by a breaker 604. This separates the intake and discharge side of each other and triggers the guided on the impeller gas flow from this.
  • in the Side channel runs around the at least one blade 602, which is arranged at the edge 603 of the impeller 600. It extends at this edge in the radial direction.
  • the impeller is rotated by the shaft 8 and gas enters the side channel through the transfer channel 25, it is moved with the blade along the channel. This entrainment of the gas in the circumferential direction ends at the scraper 604. At this, the gas is transferred to the subsequent channel. This then leads to a further pumping stage or to the gas outlet 3.
  • FIG. 3 A design of the blade of the impeller, which is not part of the invention is in Fig. 3 shown in a view of the edge.
  • the blade 602 has a first partial blade 621 and a second partial blade 622.
  • Each of these vanes has a blade backside 625 and 626.
  • At least one of these two blades forms an angle 615 of less than 90 ° with the direction of travel 607 of the blade. It is advantageous if both partial blades are inclined at such an angle and together form an open V in the direction of movement. This measure increases the pressure ratio, which can be achieved with the blade.
  • a further increase is achieved by the chamfer 616, which are provided on the partial blade rear sides 625 and 626 and on which lie in the plane of the impeller outer edge of the sub-blades.
  • a saw blade saws the edge of the impeller and is inclined against the axis of rotation of the impeller, ie the axis of rotation is not in the plane of the saw blade.
  • the impeller has in addition to the blade 602 still another blade 612, which is advantageously designed similar. Between the blades 602 and 612, a central web 630 is arranged.
  • the design of the Mittelsteges is based Fig. 4 clarified. This shows a section along the line II-II '.
  • the central web 630 is disposed between the blades 602 and 612. Its height 631 is at least partially smaller than the blade height 632, so that a continuous space between the blades is formed. This leads to an improved pressure ratio.
  • the geometry is in turn easily produced by sawing. During sawing, the saw blade plunges over the center of the edge of the impeller and removes the material of the center bar. If the saw blade is inclined as described above, a geometry results in a sawing process, in which the higher part of the center web is arranged in front of the blade 602 in relation to the direction of movement 607.
  • a further development of the shovel shows the top view of the edge of the impeller in Fig. 5 ,
  • the blade 602 has two partial blades 651 and 652.
  • Each of the sub-blades has a partial bucket rear 653 and 654.
  • a chamfer 656 is arranged, which lies on the lying in the plane of the impeller outer edge of the blade part.
  • the sub-blades form an angle 615 'of less than 90 ° with the direction of movement 607.
  • the sub-blades are offset by an offset 661 in the direction of movement against each other.
  • the partial vane backs extend beyond the center 660 of the impeller.
  • FIG. 6 is a view of the edge of the rotor of the high-vacuum side side channel pumping stage 5 shown.
  • the blade 502 arranged at the edge of the rotor has partial blades 551 and 552 with a partial rear side 513.
  • a chamfer is provided at the back part of the bucket.
  • FIGS. 3 to 6 shown structures are repeated several times and occur along the circumference of the impeller in an integer multiple.
  • the combination of a molecular pumping stage 4 with a high-vacuum side-channel pumping stage, which after a Fig. 6 designed rotor, and with a side channel pumping stage, the impeller with the features FIG. 5 has, results in a cost-effectively manufacturable, compact vacuum pump with improved vacuum characteristics.

Description

Die Erfindung betrifft eine Vakuumpumpe nach dem Oberbegriff des ersten Anspruchs.The invention relates to a vacuum pump according to the preamble of the first claim.

Vakuumpumpen mit Seitenkanalpumpstufen sind im Stand der Technik bekannt und erlangen zunehmend wirtschaftliche Bedeutung. Beim Einsatz in einer Turbomolekularpumpe ermöglicht eine Seitenkanalpumpstufe, die Turbomolekularpumpe gegen höhere Drucke ausstoßen zu lassen. Vakuumpumpen mit Holweck- und Seitenkanalpumpstufe erreichen bei sehr kompakten Baugrößen Enddrücke im molekularen Strömungsbereich. Ein Beispiel für eine solche Vakuumpumpe gibt die DE 19930952 A1 an, die im Ansaugbereich mit einer parallel arbeitenden Holweckpumpstufe und im Gasstrom nachfolgend mit einer Mehrzahl von Seitenkanalpumpstufen ausgestattet ist. Die in diesen Seitenkanalpumpstufen verwendeten Laufräder sind einfach gestaltet: die Schaufeln des scheibenförmigen Laufrades sind an dessen Rand angeordnet und stehen in radialer Richtung von der Scheibe ab. Zwischen den Schaufeln läuft ein Mittelsteg um, der entlang des ganzen Laufradumfangs die volle Schaufelhöhe besitzt.Vacuum pumps with side channel pumping stages are known in the art and are gaining increasing economic importance. When used in a turbomolecular pump, a side channel pumping stage allows the turbomolecular pump to be ejected against higher pressures. Vacuum pumps with Holweck and side channel pumping stage achieve ultimate pressures in the molecular flow range in very compact sizes. An example of such a vacuum pump is the DE 19930952 A1 which is equipped in the intake with a parallel working Holweckpumpstufe and in the gas stream subsequently with a plurality of side channel pumping stages. The impellers used in these Seitenkanalpumpstufen are simple: the blades of the disc-shaped impeller are arranged at the edge and are in the radial direction of the disc from. Between the blades a center bar runs around, which has the full blade height along the entire impeller circumference.

Die Vakuumkennwerte der Seitenkanalpumpstufe, insbesondere Saugvermögen und Druckverhältnis zwischen Einlass und Auslass, hängen von der Gestaltung der Schaufeln, des Kanals und der Spalte zwischen rotierenden und stehenden Teilen ab. In der Regel führen gute Vakuumkennwerte zu steigenden Herstellkosten.The vacuum characteristics of the side channel pumping stage, in particular the suction capacity and pressure ratio between inlet and outlet, depend on the design of the blades, the channel and the gaps between rotating and stationary parts. As a rule, good vacuum characteristics lead to rising production costs.

Andererseits besteht die Notwendigkeit, die Kosten für die Herstellung der pumpaktiven Teile der Seitenkanalpumpe gering zu halten.On the other hand, there is a need to keep the cost of producing the pump-active parts of the side channel pump low.

Das oben beschriebene Laufrad stellt bisher einen guten Kompromiss dar, für den jedoch eine Verbesserung gesucht wird.The impeller described above represents a good compromise, but for which an improvement is sought.

Zum Stand der Technik ( JP 2 536571 B2 ) gehört eine Vakuumpumpe, die eine Seitenkanalpumpstufe umfasst. Hinsichtlich der Vakuumkennwerte ist die Ausgestaltung des Laufrades der Seitenkanalpumpstufe noch nicht optimal gestaltet.The prior art ( JP 2 536571 B2 ) includes a vacuum pump that includes a side channel pumping stage. With regard to the vacuum characteristics, the design of the impeller of the side channel pumping stage is not optimally designed.

Weiterhin gehört zum Stand der Technik ( EP 0 568 069 A2 ) eine Turbomolekularvakuumpumpe, die eine zusätzliche Seitenkanalpumpstufe aufweist. Auch das Laufrad dieser Seitenkanalpumpstufe kann hinsichtlich der Vakuumkennwerte weiter verbessert werden.Furthermore belongs to the state of the art ( EP 0 568 069 A2 ) a turbomolecular vacuum pump having an additional side channel pumping stage. Also, the impeller of this side channel pumping stage can be further improved in terms of vacuum characteristics.

Zum Stand der Technik ( DE 24 05 890 A1 ) gehört ein Seitenkanalringverdichter, der ein Laufrad mit auf dem Laufrad angeordneten Schaufeln aufweist. Auch dieser Seitenkanalringverdichter kann hinsichtlich der Vakuumkennwerte weiter verbessert werden.The prior art ( DE 24 05 890 A1 ) includes a side channel ring compressor having an impeller with arranged on the impeller blades. Also, this side channel ring compressor can be further improved in terms of vacuum characteristics.

Darüber hinaus gehört zum Stand der Technik ( JP H02 9992 A ) eine Pumpe mit einem Laufrad, auf dem Schaufeln angeordnet sind, die wiederum versetzt zueinander angeordnet sind. Diese Pumpe kann hinsichtlich ihrer Vakuumkennwerte ebenfalls weiter verbessert werden.In addition, the state of the art ( JP H02 9992 A ) A pump with an impeller on which blades are arranged, which in turn are offset from one another. This pump can also be further improved in terms of their vacuum characteristics.

Es ist daher Aufgabe, eine Vakuumpumpe zu schaffen, deren Seitenkanalpumpstufe verbesserte Vakuumkennwerte und gleichzeitig eine einfach herzustellende Geometrie der pumpaktiven Bauteile besitzt.It is therefore an object to provide a vacuum pump whose Seitenkanalpumpstufe has improved vacuum characteristics and at the same time easy to manufacture geometry of the pump-active components.

Die Aufgabe wird gelöst durch die Merkmale des unabhängigen Anspruchs 1. Vorteilhafte Ausgestaltungen der Erfindung sind in den Unteransprüchen 2 bis 3 gekennzeichnet.The object is solved by the features of independent claim 1. Advantageous embodiments of the invention are characterized in the subclaims 2 to 3.

Die Geometrie der Schaufel nach Anspruch 1 ist kostengünstig herstellbar. Im Vergleich zum eingangs genannten Stand der Technik ergibt sich durch einen Winkel zwischen wenigstens einer Teilschaufel und der Bewegungsrichtung der Schaufel von weniger als 90° eine Verbesserung des Druckverhältnisses zwischen Einlass und Auslass der Seitenkanalpumpstufe im Bereich des Grobvakuums.The geometry of the blade according to claim 1 is inexpensive to produce. Compared to the prior art mentioned above, an angle between at least one partial blade and the direction of movement of the blade of less than 90 ° results in an improvement in the pressure ratio between the inlet and outlet of the side channel pumping stage in the region of the rough vacuum.

Wesentlich ist es, dass ein Mittelsteg zwischen benachbarten Schaufeln wenigstens abschnittsweise eine geringere Höhe als die Schaufel aufweist.It is essential that a central web between adjacent blades at least in sections has a lower height than the blade.

Die Verbesserung der Vakuumkennwerte, insbesondere des Druckverhältnisses, wird erzielt, wenn wenigstens eine Teilschaufel eine in Bezug zur Drehrichtung nacheilende Rückseite aufweist, die sich über die Mitte des Randes des Laufrades erstreckt.The improvement in the vacuum characteristics, in particular the pressure ratio, is achieved when at least one partial blade has a rearward-trailing back which extends beyond the center of the edge of the impeller.

Das Ergebnis weiter verbessernd wirkt ein Versatz der Teilschaufeln in Umfangsrichtung.The result further improving an offset of the vanes acts in the circumferential direction.

Eine zusätzliche Ausweitung des Vorteils wird erreicht, wenn an der Rückseite der Schaufel eine Fase angebracht ist.An additional extension of the advantage is achieved if a bevel is attached to the back of the blade.

Eine vorteilhafte Kombination ergibt sich, wenn die Seitenkanalpumpstufe im Gasstrom hinter einer weiteren Seitenkanalpumpstufe angeordnet ist, welche einen Rotor mit einer Rotorschaufel beinhaltet, welche an einer in Bezug zur Drehrichtung zurückliegenden Seite eine Fase aufweist. Diese Wahl der Schaufelgestaltungen erlaubt eine verringerte Zahl an Seitenkanalpumpstufen im Vergleich zum Stand der Technik und reduziert daher die Herstellkosten bei verbesserten Vakuumkennwerten.An advantageous combination results when the side channel pumping stage is arranged in the gas flow behind another side channel pumping stage, which includes a rotor with a rotor blade, which has a chamfer on a side lying in relation to the direction of rotation. This choice of bucket designs allows for a reduced number of side channel pumping stages compared to the prior art and therefore reduces manufacturing costs with improved vacuum ratings.

An Hand eines Ausführungsbeispiels seiner Weiterbildungen soll die Erfindung näher erläutert und die Darstellung ihrer Vorteile vertieft werden.With reference to an embodiment of its developments, the invention will be explained in more detail and the representation of its benefits to be deepened.

Es zeigen:

  • Fig. 1: Schnitt in Wellenrichtung durch eine Vakuumpumpe mit einer Seitenkanalpumpstufe.
  • Fig. 2: Schnitt quer zur Wellenachse durch die Seitenkanalpumpstufe entlang I-I'.
  • Fig. 3: Blick auf ein Laufrad mit erster und zweiter Schaufel, das kein Teil der Erfindung ist.
  • Fig. 4: Schnitt durch das Laufrad mit erster und zweiter Schaufel entlang der Linie II-II'.
  • Fig. 5: Sicht auf einen Abschnitt mit einigen Schaufeln in einer Weiterbildung.
  • Fig. 6: Sicht auf einen Abschnitt des Rotors einer weiteren Pumpstufe.
Show it:
  • Fig. 1 : Cut in the shaft direction by a vacuum pump with a side channel pumping stage.
  • Fig. 2 : Section across the shaft axis through the side channel pumping stage along I-I '.
  • Fig. 3 : View of an impeller with first and second blades, which is not part of the invention.
  • Fig. 4 : Section through the impeller with first and second blades along the line II-II '.
  • Fig. 5 : View of a section with some shovels in a training.
  • Fig. 6 : View of a section of the rotor of another pumping stage.

Die Vakuumpumpe 1 des Ausführungsbeispiels ist in Fig. 1 im Längsschnitt gezeigt. Das mit einem Gaseinlass 2 und einem Gasauslass 3 versehene Gehäuse der Vakuumpumpe weist mehrere Gehäuseteile 20, 21, 22 und 23 auf, in denen die nachfolgend beschriebenen Komponenten untergebracht sind.The vacuum pump 1 of the embodiment is shown in FIG Fig. 1 shown in longitudinal section. The housing of the vacuum pump provided with a gas inlet 2 and a gas outlet 3 has a plurality of housing parts 20, 21, 22 and 23, in which the components described below are accommodated.

Durch den Gaseinlass gelangt das Gas zunächst in die molekulare Pumpstufe 4, die hier nach Holweck-Bauart gestaltet ist. Diese umfasst einen Innenstator 405 mit einer inneren Gewindenut 407 und einen Außenstator 406 mit einer äußeren Gewindenut 408. Die Gewindenuten verlaufen schraubengangartig und wirken mit einem zwischen Innenstator und Außenstator befindlichen, rotierenden Zylinder 402 derart zusammen, dass sich im molekularen Strömungsbereich eine Pumpwirkung einstellt. Der Zylinder ist auf einem Träger 400 angebracht, welcher seinerseits mit der Welle 8 verbunden ist. Die molekulare Pumpstufe ist symmetrisch aufgebaut und weist einen zweiten Zylinder 402' auf, der mit ihr zugeordneten Statorbauteilen zusammenwirkt. Durch diese Gestaltung ergibt sich ein paralleler Fördermechanismus.Through the gas inlet, the gas first passes into the molecular pump stage 4, which is designed here according to Holweck design. This comprises an inner stator 405 with an inner thread groove 407 and an outer stator 406 with an outer thread groove 408. The thread grooves run helically and cooperate with a rotating cylinder 402 located between inner stator and outer stator in such a way that a pumping action occurs in the molecular flow region. The cylinder is mounted on a carrier 400, which in turn is connected to the shaft 8. The molecular pumping stage is symmetrical and has a second cylinder 402 'which cooperates with associated stator components. This design results in a parallel conveying mechanism.

Die Welle wird von einem Antrieb 7 in Drehung versetzt. Dieser Antrieb umfasst statorseitig eine elektrische Spule 12 und wellenseitig einen Permanentmagneten 13. Gelagert ist die Welle in Wälzlagern 10 und 11.The shaft is rotated by a drive 7 in rotation. This drive comprises an electric coil 12 on the stator side and a permanent magnet 13 on the shaft side. The shaft is mounted in roller bearings 10 and 11.

Aus der molekularen Pumpstufe tritt das Gas stromabwärts durch den ersten Übergabekanal 24 in eine hochvakuumseitige Seitenkanalstufe 5 ein. Diese weist einen Rotor 500 auf, welcher mit wenigstens einer Rotorschaufel versehen ist. Diese läuft in dem Seitenkanal 501 um. Das in dieser Pumpstufe weiter verdichtete Gas wird über den zweiten Übergabekanal 25 an die Seitenkanalpumpstufe 6 übergeben, dort weiterverdichtet und schließlich über den Gasauslass aus der Vakuumpumpe ausgestoßen.From the molecular pump stage, the gas enters downstream through the first transfer channel 24 into a high-vacuum-side side channel stage 5. This has a rotor 500, which is provided with at least one rotor blade. This runs in the side channel 501. The gas further compressed in this pumping stage is transferred via the second transfer channel 25 to the side channel pumping stage 6, where it is further compressed and finally discharged via the gas outlet from the vacuum pump.

In Fig. 2 ist die Seitenkanalpumpstufe 6 in einem Schnitt entlang der Linie I-I' gezeigt. Das Gehäuseteil 22, welches die Seitenkanalpumpstufe beherbergt, weist einen ringförmigen Seitenkanal 601 auf. Der Ring dieses Seitenkanals wird von einem Unterbrecher 604 unterbrochen. Dieser trennt Ansaug- und Ausstoßseite von einander und löst den am Laufrad geführten Gasstrom von diesem ab. Im Seitenkanal läuft die wenigstens eine Schaufel 602 um, die am Rand 603 der Laufrades 600 angeordnet ist. Sie erstreckt sich an diesem Rand in radialer Richtung. Wenn das Laufrad durch die Welle 8 in Drehung versetzt ist und Gas durch den Übergabekanal 25 in den Seitenkanal hineingelangt, wird dieses mit der Schaufel entlang des Kanals bewegt. Dieses Mitführen des Gases in Umfangsrichtung endet am Abstreifer 604. An diesem wird das Gas an den nachfolgenden Kanal übergeben. Dieser führt dann in eine weitere Pumpstufe oder zum Gasauslass 3.In Fig. 2 the side channel pumping stage 6 is shown in a section along the line II '. The housing part 22, which houses the side channel pumping stage, has an annular side channel 601. The ring of this side channel is interrupted by a breaker 604. This separates the intake and discharge side of each other and triggers the guided on the impeller gas flow from this. in the Side channel runs around the at least one blade 602, which is arranged at the edge 603 of the impeller 600. It extends at this edge in the radial direction. When the impeller is rotated by the shaft 8 and gas enters the side channel through the transfer channel 25, it is moved with the blade along the channel. This entrainment of the gas in the circumferential direction ends at the scraper 604. At this, the gas is transferred to the subsequent channel. This then leads to a further pumping stage or to the gas outlet 3.

Eine Gestaltung der Schaufel des Laufrades, die kein Teil der Erfindung ist, ist in Fig. 3 in einem Blick auf den Rand gezeigt. Die Schaufel 602 weist eine erste Teilschaufel 621 und eine zweite Teilschaufel 622 auf. Jede dieser Teilschaufeln besitzt eine Teilschaufelrückseite 625 und 626. Wenigstens eine dieser beiden Teilschaufeln bildet einen Winkel 615 von weniger als 90° mit der Bewegungsrichtung 607 der Schaufel. Günstig ist es, wenn beide Teilschaufeln in einem solchen Winkel geneigt sind und zusammen ein in Bewegungsrichtung geöffnetes V bilden. Diese Maßnahme erhöht das Druckverhältnis, welches mit der Schaufel erreicht werden. Eine weitere Erhöhung gelingt durch die Fase 616, die an den Teilschaufelrückseiten 625 und 626 vorgesehen sind und an der in der Ebene des Laufrades liegenden Außenkante der Teilschaufeln liegen. Vorteilhaft ist es, die Oberfläche der Schaufel aus ebenen Flächen zusammenzusetzen, da die Schaufel dann durch Sägen sehr einfach und damit kostengünstig hergestellt werden kann. Bei diesem Verfahren sägt ein Sägeblatt den Rand des Laufrades ein und ist dabei gegen die Rotationsachse des Laufrades geneigt, d.h die Rotationsachse liegt nicht in der Ebene des Sägeblattes.A design of the blade of the impeller, which is not part of the invention is in Fig. 3 shown in a view of the edge. The blade 602 has a first partial blade 621 and a second partial blade 622. Each of these vanes has a blade backside 625 and 626. At least one of these two blades forms an angle 615 of less than 90 ° with the direction of travel 607 of the blade. It is advantageous if both partial blades are inclined at such an angle and together form an open V in the direction of movement. This measure increases the pressure ratio, which can be achieved with the blade. A further increase is achieved by the chamfer 616, which are provided on the partial blade rear sides 625 and 626 and on which lie in the plane of the impeller outer edge of the sub-blades. It is advantageous to assemble the surface of the blade from flat surfaces, since the blade can then be produced very easily and thus inexpensively by sawing. In this method, a saw blade saws the edge of the impeller and is inclined against the axis of rotation of the impeller, ie the axis of rotation is not in the plane of the saw blade.

Das Laufrad weist neben der Schaufel 602 noch eine weitere Schaufel 612 auf, die vorteilhaft gleichartig gestaltet ist. Zwischen den Schaufeln 602 und 612 ist ein Mittelsteg 630 angeordnet.The impeller has in addition to the blade 602 still another blade 612, which is advantageously designed similar. Between the blades 602 and 612, a central web 630 is arranged.

Die Gestaltung des Mittelsteges wird anhand Fig. 4 verdeutlicht. Diese zeigt einen Schnitt entlang der Linie II-II'. Der Mittelsteg 630 ist zwischen den Schaufeln 602 und 612 angeordnet. Seine Höhe 631 ist wenigstens abschnittsweise geringer als die Schaufelhöhe 632, so dass ein durchgängiger Raum zwischen den Schaufeln entsteht. Dies führt zu einem verbesserten Druckverhältnis. Die Geometrie ist dabei wiederum leicht durch Sägen herstellbar. Während des Sägens taucht das Sägeblatt über die Mitte des Randes des Laufrades ein und nimmt das Material des Mittelsteges weg. Ist das Sägeblatt wie oben beschrieben geneigt, entsteht in einem Sägevorgang eine Geometrie, bei der der höhere Teil des Mittelsteges in Bezug zur Bewegungsrichtung 607 vor der Schaufel 602 angeordnet ist.The design of the Mittelsteges is based Fig. 4 clarified. This shows a section along the line II-II '. The central web 630 is disposed between the blades 602 and 612. Its height 631 is at least partially smaller than the blade height 632, so that a continuous space between the blades is formed. This leads to an improved pressure ratio. The geometry is in turn easily produced by sawing. During sawing, the saw blade plunges over the center of the edge of the impeller and removes the material of the center bar. If the saw blade is inclined as described above, a geometry results in a sawing process, in which the higher part of the center web is arranged in front of the blade 602 in relation to the direction of movement 607.

Eine Weiterbildung der Schaufel zeigt der Draufblick auf den Rand des Laufrades in Fig. 5. Die Schaufel 602' weist zwei Teilschaufeln 651 und 652 auf. Jede der Teilschaufeln besitzt eine Teilschaufelrückseite 653 und 654. An jeder dieser Teilschaufelrückseiten ist eine Fase 656 angeordnet, welche an der in der Ebene des Laufrades liegenden Außenkante der Teilschaufel liegt. Die Teilschaufeln bilden einen Winkel 615' von weniger als 90° mit der Bewegungsrichtung 607. Die Teilschaufeln sind um einen Versatz 661 in Bewegungsrichtung gegeneinander versetzt. Die Teilschaufelrückseiten erstrecken sich bis über die Mitte 660 des Laufrades. Diese Weiterbildung lässt sich wiederum einfach durch Sägen herstellen und erhöht das erreichbare Druckverhältnis.A further development of the shovel shows the top view of the edge of the impeller in Fig. 5 , The blade 602 'has two partial blades 651 and 652. Each of the sub-blades has a partial bucket rear 653 and 654. At each of these bucket backs a chamfer 656 is arranged, which lies on the lying in the plane of the impeller outer edge of the blade part. The sub-blades form an angle 615 'of less than 90 ° with the direction of movement 607. The sub-blades are offset by an offset 661 in the direction of movement against each other. The partial vane backs extend beyond the center 660 of the impeller. This development can in turn be easily produced by sawing and increases the achievable pressure ratio.

In Figur 6 ist ein Draufblick auf den Rand des Rotors der hochvakuumseitigen Seitenkanalpumpstufe 5 gezeigt. Die am Rand des Rotors angeordnete Schaufel 502 weist Teilschaufeln 551 und 552 mit einer Teilschaufrückseite 513 auf. An der Teilschaufelrückseite ist eine Fase vorgesehen.In FIG. 6 is a view of the edge of the rotor of the high-vacuum side side channel pumping stage 5 shown. The blade 502 arranged at the edge of the rotor has partial blades 551 and 552 with a partial rear side 513. At the back part of the bucket a chamfer is provided.

Die in den Figuren 3 bis 6 gezeigten Strukturen wiederholen sich mehrfach und treten entlang des Umfangs des Laufrades in einem ganzzahligen Vielfachen auf. Die Kombination einer molekularen Pumpstufe 4 mit einer hochvakuumseitigen Seitenkanalpumpstufe, welche ein nach Fig. 6 gestalteten Rotor besitzt, und mit einer Seitenkanalpumpstufe, die ein Laufrad mit den Merkmalen nach Figur 5 aufweist, ergibt eine kostengünstig herstellbare, kompakte Vakuumpumpe mit verbesserten Vakuumkennwerten.The in the FIGS. 3 to 6 shown structures are repeated several times and occur along the circumference of the impeller in an integer multiple. The combination of a molecular pumping stage 4 with a high-vacuum side-channel pumping stage, which after a Fig. 6 designed rotor, and with a side channel pumping stage, the impeller with the features FIG. 5 has, results in a cost-effectively manufacturable, compact vacuum pump with improved vacuum characteristics.

Claims (3)

  1. A vacuum pump (1) with a gas inlet (2), a gas outlet (3) and with a side-channel pump stage (6), which comprises a rotor put into rotation, the rotor having an edge and comprising a vane (602; 602') with a first (621; 651) and a second (622; 652) part vane, which is arranged at the edge of the rotor, wherein an angle (615, 615') between at least one part vane (621, 622; 651, 652) and the direction of movement (607) of the vane amounts to less than 90°, wherein at least one part vane (621, 622; 651, 652) has a trailing rear side (653;654) in relation to the direction of rotation which extends over the centre (660) of the edge of the rotor, wherein first and second part vanes (651, 652) are arranged mutually offset in the circumferential direction, characterised in that the rotor has a second vane (612) and there is arranged between the vanes (602; 602'; 612) in the direction of the circumference of the rotor a central web portion (630), the height (631) of which is at least in sections less than the height (632) of the vanes.
  2. A vacuum pump according to claim 1, characterised in that at least one vane (602; 602'; 612) has a bevel (616; 656) on its rear side (625, 626; 653, 654).
  3. A vacuum pump according to one of the preceding claims, characterised in that it comprises, between the side-channel pump stage (6) and the gas inlet (2), a further pump stage (5), which includes a rotor (500) with a rotor vane (502), which has a bevel (516) on a rearward-lying side in relation to the direction of rotation.
EP10004024.5A 2009-05-16 2010-04-16 Vacuum pump Not-in-force EP2251547B1 (en)

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DE102009021620.0A DE102009021620B4 (en) 2009-05-16 2009-05-16 Vacuum pump

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EP2251547A3 EP2251547A3 (en) 2014-07-09
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GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
DE102012003680A1 (en) 2012-02-23 2013-08-29 Pfeiffer Vacuum Gmbh vacuum pump
DE102014105582A1 (en) * 2014-04-17 2015-10-22 Pfeiffer Vacuum Gmbh vacuum pump
DE102015113821B4 (en) 2014-08-27 2020-06-04 Pfeiffer Vacuum Gmbh Vacuum pump
EP3594498B1 (en) * 2019-11-06 2022-01-05 Pfeiffer Vacuum Gmbh System with a recirculation device

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EP2251547A2 (en) 2010-11-17
JP2010265894A (en) 2010-11-25
DE102009021620B4 (en) 2021-07-29
JP5680334B2 (en) 2015-03-04
DE102009021620A1 (en) 2010-11-18
EP2251547A3 (en) 2014-07-09

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